CN108760650B - Multi-lamp-position rotary lighthouse light focusing system - Google Patents

Multi-lamp-position rotary lighthouse light focusing system Download PDF

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Publication number
CN108760650B
CN108760650B CN201810512619.9A CN201810512619A CN108760650B CN 108760650 B CN108760650 B CN 108760650B CN 201810512619 A CN201810512619 A CN 201810512619A CN 108760650 B CN108760650 B CN 108760650B
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hollow cathode
light
lamp
cathode lamp
dimensional position
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CN108760650A (en
Inventor
梁敬
李艳超
王庆
董芳
侯爱霞
杨名名
李彬红
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Beijing Haiguang Instrument Co ltd
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Beijing Haiguang Instrument Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
    • Y02B20/40Control techniques providing energy savings, e.g. smart controller or presence detection

Abstract

The invention relates to a multi-lamp-position rotary lighthouse light system which is characterized by comprising a light source system, a light path system, a two-dimensional position photosensitive sensor and a control system, wherein the light path system is arranged on the light source system; the light source system comprises a rotary lighthouse and a plurality of hollow cathode lamps arranged on the rotary lighthouse; the light path system comprises a first lens and a second lens which are arranged between the hollow cathode lamp and the two-dimensional position photosensitive sensor; when the rotary lighthouse works, the emitted light is firstly imaged on the argon-hydrogen flame center position above the atomizer through the first lens, and then imaged on the two-dimensional position photosensitive sensor through the second lens; the control system is electrically connected with the rotary lighthouse and the two-dimensional position photosensitive sensor. The invention solves the problem that the traditional technology can not accurately quantify and detect the position and the offset of the light spot and the drift of the ultraviolet intensity, has the advantages of accurate control, high degree of automation and the like, and has better application value.

Description

Multi-lamp-position rotary lighthouse light focusing system
Technical Field
The invention belongs to the technical field of analytical instruments, and particularly relates to a multi-lamp-position rotary lighthouse light system.
Background
The hollow cathode lamp has the advantages of strong light source energy, narrow spectral line, long service life, modulation, simple replacement, low cost and the like, and is widely used on atomic spectrum analysis instruments.
In the actual analysis process, since different hollow cathode lamps are required for different elements, replacement of the hollow cathode lamps becomes a main factor limiting analysis efficiency. A multi-lamp position rotating lighthouse capable of mounting a plurality of hollow cathode lamps becomes a main solution.
The traditional technology uses a four-quadrant detector as a solution means of a hollow cathode lamp for a light system, the purpose of light is achieved through the same signals of four quadrant photoelectric devices, but the problems that two-dimensional coordinate information of light spots cannot be accurately quantized, offset cannot be accurately estimated when the positions of the light spots are offset, and further offset cannot be quickly and efficiently corrected exist. Since the four-quadrant detector is only responsive to visible light, it is not operable when drift calibration is performed on ultraviolet light actually emitted from the light source.
Disclosure of Invention
The invention aims to provide a multi-lamp-position rotary lighthouse light system, a light spot position monitoring and drift calibration method, which aims to solve the problems that the two-dimensional coordinate information of a light spot cannot be accurately quantized in the traditional technology, the offset cannot be accurately estimated when the light spot position is offset, the offset cannot be quickly and efficiently corrected, and the four-quadrant detector cannot carry out drift calibration on ultraviolet light.
The invention provides a multi-lamp-position rotary lighthouse light system, which comprises a light source system, a light path system, a two-dimensional position photosensitive sensor and a control system, wherein the light source system is connected with the light path system; the light source system comprises a rotary lighthouse and a plurality of hollow cathode lamps arranged on the rotary lighthouse; the light path system comprises a first lens and a second lens which are arranged between the hollow cathode lamp and the two-dimensional position photosensitive sensor;
when the rotary lighthouse works, the emitted light is firstly imaged on the argon-hydrogen flame center position above the atomizer through the first lens, and then imaged on the two-dimensional position photosensitive sensor through the second lens;
the control system is electrically connected with the rotary lighthouse and the two-dimensional position photosensitive sensor and is used for controlling the hollow cathode lamp on the working position to rotate to the two-dimensional coordinate position of the two-dimensional position photosensitive sensor to finish light according to the data fed back by the two-dimensional position photosensitive sensor, and recording the current coordinate position as a position parameter called when the light is next focused.
Further, the first lens is a biconvex quartz lens, and the focal length is 5-50 mm.
Further, the second lens is a convex quartz lens, and the focal length is 3-50 mm.
Further, the photosurface of the two-dimensional position photosensor is 2×2 to 10×10mm.
Further, the position resolution of the two-dimensional position photosensor is 0.2-2 μm.
Further, the number of hollow cathode lamps is six.
Further, the light path system further comprises an ultraviolet light-sensitive converter, wherein the ultraviolet light-sensitive converter is arranged between the second lens and the two-dimensional position light-sensitive sensor and is used for converting ultraviolet light emitted by the hollow cathode lamp into visible light which is sensitive to the two-dimensional position light-sensitive sensor;
the control system is also used for monitoring the change of the visible light intensity, and the light intensity is stabilized in a set range by changing the current of the hollow cathode lamp in real time so as to calibrate the drift of the light source of the hollow cathode lamp.
Further, the control system is also used for monitoring the two-dimensional coordinates of the light spot position at the two-dimensional position photosensitive sensor in real time through the information fed back by the two-dimensional position photosensitive sensor when the hollow cathode lamp works for a long time.
Further, the ultraviolet photosensitive converter is a coated quartz plate.
Further, the coating material of the coated quartz plate is Lumogen Yellow S0790.
By means of the scheme, the light system is turned through the multi-lamp-position rotary lighthouse, the high-precision two-dimensional position photosensitive sensing and ultraviolet photosensitive conversion technology is adopted, the problem that the traditional technology cannot accurately quantitatively detect the positions of light spots and offset and ultraviolet intensity drift is solved through the cooperative control technology of the control system, and the light system has the advantages of being capable of being accurately controlled, high in automation degree and the like, and has better application value.
The foregoing description is only an overview of the present invention, and is intended to provide a better understanding of the present invention, as it is embodied in the following description, with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of a multi-light level rotary lighthouse light system according to the present invention.
Reference numerals in the drawings:
1-rotating a lighthouse; 21-a first hollow cathode lamp; 22-a second hollow cathode lamp; 23-a third hollow cathode lamp; 24-fourth hollow cathode lamp; 25-a fifth hollow cathode lamp; 26-a sixth hollow cathode lamp; 31-a first lens; 32-a second lens; 33-an ultraviolet light-sensitive converter; a 4-argon-hydrogen flame; a 5-atomizer; 6-a two-dimensional position photosensitive sensor; 7-control system.
Detailed Description
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention.
Referring to fig. 1, the present embodiment provides a multi-lamp-position rotary lighthouse light system for a spectroscopic apparatus using a plurality of hollow cathode lamps on the rotary lighthouse as light sources, comprising:
a control system 7;
a light source system consisting of a rotary lighthouse 1, a first hollow cathode lamp 21, a second hollow cathode lamp 22, a third hollow cathode lamp 23, a fourth hollow cathode lamp 24, a fifth hollow cathode lamp 25 and a sixth hollow cathode lamp 26;
an optical path system composed of a first lens 31, a second lens 32 and an ultraviolet light-sensitive converter 33;
a detection and light source drift calibration system consisting of two-dimensional position photosensitive sensors 6.
First 21, second 22, third 23, fourth 24, fifth 25, and sixth 26 hollow cathode lamps are mounted on the rotary lighthouse 1 and electrically connected to the control system 7.
The fourth hollow cathode lamp 24 is positioned on the rotary lighthouse 1 as a working position.
The control system 7 is respectively and electrically connected with the rotary lighthouse 1 and the two-dimensional position photosensitive sensor 6.
The method for the multi-lamp-position rotary lighthouse to light comprises the following steps: the hollow cathode lamp in the working position rotates to the two-dimensional coordinate position of the two-dimensional position photosensitive sensor 6 on the rotary lighthouse 1, and records the current coordinate position as the position parameter called in the next light.
The method for monitoring the light spot position of the hollow cathode comprises the following steps: when the hollow cathode lamp works for a long time, the control system 7 monitors the two-dimensional coordinate position of the light spot position in the two-dimensional position photosensitive sensor 6 in real time through the information fed back by the two-dimensional position photosensitive sensor 6.
The method for calibrating the drift of the light source of the hollow cathode lamp comprises the following steps: the ultraviolet light emitted by the hollow cathode lamp is converted into visible light which is sensitive to the two-dimensional position photosensitive sensor 6 after passing through the ultraviolet photosensitive converter 33, and the control system 7 changes the lamp current in real time by monitoring the change of the light intensity, so that the radiation light intensity is ensured to be stable in a controllable (set) range.
The two-dimensional position photosensitive sensor adopts the principle of the transverse effect of a semiconductor, and four output electrodes X1, X2, Y1 and Y2 correspond to XY axes of a rectangular coordinate system. When the position of the target signal light spot received by the device changes, the output photocurrent of the device also changes linearly along with the position change, so that the position of the target light spot is accurately measured. The two-dimensional position photosensitive sensor has the advantages of no blind area, good output linearity and uniformity, high measurement precision, no mutual influence of X, Y direction signals and the like, and can detect continuous change.
The invention images the light emitted by the hollow cathode lamp on the rotary lighthouse on the two-dimensional position photosensitive sensor through the light path system, and the rotary lighthouse rotates the hollow cathode lamp to the optimal two-dimensional position of the two-dimensional position photosensitive sensor through the control system, so as to achieve the aim of light; recording the optimized two-dimensional coordinate position on the two-dimensional position photosensitive sensor corresponding to each hollow cathode lamp through the control system, and automatically rotating the lighthouse to the recorded position when the hollow cathode lamp is identified next time, so as to achieve the aim of improving the efficiency; the ultraviolet light is converted into visible light which is sensitive to a two-dimensional position photosensitive sensor through an ultraviolet light photosensitive converter, the change of the ultraviolet light intensity of the hollow cathode lamplight source and the light spot position are monitored in real time, and the purposes of calibrating the light source drift and monitoring the light spot position in real time are achieved; the problems that the traditional light technology is low in precision, small in tolerance, low in light speed, low in calibration efficiency, incapable of monitoring the light spot position in real time and incapable of carrying out drifting calibration on ultraviolet light are solved, and the ultraviolet light calibrating device has good application and popularization values.
In this embodiment, the first lens is a biconvex quartz lens, and the focal length is 5 to 50mm, preferably 30mm.
In this embodiment, the second lens is a convex quartz lens with a focal length of 3 to 50mm, preferably 10mm.
In this embodiment, the uv-sensitive converter is a coated quartz plate, and the film material is Lumogen Yellow S0790. Lumogen Yellow S0790 is an azomethine-based commercial dye produced by BASF corporation, germany, and can be used to enhance the ability of CCD to detect the ultraviolet region.
In this embodiment, the photosurface of the two-dimensional position photosensor is 2×2 to 10×10mm, the position resolution is 0.2 to 2 μm, the photosurface of the two-dimensional position photosensor is preferably 8×8mm, and the position resolution is preferably 1 μm.
The multi-lamp-position rotary lighthouse light system is characterized in that the working process of the fourth hollow cathode lamp and the first hollow cathode lamp are as follows:
(1) 6 hollow cathode lamps are arranged on the rotary lighthouse and are electrically connected with a control system;
(2) The control system rotates the fourth hollow cathode lamp to a working position, and simultaneously supplies power to other hollow cathode lamps (taking the first hollow cathode lamp as an example) which need to be preheated simultaneously according to the requirement, so that the hollow cathode lamps are in a preheating state. Light emitted by the hollow cathode lamp sequentially passes through the first lens, the argon-hydrogen flame, the second lens and the coated quartz plate and enters the two-dimensional position photosensitive sensor.
(3) The control system controls the rotary lighthouse to rotate to the position closest to the two-dimensional coordinate origin of the two-dimensional position photosensitive sensor according to the data fed back by the two-dimensional position photosensitive sensor, records the current coordinates as (X40 and Y40), and writes the coordinate information into a storage system of the hollow cathode lamp, so that the aim of automatically focusing light is fulfilled.
(4) After the preheating of the fourth hollow cathode lamp is finished, the control system enters a working state, and the coordinates (X41 and Y41) of the light spots are monitored in real time through a two-dimensional position photosensitive sensor. When the position of the light spot is deviated, the control system finely adjusts the rotation angle of the rotary lighthouse to return to the initial coordinates (X40 and Y40), thereby achieving the purpose of monitoring and correcting the deviation of the light spot in real time.
(5) When the fourth hollow cathode lamp works, the radiated ultraviolet light is converted into visible light responded by the two-dimensional position photosensitive sensor when passing through the coated quartz plate, and meanwhile, the control system finely adjusts the lamp current in real time through the collected light intensity information, so that the radiated light is stably output, and the purpose of calibrating the drift of the light source is achieved.
(6) After the fourth hollow cathode lamp finishes the working task, the control system turns off the power supply of the fourth hollow cathode lamp and controls the rotary lighthouse to rotate the first hollow cathode lamp to the working position.
(7) Repeating the steps (3) - (5), and after the first hollow cathode is subjected to light irradiation, the initial coordinates of the light spots are (X10 and Y10), and monitoring the coordinates (X11 and Y11) of the light spots in real time to complete the working task of the first hollow cathode.
(8) When the fourth hollow cathode lamp or the first hollow cathode lamp is used as a working lamp again, the control system reads initial coordinates (X40 and Y40) of light spots from a storage system of the hollow cathode lamp, and controls the rotary lighthouse to directly rotate to (X40 and Y40) according to data fed back by the two-dimensional position photosensitive sensor, so that a rapid light focusing process is completed.
The invention uses the high-precision two-dimensional position photosensitive sensor and the ultraviolet photosensitive converter for automatic digital light of the multi-lamp-position hollow cathode lamp on the rotary lighthouse, realizes the coordination of the light spot position, the real-time correction of the light spot position deviation and the ultraviolet output drift calibration of the light source, solves the problems that the traditional technology cannot realize the light spot position digitization, the light spot position deviation cannot be corrected in real time and the ultraviolet output intensity drift cannot be calibrated, has high positioning precision, can realize closed-loop automatic control, and has better popularization and use values.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, and it should be noted that it is possible for those skilled in the art to make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims (6)

1. The multi-lamp-position rotary lighthouse light system is characterized by comprising a light source system, a light path system, a two-dimensional position photosensitive sensor and a control system; the light source system comprises a rotary lighthouse and a plurality of hollow cathode lamps arranged on the rotary lighthouse; the light path system comprises a first lens and a second lens which are arranged between the hollow cathode lamp and the two-dimensional position photosensitive sensor;
the hollow cathode lamp positioned on the working position is used for enabling emitted light to be imaged on the argon-hydrogen flame center position above the atomizer through the first lens and then imaged on the two-dimensional position photosensitive sensor through the second lens when the rotary lighthouse works;
the control system is electrically connected with the rotary lighthouse and the two-dimensional position photosensitive sensor and is used for controlling the hollow cathode lamp on the working position to rotate to the two-dimensional coordinate position of the two-dimensional position photosensitive sensor to finish light according to the data fed back by the two-dimensional position photosensitive sensor, and recording the current coordinate position as a position parameter called when the light is next focused;
the light path system further comprises an ultraviolet light-sensitive converter, wherein the ultraviolet light-sensitive converter is arranged between the second lens and the two-dimensional position light-sensitive sensor and is used for converting ultraviolet light emitted by the hollow cathode lamp into visible light which is sensitive to the two-dimensional position light-sensitive sensor; the ultraviolet photosensitive converter is a coated quartz plate;
the control system is also used for monitoring the change of the visible light intensity, and stabilizing the light intensity within a set range by changing the current of the hollow cathode lamp in real time so as to calibrate the drift of the light source of the hollow cathode lamp;
the control system is also used for monitoring the two-dimensional coordinates of the light spot position at the two-dimensional position photosensitive sensor in real time through the information fed back by the two-dimensional position photosensitive sensor when the hollow cathode lamp works for a long time;
the number of the hollow cathode lamps is six, and the hollow cathode lamps are respectively a first hollow cathode lamp, a second hollow cathode lamp, a third hollow cathode lamp, a fourth hollow cathode lamp, a fifth hollow cathode lamp and a sixth hollow cathode lamp;
the working process of using the fourth hollow cathode lamp and the first hollow cathode lamp in sequence is as follows:
(1) Six hollow cathode lamps are arranged on the rotary lighthouse and are electrically connected with a control system;
(2) The control system rotates the fourth hollow cathode lamp to a working position, and simultaneously supplies power to other hollow cathode lamps needing to be preheated simultaneously according to the requirement, so that the hollow cathode lamps are in a preheating state; light emitted by the hollow cathode lamp sequentially passes through the first lens, the argon-hydrogen flame, the second lens and the coated quartz plate and enters the two-dimensional position photosensitive sensor;
(3) The control system controls the rotary lighthouse to rotate to the position closest to the two-dimensional coordinate origin of the two-dimensional position photosensitive sensor according to the data fed back by the two-dimensional position photosensitive sensor, records the current coordinates as (X40, Y40), and writes the coordinate information into a storage system of the hollow cathode lamp, so that the aim of automatically focusing light is fulfilled;
(4) After the preheating of the fourth hollow cathode lamp is finished, the control system enters a working state, and the coordinates (X41 and Y41) of the light spots are monitored in real time through a two-dimensional position photosensitive sensor; when the position of the light spot is deviated, the control system finely adjusts the rotation angle of the rotary lighthouse to return to the initial coordinates (X40 and Y40), so that the purposes of monitoring and correcting the light spot deviation in real time are achieved;
(5) When the fourth hollow cathode lamp works, the radiated ultraviolet light is converted into visible light responded by the two-dimensional position photosensitive sensor when passing through the film-coated quartz plate, and meanwhile, the control system finely adjusts the lamp current in real time through the collected light intensity information, so that the radiated light is stably output, and the purpose of calibrating the drift of the light source is achieved;
(6) After the fourth hollow cathode lamp finishes the working task, the control system turns off the power supply of the fourth hollow cathode lamp and controls the rotary lighthouse to rotate the first hollow cathode lamp to a working position;
(7) Repeating the steps (3) - (5), wherein after the first hollow cathode is subjected to light irradiation, the initial coordinates of the light spots are (X10, Y10), and the coordinates (X11, Y11) of the light spots are monitored in real time, so that the working task of the first hollow cathode is completed;
(8) When the fourth hollow cathode lamp or the first hollow cathode lamp is used as a working lamp again, the control system reads initial coordinates (X40 and Y40) of light spots from a storage system of the hollow cathode lamp, and controls the rotary lighthouse to directly rotate to (X40 and Y40) according to data fed back by the two-dimensional position photosensitive sensor, so that a rapid light focusing process is completed.
2. The multiple lamp position rotary lighthouse lighting system of claim 1, wherein the first lens is a biconvex quartz lens with a focal length of 5-50 mm.
3. The multiple lamp position rotary lighthouse lighting system of claim 1, wherein the second lens is a biconvex quartz lens with a focal length of 3-50 mm.
4. The multiple light level rotary lighthouse lighting system of claim 1, wherein the photosensitive surface of the two-dimensional position photosensitive sensor is 2 x2 to 10 x10 mm.
5. The multiple light level rotary lighthouse lighting system of claim 4, wherein the two-dimensional position photosensor has a position resolution of 0.2 to 2 μm.
6. The multiple lamp position rotary lighthouse lighting system of claim 1, wherein the coated quartz plate is coated with Lumogen Yellow S0790.
CN201810512619.9A 2018-05-25 2018-05-25 Multi-lamp-position rotary lighthouse light focusing system Active CN108760650B (en)

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* Cited by examiner, † Cited by third party
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CN113472433A (en) * 2021-06-25 2021-10-01 山东航天电子技术研究所 Beacon optical center coordinate calculation error evaluation method suitable for laser communication

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4241258A (en) * 1978-12-11 1980-12-23 Firetek Corporation Ultraviolet fire detector
JPS63122922A (en) * 1986-11-12 1988-05-26 Japan Spectroscopic Co Hollow cathode lamp and atomic absorption/fluorescence spectrophotometer having said lamp as light source
JPH03115845U (en) * 1990-03-12 1991-12-02
US5196900A (en) * 1988-04-12 1993-03-23 Metronor A.S. Method and sensor for opto-electronic angle measurements
JPH05231929A (en) * 1992-02-25 1993-09-07 Chiyoda Kohan Kk Measuring apparatus of illuminance of ultraviolet ray
JP2003121116A (en) * 2001-10-12 2003-04-23 Optorun Co Ltd Vacuum ultraviolet optical film thickness monitor and vacuum film forming apparatus provided therewith
CN1486934A (en) * 1999-06-21 2004-04-07 ͨ����ҵ���Ź��ʹ�˾ Light assembly
JP2008242014A (en) * 2007-03-27 2008-10-09 V Technology Co Ltd Fluorescence microscope
CN102305988A (en) * 2011-09-13 2012-01-04 江苏森莱浦光电科技有限公司 Automatic focusing device for projective bulb based on light spot detection and use method thereof
CN202486048U (en) * 2011-12-22 2012-10-10 段为钢 Full-spectrophotometric assay device
CN102866138A (en) * 2012-09-13 2013-01-09 北京瑞利分析仪器有限公司 Four-quadrant detector-based auxiliary system and method for atomic fluorescence hollow cathode lamp
CN104181131A (en) * 2014-08-15 2014-12-03 中国科学院上海技术物理研究所 Automatic positioning and calibrating device for infrared modulation photoluminescence (PL) bi-dimensional imaging light path
CN105300279A (en) * 2015-10-08 2016-02-03 扬中中科维康智能科技有限公司 Laser tracker light spot position sensor PSD tracking zero point calibration method
CN205691506U (en) * 2016-06-03 2016-11-16 哈尔滨工业大学 Sensitized fluorescence screen is used to realize the device to the detection of capillary discharging EUV light source plasmoid
CN208206783U (en) * 2018-05-25 2018-12-07 北京海光仪器有限公司 A kind of more lamp position rotary lighthouses are to photosystem

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4241258A (en) * 1978-12-11 1980-12-23 Firetek Corporation Ultraviolet fire detector
JPS63122922A (en) * 1986-11-12 1988-05-26 Japan Spectroscopic Co Hollow cathode lamp and atomic absorption/fluorescence spectrophotometer having said lamp as light source
US5196900A (en) * 1988-04-12 1993-03-23 Metronor A.S. Method and sensor for opto-electronic angle measurements
JPH03115845U (en) * 1990-03-12 1991-12-02
JPH05231929A (en) * 1992-02-25 1993-09-07 Chiyoda Kohan Kk Measuring apparatus of illuminance of ultraviolet ray
CN1486934A (en) * 1999-06-21 2004-04-07 ͨ����ҵ���Ź��ʹ�˾ Light assembly
JP2003121116A (en) * 2001-10-12 2003-04-23 Optorun Co Ltd Vacuum ultraviolet optical film thickness monitor and vacuum film forming apparatus provided therewith
JP2008242014A (en) * 2007-03-27 2008-10-09 V Technology Co Ltd Fluorescence microscope
CN102305988A (en) * 2011-09-13 2012-01-04 江苏森莱浦光电科技有限公司 Automatic focusing device for projective bulb based on light spot detection and use method thereof
CN202486048U (en) * 2011-12-22 2012-10-10 段为钢 Full-spectrophotometric assay device
CN102866138A (en) * 2012-09-13 2013-01-09 北京瑞利分析仪器有限公司 Four-quadrant detector-based auxiliary system and method for atomic fluorescence hollow cathode lamp
CN104181131A (en) * 2014-08-15 2014-12-03 中国科学院上海技术物理研究所 Automatic positioning and calibrating device for infrared modulation photoluminescence (PL) bi-dimensional imaging light path
CN105300279A (en) * 2015-10-08 2016-02-03 扬中中科维康智能科技有限公司 Laser tracker light spot position sensor PSD tracking zero point calibration method
CN205691506U (en) * 2016-06-03 2016-11-16 哈尔滨工业大学 Sensitized fluorescence screen is used to realize the device to the detection of capillary discharging EUV light source plasmoid
CN208206783U (en) * 2018-05-25 2018-12-07 北京海光仪器有限公司 A kind of more lamp position rotary lighthouses are to photosystem

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