JPS54114261A - Measuring apparatus of surface undulations - Google Patents
Measuring apparatus of surface undulationsInfo
- Publication number
- JPS54114261A JPS54114261A JP2182278A JP2182278A JPS54114261A JP S54114261 A JPS54114261 A JP S54114261A JP 2182278 A JP2182278 A JP 2182278A JP 2182278 A JP2182278 A JP 2182278A JP S54114261 A JPS54114261 A JP S54114261A
- Authority
- JP
- Japan
- Prior art keywords
- object under
- under inspection
- undulations
- fluctuations
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To make possible the detection of the positions of undulated portions and accurate measurement of even the fine undulations of several μm by projecting the focused laser light to the object under inspection and detecting the fluctuations of the quantity of the irregular reflection thereof.
CONSTITUTION: The optical system is formed by the projectors 1, 2 which spot radiates the focused laser light to the surface 10 of the object under inspection W having surface undulations 10a and a detector 3 which photoelectrically converts the quantity of irregular reflection light of the radiated surface. In addition, the measuring mechanism including a circuit 5 of differentiating the output signal of the detector 3 is provided. The projection spot P of the optical system is moved along the undulation forming direction of the surface of the object under inspection and the fluctuations of the output signal during the movement are measured with the measuring mechanism, whereby the presence or not of the undulated parts 10a of the surface 10 of the object under inspection and the flat shape and size of the undulations may be measured.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2182278A JPS54114261A (en) | 1978-02-27 | 1978-02-27 | Measuring apparatus of surface undulations |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2182278A JPS54114261A (en) | 1978-02-27 | 1978-02-27 | Measuring apparatus of surface undulations |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54114261A true JPS54114261A (en) | 1979-09-06 |
Family
ID=12065743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2182278A Pending JPS54114261A (en) | 1978-02-27 | 1978-02-27 | Measuring apparatus of surface undulations |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54114261A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4598998A (en) * | 1982-02-25 | 1986-07-08 | Sumitomo Kinzoku Kogyo Kabushiki Kaisha | Screw surface flaw inspection method and an apparatus therefor |
JP2016108100A (en) * | 2014-12-08 | 2016-06-20 | 東芝エレベータ株式会社 | Distortion detection method and distortion detection device for mirrored panel configuring elevator car |
-
1978
- 1978-02-27 JP JP2182278A patent/JPS54114261A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4598998A (en) * | 1982-02-25 | 1986-07-08 | Sumitomo Kinzoku Kogyo Kabushiki Kaisha | Screw surface flaw inspection method and an apparatus therefor |
JP2016108100A (en) * | 2014-12-08 | 2016-06-20 | 東芝エレベータ株式会社 | Distortion detection method and distortion detection device for mirrored panel configuring elevator car |
CN105841625A (en) * | 2014-12-08 | 2016-08-10 | 东芝电梯株式会社 | Distortion detection method and distortion detection device for mirrored panel configuring elevator car |
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