JPS5766303A - Configuration sensing device - Google Patents

Configuration sensing device

Info

Publication number
JPS5766303A
JPS5766303A JP55140611A JP14061180A JPS5766303A JP S5766303 A JPS5766303 A JP S5766303A JP 55140611 A JP55140611 A JP 55140611A JP 14061180 A JP14061180 A JP 14061180A JP S5766303 A JPS5766303 A JP S5766303A
Authority
JP
Japan
Prior art keywords
image sensor
distance
peak
hystogram
coincided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55140611A
Other languages
Japanese (ja)
Other versions
JPS6313123B2 (en
Inventor
Yasuo Nakagawa
Hiroshi Makihira
Sohei Ikeda
Satoru Ezaki
Osamu Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55140611A priority Critical patent/JPS5766303A/en
Priority to US06/286,068 priority patent/US4472056A/en
Publication of JPS5766303A publication Critical patent/JPS5766303A/en
Publication of JPS6313123B2 publication Critical patent/JPS6313123B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Abstract

PURPOSE:To make it possible to sense the configuration of an object highly accurately, by automatically adjusting the relative distance between a sensing head and the object in an optical cutting method, and equalizing the hystogram peak of said distance to a preset value. CONSTITUTION:The object illuminated by a slit light beam is scanned and sensed by an image sensor and an image signal is obtained. The position where the image signal becomes the maximum is sensed for each scanning. Its frequency distribution is detected for every one screen. The automatic control is performed so that the peak scanning position of the hystrogram prepared by obtaining the frequency distribution for every one screen is coincided with the focal position of said image sensor. For example, the distance between the head 7 having a slit light projecting device 1 and the image sensor 7 and a specimen 3 is automatically adjusted so as to coincide the distance with the objective value, by detecting the peak position by using said hystogram prepared from the operation of circuits 11-14 and operating driving mechanism 8-10. Thus the peak position is coincided with the focal point of the image sensor 2, and highly accurate configuration sensing can be performed.
JP55140611A 1980-07-23 1980-10-09 Configuration sensing device Granted JPS5766303A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP55140611A JPS5766303A (en) 1980-10-09 1980-10-09 Configuration sensing device
US06/286,068 US4472056A (en) 1980-07-23 1981-07-23 Shape detecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55140611A JPS5766303A (en) 1980-10-09 1980-10-09 Configuration sensing device

Publications (2)

Publication Number Publication Date
JPS5766303A true JPS5766303A (en) 1982-04-22
JPS6313123B2 JPS6313123B2 (en) 1988-03-24

Family

ID=15272726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55140611A Granted JPS5766303A (en) 1980-07-23 1980-10-09 Configuration sensing device

Country Status (1)

Country Link
JP (1) JPS5766303A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60259904A (en) * 1984-06-05 1985-12-23 Kokusai Kogyo Kk Measurement of cross-sectional road profile
JPH10124646A (en) * 1996-10-17 1998-05-15 Minolta Co Ltd Three-dimensional measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60259904A (en) * 1984-06-05 1985-12-23 Kokusai Kogyo Kk Measurement of cross-sectional road profile
JPH10124646A (en) * 1996-10-17 1998-05-15 Minolta Co Ltd Three-dimensional measuring device

Also Published As

Publication number Publication date
JPS6313123B2 (en) 1988-03-24

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