KR101436626B1 - Improved Line Scan Device and Method, and Fine Pattern Detection System and Method Having the Same - Google Patents

Abstract

The present invention discloses an improved line scanning apparatus and method, and a fine pattern inspection system and method therefor.
A line scan apparatus according to the present invention includes: a CCD; A sensor unit provided under the CCD and having a plurality of first lenses for adjusting a focal distance; An object unit provided at a lower portion of the sensor unit and having a plurality of second lenses; A beam splitter provided between the first lens unit and the objective unit; And an illumination unit detachably provided integrally on a side surface of the beam splitter, wherein the illumination unit provides the beam splitter with a parallel line beam of a predetermined width, so that the beam splitter is parallel to the incident beam and the reflection beam on the panel Thereby forming a coaxial beam.

Description

[0001] The present invention relates to an improved line scan apparatus and method, and a fine pattern inspection system and method using the same.

The present invention relates to an improved line scanning apparatus and method, and a fine pattern inspection system and method therefor.

More specifically, the present invention is characterized in that a light source for illumination is integrally mounted on a side surface of a line scan camera for inspecting a fine pattern and is configured as a light source integrated line scan camera so that an illumination beam emitted from a light source is irradiated to a fine pattern The problem of nonuniformities in the amount of light between the center portion and the outer portion (peripheral portion) of the conventional LED light source for line illumination is solved, and the uniformity of the light receiving characteristics of the captured image, the remarkable improvement of the sharpness, Distortion can be minimized and the relay lens unit can be replaced to form a line beam of a desired size. Especially, the working distance is remarkably reduced and the resolution is remarkably improved to enable inspection of the ultrafine line pattern. And is capable of scanning and inspecting a plurality of patterns formed on the panel as well as an edge face of the panel A line-scan device and method, and to a fine pattern inspection system and method having the same.

2. Description of the Related Art Generally, a liquid crystal display (LCD) is a liquid crystal display (LCD) in which data signals according to image information are individually supplied to liquid crystal cells arranged in a matrix form to adjust a light transmittance of the liquid crystal cells, Display device.

A liquid crystal display (LCD) device has a structure in which a thin film transistor array substrate (TFT) is formed on a large-sized mother substrate, a color filter substrate (CF) is formed on a separate mother substrate, Panels are formed at the same time so as to improve the yield, a step of cutting with a unit liquid crystal panel is required.

Usually, the cutting of the unit panel is carried out through a step of forming a cut-off groove on the surface of the mother substrate with a wheel having a hardness higher than that of glass, and propagating a crack along the cut groove.

When the unit liquid crystal panel is separated, a phenomenon such as burr, broken, pattern breakage, or the like may occur on an edge surface cut through the cutting process. In particular, if a burr is generated on the edge of the liquid crystal panel, the edge of the liquid crystal panel is inspected after the cutting process for separating the liquid crystal panel because it causes a serious failure to the manufacturing process equipment of the next liquid crystal panel.

Conventionally, in order to inspect the edge surface of the liquid crystal panel, the edge was mechanically contacted with the edge surface. That is, by using a means provided with a sensor on one side, the sensor is brought into contact with the edge surface of the liquid crystal panel with one side provided with the sensor, and burrs, cracks, and pattern breakage occurring on the edge surface are inspected.

However, if the edge surface of the liquid crystal panel is inspected by the conventional mechanical contact method, it is not possible to inspect the edge of the edge of the liquid crystal panel formed inside the reference line. In particular, if the edge of the liquid crystal panel is damaged, it can not be detected at all.

In order to overcome these problems, optical edge inspection has been introduced. In the edge inspection method using optics, the image of the edge surface is obtained by using a line scan camera, and the obtained image is processed to determine necessary dimensions and defects.

A line scan camera for picking up an image of an edge surface of such a liquid crystal panel will be described with reference to FIG.

1 is a view for explaining a general line scan camera.

1, there is a line scan camera 30, 40, 50, 60 for imaging an image along the upper and lower edges of the panel 10 mounted on the stage 22 of the table 20 51, and 61 are installed in the line scan cameras 30, 40, 50, and 60, respectively. The line scan camera is provided with line scan cameras 30 and 40 located at an upper portion of the panel 10 and line scan cameras 50 and 60 located at a lower portion thereof. Each of the line scan cameras 30, 40, 50, and 60 and the lights 31, 41, 51, and 61 are controlled by the controller 70 for image acquisition and brightness of illumination. In order to acquire a high-quality image, it is very important to adjust the illumination appropriately. In FIG. 1, the position of the illumination is shown together with the camera. However, in order to obtain an optimal image, It is decided through a trial.

Further, the upper edge surface is imaged by the upper cameras 30 and 40 while the panel 10 mounted on the stage 220 of the table 20 is moved, and the lower edge The image is picked up.

2A is a side cross-sectional view of one line scan camera shown in Fig.

Referring to FIG. 2A, since the line scan camera 30 has a longer depth at the end of the CCD 310 and the lens, the overall length of the camera body must be longer. Therefore, the working distance between the line scan camera 30 and the panel 10 becomes longer. 2A, the length of the body of the line scan camera 30 is set to be long in the vertical direction from the panel 10, and the internal structure of the line scan camera 30 is as follows. Is installed. A first telephoto ring 330 and a second telephoto ring 340, which are two downward converters 320 and two extender rings, are installed. And a lens unit 350 having a plurality of lenses as a lower part of the two telephoto rings. The CCD 310 of the line scan camera 30 is for capturing an image of the panel 10 and the conversion unit 320 is connected to the front or rear of the lens unit to adjust the overall focal length to change. The first telephoto ring 330 and the second telephoto ring 340 provided at the lower portion of the conversion unit 320 are designed to increase the working distance. The lens unit 350 includes a plurality of lenses, for example, an iris lens for adjusting brightness, a focus lens for focusing, and the like.

The above-described line scan camera 30 photographs a line scan image along the edge surface of the panel 10. [ That is, the CCD image and the line scan image of the CCD 310 of the line scan camera 30 are formed in the same line scan axis. That is, the line scan camera 30 is line-scanned so that the long axis and the short axis of the line scan image of the panel 10 are the same as the CCD image formed on the CCD 310. [

2B is a plan view of one line scan camera shown in FIG.

Referring to FIG. 2B, a line scan camera 30 is positioned above the panel 10 and the panel 10, and a CCD 310 is provided inside the line scan camera 30. The line scan image 100 can be obtained along the line scan direction of the panel 10 and the long and short axes of the line scan image 100 are aligned with the moving direction of the line scan camera Is set. That is, the line scanning direction is the same as the moving direction of the line scan camera of the CCD 310. At this time, the line scan image 100 of the panel 10 has the same shape as the CCD image of the line scan camera 30 , Filed with the Korean Intellectual Property Office No. 10-2005-0006040, entitled " Line Scan Camera Using Pentaprism ", filed on January 22, 2005 by the Bible, 10-0484655.

However, since the above-mentioned conventional line scan camera requires a long working distance, it is complicated in structure, heavy in weight, and has a long body, so space utilization is low during installation. In particular, There is a problem that space utilization is lower.

In addition, since the focal length is long to lengthen the working distance, it is difficult to adjust the focus, and the image is blurred toward the edge of the line-by-line image acquired by the line scan camera 30.

Hereinafter, a problem of the line scan camera according to the related art will be described in detail.

3 is a diagram illustrating a relationship between a line scan camera and a light source according to the related art.

Referring to FIG. 3 together with FIG. 1, in the line scan camera 30 according to the related art, the illumination 31 is provided on one side of the line scan camera 30. Accordingly, the incident light 31a emitted from the illumination unit 31 is incident on the panel 10 and reflected. Thereafter, the reflected light 31b travels into the line scan camera 30 and is picked up on the surface of the CCD 310. The incident light 31a is incident on the panel 10 in an oblique direction so that the reflected light 31b is also incident on the line scan camera 30 It is injected in the oblique direction and proceeds.

Therefore, since only a part of the light emitted from the illumination 31 is used for imaging of the line scan camera 30, energy waste of the light source is significant, and it is necessary to maintain the uniformity of the light amount of the reflected light 31b constant .

In order to keep the incident light 31a and the reflected light 31b as parallel as possible (that is, to reduce the incident angle of the incident light 31a with respect to the panel 10 and the reflection angle of the reflected light 31b) The working distance (WD) between the lower end of the camera 30 and the panel 10 becomes longer. The minimum achievable working distance (WD) to date is approximately 140 mm.

In addition, since the amount of light at the central portion and the outer portion (peripheral portion) of the illumination 310, which is typically implemented by LEDs, is uneven, it is difficult to maintain the uniformity of the light receiving characteristics of the scanned image captured by the CCD 310. Therefore, And distortion occurs.

In the conventional line scan camera 30, for example, a method of providing a light 31 at a lower portion of the panel 10 may be used in order to keep the incident light 31a and the reflected light 31b in parallel have. In this case, the light emitted from the light source 310 can travel in parallel into the line scan camera 30, but a part of the emitted light passes through the air at the edge of the panel 10, The nonuniformity of the amount of light occurs due to the difference in the quantity of light due to the reflection of light in the panel 10, the light-receiving characteristic of the scanned image picked up by the CCD 310 deteriorates, the sharpness of the picked- Distortion occurs. 1, the light source 31 can not be installed in the lower part of the stage 22 of the table 20, so that the plurality of patterns (not shown) formed on the panel 10 on the stage 22 (Refer to position A) can not be taken. Further, as described above, if the working distance WD is long, the focal length becomes long, so that the resolution of a plurality of patterns (not shown) becomes low, for example.

Therefore, there is a need for a new method for solving the problems of the above-described conventional techniques.

Korean Patent No. 10-0484655

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems of the prior art, and it is an object of the present invention to provide a light source integrated line scan camera in which a light source for illumination is integrally mounted on a side surface of a line scan camera, The problem of nonuniformity in the amount of light between the center portion and the outer peripheral portion (peripheral portion) of the conventional LED light source for line illumination is solved, and the uniformity of the light receiving characteristics of the captured image , Remarkable improvement in sharpness and minimization of distortion can be achieved, and a line beam of a desired size can be formed through replacement of the relay lens part. In particular, the working distance is remarkably reduced and the resolution is remarkably improved, Scan of a plurality of patterns formed on the panel as well as the edge surface of the panel, The check is possible to improve the line scanning apparatus and method, and to provide a fine pattern inspection system and method having the same.

A line scan apparatus according to a first aspect of the present invention includes: a CCD; A sensor unit provided under the CCD and having a plurality of first lenses for adjusting a focal distance; An object unit provided at a lower portion of the sensor unit and having a plurality of second lenses; A beam splitter provided between the sensor unit and the objective unit; And an illumination unit detachably provided integrally on a side surface of the beam splitter, wherein the illumination unit provides the beam splitter with a parallel line beam of a predetermined width, so that the beam splitter is parallel to the incident beam and the reflection beam on the panel Thereby forming a coaxial beam.

 According to a second aspect of the present invention, there is provided a fine pattern inspection system comprising: a panel mounted on a stage of a table and having a plurality of patterns formed thereon; At least one line scan device integrally provided with an illuminating part provided on an upper portion of the panel and detachably attachable to the body, for picking up an image along one or both of an edge surface of the panel and the plurality of patterns; A controller connected to the at least one line scan device and the illumination unit in a wired or wireless manner, the controller acquiring images of the at least one line scan device and controlling brightness of the illumination unit; And a driving device for relatively moving the stage and the at least one line scanning device.

 According to a third aspect of the present invention, there is provided a line scanning method comprising the steps of: a) using an illumination lens unit having a plurality of third lenses to emit a beam emitted from a light source provided in an illumination unit integrally detachably provided on a body of a line- Forming a first parallel line beam having a first width; b) forming a parallel second line beam having a second width corresponding to a predetermined width using a relay lens unit detachably provided in front of the illumination lens unit and having a plurality of fourth lenses; c) forming a parallel coaxial beam having a third width formed by reflecting the second line beam at 90 degrees using a beam splitter provided in the line scan device; d) entering said coaxial beam onto a panel through an object provided in said line scan device; And e) a reflected beam reflected from the panel (10) is incident on the CCD via the objective, the beam splitter, and the sensor portion provided on the beam splitter to form an edge portion of the panel and a plurality of And a step of picking up an image of either one or both of the patterns.

 A method for inspecting fine patterns according to a fourth aspect of the present invention comprises the steps of: a) providing one or more line scan devices on a panel mounted on a stage of a table; b) imaging an image along one or both of an edge surface of the panel and a plurality of patterns formed on the panel while relatively moving the stage and the one or more line scan devices relative to each other; c) transmitting the image captured in step b) to a controller connected to the one or more line scan devices in a wired or wireless manner; And d) inspecting the state of either or both of the edge surface and the plurality of patterns from the image, wherein the step b) comprises: b1) detachably attaching to each body of the one or more line scan devices Forming a parallel first line beam having a first width by using an illumination lens unit having a plurality of third lenses, the beam emitted from a light source provided in an integrally provided illumination unit; b2) forming a parallel second line beam having a second width corresponding to a predetermined width using a relay lens unit detachably provided in front of the illumination lens unit and having a plurality of fourth lenses; b3) forming a parallel coaxial beam having a third width formed by reflecting the second line beam at 90 degrees using a beam splitter provided in the line scan device; b4) entering said coaxial beam onto said panel through an object provided in each of said one or more line scan devices; And b5) a reflection beam reflected from the panel is incident on the CCD via the objective portion, the beam splitter, and the sensor portion provided on the beam splitter, so that an image of one or both of the edge surface and the plurality of patterns And a step of picking up an image.

The following advantages are achieved by using the improved line scan apparatus and method of the present invention and the fine pattern inspection system and method having the same.

1. The problem of nonuniformities in the amount of light between the central portion and the outer portion (peripheral portion) of the conventional LED light source for line illumination is solved.

2. It is achieved that the uniformity of the light-receiving characteristics of the picked-up image, the remarkable improvement of the sharpness, and the minimization of the distortion are achieved.

3. It is possible to control the size of a predetermined line beam through replacement of the relay lens unit, so that a line beam of a desired size can be formed.

4. Especially, since the working distance is remarkably reduced, the resolution is remarkably improved, and ultrafine line patterns can be inspected.

5. It is possible to scan and inspect multiple patterns formed on the panel as well as the edge face of the panel.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

1 is a view for explaining a general line scan camera.
2A is a side cross-sectional view of one line scan camera shown in Fig.
2B is a plan view of one line scan camera shown in FIG.
3 is a diagram illustrating a relationship between a line scan camera and a light source according to the related art.
4A is a diagram illustrating a line scan apparatus according to an embodiment of the present invention.
FIG. 4B is a view illustrating an illumination lens unit and a relay lens unit used in the line scan apparatus according to an embodiment of the present invention shown in FIG. 4A.
FIG. 4C is a diagram showing distortion rates of images captured by the CCD of the line scan device according to the embodiment of the present invention.
FIG. 4D is a diagram illustrating a relative intensity (RI) of an image captured by a CCD of a line scan apparatus according to an exemplary embodiment of the present invention.
4E is a diagram illustrating a fine pattern inspection system having a line scan device according to an embodiment of the present invention.
5A is a flowchart showing a line scan method according to the first embodiment of the present invention.
5B is a flowchart illustrating a method of inspecting a fine pattern according to a second embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described with reference to embodiments and drawings of the present invention.

4A illustrates a line scan apparatus according to an embodiment of the present invention. FIG. 4B illustrates an illumination lens unit and a relay lens unit used in a line scan apparatus according to an embodiment of the present invention shown in FIG. 4A. Fig.

Referring to FIGS. 4A and 4B, a line scan apparatus 400 according to an embodiment of the present invention includes a CCD 410; A sensor unit 450a provided below the CCD 410 and having a plurality of first lenses for adjusting a focal length; An object part 450b provided below the sensor part 450a and having a plurality of second lenses; A beam splitter 452 provided between the sensor unit 450a and the objective unit 450b; And an illumination unit 454 detachably provided integrally on a side surface of the beam splitter 452. The illumination unit 454 applies a parallel line beam having a predetermined width W to the beam splitter 452 So that the beam splitter 452 forms a coaxial beam CB on the panel 10 parallel to the incident beam and the reflected beam.

The illumination unit 454 of the line scan apparatus 400 according to an embodiment of the present invention includes a light source 431; An illumination lens unit 456 having a plurality of third lenses 456a for forming the beams emitted from the light source 431 as the parallel line beams; And a beam splitter 452 provided detachably to the illumination lens unit 456 and the beam splitter 452 to control the parallel line beam to have the predetermined width W, And a relay lens unit 458 having a fourth lens 458a of the second lens 458a (see Fig. 4B).

The sensor unit 450a and the object unit 450b of the line scan device 400 according to an embodiment of the present invention are configured to perform the conversion of the line scan camera 30 of the prior art shown in FIGS. Only the concrete configuration and operation of the beam splitter 45 and the illumination unit 454 that form the coaxial beam will be described since they are substantially the same as the lens 320, the two telephoto rings 330 and 340, and the lens unit 350 .

4A and 4B, in the line scan device 400 according to the embodiment of the present invention, a beam splitter 452 is provided between the sensor portion 450a and the objective portion 450b, A detachable illumination section 454 is provided integrally with the body 402 of the line scan apparatus 400 on the side of the splitter 452.

The illumination unit 454 described above includes a light source 431. The light source 431 is preferably implemented, for example, as an LED that emits an ultraviolet beam. In front of the light source 431, an illumination lens unit 456 having a plurality of third lenses 456a is provided. The plurality of third lenses 456a is composed of, for example, two general lenses 456a1 and two cylinder lenses 456a2, but is not limited thereto. A relay lens 457 is provided detachably between the illumination lens unit 456 and the beam splitter 452 and is removably attached to the illumination lens unit 456 and the beam splitter 452, A portion 458 is provided. The plurality of fourth lenses 458a of the relay lens unit 458 may include, for example, three cylinder lenses 458a1, but are not limited thereto.

The beam emitted from the light source 431 is formed by a plurality of third lenses 456a in the illumination lens unit 456 to form a parallel first line beam LB1 having a first width W1. Thereafter, the parallel first line beam LB1 is incident into the relay lens portion 458, and is paralleled by the plurality of fourth lenses 458a of the relay lens portion 458 with the second width W And a second line beam LB2 is formed. Here, the second width W corresponds to a predetermined width W of the relay lens portion 458. [ The parallel second line beam LB2 is then incident on the beam splitter 452 and is then reflected 90 degrees to form a parallel coaxial beam CB with a third width W3. The coaxial beam CB is incident on the panel 10 through the plurality of second lenses and then reflected. The reflected beam reflected from the panel 10 is again incident on the CCD 410 via the objective portion 450b, the beam splitter 452 and the sensor portion 450a and is then reflected by the CCD 410 onto the surface of the panel 10 An image of one or both of a plurality of patterns (not shown) formed on the edge portion and the panel 10 is picked up.

As described above, in the line scan device 400 according to the embodiment of the present invention, the relay lens unit 458 itself is replaced or the plurality of fourth lenses 458a in the relay lens unit 458 are replaced Or by changing the arrangement, it is possible to control the change of the second width W and the predetermined width W accordingly. As a result, it is possible to control the change of the size of the third width W3 of the coaxial beam CB incident on the panel 10, so that a line beam of a desired size (i.e., the coaxial beam CB) can be formed .

In the line scan device 400 according to the embodiment of the present invention, the illumination unit 454 integrally provided on the body 402 of the line scan device 400 on the side of the beam splitter 452, 10 and the reflected beam reflected by the panel 10 are used, the coaxial beam CB is used. Therefore, the CCD 410 can be provided with an edge portion and a plurality of patterns (not shown) The light receiving characteristic of the coaxial beam CB forming the image of both can maintain the uniformity. Accordingly, not only the sharpness of the image captured by the CCD 410 is remarkably improved as compared with the prior art, but also the minimization of the distortion of the image over the entire length of the parallel line beam is achieved.

4C is a view showing a distortion rate of an image picked up by a CCD of a line scan device according to an embodiment of the present invention. And a relative intensity (RI) of the captured image.

Referring to FIG. 4C, the distortion rate of the image captured by the CCD 410 of the line scan apparatus 400 according to an exemplary embodiment of the present invention varies in the + Y axis direction (that is, the longitudinal direction of the line beam) This distortion rate indicates that the light receiving characteristic of the image captured by the CCD 410 is substantially uniform, and the beam splitter 452 and the line scan device 400 have a relatively low distortion, Which is formed by the illumination portion 454 provided integrally with the body 402 of the coaxial beam CB.

4D, the relative light amount RI of the image captured by the CCD 410 of the line scan device 400 according to an exemplary embodiment of the present invention is shifted in the + Y-axis direction ), Which are the same as those shown in Fig. This relative amount of light RI indicates that the image picked up by the CCD 410 has a substantially uniform light amount distribution over the entire field of view and can be applied to the beam splitter 452 and the body 402 of the line scan apparatus 400, And the use of the coaxial beam CB formed by the integrally provided illumination portion 454.

In the line scan device 400 according to an embodiment of the present invention, the line scan device 400 (see FIG. 4) is connected to the beam splitter 452 and the body 402 of the line scan device 400, Unlike the conventional side light source 31 shown in FIG. 3, the lower end of the body 402 of the line scan device 400 and the lower end of the panel 10 ) Is 20 mm, which is significantly smaller than the minimum working distance of 140 mm in the prior art. The working distance WD between the lower end of the body 402 of the line scanning device 400 and the panel 10 is lower than the working distance WD between the edge of the panel 10 picked up by the CCD 410 And the resolution of an image of one or both of a plurality of patterns (not shown) formed on the panel 10 is remarkably improved. In the embodiment of the present invention, when the total magnification of the sensor portion 450a and the object portion 450b is set to 3.0 times, a resolution of 1.666 占 퐉 is obtained. For example, a plurality of patterns (not shown) ), It becomes possible to scan and inspect ultrafine patterns.

4E is a diagram illustrating a fine pattern inspection system having a line scan device according to an embodiment of the present invention.

Referring to FIG. 4E, a fine pattern inspection system 401 according to an embodiment of the present invention includes a panel 10 on which a plurality of patterns (not shown) are formed, which are stacked on a stage 22 of a table 20; And an illumination unit 454 integrally provided on an upper portion of the panel 10 and detachably attached to the body 402. The illumination unit 454 may be integrally formed on the edge surface of the panel 10 and the plurality of patterns (not shown) One or more line scan devices (400a, 400b) for imaging an image along a line; The line scanning device 400a or 400b is connected to the at least one line scan device 400a or 400b and the illumination unit 454 in a wired or wireless manner to acquire images of the at least one line scan device 400a or 400b, A controller 70 for controlling the controller 70; And a driving device (not shown) for relatively moving the stage 22 and the one or more line scanning devices 400a and 400b. Although in the embodiment of Figure 4e one or more line scan devices 400a and 400b are illustrated as being two by one, those skilled in the art will appreciate that one or more line scan devices 400a and 400b may be one or more than three It will be understandable enough.

The one or more line scan devices 400a and 400b used in the fine pattern inspection system 401 according to an embodiment of the present invention may be implemented by the techniques shown in FIGS. 4A and 4B, Line scan device 400 according to the present invention.

Hereinafter, a detailed configuration and operation of the fine pattern inspection system 401 according to an embodiment of the present invention will be described.

Referring to FIG. 4E again with reference to FIGS. 4A and 4B, in a fine pattern inspection system 401 according to an embodiment of the present invention, on a panel 10 mounted on a stage 22 of a table 20 One or more line scan devices 400a, 400b are provided. The one or more line scan devices 400a and 400b integrally include an illumination unit 454 that can be detachably attached to the body 402.

In addition, the one or more line scanning devices 400a and 400b image an image along either or both of the edge surface of the panel 10 and a plurality of patterns (not shown) formed on the panel 10. [ More specifically, the image pick-up of either or both of the edge surface of the panel 10 and a plurality of patterns (not shown) formed on the panel 10 is performed by 1) 2) when only the image of the edge surface of the panel 10 is picked up, or 3) when a plurality of patterns (not shown) formed on the panel 10 (Not shown) is picked up. Here, it should be noted that the edge surface of the panel 10 also belongs to the category of the fine pattern.

Further, the stage 22 and the one or more line scanning devices 400a and 400b can be moved relative to each other by a driving device (not shown). More specifically, this relative movement is achieved by: 1) moving the stage 22 in a state in which one or more line scan devices 400a and 400b are stationary with a drive device (not shown) attached to the stage 22; When one or more line scan devices 400a and 400b move in a state where a driving device (not shown) is attached to one or more line scan devices 400a and 400b and the stage 22 is stopped, or 3) (Not shown) are attached to the stage 22 and one or more line scan devices 400a and 400b, respectively, so that the stage 22 and one or more line scan devices 400a and 400b move in opposite directions do.

As described above, the stage 22 and the one or more line scan devices 400a and 400b relatively move with respect to each other so that one or more line scan devices 400a and 400b are disposed on the edge surface of the panel 10 and on the panel 10 The controller 70 controls the image acquisition and illumination of one or more line scan devices 400a and 400b and the illumination unit 454 (specifically, The brightness of the light source 431 provided in the illumination unit 454). At this time, the images obtained from the one or more line scan devices 400a and 400b are transmitted to the controller 70, and the controller 70 determines the state of the edge face and / or a plurality of patterns (not shown) Can be precisely inspected.

In addition, the one or more line scan devices 400a and 400b may be implemented as a line scan device 400 according to an embodiment of the present invention as illustrated and described with reference to FIGS. 4A and 4B, Will be omitted because they have been described in detail above.

In the fine pattern inspection system 401 according to the embodiment of the present invention, the beam splitter 452 used for one or more line scan devices 400a and 400b and the beam splitter 452 used for the one or more line scan devices 400a and 400b (Not shown) formed on the panel 10 due to the use of a parallel line beam formed by the illumination unit 454 integrally provided with the coaxial beam CB, Ultra fine patterns can be scanned and inspected.

5A is a flowchart showing a line scan method according to the first embodiment of the present invention.

Referring to FIG. 5A, with reference to FIGS. 4A and 4B, a line scan method 500 according to a first exemplary embodiment of the present invention includes a) a method of detachably attaching to a body 402 of a line scan device 400 The beam emitted from the light source 431 provided in the illumination unit 454 is irradiated to the parallel first line W1 having the first width W1 using the illumination lens unit 456 having the plurality of third lenses 456a. Forming 510 a beam LB1; b) a second width (W) corresponding to a predetermined width W by using a relay lens unit 458 detachably provided in front of the illumination lens unit 456 and having a plurality of fourth lenses 458a Forming a second parallel line beam (LB2) having a predetermined width (W); c) a parallel coaxial beam CB having a third width W3 formed by reflecting the second line beam LB2 at 90 degrees using a beam splitter 452 provided in the line scan device 400, (530); d) entering (540) the coaxial beam (CB) onto the panel (10) through an objective (450b) provided in the line scan device (400); And e) a reflected beam reflected from the panel 10 is incident on the CCD 410 through the objective portion 450b, the beam splitter 452, and the sensor portion 450a provided on the beam splitter 452, And imaging (550) an image of one or both of the edge of the panel (10) and a plurality of patterns (not shown) formed on the panel (10).

In the line scan method 500 according to the first embodiment of the present invention, the relay lens unit 458 itself is replaced, or the plurality of fourth lenses 458a in the relay lens unit 458 It is possible to change the size of the coaxial beam CB by replacing or changing the arrangement.

5B is a flowchart illustrating a method of inspecting a fine pattern according to a second embodiment of the present invention.

Referring to FIG. 5B with reference to FIGS. 4A, 4B, and 4E, a method for inspecting fine patterns 501 according to a second embodiment of the present invention includes the steps of: a) (511) providing one or more line scan devices (400a, 400b) on the substrate (10); b) moving the stage 22 and the one or more line scan devices 400a and 400b relative to each other while relatively moving the edge surface of the panel 10 and a plurality of patterns (not shown) formed on the panel 10 Imaging (521) an image along either or both; c) transmitting (531) the image captured in step b) to the one or more line scan devices (400a, 400b) connected to the controller (70) in a wired or wireless manner; And d) inspecting (541) the state of either or both of the edge plane and the plurality of patterns (not shown) from the image, wherein step b) comprises: b1) The illumination lens unit 456 includes a plurality of third lenses 456a, and the beam emitted from the light source 431 provided in the illumination unit 454, which is detachably provided integrally with the respective bodies 402 of the first, To form a parallel first line beam (LB1) having a first width (W1); and b2) a relay lens unit 458 detachably provided in front of the illumination lens unit 456 and having a plurality of fourth lenses 458a, Forming a second parallel line beam (LB2) having a predetermined width (W); b3) a parallel coaxial beam CB having a third width W3 formed by reflecting the second line beam LB2 at 90 degrees using a beam splitter 452 provided in the line scan device 400, ; b4) entering the coaxial beam CB onto the panel 10 through the objective portion 450b provided in the line scan device 400; And b5) a reflected beam reflected from the panel 10 is incident on the CCD 410 through the objective portion 450b, the beam splitter 452, and the sensor portion 450a provided on the beam splitter 452, And imaging the image of either or both of the edge surface and the plurality of patterns (not shown).

In the fine pattern inspection method 501 according to the second embodiment of the present invention, the relay lens unit 458 itself is replaced or the plurality of fourth lenses 458a in the relay lens unit 458 are replaced, The size of the coaxial beam CB can be changed by replacing or changing the arrangement.

In the fine pattern inspection method 501 according to the second embodiment of the present invention, the imaging of the image of either or both of the edge surface and the plurality of patterns (not shown) is performed by: i) (Ii) when only the image of the edge plane is picked up, and (iii) when only the image of the plurality of patterns (not shown) is picked up have.

In the fine pattern inspection method 501 according to the second embodiment of the present invention, the relative movement of the stage 22 and the one or more line scan devices 400a and 400b may be performed by i) When the stage 22 moves while the apparatuses 400a and 400b are stationary, ii) when the one or more line scan apparatuses 400a and 400b moves while the stage 22 is stationary, and iii) the stage 22 and the one or more line scan devices 400a and 400b move in opposite directions.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

10: panel 20: table 22: stage 30,40,50,60: line scan camera
31, 41, 51, 61: Illumination 31a: Incident light 31b: Reflected light 70:
100: Line scan image 310, 410: CCD 320: Conversion part 330, 340: Telephoto ring
350: lens unit 400: line scanning device 402: body 431: light source
450a: Sensor part 450b: Object part 452: Beam splitter 454:
456: illumination lens part 456a: third lens 456a1: general lens 456a2, 458a1: cylinder lens
458; Relay lens section 458a: fourth lens

Claims (15)

In the line scanning apparatus,
CCD;
A sensor unit provided under the CCD and having a plurality of first lenses for adjusting a focal distance;
An object unit provided at a lower portion of the sensor unit and having a plurality of second lenses;
A beam splitter provided between the sensor unit and the objective unit; And
A beam splitter provided on the side of the beam splitter,
, ≪ / RTI &
The illumination unit
Light source;
An illumination lens unit having a plurality of third lenses for forming the beam emitted from the light source into the parallel line beam; And
And a plurality of fourth lenses provided detachably to the illumination lens unit and the beam splitter, respectively, for controlling the parallel line beams to have predetermined widths and providing the beams to the beam splitter,
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The illumination unit provides a parallel line beam of a predetermined width to the beam splitter so that the beam splitter forms a coaxial beam on which the incident beam and the reflected beam are parallel
Line scan device. delete The method according to claim 1,
Wherein the light source is implemented as an LED that emits an ultraviolet beam. The method according to claim 1,
The width of the coaxial beam can be changed by replacing the relay lens unit itself or by replacing or arranging the plurality of fourth lenses in the relay lens unit. A fine pattern inspection system comprising:
A panel mounted on a stage of the table and having a plurality of patterns formed thereon;
At least one line scan device integrally provided with an illuminating part provided on an upper portion of the panel and detachably attachable to the body, for picking up an image along one or both of an edge surface of the panel and the plurality of patterns;
A controller connected to the at least one line scan device and the illumination unit in a wired or wireless manner, the controller acquiring images of the at least one line scan device and controlling brightness of the illumination unit; And
And a driving device for relatively moving the stage and the one or more line scanning devices
Lt; / RTI >
The at least one line scan device
CCD;
A sensor unit provided under the CCD and having a plurality of first lenses for adjusting a focal distance;
An object unit provided at a lower portion of the sensor unit and having a plurality of second lenses;
A beam splitter provided between the sensor unit and the objective unit; And
A beam splitter provided on the side of the beam splitter,
/ RTI >
The illumination unit
Light source;
An illumination lens unit having a plurality of third lenses for forming the beam emitted from the light source into the parallel line beam; And
And a plurality of fourth lenses provided detachably to the illumination lens unit and the beam splitter, respectively, for controlling the parallel line beams to have predetermined widths and providing the beams to the beam splitter,
≪ / RTI >
The illumination unit provides a parallel line beam of a predetermined width to the beam splitter so that the beam splitter forms a coaxial beam on which the incident beam and the reflected beam are parallel
Fine pattern inspection system. delete delete 6. The method of claim 5,
Wherein the light source is an LED that emits an ultraviolet beam. 6. The method of claim 5,
Wherein the size of the coaxial beam can be changed by replacing the relay lens unit itself or replacing or arranging the plurality of fourth lenses in the relay lens unit. In the line scan method,
a) a parallel first line beam having a first width and a second line beam having a first width, using a lighting lens unit having a plurality of third lenses, the beam emitted from a light source provided in a lighting unit detachably provided integrally with the body of the line scanning apparatus, ;
b) forming a parallel second line beam having a second width corresponding to a predetermined width using a relay lens unit detachably provided in front of the illumination lens unit and having a plurality of fourth lenses;
c) forming a parallel coaxial beam having a third width formed by reflecting the second line beam at 90 degrees using a beam splitter provided in the line scan device;
d) entering said coaxial beam onto a panel through an object provided in said line scan device; And
and e) a reflected beam reflected from the panel (10) is incident on the CCD via the objective portion, the beam splitter, and the sensor portion provided on the beam splitter to form an edge portion of the panel and a plurality of patterns Imaging the image of either one or both
/ RTI > 11. The method of claim 10,
Wherein the size of the coaxial beam can be changed by replacing the relay lens unit itself or by replacing or arranging the plurality of fourth lenses in the relay lens unit. In the fine pattern inspection method,
a) providing at least one line scan device on a panel mounted on a stage of a table;
b) imaging an image along one or both of an edge surface of the panel and a plurality of patterns formed on the panel while relatively moving the stage and the one or more line scan devices relative to each other;
c) transmitting the image captured in step b) to a controller connected to the one or more line scan devices in a wired or wireless manner; And
d) inspecting the state of either or both of the edge surface and the plurality of patterns from the image
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The step b)
b1) a beam emitted from a light source provided in an illuminating unit detachably provided integrally with each body of the at least one line scan apparatus is illuminated in parallel with a first width by using an illumination lens unit having a plurality of third lenses, Forming a first line beam;
b2) forming a parallel second line beam having a second width corresponding to a predetermined width using a relay lens unit detachably provided in front of the illumination lens unit and having a plurality of fourth lenses;
b3) forming a parallel coaxial beam having a third width formed by reflecting the second line beam at 90 degrees using a beam splitter provided in the line scan device;
b4) entering said coaxial beam onto said panel through an object provided in each of said one or more line scan devices; And
b5) The reflected beam reflected from the panel is incident on the CCD via the objective portion, the beam splitter, and the sensor portion provided on the beam splitter, and the image of either or both of the edge surface and the plurality of patterns is picked up Step
Wherein the fine pattern inspection method comprises the steps of: 13. The method of claim 12,
Wherein the size of the coaxial beam can be changed by replacing the relay lens unit itself or by replacing or arranging the plurality of fourth lenses in the relay lens unit. 13. The method of claim 12,
Wherein imaging of the image of either or both of the edge surface and the plurality of patterns is performed when i) the image of the edge surface and the image of the plurality of patterns are simultaneously captured, ii) when only the image of the edge surface is picked up, And iii) only images of the plurality of patterns are picked up. 13. The method of claim 12,
Wherein the relative movement of the stage and the one or more line scan devices includes i) the stage moves while the one or more line scan devices are stationary, ii) the one or more line scan devices move And iii) the stage and the at least one line scan apparatus are moved in opposite directions to each other.

Images