CN203606585U - Electrical detection equipment and array detection system - Google Patents
Electrical detection equipment and array detection system Download PDFInfo
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- CN203606585U CN203606585U CN201320677800.8U CN201320677800U CN203606585U CN 203606585 U CN203606585 U CN 203606585U CN 201320677800 U CN201320677800 U CN 201320677800U CN 203606585 U CN203606585 U CN 203606585U
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Abstract
The utility model discloses electrical detection equipment. The electrical detection equipment comprises a light source which can emit incident light, an optical element, a modulator, an image sensor and an image processor, wherein the optical element is used for converging the incident light which is emitted by the light source and divulging reflected light which is reflected by the modulator, the modulator is used for reflecting the incident light which is converged by means of an electric field which is formed between the modulator and an array substrate to be detected to enable reflected light to be formed, the image sensor is used for conducting electric signal conversion on the reflected light which is divulged by the optical element to enable an image to be formed, and the image processor is used for processing the image which is generated by the image sensor. The utility model further discloses an array detection system. According to the electrical detection equipment and the array detection system, the analysis capacity of the electrical detection equipment can be improved, and accuracy testing of high PPI is achieved.
Description
Technical Field
The utility model relates to a display technology especially relates to an electricity check out test set and array detecting system.
Background
With the diversification of the development of the flat panel display technology, the defects of the products are also diversified. The reduction of production cost and the improvement of yield are the goals that every manufacturer pursues all the time. Therefore, various array detection devices are needed in the process of manufacturing the array substrate and used for detecting whether the product belongs to a good product or not after each process is finished.
In the process of manufacturing an array substrate of a thin film transistor liquid crystal display device, detection equipment for a thin film transistor array is mainly divided into two types, one type is optical detection equipment which is used for detecting particles of an array circuit on the array substrate, the particles can come from dust in the air or dirt in a film coating process, but when the particles are large enough, the subsequent electrical detection equipment for detecting the array circuit can be damaged; the other type is an electrical detection device which is used for detecting whether the thin film transistor pixels have factors causing the defects or not under the condition that the array circuit is powered on so as to repair the pixels in time.
Fig. 1 is a schematic structural diagram of a conventional electrical detection device, as shown in fig. 1, the electrical detection device includes a light source 101, a beam splitter 102, an objective lens 103, a modulator 104, an image sensor 106 and an image processor 107; wherein the modulator 104 includes a glass plate, a mirror, and a liquid crystal between the glass plate and the mirror.
Incident light emitted by a light source 101 is reflected by a spectroscope 102, then enters a modulator 104 through an objective lens 103, and further irradiates an array substrate 105 to be detected; meanwhile, after the array substrate 105 is powered on, an electric field is formed between the array substrate 105 and the modulator 104, liquid crystals in the modulator 104 are deflected differently according to the magnitude of the electric field, reflected light reflected back by the liquid crystals is different due to different deflection directions of the liquid crystals in the modulator 104, the reflected light sequentially passes through the transmission of the objective lens 103 and the transmission of the spectroscope 102 and enters the image sensor 106, the image sensor 106 stores images of the reflected light, converts the images into digital signals and transmits the digital signals to the image processor 107, and the image processor 107 further judges whether pixels on the array substrate 105 are normal according to the intensity of the reflected light.
Since a higher number of Pixels Per Inch (PPI) means that the display screen can display images with higher density, high PPI products, i.e. products with a PPI higher than 300PPI, are always sought by users and manufacturers. While during production the resolving power of the electrical detection device determines how high PPI can be produced, in fig. 1 the size of the modulator 104 is 130mm x 130mm and the resolving power of the image sensor 106 is 4K x 4K, where 1K =1000, i.e.: 4K photosensitive units are distributed in the horizontal direction and the vertical direction respectively, and the resolution of the electric detection equipment is 32.5 mu m (130 mm/4K) according to the detection principle; fig. 2 is a schematic view of an illumination range of the modulator on the array substrate when the conventional electrical detection apparatus detects that the pixel pitch is smaller than the size of the photosensitive unit, as shown in fig. 2, since the pixel pitch is smaller than 32.5 μm, that is: the pixel pitch is smaller than the size of a photosensitive unit of a charge coupled device, and the illumination range irradiated on the array substrate through the modulator is far larger than the pixel pitch, so that the detection of the tested pixel by the reflected light of the tested pixel or the area outside the panel is useless, and the array substrate cannot be effectively tested through the electrical detection equipment.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides an electrical detection device and an array detection system, which can improve the analysis capability of the electrical detection device, thereby realizing the accurate test of high PPI.
In order to achieve the above purpose, the technical scheme of the utility model is realized like this:
an embodiment of the utility model provides an electricity check out test set, electricity check out test set includes: the device comprises a light source for emitting incident light, an optical device for converging the incident light emitted by the light source and diverging reflected light reflected by a modulator, the modulator for reflecting the converged incident light by utilizing an electric field between the modulator and an array substrate to be detected to form reflected light, an image sensor for converting the reflected light diverged by the optical device into an electric signal to form an image, and an image processor for processing the image generated by the image sensor.
Preferably, the optical device comprises: the light source comprises a first light splitter for reflecting incident light emitted by the light source and transmitting the reflected light passing through a first objective lens, and the first objective lens for converging the incident light reflected by the first light splitter and diverging the reflected light reflected by the modulator.
Preferably, the optical device comprises: the light source comprises a first spectroscope for reflecting incident light emitted by the light source and transmitting reflected light reflected by the modulator, an adjusting mechanism for adjusting an included angle between the first spectroscope and a horizontal plane, and a second spectroscope for transmitting the reflected light transmitted by the first spectroscope.
Preferably, the adjusting mechanism is a rotating shaft connected to the second beam splitter.
Preferably, the adjusting mechanism is a telescopic rod connected to the second spectroscope.
Preferably, the electrical detection device further comprises a motor for driving the adjusting mechanism to adjust the included angle.
Preferably, the image sensor is a charge coupled device.
The embodiment of the utility model provides a still provide an array detecting system, array detecting system includes optical detection equipment to and foretell electricity check out test set.
The embodiment of the utility model provides an electricity check out test set and array detection system, including the light source that sends the incident light, right the incident light that the light source sent assembles and the optical device that diverges to the reverberation after the modulator reflection, utilize the electric field between self and the array substrate that awaits measuring to reflect the incident light that assembles and form the modulator of reverberation, to the reverberation after the optical device diverges carry out the image sensor of signal to electricity conversion formation image and right the image processor that the image that image sensor generated was handled; so, adopt the technical scheme of the utility model the analytic ability of electricity check out test set can be promoted to realize high PPI's accurate test.
Further, the utility model discloses when electricity check out test set was applied to the size that detects pixel interval and is less than image sensor's sensitization unit, can be on the unchangeable basis of current image sensor's hardware, only need to change original objective for having the objective of assembling the effect, perhaps through the contained angle between the guiding mechanism increase spectroscope and the horizontal plane that increases, so, not only can reach the effect that promotes electricity check out test set resolving power, have advantages such as the practicality is strong, convenient operation moreover.
Drawings
FIG. 1 is a schematic structural diagram of an electrical detection apparatus of the prior art;
FIG. 2 is a schematic view of an illumination range of a modulator on an array substrate when a conventional electrical inspection apparatus detects that a pixel pitch is smaller than a size of a photosensitive unit;
fig. 3 is a schematic structural diagram of an electrical detection apparatus according to an embodiment of the present invention;
fig. 4 is a schematic view of an illumination range of the modulator on the array substrate when the electrical detection apparatus detects that the pixel pitch is smaller than the size of the photosensitive unit according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a second electrical detection device according to an embodiment of the present invention.
Reference numerals:
101- -a light source; 102- -a beam splitter; 103- -objective lens; 104- -a modulator; 105- -array substrate; 106- -an image sensor; 107- -image processor; 302- -first beam splitter; 303 — first objective lens; 501-adjusting mechanism; 502- -second beam splitter; 503- -second objective lens.
Detailed Description
The embodiment of the utility model provides an electricity check out test set, include: the electronic detection device is applicable to detecting that the pixel pitch is smaller than the size of a photosensitive unit of the image sensor, and further comprises an optical device; wherein,
the light source is used for emitting incident light;
the optical device is used for converging incident light emitted by the light source and diverging reflected light reflected by the modulator;
the modulator is used for reflecting the converged incident light by utilizing an electric field between the modulator and the array substrate to be detected to form reflected light;
the image sensor is used for performing electric signal conversion on the reflected light diffused by the optical device to form an image;
the image processor is used for processing the image generated by the image sensor. Such as: and detecting whether the pixels on the array substrate are normal or not.
Preferably, the optical device may include a first beam splitter and a first objective lens; the first spectroscope is used for reflecting incident light emitted by the light source and transmitting the reflected light diffused by the first objective lens; the first objective lens is used for converging the incident light reflected by the first light splitter and diverging the reflected light reflected by the modulator so as to enter the first light splitter. Wherein the first objective lens may be formed by a plurality of lens combinations, and the implementation of the plurality of lens combinations to form the first objective lens is a routine technical means for those skilled in the art.
Preferably, the optical device may include an adjustment mechanism, a second spectroscope, and a second objective lens; the adjusting mechanism is used for adjusting an included angle between the second spectroscope and a horizontal plane; the second beam splitter is used for reflecting incident light emitted by the light source and transmitting reflected light reflected by the modulator; and the second objective is used for transmitting the reflected light transmitted by the second spectroscope so as to enter the image sensor. The second objective lens can be formed by combining a plurality of lenses, and the implementation of the combination of the plurality of lenses to form the second objective lens is a conventional technical means for those skilled in the art.
Preferably, the adjusting mechanism may be a rotating shaft connected to the second beam splitter, and may also be a telescopic rod connected to the second beam splitter.
Preferably, the electrical detection device further comprises a motor; and the motor is used for driving the adjusting mechanism to adjust the included angle.
Preferably, the image sensor is a charge coupled device.
The embodiment of the utility model provides an array detecting system, array detecting system includes optical detection equipment and foretell electricity check out test set.
The technical solution of the present invention will be further elaborated with reference to the accompanying drawings and specific embodiments.
Example one
Fig. 3 is a schematic structural diagram of an electrical detection apparatus according to an embodiment of the present invention, as shown in fig. 3, the electrical detection apparatus includes: the system comprises a light source 101, a first spectroscope 302, a first objective 303 with a converging function, a modulator 104, an image sensor 106 and an image processor 107;
incident light emitted by the light source 101 is reflected by the first beam splitter 302, then is converged by the first objective lens 303, enters the modulator 104, and further irradiates the array substrate 105 to be detected; meanwhile, after the array substrate 105 is powered on, an electric field is formed between the array substrate 105 and the modulator 104, liquid crystals in the modulator 104 are deflected differently according to the intensity of the electric field, and the frequency of reflected light reflected back through the liquid crystals is different due to the difference of the deflection directions of the liquid crystals in the modulator 104; according to the principle that the light path is reversible, the reflected light passes through the first objective lens 303, the first objective lens 303 plays a role in diverging the reflected light, the diverged reflected light enters the image sensor 106 after being transmitted by the first beam splitter 302, the image sensor 106 stores the reflected light, converts the reflected light into a digital signal and transmits the digital signal to the image processor 107, and the image processor 107 further judges whether the pixels on the array substrate 105 are normal according to the intensity of the reflected light.
Fig. 4 is the utility model provides an electricity check out test set the modulator shines the illumination scope sketch map on the array substrate when the size of detection pixel interval less than the sensitization unit, as shown in fig. 4, first objective 303 assembles the back to the incident light, shines the illumination scope on the array substrate through the modulator and just equals the pixel interval, just so there is not the reverberation in the region outside pixel or the panel under test, consequently, can carry out effective test to the array substrate through electricity check out test set. The first objective 303 in fig. 3 functions to amplify the information of the inspection pixel or panel, thereby improving the resolution of the electrical inspection apparatus.
In a first embodiment of the present invention, the first objective lens is a lens assembly formed by combining a plurality of lenses; in the actual production process, the objective lens can be replaced, for example, the objective lens without the convergence function is replaced by the first objective lens with the convergence function; or the original objective lens with the convergence function is replaced by the first objective lens with stronger convergence function.
Example two
Fig. 5 is a schematic structural diagram of a second electrical detection device according to an embodiment of the present invention, as shown in fig. 5, the second electrical detection device includes: the light source 101, the adjusting mechanism 501, the second spectroscope 502, the second objective 503, the modulator 104, the image sensor 106, and the image processor 107; wherein,
the adjusting mechanism 501 may be a rotating shaft connected to the second spectroscope 502, and the rotating shaft is adjusted to increase an included angle between the second spectroscope and a horizontal plane; the adjusting mechanism 501 can also be a telescopic rod connected to the second spectroscope 502; the included angle between the second spectroscope and the horizontal plane is increased by adjusting the length of the telescopic rod. Here, the function of the adjusting mechanism 501 can be realized by those skilled in the art according to various prior arts, and will not be described in detail.
Incident light emitted by the light source 101 is converged by the second beam splitter 502 with the increased included angle, enters the modulator 104 and then irradiates the array substrate 105 to be detected; meanwhile, after the array substrate 105 is powered on, an electric field is formed between the array substrate 105 and the modulator 104, liquid crystals in the modulator 104 are deflected differently according to the intensity of the electric field, and the frequency of reflected light reflected back through the liquid crystals is different due to the difference of the deflection directions of the liquid crystals in the modulator 104; according to the principle that the light path is reversible, the reflected light is diverged by the beam splitter 502, transmitted by the second objective 503 and enters the image sensor 106, the image sensor 106 stores the reflected light, converts the reflected light into a digital signal and transmits the digital signal to the image processor 107, and the image processor 107 further judges whether the pixels on the array substrate 105 are normal according to the judged intensity of the reflected light.
Here, after the included angle between the second beam splitter 502 and the horizontal plane is increased, the incident light is irradiated on the array substrate through the modulator to play a role in converging, so that the second beam splitter in fig. 5 plays a role in amplifying information of the detection pixel or the panel, thereby improving the resolving capability of the electrical detection device. In the actual production process, the included angle between the second spectroscope 502 and the horizontal plane can be increased through the adjusting mechanism 501, a motor can be connected to the adjusting mechanism 501, and the included angle between the second spectroscope 502 and the horizontal plane can be increased by driving the adjusting mechanism 501 through the motor; those skilled in the art can increase the included angle between the second beam splitter 502 and the horizontal plane according to the actual application scenario, and details are not described here.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention.
Claims (8)
1. An electrical detection apparatus, characterized in that it comprises: the device comprises a light source for emitting incident light, an optical device for converging the incident light emitted by the light source and diverging reflected light reflected by a modulator, the modulator for reflecting the converged incident light by utilizing an electric field between the modulator and an array substrate to be detected to form reflected light, an image sensor for converting the reflected light diverged by the optical device into an electric signal to form an image, and an image processor for processing the image generated by the image sensor.
2. The electrical detection apparatus of claim 1, wherein the optical device comprises: the light source comprises a first light splitter for reflecting incident light emitted by the light source and transmitting the reflected light passing through a first objective lens, and the first objective lens for converging the incident light reflected by the first light splitter and diverging the reflected light reflected by the modulator.
3. The electrical detection apparatus of claim 1, wherein the optical device comprises: the light source comprises a first spectroscope for reflecting incident light emitted by the light source and transmitting reflected light reflected by the modulator, an adjusting mechanism for adjusting an included angle between the first spectroscope and a horizontal plane, and a second spectroscope for transmitting the reflected light transmitted by the first spectroscope.
4. The electrical detection apparatus of claim 3, wherein the adjustment mechanism is a rotating shaft coupled to the second beam splitter.
5. The electrical detection apparatus of claim 3, wherein the adjustment mechanism is a telescopic rod connected to the second beam splitter.
6. The electrical testing device of claim 3, further comprising a motor for driving the adjusting mechanism to adjust the included angle.
7. The electrical detection apparatus of any one of claims 1 to 6, wherein the image sensor is a charge coupled device.
8. An array detection system, characterized in that it comprises an optical detection device and an electrical detection device according to any one of claims 1 to 7.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320677800.8U CN203606585U (en) | 2013-10-30 | 2013-10-30 | Electrical detection equipment and array detection system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320677800.8U CN203606585U (en) | 2013-10-30 | 2013-10-30 | Electrical detection equipment and array detection system |
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| CN203606585U true CN203606585U (en) | 2014-05-21 |
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| CN201320677800.8U Expired - Fee Related CN203606585U (en) | 2013-10-30 | 2013-10-30 | Electrical detection equipment and array detection system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104157229B (en) * | 2014-07-30 | 2016-08-24 | 京东方科技集团股份有限公司 | The detection method of a kind of array base palte and equipment |
| CN107390392A (en) * | 2017-07-24 | 2017-11-24 | 昆山国显光电有限公司 | Array substrate detection equipment and array base palte detection method |
| CN107421959A (en) * | 2017-07-25 | 2017-12-01 | 昆山国显光电有限公司 | Defect pixel detecting method and device, computer equipment and machinable medium |
-
2013
- 2013-10-30 CN CN201320677800.8U patent/CN203606585U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104157229B (en) * | 2014-07-30 | 2016-08-24 | 京东方科技集团股份有限公司 | The detection method of a kind of array base palte and equipment |
| CN107390392A (en) * | 2017-07-24 | 2017-11-24 | 昆山国显光电有限公司 | Array substrate detection equipment and array base palte detection method |
| CN107421959A (en) * | 2017-07-25 | 2017-12-01 | 昆山国显光电有限公司 | Defect pixel detecting method and device, computer equipment and machinable medium |
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