JPS57171205A - Optical measuring method for pore - Google Patents

Optical measuring method for pore

Info

Publication number
JPS57171205A
JPS57171205A JP5680181A JP5680181A JPS57171205A JP S57171205 A JPS57171205 A JP S57171205A JP 5680181 A JP5680181 A JP 5680181A JP 5680181 A JP5680181 A JP 5680181A JP S57171205 A JPS57171205 A JP S57171205A
Authority
JP
Japan
Prior art keywords
pore
light
laser
semiconductor laser
scanned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5680181A
Other languages
Japanese (ja)
Inventor
Seiichi Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5680181A priority Critical patent/JPS57171205A/en
Publication of JPS57171205A publication Critical patent/JPS57171205A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters

Abstract

PURPOSE:To enable to perform an automatic and self-measurement of a pore diameter, by a method wherein a measuring surface is scanned by semiconductor laser spot light to detect an irradiation light strength of semiconductor laser varying with reflection light. CONSTITUTION:A measuring surface 11, wherein a pore 12 is formed, is scanned by laser light from a laser measuring device 1 placed on a table which moves in 2 directions crossing each other at right angles. A part, except the pore, reflects laser spot light, and the reflection light enters an active layer 3 of a semiconductor laser 2 after travelling backward in the same optical path. This reduces the threshold of the laser 2 and increases a radiation light strength. The increase is monitored by a photo detector 9, and based on a position signal generated with the movement of the table, an automatic and high-precise measurement is made on the diameter and position of the pore which an air micrometer can not measure at a sufficient precision.
JP5680181A 1981-04-14 1981-04-14 Optical measuring method for pore Pending JPS57171205A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5680181A JPS57171205A (en) 1981-04-14 1981-04-14 Optical measuring method for pore

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5680181A JPS57171205A (en) 1981-04-14 1981-04-14 Optical measuring method for pore

Publications (1)

Publication Number Publication Date
JPS57171205A true JPS57171205A (en) 1982-10-21

Family

ID=13037497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5680181A Pending JPS57171205A (en) 1981-04-14 1981-04-14 Optical measuring method for pore

Country Status (1)

Country Link
JP (1) JPS57171205A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008233085A (en) * 2007-03-16 2008-10-02 Trumpf Werkzeugmaschinen Gmbh & Co Kg Method and device for inspecting existence of normal conditions in processing of thin plate
CN105300279A (en) * 2015-10-08 2016-02-03 扬中中科维康智能科技有限公司 Laser tracker light spot position sensor PSD tracking zero point calibration method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51868A (en) * 1974-06-20 1976-01-07 Mitsubishi Electric Corp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51868A (en) * 1974-06-20 1976-01-07 Mitsubishi Electric Corp

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008233085A (en) * 2007-03-16 2008-10-02 Trumpf Werkzeugmaschinen Gmbh & Co Kg Method and device for inspecting existence of normal conditions in processing of thin plate
CN105300279A (en) * 2015-10-08 2016-02-03 扬中中科维康智能科技有限公司 Laser tracker light spot position sensor PSD tracking zero point calibration method

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