JPH07190735A - Optical measuring device and its measuring method - Google Patents

Abstract

PURPOSE:To accurately measure each position for flaws or dents of a measured object by providing a spot light source other than a measuring laser beam source, irradiating spot light on the measured object, and thereby forming each reference point. CONSTITUTION:Sector shaped-filament laser beam 11 is irradiated over a measured object 100 from a laser beam source section 2, spot light 15 is concurrently irradiated from a spot light source section 3 in such a way as to be overlapped, and a cross mark acting as a reference point is thereby formed over the measured object 100. Reflecting light of measuring laser beam and reflecting light from the reference point are converged by a lens 43, and projected over a CCD camera section 41 so as to be measured. In this case, the light source section 3 is moved by a controller and an actuator in such a way that reflection light of spot light from the mark passes through the center section of the lens 43 at all times, so that the deformation of the mark is thereby reduced. A distance from the reference point over the measured object 100 to each target point (flaws, dents and the like) is detected by the camera section 41, so that each actual dimension is thereby operated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical measuring device capable of measuring the shape of an object to be measured in a non-contact manner and a measuring method therefor.

[0002]

2. Description of the Related Art Conventionally, an optical measuring apparatus as shown in FIG. 4 has been used as an apparatus for optically measuring the sectional shape and length of an object to be measured. That is, in the optical measuring device 1 shown in the figure, the laser beam 12 emitted from the laser light source 21 is collimated by the collimator lens 23 into parallel rays 14, which are laterally enlarged by the cylindrical lens 25 to generate the parallel rays 14. A laser light source unit 2 which is a first laser light irradiating means for irradiating the object to be measured 100 with a fan-shaped linear laser beam 11 and a reflected lens 16 of a light beam 17 to be irradiated which is irradiated on the object 100 to be measured. Four
CCD camera section 4 which is an image detecting means for capturing a measurement image 18 formed on the light receiving surface of the CCD camera.
1 and an output device section (not shown) for electrically performing signal processing by a controller (not shown) and drawing on an XY plotter.

As an apparatus similar to this, a slit 27 for sharpening the fan-shaped linear laser light 11 as shown in FIG. 5 is provided to generate a slit light beam 11a. A device for measuring is also used.

[0004]

However, in such an optical measuring device, it is difficult to specify the measurement position of the object to be measured because the laser beam irradiating the object to be measured does not have a light beam serving as a reference point. Or impossible, and XY
Since the measurement reference point of the DUT is not clearly shown on the screen data of the plotter or display screen, it is difficult or impossible to specify the relative positional relationship between the measurement reference point of the DUT and the screen data. It was possible. That is, in the case of an object to be measured that has corners, irregularities, bends, etc., it is possible to identify the position of the measurement screen data by comparing the parts, but in this case as well, depending on the shape of the object to be measured, It takes time to compare and contrast the positional relationship between the position and the measurement screen data, and the accuracy is not good. Furthermore, the corners, irregularities, bends, etc. of the measurement points of the object to be measured are smooth, or there are few changes in the shape, or if there is almost no measurement position, it is very difficult to specify the measurement position, or it may not be possible at all. Occur. In addition, even if the object to be measured is longer than the measurement range of this device, it will be measured for each measurement range of this measurement device and the measurement screen data will be connected to measure the overall shape and length. However, also in this case, when there is little or no change in the shape, it is difficult to compare the position of the object to be measured with the measurement screen data, and a plurality of screen data are connected to read the entire length. In this case, it is difficult to align the reference points of the measurement screen data. Therefore, there is a problem in that the alignment takes time and may be inaccurate or may not be possible at all.

Therefore, an optical measuring device 1b as shown in FIG. 3 is conceivable in order to solve such a problem. The optical measuring device 1b includes a laser light source unit 2 that irradiates the DUT 100 with a slit light beam 11a, and a CCD camera unit 4 that is an image detecting unit that collects reflected light from the DUT 100 and detects an image. There is. Further, in the laser light source unit 2, a laser light source 21 for generating a laser light, a collimator lens 23 for dimming the laser light from the laser light source 21 in parallel, and a laser light dimmed by the collimator lens 23. Of the cylindrical lens 25 to diffuse the laser beam 11 into a fan-shaped linear laser beam 11, and the fan-shaped linear laser beam 11 from the cylindrical lens 25 into a sharper slit light 11a and a desired point of the DUT 100. And a cross-shaped slit 27a for marking the center point of measurement. On the other hand, in the CCD camera unit 4, a condenser lens 43 for condensing the reflected laser light 16 which is the reflected light of the slit light 11 a applied to the DUT 100, and the condenser lens 43 collects the reflected laser light 16. CC for detecting an image of the DUT 100 from the reflected laser light 16
There is a D camera 41. Further, the angle adjustment of each member of the laser light source unit 2 and each member of the CCD camera unit 4 is performed by an actuator (not shown), and the control of this actuator and the calculation for making the size of the image detected by the CCD camera unit 4 actual size are shown. The operation result is performed by a controller not operated, and the result of this operation is output by an output device (not shown) such as an XY plotter or a display.

The optical measuring device 1b thus constructed
Operates and acts as follows.

The laser light emitted from the laser light source 21 is adjusted in parallel by the collimator lens 23. The parallel dimmed laser light is the linear laser light 11 diffused by the cylindrical lens 25.
The slit light 11a has a clear boundary between the linear laser light 11 by passing through the cross slit 27a.
become. This clear slit light 11a is irradiated onto the DUT 100 to become the reflected laser light 16, which is condensed by the condensing lens 43 and is placed on the CCD camera 41 under the DUT 10.
Although the image of 0 is projected, since the boundary of the image is made clear by the cross slit 27a, it can be easily measured by the CCD camera 41.

The cross-shaped slit 27a will be further described below. Since the cross-shaped slit 27a is die-cut at its center, the cross-shaped slit 27a irradiates the object to be measured 100 from the die-cut cross-shaped groove to form a mark. The mark laser light 13 for performing the irradiation is irradiated on the DUT 100. The position where the mark laser light 13 is irradiated becomes a reference point for measurement. For example, when measuring the position of the scratch or the dent of the DUT 100, the position of the mark irradiated from the cross slit 27a can be used as a reference point. Further, when measuring a large DUT 100 that cannot be measured at one time, it is possible to measure the whole by superimposing measurement data around a reference point.

The cross-shaped slit 27a does not necessarily have to be die-cut into a cross shape, and may be a T-shaped slit or the like as long as it can be distinguished at least as a reference point. Further, by providing a reference point on the object to be measured 100 in advance and aligning the mark from the optical measuring device 1b of the present invention to this reference point, the position of the object to be measured 100 can be more easily aligned.

Although the optical measuring apparatus 1b having such a configuration can perform sufficient measurement in terms of accuracy, it has been found that a problem arises due to the following reasons when attempting to perform measurement with higher accuracy. That is, the above-mentioned cross-shaped slit 27
When measuring the peripheral portion of the object to be measured 100 while the object to be measured 100 is fixed, the optical measuring device 1b using a uses the cross-shaped slit 27a as slit light 11a which is a fan-shaped linear laser beam. Since the slit light 11a is fan-shaped and is in a direction of being diffused toward the peripheral portion, the incident angle of the mark laser light 13 to the DUT 100 and the DUT 100 are measured. The angle of reflection from is also changed and passes through the condenser lens 43. Therefore, the reflected light of the mark laser light 13 becomes an inclined line with respect to the reflected light ray 16 and is projected on the CCD camera 41. Then, in the optical measuring device 1b, the distorted mark is detected by the CCD camera 41, and the distorted mark is reflected by the reflected light 16 as the inclination increases.
Since the angle formed by and becomes small, it becomes difficult to distinguish the two as different light beams, and therefore the measurement accuracy decreases. In addition, complicated processing is required to correctly recognize the distorted mark as a mark.

Therefore, according to the present invention, in order to solve such a problem, if a function corresponding to a signal for irradiating an optical mark light beam is provided at a required measurement position of an object to be measured, the measurement condition is affected. Enables efficient and accurate measurement without being processed. That is, an optical measuring device and a measuring method therefor capable of obtaining an accurate measurement reference point at a required position of an object to be measured by adding a function corresponding to a signal for this measurement alignment to the present measuring device. It is in.

[0012]

An optical measuring device of the present invention for achieving the above object comprises a first laser light irradiating means for irradiating an object to be measured with a first laser light of a filament. The first laser light irradiating means irradiates the second laser light having a small filament so as to overlap the first laser light to generate a mark on the object to be measured, and
Second laser light irradiating means having an irradiation angle variable with respect to the laser light, and first laser light irradiating means and second laser light irradiating means for collecting reflected light of the second laser light. Image detecting means for detecting a light image.

Further, the measuring method using the optical measuring apparatus of the present invention irradiates the object to be measured with the first laser beam by the first laser beam irradiating means for irradiating the linear laser beam with the first laser beam, and then, , Second irradiation of small linear second laser light
The second laser light is irradiated onto the object to be measured by the laser light irradiating means, and the first laser light and the second laser light are overlapped with each other to form a cross-shaped mark on the object to be measured. While allowing the reflected light of the mark from the measurement object to pass through the center of the image detection means for detecting an image from the reflected light, the object is measured by moving the mark to a desired point at any time. It is characterized by

[0014]

The optical measuring device of the present invention irradiates the first laser light of a fan-shaped linear strip having the optimum width and length for the measurement by the first laser light irradiating means, and the first laser light is radiated to the first laser light. Cross-shaped marks are generated by irradiating the second laser light, which is a second laser light irradiating means, so as to overlap with each other so as to overlap each other. The cross mark is used as a reference point to irradiate the object to be measured together with the first laser light, and the reflected light from the object to be measured is condensed by the image detection means to obtain the object to be measured and the cross mark. The object to be measured is to be measured by detecting the image.

In the optical measuring method of the present invention, the first laser light emitted by the first laser light irradiation means and the second laser light emitted by the second laser light irradiation means are superposed on each other. A cross mark is generated on the DUT. By allowing the reflected light from the object to be measured of the cross-shaped mark to pass through the center of the image detection means, the cross-shaped mark formed by the second laser light irradiation means passes through the peripheral portion of the image detection means. It is possible to reduce the distortion of the cross-shaped mark when performing.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the optical measuring device of the present invention will be described with reference to the drawings.

The optical measuring apparatus of the present invention is a second laser light irradiating means which is a light source different from the laser light source section 2 which is the first laser light irradiating means in the optical measuring apparatus having the structure shown in FIG. The spot light source unit 3 is added.

The spot light source unit 3 includes a spot laser light source 31 for generating spot laser light,
A spot collimator lens 33 for adjusting the spot laser light from the spot laser light source 31 in parallel, and a spot laser light diffused by the spot collimator lens 33 to diffuse the spot laser light 11 And a cylindrical lens 35 for spot.

The angle adjustment of each member of the laser light source unit 2, each member of the spot light source unit 3, and each member of the CCD camera unit 4 is performed by respective actuators (not shown). Control of the actuators and CCD camera unit 4 are performed. The calculation of the actual size of the image detected by is performed by a controller (not shown), and the result of this calculation is
It is also output by an output device (not shown) such as an XY plotter or a display.

The optical measuring device of the present invention thus constructed operates as follows.

This apparatus irradiates the object to be measured 100 with a fan-shaped linear laser beam 11 from the laser light source unit 2 and measures the spot light 15 emitted from the spot light source unit 3 so as to overlap the laser beam 11. When the object 100 is irradiated,
Since an intersection mark is generated on the DUT 100, this intersection mark is used as a reference point of the DUT 100. The reflected light of the reference point and the laser light 11 from the DUT 100 is condensed by the lens 43 and then projected onto the CCD camera 41 and measured.

The measuring method using the optical measuring device 1 of the present invention is performed as follows.

First, the DUT 1 is measured by the laser light source unit 2.
00 is irradiated with a linear laser beam 11. Next, the spot light source 3 irradiates the object 100 with a spot light beam 15 and irradiates an arbitrary point on the object 100 with a cross-shaped mark generated by overlapping the linear laser light 11 as a reference point. . Then, the reflected light of the mark by the spot light beam 15 applied to the DUT 100 always moves the spot light source unit 3 by a controller and an actuator (not shown) so as to pass through the central portion of the condenser lens 43. By allowing this spot light beam 15 to pass through the center of the condenser lens 43, the CCD camera 41
It is possible to reduce the distortion of the mark detected in 1. when passing through the peripheral portion of the condenser lens 43. Therefore, since the distortion of the mark due to the spot light beam 15 detected by the CCD camera 41 can be reduced, the shape of the DUT 100 can be measured with high measurement accuracy using the mark due to the spot light beam as a reference point.

FIG. 2 is a flow chart of this optical measuring method.

A linear laser light 1 from the laser light source unit 2
1 is irradiated onto the DUT 100 (S1), and the spot light 15
Is radiated so as to overlap with the laser light of the filament, and a cross mark is radiated on the DUT 100 (S2). And
The reflected light of the mark by the spot light 15 is the condenser lens 43.
The spot light source unit passes through the center of the laser beam 11 and is substantially orthogonal to the image of the reflected light of the laser light 11 so that the image detected by the CCD camera 41 can be clearly distinguished from the reflected light of the laser light 11. The position of 3 is adjusted (S3). At this time, when the reflected light of the mark by the spot light ray 15 passes through the central portion of the condenser lens 43 (S4), the spot light 1
The distance from the reference point on the object to be measured 100 to the target point, etc. is detected by the CCD camera unit 41 with the mark of 5 as the reference point, and the actual dimensions are calculated by the controller (not shown) to complete the measurement (S5).

As described above, the optical measuring device of the present invention is
A spot light source is provided in addition to the laser light source for measuring the object to be measured, and the spot light from the spot light source is applied to the object to be measured and a mark serving as a reference point is generated. Then, by using this reference point, it is possible to accurately measure a position such as a scratch or a dent of the object to be measured from this reference point. Further, even if the object to be measured cannot be measured at one time, the overall size can be easily and accurately measured by superimposing the data on the basis of the reference points.

On the other hand, in the measuring method using the optical measuring device of the present invention, the spot light source is moved so that the reflected light of the mark by the spot light source irradiated on the object to be measured always passes through the central portion of the condenser lens. By doing so, distortion when the reflected light passes through the peripheral portion of the condenser lens can be reduced.

[0028]

As described above, according to the optical measuring apparatus of the present invention, the mark serving as the reference point is irradiated onto the object to be measured by the spot light source, and the object to be measured is based on this reference point. Positions such as scratches or dents can be accurately measured. Further, even for an object to be measured that cannot be measured at one time, the reference point by the spot light source is moved, and the data is superposed on the basis of this reference point, so that the measurement can be performed easily and quickly and accurately.

On the other hand, the measuring method using the optical measuring device of the present invention makes it possible to clearly distinguish the reflected light of the mark by the spot light source applied to the object to be measured from the reflected light of the measuring laser light. Therefore, the measurement accuracy can be improved.

[Brief description of drawings]

FIG. 1 is a drawing for explaining a configuration of an embodiment of an optical measuring device of the present invention.

FIG. 2 is a flow chart for explaining control of the optical measuring method of the present invention.

FIG. 3 is a drawing for explaining a configuration of an embodiment of an optical measuring device.

FIG. 4 is a drawing for explaining a configuration of an example of a conventional optical measuring device.

FIG. 5 is a drawing for explaining the configuration of another embodiment of the conventional optical measuring device.

[Explanation of symbols]

1, 1a, 1b, 1c ... Optical measuring device, 2 ... Laser light source part, 3 ... Spot light source part,
4 ... CCD camera part, 11 ... linear laser light, 11a ... slit light,
13 ... Mark laser light, 15 ... Spot light,
16 ... Reflected laser light, 21
… Laser light source, 23… Collimator lens, 25… Cylindrical lens,
27 ... slit, 27a ... cross-shaped slit,
31 ... Laser light source for spot, 33 ... Collimator lens for spot, 35 ... Cylindrical lens for spot, 41 ... CCD camera, 43 ... Condensing lens, 100 ... Object to be measured.

Claims (2)

[Claims] 1. A first laser light irradiating means for irradiating an object to be measured with a linear laser light, and a small line overlapping the first laser light irradiating by the first laser light irradiating means. Second laser light irradiating means for irradiating a second laser light of a strip to generate a mark on the object to be measured and changing an irradiation angle with respect to the first laser light; the first laser light irradiating means and the second laser light irradiating means. An optical measuring device, comprising: an image detecting unit that collects reflected light of the first laser beam and the second laser beam emitted by the laser beam irradiating unit to detect an image. 2. An object to be measured is irradiated with a first laser beam by a first laser beam irradiation means for irradiating a linear laser beam with a first laser beam, and then a second laser beam with a small linear beam is irradiated. A second laser beam is emitted to the object to be measured by a laser beam irradiating means, and a first laser beam and a second laser beam are superposed to generate a cross-shaped mark on the object to be measured. While allowing the reflected light of the mark from the measurement object to pass through the center of the image detection means for detecting an image from the reflected light, the object is measured by moving the mark to a desired point at any time. An optical measurement method characterized by the above.