JPS54114261A - Measuring apparatus of surface undulations - Google Patents

Measuring apparatus of surface undulations

Info

Publication number
JPS54114261A
JPS54114261A JP2182278A JP2182278A JPS54114261A JP S54114261 A JPS54114261 A JP S54114261A JP 2182278 A JP2182278 A JP 2182278A JP 2182278 A JP2182278 A JP 2182278A JP S54114261 A JPS54114261 A JP S54114261A
Authority
JP
Japan
Prior art keywords
object under
under inspection
undulations
fluctuations
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2182278A
Other languages
Japanese (ja)
Inventor
Hideo Segawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2182278A priority Critical patent/JPS54114261A/en
Publication of JPS54114261A publication Critical patent/JPS54114261A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To make possible the detection of the positions of undulated portions and accurate measurement of even the fine undulations of several μm by projecting the focused laser light to the object under inspection and detecting the fluctuations of the quantity of the irregular reflection thereof.
CONSTITUTION: The optical system is formed by the projectors 1, 2 which spot radiates the focused laser light to the surface 10 of the object under inspection W having surface undulations 10a and a detector 3 which photoelectrically converts the quantity of irregular reflection light of the radiated surface. In addition, the measuring mechanism including a circuit 5 of differentiating the output signal of the detector 3 is provided. The projection spot P of the optical system is moved along the undulation forming direction of the surface of the object under inspection and the fluctuations of the output signal during the movement are measured with the measuring mechanism, whereby the presence or not of the undulated parts 10a of the surface 10 of the object under inspection and the flat shape and size of the undulations may be measured.
COPYRIGHT: (C)1979,JPO&Japio
JP2182278A 1978-02-27 1978-02-27 Measuring apparatus of surface undulations Pending JPS54114261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2182278A JPS54114261A (en) 1978-02-27 1978-02-27 Measuring apparatus of surface undulations

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2182278A JPS54114261A (en) 1978-02-27 1978-02-27 Measuring apparatus of surface undulations

Publications (1)

Publication Number Publication Date
JPS54114261A true JPS54114261A (en) 1979-09-06

Family

ID=12065743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2182278A Pending JPS54114261A (en) 1978-02-27 1978-02-27 Measuring apparatus of surface undulations

Country Status (1)

Country Link
JP (1) JPS54114261A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4598998A (en) * 1982-02-25 1986-07-08 Sumitomo Kinzoku Kogyo Kabushiki Kaisha Screw surface flaw inspection method and an apparatus therefor
JP2016108100A (en) * 2014-12-08 2016-06-20 東芝エレベータ株式会社 Distortion detection method and distortion detection device for mirrored panel configuring elevator car

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4598998A (en) * 1982-02-25 1986-07-08 Sumitomo Kinzoku Kogyo Kabushiki Kaisha Screw surface flaw inspection method and an apparatus therefor
JP2016108100A (en) * 2014-12-08 2016-06-20 東芝エレベータ株式会社 Distortion detection method and distortion detection device for mirrored panel configuring elevator car
CN105841625A (en) * 2014-12-08 2016-08-10 东芝电梯株式会社 Distortion detection method and distortion detection device for mirrored panel configuring elevator car

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