JPS5422845A - Automatic focusing device - Google Patents

Automatic focusing device

Info

Publication number
JPS5422845A
JPS5422845A JP8727177A JP8727177A JPS5422845A JP S5422845 A JPS5422845 A JP S5422845A JP 8727177 A JP8727177 A JP 8727177A JP 8727177 A JP8727177 A JP 8727177A JP S5422845 A JPS5422845 A JP S5422845A
Authority
JP
Japan
Prior art keywords
automatic focusing
focusing device
preset
sample
postiion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8727177A
Other languages
Japanese (ja)
Inventor
Masakata Minami
Tomohide Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8727177A priority Critical patent/JPS5422845A/en
Priority to US05/924,722 priority patent/US4230940A/en
Publication of JPS5422845A publication Critical patent/JPS5422845A/en
Pending legal-status Critical Current

Links

Landscapes

  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE: To simplify the construction and improve the operating efficiency by guiding a laser beam to a sample surface at a preset angle of incidence and by receiving the reflected beam so that the vertical dislocation of the sample from a preset postiion may be detected.
COPYRIGHT: (C)1979,JPO&Japio
JP8727177A 1977-07-22 1977-07-22 Automatic focusing device Pending JPS5422845A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8727177A JPS5422845A (en) 1977-07-22 1977-07-22 Automatic focusing device
US05/924,722 US4230940A (en) 1977-07-22 1978-07-14 Automatic focusing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8727177A JPS5422845A (en) 1977-07-22 1977-07-22 Automatic focusing device

Publications (1)

Publication Number Publication Date
JPS5422845A true JPS5422845A (en) 1979-02-21

Family

ID=13910091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8727177A Pending JPS5422845A (en) 1977-07-22 1977-07-22 Automatic focusing device

Country Status (1)

Country Link
JP (1) JPS5422845A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632114A (en) * 1979-06-12 1981-04-01 Philips Nv Optical image forming system
JPS5764712A (en) * 1980-10-09 1982-04-20 Hitachi Ltd Detector for focusing position

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5287270A (en) * 1976-01-08 1977-07-20 Akitaka Asada Method of producing ice

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5287270A (en) * 1976-01-08 1977-07-20 Akitaka Asada Method of producing ice

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632114A (en) * 1979-06-12 1981-04-01 Philips Nv Optical image forming system
JPS6337364B2 (en) * 1979-06-12 1988-07-25 Fuiritsupusu Furuuiranpenfuaburiken Nv
JPS5764712A (en) * 1980-10-09 1982-04-20 Hitachi Ltd Detector for focusing position
JPS6342762B2 (en) * 1980-10-09 1988-08-25 Hitachi Ltd

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