JPS5764712A - Detector for focusing position - Google Patents

Detector for focusing position

Info

Publication number
JPS5764712A
JPS5764712A JP14061080A JP14061080A JPS5764712A JP S5764712 A JPS5764712 A JP S5764712A JP 14061080 A JP14061080 A JP 14061080A JP 14061080 A JP14061080 A JP 14061080A JP S5764712 A JPS5764712 A JP S5764712A
Authority
JP
Japan
Prior art keywords
light
sample
photoelectric element
light reflected
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14061080A
Other languages
Japanese (ja)
Other versions
JPS6342762B2 (en
Inventor
Nobuyuki Akiyama
Yoshimasa Oshima
Mitsuyoshi Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14061080A priority Critical patent/JPS5764712A/en
Priority to US06/310,240 priority patent/US4433235A/en
Publication of JPS5764712A publication Critical patent/JPS5764712A/en
Publication of JPS6342762B2 publication Critical patent/JPS6342762B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE:To enable automatic focusing even if there are some patterns with high or low reflection factors or different steps on the surface of a sample by detecting the light reflected by the surface of the sample with the 2nd photoelectric element and controlling the strength of laser light so as to keep the detected value always constant. CONSTITUTION:A laser spot 32 is formed on the surface of a sample by laser light generated from a semiconductor laser generator 24, the light reflected by the surface 31 of the sample is focused by an objective lens 30, reflected by a translucent mirror 29 and passed through a 1/4 wavelength plate 28 and the light reflected by a polarizing beams splitter 27 is branched by a beam splitter 35 and detected by the photoelectric element of a light strength measuring optical system 36. When a part of the light reflected by the surface 31 of the sample passes through the beam splitter 35 and reaches a focus detection optical system 37, the light is introduced into the 2nd photoelectric element 44 and the laser light from the semiconductor laser generator 24 is controlled so that the output from the photoelectric element 44 becomes constant.
JP14061080A 1980-10-09 1980-10-09 Detector for focusing position Granted JPS5764712A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP14061080A JPS5764712A (en) 1980-10-09 1980-10-09 Detector for focusing position
US06/310,240 US4433235A (en) 1980-10-09 1981-10-09 Focusing position detecting device in optical magnifying and observing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14061080A JPS5764712A (en) 1980-10-09 1980-10-09 Detector for focusing position

Publications (2)

Publication Number Publication Date
JPS5764712A true JPS5764712A (en) 1982-04-20
JPS6342762B2 JPS6342762B2 (en) 1988-08-25

Family

ID=15272704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14061080A Granted JPS5764712A (en) 1980-10-09 1980-10-09 Detector for focusing position

Country Status (1)

Country Link
JP (1) JPS5764712A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974938B1 (en) 2000-03-08 2005-12-13 Tibotec Bvba Microscope having a stable autofocusing apparatus
JP2011257661A (en) * 2010-06-11 2011-12-22 Mitsutoyo Corp Autofocus mechanism and optical processing device provided with the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5195860A (en) * 1975-02-19 1976-08-23
JPS5422845A (en) * 1977-07-22 1979-02-21 Toshiba Corp Automatic focusing device
JPS5530405A (en) * 1978-08-18 1980-03-04 Fukuhara Seiki Seisakusho Knitting of raised yarn in double knitting type circular knitting machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5195860A (en) * 1975-02-19 1976-08-23
JPS5422845A (en) * 1977-07-22 1979-02-21 Toshiba Corp Automatic focusing device
JPS5530405A (en) * 1978-08-18 1980-03-04 Fukuhara Seiki Seisakusho Knitting of raised yarn in double knitting type circular knitting machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974938B1 (en) 2000-03-08 2005-12-13 Tibotec Bvba Microscope having a stable autofocusing apparatus
US7016110B2 (en) 2000-03-08 2006-03-21 Tibotec Bvba Microscope suitable for high-throughput screening having an autofocusing apparatus
JP2011257661A (en) * 2010-06-11 2011-12-22 Mitsutoyo Corp Autofocus mechanism and optical processing device provided with the same

Also Published As

Publication number Publication date
JPS6342762B2 (en) 1988-08-25

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