JPS56125604A - Surface roughness measuring apparatus - Google Patents

Surface roughness measuring apparatus

Info

Publication number
JPS56125604A
JPS56125604A JP2813680A JP2813680A JPS56125604A JP S56125604 A JPS56125604 A JP S56125604A JP 2813680 A JP2813680 A JP 2813680A JP 2813680 A JP2813680 A JP 2813680A JP S56125604 A JPS56125604 A JP S56125604A
Authority
JP
Japan
Prior art keywords
light spot
detection signal
contrast
position detection
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2813680A
Other languages
Japanese (ja)
Other versions
JPS6333083B2 (en
Inventor
Hiroshi Makihira
Yoshisada Oshida
Yukio Uto
Kazushi Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2813680A priority Critical patent/JPS56125604A/en
Publication of JPS56125604A publication Critical patent/JPS56125604A/en
Publication of JPS6333083B2 publication Critical patent/JPS6333083B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enable automatic focusing to be accomplished even when position detection of light spot fails to operate normally by controlling automatic focusing servo by the use of both signals of a contrast detection signal and a position detection signal of light spot. CONSTITUTION:The laser beam from a laser diode 5 which is a light source for detecting light spot positions is irradiated to the surface of an object to be measured through a mirror 6, a half mirror 7, and a lens 13, and the reflected light thereof is detected with a position detection 10 of light spot. The output signal of the detector 10 and the output signal of an image pickup element 12 are inputted to a servo control device 14. The device 14 moves a sample table 19 vertically by being controlling by the contrast control signal when the contrast detection signal from the element 12 is appears at more than a prescribed level and by the output from the detector 10 when the contrast detection signal is below the prescribed level. Limit detectors 15, 16 limit the vertical movements of the sample table 19 within a fixed range.
JP2813680A 1980-03-07 1980-03-07 Surface roughness measuring apparatus Granted JPS56125604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2813680A JPS56125604A (en) 1980-03-07 1980-03-07 Surface roughness measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2813680A JPS56125604A (en) 1980-03-07 1980-03-07 Surface roughness measuring apparatus

Publications (2)

Publication Number Publication Date
JPS56125604A true JPS56125604A (en) 1981-10-02
JPS6333083B2 JPS6333083B2 (en) 1988-07-04

Family

ID=12240349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2813680A Granted JPS56125604A (en) 1980-03-07 1980-03-07 Surface roughness measuring apparatus

Country Status (1)

Country Link
JP (1) JPS56125604A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6061605A (en) * 1983-09-14 1985-04-09 Agency Of Ind Science & Technol Non-contact skid of roughness meter
JPS62162912A (en) * 1986-01-13 1987-07-18 Sony Corp Height measuring instrument for material body
CN106123813A (en) * 2016-07-29 2016-11-16 河南省基本建设科学实验研究院有限公司 Bulge measuring instrument and detection method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6061605A (en) * 1983-09-14 1985-04-09 Agency Of Ind Science & Technol Non-contact skid of roughness meter
JPS62162912A (en) * 1986-01-13 1987-07-18 Sony Corp Height measuring instrument for material body
CN106123813A (en) * 2016-07-29 2016-11-16 河南省基本建设科学实验研究院有限公司 Bulge measuring instrument and detection method thereof

Also Published As

Publication number Publication date
JPS6333083B2 (en) 1988-07-04

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