CN205691506U - Sensitized fluorescence screen is used to realize the device to the detection of capillary discharging EUV light source plasmoid - Google Patents
Sensitized fluorescence screen is used to realize the device to the detection of capillary discharging EUV light source plasmoid Download PDFInfo
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- CN205691506U CN205691506U CN201620534576.0U CN201620534576U CN205691506U CN 205691506 U CN205691506 U CN 205691506U CN 201620534576 U CN201620534576 U CN 201620534576U CN 205691506 U CN205691506 U CN 205691506U
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- light source
- plasmoid
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- euv light
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- 238000007599 discharging Methods 0.000 title claims abstract description 22
- 238000001514 detection method Methods 0.000 title claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims description 23
- 230000007246 mechanism Effects 0.000 claims description 13
- 230000000694 effects Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract description 2
- 238000009434 installation Methods 0.000 abstract 1
- 210000002381 plasma Anatomy 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical group [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Use sensitized fluorescence screen to realize the device to the detection of capillary discharging EUV light source plasmoid, relate to the detection technique of capillary discharging EUV light source plasmoid.Purpose is to solve the existing detection method problem that power requirement is higher and CCD camera cost is high to EUV light source.LuAG Ce fluorescent screen of the present utility model is for receiving the extreme ultraviolet that capillary discharging EUV light source sends, and produce visible ray, the visible ray that LuAG Ce fluorescent screen produces is focused on Visible-light CCD imageing sensor by condenser lens, the light spot image that Visible-light CCD imageing sensor is obtained by computer processes, and goes out plasmoid according to formula inversion reckoning.This installation cost is low, the lowest to light source power requirement, simple in construction, it is adaptable to the detection to capillary discharging EUV light source plasmoid.
Description
Technical field
This utility model relates to the detection technique of capillary discharging EUV light source plasmoid.
Background technology
In capillary tube two ends high current, Fast pulsed discharge excitation, (this project is xenon can to make the medium of capillary casing pack
Xe medium), initially produce ionization along capillary tube inner tubal wall, form plasma shell, by self-field effect, produce powerful Lip river
Lun Zili, orders about plasma shell radially constriction (referred to as Z constriction), owing to can produce Ohmic heating simultaneously in motion, makes
Plasma temperature raises, and collision Xe can produce the Xe ion of more high price, finally obtains Xe ten valency ion, now by being combined
Journey Xe10+De excitation is sent out, and will produce the output of 13.5nm extreme ultraviolet.
The change of capillary discharging plasma is a dynamic process, needs its state, particularly in real work
Xe10+The dynamic characteristic of ion generation 13.5nm radiant light output, careful understanding, thus for improving discharging condition, to obtain more
High power and the output of stable 13.5nm radiant light.Conventional sense is to use to respond extreme ultraviolet waveband CCD camera kinetic measurement
Radiation spot changes, but the extreme ultraviolet waveband CCD camera price eighteenth of the twenty is expensive, and response area is less than normal, and response sensitivity is the highest simultaneously, this
Sample just requires to have higher requirements the luminous power of light source.
Utility model content
The purpose of this utility model is to solve the detection of existing capillary discharging EUV light source plasmoid
Method due to CCD camera response area is less than normal, response sensitivity is low, cause the power requirement to EUV light source higher and
The problem that CCD camera cost is high, it is provided that a kind of employing sensitized fluorescence screen realizes capillary discharging extreme ultraviolet source plasma
The device of state-detection.
Employing sensitized fluorescence screen described in the utility model realizes capillary discharging EUV light source plasmoid
The device of detection includes LuAG-Ce fluorescent screen 1, condenser lens 2, Visible-light CCD imageing sensor 3 and optical adjusting mechanism,
LuAG-Ce fluorescent screen 1 is for receiving the extreme ultraviolet that capillary discharging EUV light source sends, and produces visible ray, focuses on thoroughly
Mirror 2 focuses on Visible-light CCD imageing sensor 3, optical adjusting mechanism for the visible ray producing LuAG-Ce fluorescent screen 1
For installing LuAG-Ce fluorescent screen 1, condenser lens 2 and Visible-light CCD imageing sensor 3.
The extreme ultraviolet (13.5nm) that this utility model uses sensitized fluorescence screen to be produced by capillary discharging is converted into visible
Light, detects this visible ray, reconstructs the plasmas such as capillary tube plasma light spot shape and relative intensity distribution
State.This utility model does not use the CCD camera that can respond 13.5nm wave band, but uses Visible-light CCD with low cost
Can be realized as measuring, LuAG-Ce fluorescent screen 1 is very sensitive to the extreme ultraviolet of 13.5nm wave band, because of without high power
Extreme ultraviolet can be realized as measure.Additionally, said apparatus simple in construction, low cost, range is extensive, easy to use.
Accompanying drawing explanation
Fig. 1 is that employing sensitized fluorescence screen described in the utility model realizes capillary discharging extreme ultraviolet source plasma
The structural representation of the device of state-detection；
Fig. 2 is the fluoroscopic response curve of LuAG-Ce, and i.e. between visible ray light intensity and incident photon energy, the standard of relation is bent
Line, wherein vertical line left part curve (i.e. a) represent incident illumination be UVU section, the curve (i.e. b) of vertical line right part represent into
Penetrating light is XVU section；
Fig. 3 is that in Fig. 2, photon energy is at the enlarged drawing in 0～26eV region, and wherein c represents that Ce trivalent ion is at 4f-5d two
Transition between individual energy level, e represents the excited state of LuAG complex, and g represents LuAG complex free-free transition, and h represents electricity
Son excites multiplier effect.
Detailed description of the invention
Detailed description of the invention one: combine Fig. 1 and present embodiment is described, the employing sensitized fluorescence screen described in present embodiment is real
The now device to the detection of capillary discharging EUV light source plasmoid, including LuAG-Ce fluorescent screen 1 and condenser lens 2,
LuAG-Ce fluorescent screen 1 is for receiving the extreme ultraviolet that capillary discharging EUV light source sends, and produces visible ray, focuses on thoroughly
Mirror 2 is focused for the visible ray producing LuAG-Ce fluorescent screen 1.
As it is shown in figure 1, described device needs to coordinate Visible-light CCD imageing sensor 3 and computer 4 to realize gas ions state
Detection.Incident extreme ultraviolet (13.5nm) light is converted into visible ray output by LuAG-Ce fluorescent screen 1, it is seen that light line focus lens 2
After focus on Visible-light CCD imageing sensor 3, the light spot image that Visible-light CCD imageing sensor 3 is obtained by computer 4 enters
Row processes, and goes out plasmoid according to formula inversion reckoning.Principle is: plasma cross-section is a round speckle, this circle speckle
Diverse location radiation light intensity be likely to be different, focus on CCD after imaging, the light spot shape of focal point, relatively strong
Degree distribution waits all corresponding with the radiation light intensity of plasmoid and diverse location, thus can be by computer 4 to measurement
The light spot shape obtained and relative intensity distribution carry out inversion reckoning and go out plasmoid.
Detailed description of the invention two: combine Fig. 1 and illustrate that present embodiment, present embodiment are to adopting described in embodiment one
The further of device realized the detection of capillary discharging EUV light source plasmoid with photosensitive fluorescent screen limits, this reality
Executing in mode, described device also includes optical adjusting mechanism, is used for installing LuAG-Ce fluorescent screen 1, condenser lens 2 and visible ray
Ccd image sensor 3.Optical adjusting mechanism can use following two structure:
1, optical adjusting mechanism includes a horizontal slide and three optical adjusting frames, and the bottom of three optical adjusting frames is equal
Being embedded in horizontal slide, and can move along horizontal slide, the side bottom each optical adjusting frame is provided with retaining mechanism,
For fixing the position of optical adjusting frame, three optical adjusting frames are respectively used to install LuAG-Ce fluorescent screen 1, condenser lens 2 and
Visible-light CCD imageing sensor 3, and LuAG-Ce fluorescent screen 1, condenser lens 2 and Visible-light CCD imageing sensor 3 can be adjusted
Relative position, three optical adjusting frames all can regulate height, and position adjustments is locked with retaining mechanism after completing, and prevents each light
Learn element to change relative to position, it is to avoid because the environmental factorss such as vibration bring error to measurement result.Retaining mechanism can use
Screw realizes.
2, optical adjusting mechanism uses cage multiaxis optical system installing rack, and cage multiaxis optical system installing rack is light path
Regulation adjusts frame the most flexibly, can not only the most arbitrarily change the relative position of each optical element, Er Qieneng
Enough arbitrarily change optical path direction, make detection process more quick flexibly.
Claims (3)
1. using sensitized fluorescence screen to realize the device to the detection of capillary discharging EUV light source plasmoid, its feature exists
In, this device includes LuAG-Ce fluorescent screen (1), condenser lens (2), Visible-light CCD imageing sensor (3) and pH effect machine
Structure, LuAG-Ce fluorescent screen (1) is for receiving the extreme ultraviolet that capillary discharging EUV light source sends, and produces visible ray, poly-
Focus lens (2) focuses on Visible-light CCD imageing sensor (3), light for the visible ray producing LuAG-Ce fluorescent screen (1)
Learn guiding mechanism to be used for LuAG-Ce fluorescent screen (1), condenser lens (2) and Visible-light CCD imageing sensor (3) are installed.
Employing sensitized fluorescence screen the most according to claim 1 realizes capillary discharging EUV light source plasmoid
The device of detection, it is characterised in that optical adjusting mechanism includes that a horizontal slide and three optical adjusting frames, three optics are adjusted
The bottom of whole frame is all embedded in horizontal slide, and can move along horizontal slide, and the side bottom each optical adjusting frame is all provided with
Being equipped with retaining mechanism, for fixing the position of optical adjusting frame, three optical adjusting frames are respectively used to install LuAG-Ce fluorescent screen
(1), condenser lens (2) and Visible-light CCD imageing sensor (3), and LuAG-Ce fluorescent screen (1), condenser lens can be adjusted
(2) with the relative position of Visible-light CCD imageing sensor (3).
Employing sensitized fluorescence screen the most according to claim 1 realizes capillary discharging EUV light source plasmoid
The device of detection, it is characterised in that described optical adjusting mechanism is cage multiaxis optical system installing rack.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620534576.0U CN205691506U (en) | 2016-06-03 | 2016-06-03 | Sensitized fluorescence screen is used to realize the device to the detection of capillary discharging EUV light source plasmoid |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620534576.0U CN205691506U (en) | 2016-06-03 | 2016-06-03 | Sensitized fluorescence screen is used to realize the device to the detection of capillary discharging EUV light source plasmoid |
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| CN205691506U true CN205691506U (en) | 2016-11-16 |
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| CN201620534576.0U Expired - Fee Related CN205691506U (en) | 2016-06-03 | 2016-06-03 | Sensitized fluorescence screen is used to realize the device to the detection of capillary discharging EUV light source plasmoid |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760650A (en) * | 2018-05-25 | 2018-11-06 | 北京海光仪器有限公司 | A kind of more lamp position rotary lighthouses are to photosystem |
-
2016
- 2016-06-03 CN CN201620534576.0U patent/CN205691506U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760650A (en) * | 2018-05-25 | 2018-11-06 | 北京海光仪器有限公司 | A kind of more lamp position rotary lighthouses are to photosystem |
| CN108760650B (en) * | 2018-05-25 | 2023-10-13 | 北京海光仪器有限公司 | Multi-lamp-position rotary lighthouse light focusing system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161116 |