CN107390392A - Array substrate detection equipment and array base palte detection method - Google Patents
Array substrate detection equipment and array base palte detection method Download PDFInfo
- Publication number
- CN107390392A CN107390392A CN201710606355.9A CN201710606355A CN107390392A CN 107390392 A CN107390392 A CN 107390392A CN 201710606355 A CN201710606355 A CN 201710606355A CN 107390392 A CN107390392 A CN 107390392A
- Authority
- CN
- China
- Prior art keywords
- liquid crystal
- base palte
- array base
- detection equipment
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Abstract
The embodiments of the invention provide a kind of array substrate detection equipment and array base palte detection method, solves the problems, such as that the accuracy in detection of existing array base palte detection mode is not high.The array substrate detection equipment includes：Light emitting devices, beam direction device, lens group, liquid crystal modulator and image collecting device；Wherein, the light emitting devices is configured to launch light beam to the beam direction device；The liquid crystal modulator includes liquid crystal material and is arranged at the reflecting surface of the liquid crystal material side；The beam direction device is configured to the beam direction that the light emitting devices is launched to the liquid crystal modulator, and by the beam direction that the reflective surface in the liquid crystal modulator is returned to described image harvester.
Description
Technical field
The present invention relates to display detection technique field, and in particular to a kind of array substrate detection equipment and array base palte detection
Method.
Background technology
With the continuous development of Display Technique, consumer requires also more and more higher for the yields of display product.Battle array
Core devices of the row substrate as display, the pixel region for being used to play display effect on array base palte are with the presence or absence of defect
An important factor for weighing display product yields.
Fig. 1 show a kind of principle schematic of array base palte detection mode of prior art offer.What light source was sent
Light beam is directly radiated on liquid crystal modulator 13 after the reflection of spectroscope 11 by object lens 12.Liquid crystal modulator 13 includes
Liquid crystal material and the reflecting surface for being arranged at liquid crystal material side., can be in array base palte 14 and liquid crystal after the energization of array base palte 14
Electric field is formed between modulator 13.Liquid crystal material in liquid crystal modulator 13 occurs different inclined according to the size of electric-field intensity
Turn, the difference of liquid crystal material yawing moment is so that the reflected light gone back of reflective surface is also just different.Adopted again by image
Acquisition means 15 gather the reflected light that reflects back to obtain image information, judge array base palte 14 based on the image information
Pixel region 361 ' whether there is defect.If the existing defects of pixel region 361 ' of array base palte 14, the figure at defective locations
Exception is shown as information will be present, such as shows point defect or line defect etc..
However, array base palte 14 is in addition to including pixel region 361 ', in addition to other circuit structure regions 362 '.When
When being detected by the way of shown in Fig. 1, array base is greater than due to entering the illumination range of light beam of liquid crystal modulator 13
The pixel region 361 ' of plate 14, therefore other circuit structure regions 362 ' also can additionally be collected figure on array base palte 14
In picture information, as shown in Figure 2.These images additionally gathered can produce dry to the process that defect dipoles are carried out according to image information
Disturb, reduce the degree of accuracy of detection process.
The content of the invention
In view of this, the embodiments of the invention provide a kind of array substrate detection equipment and array base palte detection method, solution
The problem of accuracy in detection for existing array base palte detection mode of having determined is not high.
A kind of array substrate detection equipment that one embodiment of the invention provides includes：Light emitting devices, beam direction device,
Lens group, liquid crystal modulator and image collecting device；
Wherein, the light emitting devices is configured to launch light beam to the beam direction device；The liquid crystal modulator bag
Include liquid crystal material and be arranged at the reflecting surface of the liquid crystal material side；The beam direction device is configured to launch the light
The beam direction that device is launched is returned to the liquid crystal modulator, and by the reflective surface in the liquid crystal modulator
Beam direction to described image harvester；
Wherein, the lens group is arranged on the optical path between the beam direction device and the liquid crystal modulator
On, be configured to by the illumination range of light beam of the beam direction device guiding to the liquid crystal modulator be gathered in it is to be detected
Array base palte the equivalent regional extent of pixel region, and the reflective surface in the diffusion liquid crystal modulator returns
The light beam come.
Wherein, the lens group includes：At least two lens and telescoping drive mechanism；
Wherein, the optical axis of at least two lens overlaps, and the telescoping drive mechanism is configured to drive institute
At least two lens are stated to move along the optical axis.
Wherein, the telescoping drive mechanism includes outer barrel, at least two inner cylinders and at least two motors；
Wherein, at least two inner cylinder is socketed on the outer barrel in a manner of screw thread coordinates, and described at least two
Lens are respectively arranged at least two inner cylinder；
Wherein, at least two motor drives at least two inner cylinder rotating respectively, with cause it is described at least
Two lens move along the optical axis.
Wherein, the beam direction device is the first spectroscope.
Wherein, the array substrate detection equipment further comprises：It is arranged on the light emitting devices and the light beam is led
To the second spectroscope on the optical path between device.
Wherein, the array substrate detection equipment further comprises：
Image analysis apparatus, it is configured to obtain battle array by analyzing image information that described image harvester collected
The defects of row substrate information.
Wherein, described image harvester is charge coupled device camera.
Wherein, the array substrate detection equipment further comprises：Array base palte bogey, it is arranged on the liquid crystal and adjusts
Below device processed, for carrying array base palte to be detected.
A kind of array base palte detection method that one embodiment of the invention provides includes：
Array base palte to be detected is placed in below the liquid crystal modulator of the array substrate detection equipment；
The array base palte is powered, by the lens group by the beam direction device guiding to the liquid crystal
The illumination range of the light beam of modulator is gathered in the regional extent equivalent with the pixel region of the array base palte；And
The defects of array base palte information described in the image information acquisition collected according to described image harvester.
Wherein, the lens group of the array substrate detection equipment includes：At least two lens and telescoping drive mechanism；Its
In, the optical axis of at least two lens overlaps, and the telescoping drive mechanism is configured to drive described at least two
Lens move along the optical axis；
Wherein, it is described by the lens group by the light beam of the beam direction device guiding to the liquid crystal modulator
Illumination range, which is gathered in the regional extent equivalent with the pixel region of the array base palte, to be included：
Position of at least two lens on the optical axis is adjusted by the telescoping drive mechanism, by the light
The illumination range that beam guider is directed to the light beam of the liquid crystal modulator is gathered in pixel region with the array base palte
Equivalent regional extent.
A kind of array substrate detection equipment and array base palte detection method provided in an embodiment of the present invention, by being led in light beam
Lens group is set on to the optical path between device and liquid crystal modulator, by beam direction device guiding to liquid crystal modulator
The illumination range of light beam be gathered in the regional extent equivalent with the pixel region of array base palte to be detected so that array
Other regions on substrate in addition to pixel region additionally will not be collected in image information, are also avoided to according to figure
As information carries out the interference of the process of defect dipoles.Simultaneously as the reversibility of optical path of lens group, lens group can also spread liquid crystal
The light beam that reflective surface in modulator is returned, this is equivalent to be exaggerated the image information of pixel region on array base palte,
Contribute to the degree of accuracy of further raising detection process.
Brief description of the drawings
Fig. 1 show a kind of principle schematic of array base palte detection mode of prior art offer.
Fig. 2 show a kind of schematic diagram of array base palte detection mode acquired image information of prior art offer.
Fig. 3 show a kind of structural representation of array substrate detection equipment of one embodiment of the invention offer.
Fig. 4 show a kind of schematic flow sheet of array base palte detection method of one embodiment of the invention offer.
Fig. 5 show a kind of showing for array substrate detection equipment acquired image information of one embodiment of the invention offer
It is intended to.
Fig. 6 a~6b show the work of the lens group in a kind of array substrate detection equipment of one embodiment of the invention offer
Make principle schematic.
Fig. 7 show a kind of structural representation of array substrate detection equipment of another embodiment of the present invention offer.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.Based on this
Embodiment in invention, the every other reality that those of ordinary skill in the art are obtained under the premise of creative work is not made
Example is applied, belongs to the scope of protection of the invention.
Fig. 3 show a kind of structural representation of array substrate detection equipment of one embodiment of the invention offer.Such as Fig. 3 institutes
Show, the array substrate detection equipment includes：Light emitting devices 31, beam direction device 32, lens group 33, the and of liquid crystal adjuster 34
Image collecting device 35.Light emitting devices 31 is configured to launch light beam to beam direction device 32；Liquid crystal adjuster 34 includes liquid
Brilliant material and the reflecting surface for being arranged at liquid crystal material side；Beam direction device 32 is configured to launched light emitting devices 31
Beam direction is to liquid crystal adjuster 34, and by the beam direction that the reflective surface in liquid crystal adjuster 34 is returned to IMAQ
Device 35.Lens group 33 is arranged on the optical path between beam direction device 32 and liquid crystal adjuster 34, is configured to light
The illumination range that beam guider 32 is directed to the light beam of liquid crystal adjuster 34 is gathered in picture with array base palte to be detected 36
The light beam that reflective surface in the equivalent regional extent in plain region 361, and diffusion liquid crystal adjuster 34 is returned.
The array substrate detection equipment provided based on the embodiment of the present invention, the process detected to array basal plate 36
It may include following steps：
Step 401：Array base palte 36 to be detected is placed in the lower section of liquid crystal adjuster 34 of array substrate detection equipment.This
Sample can just form electric field, liquid crystal adjustment when array substrate 36 is powered between array base palte 36 and liquid crystal adjuster 34
Different deflection can just occur according to the size of electric-field intensity for the liquid crystal material in device 34.The difference of liquid crystal material yawing moment
It can make it that the reflected light that the reflective surface of liquid crystal adjuster 34 goes back is different, then the reflection is gathered by image collecting device 35
The reflected light gone back can obtain image information.
Step 402：Array substrate 36 is powered, and beam direction device 32 is directed into liquid crystal by lens group 33 adjusts
The illumination range of the light beam of whole device 34 is gathered in the regional extent equivalent with the pixel region of array base palte 36 361.
As shown in figure 5, because the illumination range of light beam for entering liquid crystal adjuster 34 has been gathered in and battle array by lens group 33
The equivalent regional extent of the pixel region 361 of row substrate 36, therefore the reflecting surface of liquid crystal adjuster 34 also can only reflect and pixel
The reflected light of the equivalent regional extent in region 361, the so also just liquid crystal material of the regional extent equivalent only with pixel region 361
The deflection situation of material can be showed by image information.
Step 403：The defects of image information acquisition array base palte 36 collected according to image collecting device 35 is believed
Breath.
As shown in figure 5, the pixel on array base palte 36 is only corresponded to by image information that figure harvester is collected
Region 361, so that other regions on array base palte 36 in addition to pixel region 361 will not additionally be collected image
In information, the interference of the process to carrying out defect dipoles according to image information is also avoided.Simultaneously as the light of lens group 33
Road invertibity, lens group 33 can also spread the light beam that the reflective surface in liquid crystal adjuster 34 is returned, and this is equivalent to amplify
The image information of pixel region 361 on array base palte 36, help further to improve the degree of accuracy of detection process.
In an embodiment of the present invention, it is contemplated that the model of array base palte 36 is different, the size of pixel region 361 thereon
It is inevitable different, therefore the lens group 33 may include：At least two lens and telescoping drive mechanism.At least two lens
Optical axis overlap, telescoping drive mechanism is configured to drive at least two lens to move along optical axis.Now, when need
When being detected to the array base palte 36 of different model, at least two lens can be adjusted by telescoping drive mechanism in light
Position on axle, the illumination range that beam direction device 32 is directed to the light beam of liquid crystal adjuster 34 are gathered in and array base
The equivalent regional extent of the pixel region 361 of plate 36.
In an embodiment of the present invention, the telescoping drive mechanism may include outer barrel, at least two inner cylinders and at least two
Motor.At least two inner cylinder is socketed on outer barrel in a manner of screw thread coordinates, and at least two lens are set respectively
In at least two inner cylinder.At least two motor drives at least two inner cylinder rotating respectively, to cause this at least
Two lens move along optical axis.So so that the lens group 33 only includes two lens (being respectively labeled as 331 and 332) as an example,
As shown in Figure 6 a, it is current to be detected to adapt into the illumination range of the light beam of liquid crystal adjuster 34 when needing further diminution
During the pixel region 361 of array base palte 36, two lens are driven away from each other by telescoping drive mechanism.Such as Fig. 6 b institutes
Show, when needs further amplify the illumination range into the light beam of liquid crystal adjuster 34 to adapt to current array base palte to be detected
During 36 pixel region 361, drive two lens closer to each other by telescoping drive mechanism.
It should be appreciated that the lens numbers in lens group 33 can be depending on the design requirement of reality, telescoping drive mechanism
Other mechanical drive modes can be used to realize, the present invention is specific to the lens numbers of lens group 33 and telescoping drive mechanism
Structure does not limit.
In an embodiment of the present invention, as shown in figure 3, beam direction device 32 can use the first spectroscope to realize, this
One spectroscope includes the first semi-transparent semi-reflecting inclined-plane.The part reflection for the light beam that light emitting devices 31 is launched on first inclined-plane
To liquid crystal adjuster 34, a part for the light beam that the reflective surface in liquid crystal adjuster 34 is returned is transmitted through image collector
Put 35, the light beam phase that the light beam of the first slant reflection to liquid crystal adjuster 34 is returned with the reflective surface in liquid crystal adjuster 34
Overlap.It is to be understood that the beam direction device 32 also can use the other modes in addition to spectroscope to realize, as long as can be by light
The beam direction that emitter 31 is launched returns the reflective surface in liquid crystal adjuster 34 to liquid crystal adjuster 34
Beam direction is to image collecting device 35.The present invention is not limited the concrete structure of beam direction device 32.
In an embodiment of the present invention, it is contemplated that the light intensity of the initial transmissions light of light emitting devices 31 may be excessive, such as Fig. 7
Shown, the array substrate detection equipment further comprises：The light being arranged between light emitting devices 31 and beam direction device 32
The second spectroscope 37 on ways for education footpath, the second spectroscope 37 include the second semi-transparent semi-reflecting inclined-plane.Light is launched on second inclined-plane to be filled
The part reflection of 31 light beams launched is put, the another part for the light beam that light emitting devices 31 is launched is transmitted through light beam and led
To device 32, to play the purpose of the light intensity of scattered initial transmissions light.
In an embodiment of the present invention, the array substrate detection equipment further comprises：Image analysis apparatus, it is configured to lead to
The image information that is collected of analysis image collecting device 35 is crossed to obtain the defects of array base palte 36 information.It should be appreciated that
The image analysis apparatus can use the computer equipment equipped with image analysis software to realize, but the present invention fills to the graphical analysis
The specific implementation put does not limit.
In an embodiment of the present invention, image collecting device 35 can be charge coupled device camera (ccd video camera), so
And the present invention is not limited equally the specific implementation of image collecting device 35.
In an embodiment of the present invention, for the ease of fixing and carry array base to be detected below liquid crystal adjuster 34
Plate 36, the detection means of array base palte 36 can further comprise：The bogey of array base palte 36, is arranged under liquid crystal adjuster 34
Side, for carrying array base palte 36 to be detected.It should be appreciated, however, that in an embodiment of the present invention, can also be without the battle array
The bogey of row substrate 36, as long as array base palte 36 to be detected can be placed on the lower section of liquid crystal adjuster 34 to form electric field i.e.
Can.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
Within god and principle, any modification for being made, equivalent substitution etc., it should be included in the scope of the protection.
Claims (10)
- A kind of 1. array substrate detection equipment, it is characterised in that including：Light emitting devices, beam direction device, lens group, liquid Brilliant modulator and image collecting device；Wherein, the light emitting devices is configured to launch light beam to the beam direction device；The liquid crystal modulator includes liquid Brilliant material and the reflecting surface for being arranged at the liquid crystal material side；The beam direction device is configured to the light emitting devices The beam direction launched is to the liquid crystal modulator, and the light that the reflective surface in the liquid crystal modulator is returned Beam is directed to described image harvester；Wherein, the lens group is arranged on the optical path between the beam direction device and the liquid crystal modulator, structure Make as the illumination range of light beam of the beam direction device guiding to the liquid crystal modulator is gathered in and battle array to be detected What the reflective surface in the equivalent regional extent of the pixel region of row substrate, and the diffusion liquid crystal modulator was returned Light beam.
- 2. array substrate detection equipment according to claim 1, it is characterised in that the lens group includes：At least two Lens and telescoping drive mechanism；Wherein, the optical axis of at least two lens is overlapped, and the telescoping drive mechanism is configured to described in driving extremely Few two lens move along the optical axis.
- 3. according to power require 2 described in array substrate detection equipment, it is characterised in that the telescoping drive mechanism include outer barrel, At least two inner cylinders and at least two motors；Wherein, at least two inner cylinder is socketed on the outer barrel, at least two lens in a manner of screw thread coordinates It is respectively arranged at least two inner cylinder；Wherein, at least two motor drives at least two inner cylinder rotating respectively, to cause described at least two Lens move along the optical axis.
- 4. array substrate detection equipment according to claim 1, it is characterised in that the beam direction device is first point Light microscopic.
- 5. array substrate detection equipment according to claim 1, it is characterised in that further comprise：It is arranged on the light The second spectroscope on optical path between emitter and the beam direction device.
- 6. array substrate detection equipment according to claim 1, it is characterised in that further comprise：Image analysis apparatus, it is configured to obtain array base by analyzing image information that described image harvester collected The defects of plate information.
- 7. array substrate detection equipment according to claim 1, it is characterised in that described image harvester is electric charge coupling Close device camera.
- 8. array substrate detection equipment according to claim 1, it is characterised in that further comprise：Array base palte carries Device, it is arranged on below the liquid crystal modulator, for carrying array base palte to be detected.
- 9. a kind of array base palte detection method of the array substrate detection equipment based on as described in any in claim 1 to 8, its It is characterised by, including：Array base palte to be detected is placed in below the liquid crystal modulator of the array substrate detection equipment；The array base palte is powered, by the lens group by the beam direction device guiding to the liquid crystal modulation The illumination range of the light beam of device is gathered in the regional extent equivalent with the pixel region of the array base palte；AndThe defects of array base palte information described in the image information acquisition collected according to described image harvester.
- 10. array base palte detection method according to claim 9, it is characterised in that the array substrate detection equipment Lens group includes：At least two lens and telescoping drive mechanism；Wherein, the optical axis of at least two lens overlaps, The telescoping drive mechanism is configured to drive at least two lens to move along the optical axis；Wherein, it is described by the lens group by the illumination of light beam of the beam direction device guiding to the liquid crystal modulator Range-aggregation includes in the regional extent equivalent with the pixel region of the array base palte：Position of at least two lens on the optical axis is adjusted by the telescoping drive mechanism, the light beam is led It is gathered in the illumination range of device guiding to the light beam of the liquid crystal modulator equivalent with the pixel region of the array base palte Regional extent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710606355.9A CN107390392A (en) | 2017-07-24 | 2017-07-24 | Array substrate detection equipment and array base palte detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710606355.9A CN107390392A (en) | 2017-07-24 | 2017-07-24 | Array substrate detection equipment and array base palte detection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107390392A true CN107390392A (en) | 2017-11-24 |
Family
ID=60337141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710606355.9A Pending CN107390392A (en) | 2017-07-24 | 2017-07-24 | Array substrate detection equipment and array base palte detection method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107390392A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021232452A1 (en) * | 2020-05-22 | 2021-11-25 | 重庆康佳光电技术研究院有限公司 | Mass transfer device and system, and control method therefor |
| US11721785B2 (en) | 2020-05-22 | 2023-08-08 | Chongqing Konka Photoelectronic Technology Research Institute Co., Ltd. | Mass transfer apparatus, mass transfer system, and control method for mass transfer |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1731233A (en) * | 2004-08-06 | 2006-02-08 | 阿尔卑斯电气株式会社 | Optical lens adjusting device and adjusting method thereof |
| CN1967306A (en) * | 2005-11-16 | 2007-05-23 | 宾得株式会社 | Cam mechanism of a telescoping lens barrel |
| CN101171540A (en) * | 2005-03-07 | 2008-04-30 | 株式会社理光 | Lens barrel, camera and mobile information terminal device having the same |
| CN101644819A (en) * | 2008-08-06 | 2010-02-10 | 佳能株式会社 | Image pickup apparatus |
| CN103196568A (en) * | 2012-01-05 | 2013-07-10 | 株式会社三丰 | Wavelength detector and contact probe using it |
| CN203606585U (en) * | 2013-10-30 | 2014-05-21 | 北京京东方光电科技有限公司 | Electrical detection equipment and array detection system |
| CN104111548A (en) * | 2014-06-30 | 2014-10-22 | 京东方科技集团股份有限公司 | Array substrate detecting device and optical system applied to same |
-
2017
- 2017-07-24 CN CN201710606355.9A patent/CN107390392A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1731233A (en) * | 2004-08-06 | 2006-02-08 | 阿尔卑斯电气株式会社 | Optical lens adjusting device and adjusting method thereof |
| CN101171540A (en) * | 2005-03-07 | 2008-04-30 | 株式会社理光 | Lens barrel, camera and mobile information terminal device having the same |
| CN1967306A (en) * | 2005-11-16 | 2007-05-23 | 宾得株式会社 | Cam mechanism of a telescoping lens barrel |
| CN101644819A (en) * | 2008-08-06 | 2010-02-10 | 佳能株式会社 | Image pickup apparatus |
| CN103196568A (en) * | 2012-01-05 | 2013-07-10 | 株式会社三丰 | Wavelength detector and contact probe using it |
| CN203606585U (en) * | 2013-10-30 | 2014-05-21 | 北京京东方光电科技有限公司 | Electrical detection equipment and array detection system |
| CN104111548A (en) * | 2014-06-30 | 2014-10-22 | 京东方科技集团股份有限公司 | Array substrate detecting device and optical system applied to same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021232452A1 (en) * | 2020-05-22 | 2021-11-25 | 重庆康佳光电技术研究院有限公司 | Mass transfer device and system, and control method therefor |
| US11721785B2 (en) | 2020-05-22 | 2023-08-08 | Chongqing Konka Photoelectronic Technology Research Institute Co., Ltd. | Mass transfer apparatus, mass transfer system, and control method for mass transfer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1036874C (en) | Method for projecting image obtained by using liquid crystal panels and display apparatus for realizing same | |
| TWI357994B (en) | Method and apparatus for repairing a liquid crysta | |
| CN107517374B (en) | A kind of determination method and device of line-scan digital camera visual field | |
| CN108663883A (en) | A kind of projection display system | |
| CN102449527B (en) | Image processing apparatus, image processing method and microscope | |
| CN103558698B (en) | Laser repairing equipment | |
| CN103744172B (en) | A kind of confocal microscopic image method possessing spatial light modulation illumination | |
| CN103776769A (en) | Confocal optical scanner | |
| CN105632384A (en) | Projection display system and projection display method | |
| CN107390392A (en) | Array substrate detection equipment and array base palte detection method | |
| CN105824176B (en) | A kind of ultrashort out-of-focus projection's camera lens of curved face reflecting type based on mems | |
| CN106526917A (en) | Liquid crystal screen dot matrix detection device achieving scanning by means of line-scan digital camera | |
| CN103720459B (en) | A kind of based on single slip ring and controlled in wireless exciting light scanning device for fluorescent molecule fault imaging and method | |
| CN1847878A (en) | CCD splicing system | |
| CN202903452U (en) | Light device for forming an image of an object buried below one or more filters | |
| CN202748305U (en) | Confocal optical scanner | |
| CN1257214A (en) | Large size image projector | |
| CN106773158A (en) | A kind of movable type seeks liquid crystal display pixel qualities analytical equipment and a method certainly | |
| CN202092660U (en) | Scenery simulator applicable to TDI (Transport Driver Interface) camera | |
| CN107991766A (en) | A kind of microscope and imaging method with three-dimensional imaging ability | |
| CN105763817A (en) | Image erasing device and method, and image scanning system | |
| CN202974840U (en) | Confocal optical scanner | |
| KR101436626B1 (en) | Improved Line Scan Device and Method, and Fine Pattern Detection System and Method Having the Same | |
| CN113703250B (en) | Imaging system and imaging method based on scanning galvanometer | |
| CN1580746A (en) | Matrix type biochip CCD scanning fetch device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171124 |