JPS5596406A - Device for determining roughness of surface - Google Patents

Device for determining roughness of surface

Info

Publication number
JPS5596406A
JPS5596406A JP396179A JP396179A JPS5596406A JP S5596406 A JPS5596406 A JP S5596406A JP 396179 A JP396179 A JP 396179A JP 396179 A JP396179 A JP 396179A JP S5596406 A JPS5596406 A JP S5596406A
Authority
JP
Japan
Prior art keywords
image
pickup
pattern
stage
roughness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP396179A
Other languages
Japanese (ja)
Other versions
JPS6219685B2 (en
Inventor
Yoshisada Oshida
Nobuyuki Akiyama
Yasuo Nakagawa
Hiroshi Makihira
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP396179A priority Critical patent/JPS5596406A/en
Publication of JPS5596406A publication Critical patent/JPS5596406A/en
Publication of JPS6219685B2 publication Critical patent/JPS6219685B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Automatic Focus Adjustment (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To improve the accuracy of determining the roughness of the surface of a material without exerting any adverse influence thereon, by projecting the light passed through or reflected on a fine pattern on the surface of the material to form an image of the pattern thereon, moving the material so as to set an image of the pattern, formed on a pickup unit, in agreement with the image of the pattern formed on the surface of the material, and measuring the amount of displacement of the material thus moved.
CONSTITUTION: An image of a projection object 2 formed on a material 4 to be measured is also formed on a pickup surface 61 of a pickup unit 6. A projection optical system 3 and a pickup optical system 5 is arranged such that the image formed on the material 4 and the image on the pickup surface 61 agree with each other. A detection circuit 7 receives a pickup signal from the pickup unit to determine the position of the material 4 with respect to a focal point of the images referred to above. A focusing fine adjustment means 94 is driven by a drive circuit 8 on the basis of a signal of determination from the detection circuit 7, to bring the material 4 to a focal point. At this time, the number of pulses from a motor for use in driving a stage 10 is counted in the drive circuit 8. Thus, the amount of vertical displacement of the stage 10 is calculated. The stage 10 is moved at a low speed in the horizontal direction as well. Variations in roughness of the surface of the material 4 can be determined with reference to the above calculated value.
COPYRIGHT: (C)1980,JPO&Japio
JP396179A 1979-01-19 1979-01-19 Device for determining roughness of surface Granted JPS5596406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP396179A JPS5596406A (en) 1979-01-19 1979-01-19 Device for determining roughness of surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP396179A JPS5596406A (en) 1979-01-19 1979-01-19 Device for determining roughness of surface

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP25162786A Division JPS62115114A (en) 1986-10-24 1986-10-24 Automatic focusing control device

Publications (2)

Publication Number Publication Date
JPS5596406A true JPS5596406A (en) 1980-07-22
JPS6219685B2 JPS6219685B2 (en) 1987-04-30

Family

ID=11571681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP396179A Granted JPS5596406A (en) 1979-01-19 1979-01-19 Device for determining roughness of surface

Country Status (1)

Country Link
JP (1) JPS5596406A (en)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207852A (en) * 1981-05-15 1982-12-20 Siemens Ag Method of detecting three-dimensional object
JPS5811803A (en) * 1981-07-15 1983-01-22 Hitachi Ltd Method and device for measuring film thickness
JPS5875005A (en) * 1981-10-30 1983-05-06 Hitachi Ltd Method and device for measuring thickness of plate
JPS6118913A (en) * 1984-07-06 1986-01-27 Kowa Co Automatic focus adjusting device
JPS6199113A (en) * 1984-10-22 1986-05-17 Toho Denshi Kogyo Kk Focusing method of microscope
JPS61138222A (en) * 1984-12-11 1986-06-25 Minolta Camera Co Ltd Illuminating device of camera having t.t.l. focus detector
JPS61235808A (en) * 1985-04-12 1986-10-21 Hitachi Ltd Method and device for automatic focusing
JPS622118A (en) * 1985-06-17 1987-01-08 ヴイユウ　エンジニアリング　インコ−ポレイテツド Method and device for measuring position in z axial direction
JPS628437A (en) * 1985-07-04 1987-01-16 Jeol Ltd Particle beam micro-analyzer
JPS627010U (en) * 1985-06-28 1987-01-16
JPS62241246A (en) * 1986-04-11 1987-10-21 Jeol Ltd Automatic focusing device of optical microscope for x-ray microanalyzer of the like
JPS6323114A (en) * 1986-03-25 1988-01-30 Asahi Optical Co Ltd Auxiliary projector for focus detection
JPS63212911A (en) * 1987-03-02 1988-09-05 Hitachi Electronics Eng Co Ltd Auto focus system
JPS63239412A (en) * 1987-03-27 1988-10-05 Hitachi Electronics Eng Co Ltd Automatic focusing system
JP2007155379A (en) * 2005-12-01 2007-06-21 Tokyo Univ Of Agriculture & Technology Three-dimensional shape measuring device and three-dimensional shape measuring method
JP2010026212A (en) * 2008-07-18 2010-02-04 Mitsutoyo Corp Autofocus device
US8314849B2 (en) 2008-03-11 2012-11-20 Nikon Corporation Shape measuring device
US10728519B2 (en) 2004-06-17 2020-07-28 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
US10952827B2 (en) 2014-08-15 2021-03-23 Align Technology, Inc. Calibration of an intraoral scanner

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6396039B1 (en) * 1999-03-11 2002-05-28 Corning Incorporated Focusing filament for autofocus system
JP5434379B2 (en) * 2009-08-28 2014-03-05 株式会社ニコン Scale body, position detection apparatus, stage apparatus, and exposure apparatus

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207852A (en) * 1981-05-15 1982-12-20 Siemens Ag Method of detecting three-dimensional object
JPS5811803A (en) * 1981-07-15 1983-01-22 Hitachi Ltd Method and device for measuring film thickness
JPS5875005A (en) * 1981-10-30 1983-05-06 Hitachi Ltd Method and device for measuring thickness of plate
JPS6118913A (en) * 1984-07-06 1986-01-27 Kowa Co Automatic focus adjusting device
JPS6199113A (en) * 1984-10-22 1986-05-17 Toho Denshi Kogyo Kk Focusing method of microscope
JPS61138222A (en) * 1984-12-11 1986-06-25 Minolta Camera Co Ltd Illuminating device of camera having t.t.l. focus detector
JPS61235808A (en) * 1985-04-12 1986-10-21 Hitachi Ltd Method and device for automatic focusing
JPS622118A (en) * 1985-06-17 1987-01-08 ヴイユウ　エンジニアリング　インコ−ポレイテツド Method and device for measuring position in z axial direction
JPS627010U (en) * 1985-06-28 1987-01-16
JPS628437A (en) * 1985-07-04 1987-01-16 Jeol Ltd Particle beam micro-analyzer
JPS6323114A (en) * 1986-03-25 1988-01-30 Asahi Optical Co Ltd Auxiliary projector for focus detection
JPS62241246A (en) * 1986-04-11 1987-10-21 Jeol Ltd Automatic focusing device of optical microscope for x-ray microanalyzer of the like
JPS63212911A (en) * 1987-03-02 1988-09-05 Hitachi Electronics Eng Co Ltd Auto focus system
JPS63239412A (en) * 1987-03-27 1988-10-05 Hitachi Electronics Eng Co Ltd Automatic focusing system
US10728519B2 (en) 2004-06-17 2020-07-28 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
US10750152B2 (en) 2004-06-17 2020-08-18 Align Technology, Inc. Method and apparatus for structure imaging a three-dimensional structure
US10750151B2 (en) 2004-06-17 2020-08-18 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
US10764557B2 (en) 2004-06-17 2020-09-01 Align Technology, Inc. Method and apparatus for imaging a three-dimensional structure
US10812773B2 (en) 2004-06-17 2020-10-20 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
US10924720B2 (en) 2004-06-17 2021-02-16 Align Technology, Inc. Systems and methods for determining surface topology and associated color of an intraoral structure
US10944953B2 (en) 2004-06-17 2021-03-09 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
JP2007155379A (en) * 2005-12-01 2007-06-21 Tokyo Univ Of Agriculture & Technology Three-dimensional shape measuring device and three-dimensional shape measuring method
US8314849B2 (en) 2008-03-11 2012-11-20 Nikon Corporation Shape measuring device
JP2010026212A (en) * 2008-07-18 2010-02-04 Mitsutoyo Corp Autofocus device
US10952827B2 (en) 2014-08-15 2021-03-23 Align Technology, Inc. Calibration of an intraoral scanner

Also Published As

Publication number Publication date
JPS6219685B2 (en) 1987-04-30

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