JP2015102364A - Visual inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a visual inspection device, of a simple structure though, capable of inspecting the appearance of an object to be inspected by using both a bright-field optical system and a dark-field optical system, and capable of downsizing a device size and reducing a device cost.SOLUTION: A light irradiation unit (11) of a visual inspection device (1) is configured so that light including a bright-field light component and a dark-field light component is emitted from a light emission unit (11a). A light-shading body control unit (17) moves a light-shading body (13) over a bright-field light component shading position and a dark-field light component shading position. When the light-shading body (13) is moved to the dark-field light component shading position by the light-shading body control unit (17) and the dark-field light component is shaded, a line sensor camera (12) acquires a bright-field image based on the bright-field light component. When the light-shading body (13) is moved to the bright-field light component shading position by the light-shading body control unit (17) and the bright-field light component is shaded, the line sensor camera (12) acquires a dark-field image based on the dark-field light component.

Description

  The present invention relates to an appearance inspection apparatus for inspecting an appearance by detecting defects present in a plate-like body such as a glass plate or a liquid crystal panel.

  Electronic devices used in precision instruments, optical devices such as lenses and image sensors, and transparent plates such as liquid crystal panels can have a significant impact on the performance of defects such as “scratches” and “dirt”. Often give. It is generally difficult to prevent such defects from occurring completely in the manufacturing process due to various factors during manufacturing. Therefore, the appearance and performance of the product, such as the presence or absence of defects, are carefully inspected before product shipment, and only products that satisfy certain standards are shipped as products.

  As the above-described appearance inspection method, there is a visual inspection in which an operator visually determines whether there is a defect. However, visual inspection is greatly influenced by the degree of skill of inspection and individual differences in judgment criteria, and is not necessarily a stable inspection.

  In recent years, in view of the problems of such visual inspection, an appearance inspection apparatus that reduces the amount of visual inspection and performs an appearance inspection accurately and efficiently has been proposed. Conventional visual inspection apparatuses are roughly classified into a bright field optical system and a dark field optical system. In the visual field inspection system for bright field optical systems, the object to be inspected is irradiated with light from a light source such as laser light or LED illumination, and the object to be inspected, such as regular reflection light or transmitted light of the light irradiated to the object to be inspected. Inspection is performed by detecting light that is not scattered. Further, in the visual field inspection apparatus of the dark field optical system, light is irradiated to the object to be inspected from a light source such as laser light or LED illumination, and the object to be inspected other than the regular reflection light or transmitted light of the light irradiated to the object to be inspected Inspection is performed by detecting light scattered by the inspection object.

  A first prior art appearance inspection apparatus described in Patent Document 1 will be described with reference to FIG. FIG. 8 is a diagram schematically showing the configuration of the first conventional visual inspection apparatus. The visual inspection apparatus according to the first prior art is configured so that a light projecting unit 93 from the lower side at a position P of the transparent sheet W at a position P with respect to a sheet-like transparent sheet W conveyed in a predetermined conveyance direction A. Illuminate the entire width direction diagonally in a slit shape. The first light receiving unit 91 disposed on the optical axis of the light projecting unit 93 on the upper side with respect to the transparent sheet body W detects the luminance distribution in the width direction of the transmitted light that has passed through the position P of the transparent sheet body W. The second light receiving unit 92 disposed in the direction perpendicular to the conveyance direction A on the upper side with respect to the transparent sheet body W has a transparent sheet when the surface adhering foreign matter T exists at the position P of the transparent sheet body W. A luminance distribution in the width direction of transmitted light that has passed through the body W and has been diffused or scattered by the surface-attached foreign matter T is detected.

  As described above, in the appearance inspection apparatus according to the first conventional technique, the light received from the illumination device passes through the object to be inspected and is directly received by the light receiver, and the light from the illumination device. Is scattered by the object to be inspected, and is composed of a second light receiving portion that receives the scattered light. In the appearance inspection apparatus according to the first prior art, a bright field optical system is constructed by the illumination device and the first light receiving unit, and a dark field optical system is constructed by the illumination device and the second light receiving unit.

  On the other hand, the second prior art visual inspection apparatus described in Patent Document 2 is provided with a CCD area sensor provided directly above the optical lens, and a CCD area sensor. On the other hand, it is composed of a plurality of illumination devices that respectively construct a bright field optical system and a dark field optical system. The visual inspection apparatus of the second prior art includes a bright field illumination for transmitting a lens and a bright field illumination for reflecting a lens as an illumination device for constructing a bright field optical system, and constructs a dark field optical system. As described above, a dark field illumination for transmitting a lens and a dark field illumination for reflecting a lens are provided, and an appearance inspection is performed by switching these four illuminations.

JP 2010-223598 A JP 2008-249568 A

  In the first and second conventional visual inspection apparatuses described above, the bright field image acquired by the bright field optical system is subjected to image analysis, and the dark field image acquired by the dark field optical system is subjected to image analysis. Thus, it is possible to detect a plurality of types of defects of different types.

  However, the first and second prior art visual inspection apparatuses have the following problems. That is, when the appearance inspection of the object to be inspected is performed using both the bright field optical system and the dark field optical system, the first prior art appearance inspection apparatus receives a plurality of light receptions for one illumination device. Part (a plurality of image pickup parts for acquiring bright field images and dark field images respectively) is required, and in the second prior art appearance inspection apparatus, a plurality of illuminations are applied to one CCD area sensor (light receiving part). A device is required. Therefore, the first and second prior art visual inspection apparatuses have a problem that the number of component parts of the apparatus is large, the apparatus configuration is complicated, the apparatus size is increased, and the apparatus cost is increased.

  It is an object of the present invention to perform an appearance inspection of an object to be inspected with a simple configuration and using both an optical system of a bright field optical system and a dark field optical system. An object of the present invention is to provide an appearance inspection apparatus that can achieve cost reduction.

The present invention provides a placement unit for placing an object to be inspected,
The light emitting unit is disposed opposite to the object to be inspected placed on the placing unit and emits light including a bright field light component and a dark field light component, and is emitted from the light emitting unit. A light irradiating unit that irradiates the object to be inspected placed on the mounting unit;
A movable part is provided at a position between the placement unit and the light irradiation unit, and a part of the light emitted from the light emission unit is shielded by moving to be irradiated on the object to be inspected. A light amount adjusting member for adjusting the amount of light;
A light quantity adjusting member movement control unit for controlling the movement operation of the light quantity adjusting member, wherein the bright field light component shielding position capable of shielding the bright field light component of the light emitted from the light emitting part; and the light emission A light amount adjustment member movement control unit that moves the light amount adjustment member over a dark field light component light shielding position capable of shielding the dark field light component of the light emitted from the unit;
A visual inspection apparatus comprising: a light receiving unit configured to receive reflected light or transmitted light from an inspection object irradiated with light by the light irradiation unit.

  Further, in the appearance inspection apparatus according to the present invention, the light amount adjusting member includes a light shielding region in which a base material constituting the light amount adjusting member blocks light emitted from the light emitting unit of the light irradiation unit, and the light amount adjusting member. An opening or a notch provided in a part of the base material constituting the light-transmitting part, and a transmission region that transmits the light emitted from the light emitting part.

  In the appearance inspection apparatus of the present invention, the light amount adjusting member is a flat plate-shaped member that is larger than the light emitting portion of the light emitting portion.

Moreover, in the appearance inspection apparatus of the present invention, the light irradiation unit is a linear light source extending linearly along the first direction,
The light receiving unit is a line sensor camera in which a plurality of light receiving elements are arranged in parallel with the first direction,
The light quantity adjustment member movement control unit moves the light quantity adjustment member along a second direction perpendicular to the first direction.

The appearance inspection apparatus of the present invention further includes a placement unit movement control unit that reciprocates the placement unit along one direction,
The light amount adjustment member movement control unit moves the light amount adjustment member in conjunction with the reciprocation of the placement unit by the placement unit movement control unit.

  According to the present invention, the appearance inspection apparatus includes a placement unit on which an object to be inspected is placed, a light irradiation unit, a light amount adjustment member, a light amount adjustment member movement control unit, and a light receiving unit. The light irradiating unit is disposed to face the object to be inspected mounted on the mounting unit, and has a light emitting unit that emits light including a bright field light component and a dark field light component. The object to be inspected placed on the placement portion is irradiated with the light emitted from the placement portion. The light amount adjusting member is movably provided at a position between the placement unit and the light irradiation unit, and blocks a part of the light emitted from the light emission unit by moving to irradiate the object to be inspected. Adjust the amount of light emitted. The light amount adjustment member movement control unit is a part that controls the movement operation of the light amount adjustment member. The bright field light component light shielding position that can block the bright field light component of the light emitted from the light emission unit, and the light emission unit The light amount adjusting member is moved over the dark field light component light shielding position where the dark field light component of the emitted light can be shielded.

  The light receiving unit receives reflected light or transmitted light from the inspection object irradiated with light by the light irradiation unit. When the light quantity adjusting member is moved to the dark field light component light shielding position by the light quantity adjusting member movement control unit and the dark field light component is shielded, the light receiving unit is configured to brighten the light emitted from the light emitting unit of the light emitting unit. A bright field image based on the field light component is acquired, and when the light intensity adjusting member is moved to the bright field light component shielding position by the light intensity adjusting member movement control unit and the bright field light component is shielded, the light emitting unit emits light. A dark field image based on the dark field light component of the light emitted from the unit is acquired.

  The appearance inspection apparatus of the present invention configured as described above includes a light irradiation unit configured to emit light including a bright field light component and a dark field light component, and a component shielded by a light amount adjusting member. Using a single light receiving unit configured to be able to acquire a bright-field image and a dark-field image based on light components other than the above, using both the bright-field optical system and the dark-field optical system The appearance inspection of the object to be inspected can be performed, and the apparatus size can be reduced and the apparatus cost can be reduced.

  According to the invention, the light amount adjusting member constitutes the light amount adjusting member, and a light shielding region in which a base material constituting the light amount adjusting member blocks light emitted from the light emitting portion of the light irradiating portion. An opening or a notch provided in a part of the base material, and having a transmission region that transmits light emitted from the light emitting unit. With such a light amount adjusting member, for example, when the dark field light component is shielded in the light shielding region, the bright field light component can be transmitted through the transmission region including the opening or the notch, and the bright field light component is transmitted in the light shielding region. When the light component is shielded, the dark field light component can be transmitted through the transmission region including the opening or the notch.

  Moreover, according to this invention, the light quantity adjustment member which has a light-shielding area | region and a permeation | transmission area | region is a flat member larger than the light-projection part of a light irradiation part. Thereby, in the light emitted from the light emitting part, all the light other than the light transmitted from the transmission region can be shielded by the light shielding region.

  According to the invention, the light irradiation unit is a linear light source extending linearly along the first direction, and the light receiving unit is a line in which a plurality of light receiving elements are arranged in parallel with the first direction. It is a sensor camera. The light amount adjustment member movement control unit is configured to move the light amount adjustment member along a second direction perpendicular to the first direction. In such a configuration, the linear light source and the line sensor camera are switched between the case where the light receiving unit acquires a bright field image based on the bright field light component and the case where the dark field image based on the dark field light component is acquired. This is implemented by moving the light amount adjusting member in a second direction perpendicular to the first direction, which is the extending direction of the light. Since the second direction in which the light amount adjusting member moves is a direction perpendicular to the extending direction of the linear light source and the line sensor camera, the light amount adjusting member moves over a relatively short distance, so that the light receiving unit moves the bright field. Switching between the case of acquiring an image and the case of acquiring a dark field image can be performed.

  According to the invention, the appearance inspection apparatus further includes a placement unit movement control unit that reciprocates the placement unit along one direction. The light amount adjustment member movement control unit moves the light amount adjustment member in conjunction with the reciprocating motion of the placement unit by the placement unit movement control unit. For example, when the placement unit movement control unit moves the placement unit forward, the light amount adjustment member movement control unit moves the light amount adjustment member to the dark field light component light-shielding position, thereby responding to the movement of the placement unit. Thus, a bright field image based on a bright field light component can be acquired by the light receiving unit, and an appearance inspection using a bright field optical system can be performed. In addition, when the placement unit movement control unit moves the placement unit back, the light amount adjustment member movement control unit moves the light amount adjustment member to the bright-field light component light-shielding position to respond to the backward movement of the placement unit. Thus, a dark field image based on a dark field light component can be acquired by the light receiving unit, and an appearance inspection using a dark field optical system can be performed.

It is a figure showing roughly the composition of appearance inspection device 1 concerning a 1st embodiment of the present invention. It is a figure for demonstrating operation | movement of the light-shielding body 13 in the external appearance inspection apparatus 1. FIG. It is a figure for demonstrating operation | movement of the light-shielding body 13 in the external appearance inspection apparatus 1. FIG. It is a figure which shows roughly the structure of the external appearance inspection apparatus 1A which concerns on 2nd Embodiment of this invention. It is a figure which shows the structure of the light-shielding body 13B used in the external appearance inspection apparatus which concerns on 3rd Embodiment of this invention. It is a figure which shows roughly the structure of the external appearance inspection apparatus 1B which concerns on 3rd Embodiment of this invention. It is a figure which shows roughly the structure of the visual inspection apparatus 1C which concerns on 4th Embodiment of this invention. It is a figure which shows roughly the structure of the external appearance inspection apparatus of a 1st prior art.

  Embodiments of a defect inspection apparatus according to the present invention will be described below with reference to the drawings. In addition, each thickness, length, etc. of the structural member in each figure are not limited to the structure to illustrate from a viewpoint on drawing preparation.

(First embodiment)
FIG. 1 is a diagram schematically showing a configuration of an appearance inspection apparatus 1 according to the first embodiment of the present invention. 2 and 3 are diagrams for explaining the operation of the light shield 13 in the appearance inspection apparatus 1. FIG. The appearance inspection apparatus 1 according to the present embodiment is an apparatus for detecting the defects present in the inspection object 10 and inspecting the appearance. Examples of the object to be inspected 10 include a flat plate-like body such as a glass plate or a liquid crystal panel, or a curved body having a gentle curvature.

  The appearance inspection apparatus 1 includes a light irradiation unit 11 having a light emitting unit 11a that emits light including a bright field light component and a dark field light component, a line sensor camera 12 that is a light receiving unit, and a light shielding body that is a light amount adjusting member. 13, a placement unit 14, an illumination control unit 15, an image processing unit 16 that functions as an image analysis unit, a light-blocking body control unit 17 that functions as a light amount adjustment member movement control unit, and a placement unit movement control unit And a functioning transport system controller 18. Although the details will be described later, the appearance inspection apparatus 1 performs appearance inspection by detecting defects present in the inspection object 10 based on the bright field image and the dark field image acquired by the line sensor camera 12.

  Here, “bright field” means that the light irradiated by the light irradiation unit 11 is directly reflected (reflected without scattering) or transmitted through the inspected object 10 and directly enters the line sensor camera 12. Defined as lighting conditions. In addition, the “dark field” means that the light irradiated by the light irradiation unit 11 is directly reflected (reflected without scattering) or transmitted through the inspected object 10 and directly enters the line sensor camera 12. It is defined as a lighting condition that never happens. The “dark field” is used for the purpose of detecting scattered light or the like that is weaker than direct light without detecting too strong direct light (suppressing halation).

  The bright field image acquired by the line sensor camera 12 is an image based on the bright field light component of the light emitted from the light emitting unit 11a of the light irradiation unit 11 according to the bright field illumination condition. The dark field image acquired at 12 is an image based on the dark field light component of the light emitted from the light emitting unit 11a of the light irradiation unit 11 according to the dark field illumination conditions.

  The placement unit 14 places the object 10 to be inspected. The placement unit 14 is reciprocated in a state where the object 10 is placed by the transport system control unit 18 controlled by the control unit 19 realized by the host computer, and the arrows A1 and A2 are moved. Moved in the direction of. In this embodiment, the moving directions A1 and A2 in which the placement unit 14 is moved by the reciprocating motion by the transport system control unit 18 coincide with the horizontal direction, and the object 10 placed on the placement unit 14 is horizontal. The state is held and moves in the moving directions A1 and A2 to reciprocate.

  The light irradiation unit 11 is disposed to face one main surface of the inspection object 10 placed on the placement unit 14 and emits light including a bright field light component and a dark field light component. The object 10 to be inspected placed on the placing portion 14 is irradiated with the light emitted from the light emitting portion 11a. In the light irradiation unit 11, the light irradiation operation of irradiating the object 10 with light is controlled by the illumination control unit 15 controlled by the control unit 19.

  The light irradiation unit 11 is a line in a direction perpendicular to the movement directions A1 and A2 (first direction; a direction parallel to the width direction of the object 10) on the horizontal plane including the movement directions A1 and A2 of the placement unit 14. It is preferable that the light source extends linearly. As such a light irradiation unit 11, a linear light source in which LEDs are arranged in an array, a linear light source in which a halogen lamp and a linear optical fiber light guide are combined, a halogen lamp and a long rod are combined. The linear light source etc. which were made are mentioned. In this embodiment, the light irradiation unit 11 employs a linear light source in which white LEDs are arranged in an array, and has a length of 400 mm × 25 mm (the length corresponding to the direction perpendicular to the moving directions A1 and A2 is 400 mm, and moves). The linear light source provided with the light emission part 11a which has the light emission surface of the length corresponding to direction A1, A2 is 25 mm was employ | adopted. The light irradiation unit 11 includes a diffusing plate, a prism sheet, and the like for adjusting the diffusibility of the illumination light emitted from the light emitting surface of the light emitting unit 11a and the light component with respect to the device under test 10. It is good. In addition, the light emission part 11a is an opening part from which light is emitted in the light irradiation part 11, and when a transparent glass plate or a light diffusion plate is disposed in this opening part, this part is the light emission part. 11a.

  The line sensor camera 12 is disposed on the same side as the light irradiation unit 11 with respect to the inspection object 10 placed on the placement unit 14, and on a horizontal plane including the movement directions A1 and A2 of the placement unit 14. A light receiving section in which a plurality of light receiving elements are arranged in a direction perpendicular to the moving directions A1 and A2 (first direction; a direction parallel to the width direction of the inspection object 10). The line sensor camera 12 receives the reflected light from the inspection object 10 irradiated with the light including the bright field light component and the dark field light component by the light irradiation unit 11, and the light intensity (illuminance: Lux) and a bright-field image and a dark-field image are acquired based on the received reflected light.

  The line sensor camera 12 is focused so that the focal position P exists on the inspection object 10 moved in the movement directions A1 and A2 of the mounting portion 14, and the imaging position is fixed. That is, the line sensor camera 12 captures one line including the focal position P on the inspection object 10, and the inspection object 10 is moved by moving the inspection object 10 in the movement directions A1 and A2. The whole image of is taken. Conversely, light from other than one line including the focal position P on the object to be inspected 10 is not detected.

  As such a line sensor camera 12, a line CCD (Charge Coupled Device) camera is typical, but other than that, a MOS (Metal-Oxide Semiconductor) type camera, a camera in which photodiodes are arranged in a line, or the like. Can be used. The line sensor camera 12 is attached with a lens or the like for forming an optical image of the object 10 to be inspected on the light receiving element.

  Since the line sensor camera 12 detects one line including the focal position P on the object 10 to be inspected, the region of the visual field range R1 centered on the optical axis L of the lens shown in FIGS. The viewing field range is parallel to the moving directions A1 and A2 of the mounting portion 14. That is, among the components of light reflected or scattered by one line including the focal position P on the object 10 to be inspected, the line sensor camera 12 detects a component included in the visual field range R1. The spread angle of the visual field range R1 depends on the lens performance of the line sensor camera 12. In the present embodiment, a line sensor having a pixel size of 5 μm × 5 μm and about 12300 pixels is used as the line sensor camera 12.

  Further, in the appearance inspection apparatus 1 according to the present embodiment, the line sensor camera 12 detects one line including the focal position P on the inspected object 10, so that the light emitted from the light emitting unit 11 a of the light emitting unit 11 is used. Among these components, a component that contributes to imaging with the line sensor camera 12 is an irradiation region R2 shown in FIGS. In this embodiment, the light irradiation part 11 and the line sensor camera 12 are arrange | positioned by the optical conditions and positional relationship in which the visual field range R1 is contained in irradiation region R2.

  The image processing unit 16 controlled by the control unit 19 performs predetermined image analysis on the bright field image and the dark field image acquired by the line sensor camera 12, and detects a defect of the inspection object 10.

  The light shield 13 is parallel to the light emitting surface of the light emitting unit 11a at a position between the mounting unit 14 and the light emitting unit 11 (a first direction that is an extending direction of the light emitting unit 11 and the line sensor camera 12). In a second direction perpendicular to the light beam), and by moving, a part of the light emitted from the light emitting part 11a of the light irradiating part 11 is shielded to irradiate the inspected object 10 Adjust the amount of light emitted. Examples of the moving means for moving the light blocking body 13 include a structure in which a drive motor and a movement guide are combined. However, the moving means is not limited to this structure.

  The light shielding body 13 is a flat plate-shaped member that is larger than the light emitting surface of the light emitting section 11 a of the light irradiation section 11. As shown in FIG. 2B, in the light emitting unit 11 a, the line sensor camera 12 detects a component of light emitted from a region that is not shielded by the light shield 13. In the present embodiment, the light shield 13 is 450 mm × 30 mm (the length corresponding to the direction perpendicular to the moving directions A1 and A2 of the mounting portion 14 is 450 mm, and the length corresponding to the moving directions A1 and A2 is 30 mm. A member obtained by performing black alumite treatment on the aluminum member. Moreover, the edge part of the light-shielding body 13 may have a knife-edge shape as necessary.

  The movement of the light shield 13 between the placement unit 14 and the light irradiation unit 11 is controlled by the light shield control unit 17 controlled by the control unit 19. The light-shielding body control unit 17 includes a bright-field light component shielding position capable of shielding a bright-field light component of light emitted from the light emitting unit 11a of the light emitting unit 11, and a dark field of light emitted from the light emitting unit 11a. The light shield 13 is linearly moved over the dark field light component light shielding position where the light component can be shielded.

  Here, in the line sensor camera 12, as shown in FIG. 2A, the light shielding unit 13 is moved to the dark field light component light shielding position by the light shielding unit control unit 17, and the light emitted from the light emitting unit 11a is transmitted. When the dark field light component is blocked, a bright field image based on the bright field light component is acquired. Further, in the line sensor camera 12, as shown in FIG. 3, the light shielding unit 13 is moved to the bright field light component shielding position by the light shielding unit control unit 17, and the bright field light component of the light emitted from the light emitting unit 11a. Is shielded, a dark field image based on the dark field light component is acquired.

  Specifically, as described above, the line sensor camera 12 detects reflected light or scattered light included in the region of the visual field range R1. Of the light components emitted from the light emitting unit 11a of the light emitting unit 11, the components detected by the line sensor camera 12 are components included in the irradiation region R2. That is, in FIG. 2A and FIG. 3, among the components of the irradiation region R2 emitted from the light emitting unit 11a, the component overlapping the visual field range R1 becomes a bright field light component for the line sensor camera 12, and the irradiation is performed. Of the components in the region R2, the component that does not overlap the visual field range R1 is a dark field light component for the line sensor camera 12.

  As shown in FIG. 2A, the light shield 13 is moved to the dark field light component light shielding position by the light shield controller 17, and the line sensor camera among the components of the irradiation region R2 emitted from the light emitter 11a. When the dark field light component 12 is shielded, the line sensor camera 12 captures the inspected object 10 with a bright field optical system and acquires a bright field image. When the transport system control unit 18 moves the placement unit 14 in the movement direction A1 while maintaining the relative positions of the light irradiation unit 11, the line sensor camera 12, and the light shielding body 13, the movement of the placement unit 14 is changed. Thus, a bright-field image can be acquired by the line sensor camera 12 for the inspection object 10 moving in the movement direction A1. The image processing unit 16 performs image analysis on the bright field image acquired in this manner, thereby detecting defects existing in the inspected object 10 and determining non-defective products, defective products, re-inspected products, and the like. Thus, an appearance inspection using a bright field optical system can be performed.

  As shown in FIG. 3, the line sensor camera 12 among the components of the irradiation region R <b> 2 emitted from the light emitting unit 11 a when the light shielding unit 13 is moved to the bright field light component shielding position by the light shielding unit control unit 17. When the bright field light component is blocked, the line sensor camera 12 captures the inspected object 10 by the dark field optical system and acquires a dark field image. When the transport system control unit 18 moves the mounting unit 14 in the movement direction A2 while maintaining the relative positions of the light irradiation unit 11, the line sensor camera 12, and the light shielding body 13, the movement of the mounting unit 14 is changed. Thus, a dark field image can be acquired by the line sensor camera 12 with respect to the inspection object 10 moving in the movement direction A2. The image processing unit 16 performs image analysis on the dark field image acquired in this manner, thereby detecting defects present in the inspected object 10 and determining non-defective products, defective products, re-inspected products, and the like. Thus, an appearance inspection using a dark field optical system can be performed.

  Further, it is possible to configure an optical system in which a bright field state and a dark field state in which a part of the bright field light component can be received by the line sensor camera 12 from the state of the dark field optical system. For example, when the object to be inspected 10 is an inspection object including a glass surface or a metal terminal such as a liquid crystal panel, the bright field optical system has a high reflectance of the terminal portion, and the terminal portion is halated. A state in which analysis and inspection cannot be performed on the captured image occurs. By capturing an image with the line sensor camera 12 in a state where a part of the bright field light component is added from the state of the dark field optical system, an image in which the terminal portion is not halated can be acquired. In the case of detecting a defect having a curved surface such as a convex shape or a concave shape, a normal region is detected with an intermediate gradation, and an abnormal portion is detected with a low gradation or a high gradation.

  The light shield control unit 17 is linearly moved along the movement directions A1 and A2 in conjunction with the reciprocation of the placement unit 14 in the movement directions A1 and A2 by the transport system control unit 18. Move. Further, in conjunction with the reciprocating motion of the mounting unit 14, the control value for causing the light irradiation unit 11 to emit light may be controlled by the illumination control unit 15 so as to be changed in the forward path. As a specific example, the light irradiation luminance value that is the amount of light emitted from the light emitting unit 11a of the light irradiation unit 11 is used as a control value, and the light irradiation luminance value is determined by the forward operation and the backward operation of the mounting unit 14. May be controlled to be different.

  In such a configuration, when the bright field image is acquired by the line sensor camera 12 and when the dark field image is acquired, the linearly extending light irradiation unit 11 and the extending direction of the line sensor camera 12 are switched. This is implemented by moving the light shield 13 in the movement directions A1 and A2 that are perpendicular to each other. Since the direction in which the light shield 13 moves is a direction perpendicular to the extending direction of the light irradiation unit 11 and the line sensor camera 12, the light sensor 13 moves by a relatively short distance, so Switching between the case of acquiring a field image and the case of acquiring a dark field image can be performed.

  Further, in a mode in which the light shielding body control unit 17 moves the light shielding body 13 in conjunction with the reciprocating motion of the placement unit 14, for example, the transport system control unit 18 shows the placement unit 14 as shown in FIG. In addition, when the forward movement is performed in the movement direction A1, the light-shielding body control unit 17 moves the light-shielding body 13 to the dark field light component light-shielding position, thereby moving in the movement direction A1 according to the forward movement of the placement unit 14. A bright field image can be acquired with respect to the inspected object 10 by the line sensor camera 12, whereby an appearance inspection using a bright field optical system can be performed. Further, when the transport system control unit 18 moves the mounting unit 14 back in the movement direction A2 as shown in FIG. 3, the light shielding unit control unit 17 moves the light shielding unit 13 to the bright field light component light shielding position. Thus, a dark field image can be acquired by the line sensor camera 12 with respect to the inspected object 10 that moves in the movement direction A2 in accordance with the backward movement of the placement unit 14, and thus the dark field optical system is used. Visual inspection can be performed.

  The appearance inspection apparatus 1 of the present embodiment configured as described above is shielded by one light irradiation unit 11 configured to be able to emit light including a bright field light component and a dark field light component, and a light shielding body 13. Both the bright-field optical system and the dark-field optical system with a simple configuration with a single line sensor camera 12 configured to be able to acquire a bright-field image and a dark-field image based on a light component other than the component to be The appearance inspection of the inspected object 10 can be performed using the optical system, and the apparatus size can be reduced and the apparatus cost can be reduced.

(Second Embodiment)
FIG. 4 is a diagram schematically showing the configuration of an appearance inspection apparatus 1A according to the second embodiment of the present invention. The appearance inspection apparatus 1A of the present embodiment is similar to the above-described appearance inspection apparatus 1, and corresponding portions are denoted by the same reference numerals and description thereof is omitted.

  In the above-described appearance inspection apparatus 1, the light blocking body 13 can block the bright field light component of the light emitted from the light emitting unit 11 a of the light emitting unit 11 between the mounting unit 14 and the light emitting unit 11. The light-shielding body controller 17 is configured to move linearly across the bright-field light component shielding position and the dark-field light component shielding position capable of shielding the dark-field light component of the light emitted from the light emitting unit 11a. It had been. On the other hand, in the appearance inspection apparatus 1A, the light shielding unit 13A rotates around a predetermined rotation axis between the mounting unit 14 and the light irradiation unit 11, thereby emitting light from the light irradiation unit 11. The bright field light component shielding position capable of shielding the bright field light component of the light emitted from the portion 11a and the dark field light component shielding position capable of shielding the dark field light component of the light emitted from the light emitting portion 11a. Configured to move.

  In this way, by configuring the light shield 13A to rotate, it is possible to prevent the light shield 13A from blocking the visual field range R1 in the line sensor camera 12. As a result, the angle formed by the optical axis L of the lens of the line sensor camera 12 and the central axis of the light irradiation unit 11 can be reduced, and the degree of freedom of arrangement of the optical system can be increased. In addition, since the size of the light shield 13A can be increased, the degree of freedom in selecting the light irradiation unit 11 can also be increased.

  Also in the appearance inspection apparatus 1A of the present embodiment, a light irradiation unit 11 configured to be able to emit light including a bright-field light component and a dark-field light component, and components other than the components shielded by the light-shielding body 13 Both the reflection-type bright-field optical system and the dark-field optical system with a simple configuration with the single line sensor camera 12 configured to be able to acquire a bright-field image and a dark-field image based on the light components of The appearance inspection of the inspected object 10 can be performed using the system, and the apparatus size can be reduced and the apparatus cost can be reduced.

(Third embodiment)
FIG. 5 is a diagram showing a configuration of a light shield 13B used in the appearance inspection apparatus according to the third embodiment of the present invention. FIG. 6 is a diagram schematically showing a configuration of an appearance inspection apparatus 1B according to the third embodiment of the present invention. The appearance inspection apparatus 1B of the present embodiment is similar to the appearance inspection apparatus 1 described above, and corresponding portions are denoted by the same reference numerals and description thereof is omitted.

  In the appearance inspection apparatus 1B of the present embodiment, the configuration of the light shielding body 13B is different from the configuration of the light shielding body 13 provided in the above-described appearance inspection apparatus 1. The light shielding body 13B provided in the appearance inspection apparatus 1B includes a light shielding region that blocks light emitted from the light emitting unit 11a of the light irradiation unit 11, and a transmission region that transmits light emitted from the light emitting unit 11a. . More specifically, as shown in FIG. 5, the light shield 13B is a flat plate-like member that is larger than the light emitting surface of the light emitting portion 11a, and has an opening 131 formed at the center. The opening 131 becomes a transmission region that transmits the light emitted from the light emitting portion 11a. In FIG. 5, the light shielding body 13 </ b> B in which the opening 131 is formed as the transmissive region is shown, but the light shielding body 13 </ b> B may be a member in which a cutout portion is formed as the transmissive region.

  In the present embodiment, as shown in FIG. 6A, among the components of the irradiation region R2 emitted from the light emitting portion 11a, the bright field light component that overlaps the visual field range R1 is transmitted through the opening 131. When the light shield 13B is moved to the dark field light component light shielding position, the dark field light component with respect to the line sensor camera 12 is shielded, and the line sensor camera 12 images the object to be inspected 10 with the bright field optical system. Thus, a bright field image is acquired.

  In addition, as shown in FIG. 6B, among the components of the irradiation region R2 emitted from the light emitting portion 11a, the dark field light component that does not overlap with the visual field range R1 passes through the opening 131. When the light-shielding body 13B is moved to a certain bright-field light component light-shielding position, the bright-field light component for the line sensor camera 12 is shielded, and the line sensor camera 12 images the object to be inspected 10 with the dark-field optical system. A dark field image is acquired.

  In the present embodiment, the light shielding body 13B in which the opening 131 serving as a transmission region is formed is a flat plate-shaped member that is larger than the light emitting surface of the light emitting portion 11a. Therefore, in the light emitted from the light emitting portion 11a, All light other than the light transmitted from the opening 131 can be shielded by the light shield 13B.

  Also in the appearance inspection apparatus 1B of the present embodiment, a light irradiation unit 11 configured to be able to emit light including a bright-field light component and a dark-field light component, and components other than those light-shielded by the light-shielding body 13B Both the reflection-type bright-field optical system and the dark-field optical system with a simple configuration with the single line sensor camera 12 configured to be able to acquire a bright-field image and a dark-field image based on the light components of The appearance inspection of the inspected object 10 can be performed using the system, and the apparatus size can be reduced and the apparatus cost can be reduced.

(Fourth embodiment)
FIG. 7 is a diagram schematically showing the configuration of an appearance inspection apparatus 1C according to the fourth embodiment of the present invention. The appearance inspection apparatus 1C of the present embodiment is similar to the appearance inspection apparatus 1 described above, and corresponding portions are denoted by the same reference numerals and description thereof is omitted.

  In the above-described appearance inspection apparatus 1, the line sensor camera 12 is disposed on the same side as the light irradiation unit 11 with respect to the inspected object 10 placed on the placement unit 14. Based on the received reflected light, the reflected light from the inspected object 10 irradiated with the light including the light component and the dark field light component is received, and the light intensity (illuminance: lux) of the received reflected light is measured. Thus, a bright field image and a dark field image are acquired. On the other hand, in the appearance inspection apparatus 1C, the line sensor camera 12 is disposed on the opposite side of the light irradiation unit 11 with respect to the inspection object 10 placed on the placement unit 14, and the light irradiation unit 11 receives the transmitted light from the object to be inspected 10 irradiated with the light including the bright field light component and the dark field light component, and acquires a bright field image and a dark field image based on the received transmitted light.

  Also in the appearance inspection apparatus 1 </ b> C of the present embodiment configured as described above, one light irradiation unit 11 configured to be able to emit light including a bright field light component and a dark field light component, and the light shielding body 13. A transmission-type bright-field optical system and dark-field optics with a simple configuration using one line sensor camera 12 configured to be able to acquire a bright-field image and a dark-field image based on a light component other than the light-shielded component. The appearance inspection of the object to be inspected 10 can be performed using both of the optical systems, and the apparatus size can be reduced and the apparatus cost can be reduced.

1, 1A, 1B, 1C Appearance inspection apparatus 10 Inspected object 11 Light irradiation part 11a Light emitting part 12 Line sensor camera 13 Light shielding body 14 Mounting part 15 Illumination control part 16 Image processing part 17 Light shielding body control part 18 Conveyance system control Unit 19 Control unit

Claims (5)

A placement unit for placing the object to be inspected;
The light emitting unit is disposed opposite to the object to be inspected placed on the placing unit and emits light including a bright field light component and a dark field light component, and is emitted from the light emitting unit. A light irradiating unit that irradiates the object to be inspected placed on the mounting unit;
A movable part is provided at a position between the placement unit and the light irradiation unit, and a part of the light emitted from the light emission unit is shielded by moving to be irradiated on the object to be inspected. A light amount adjusting member for adjusting the amount of light;
A light quantity adjusting member movement control unit for controlling the movement operation of the light quantity adjusting member, wherein the bright field light component shielding position capable of shielding the bright field light component of the light emitted from the light emitting part; and the light emission A light amount adjustment member movement control unit that moves the light amount adjustment member over a dark field light component light shielding position capable of shielding the dark field light component of the light emitted from the unit;
An appearance inspection apparatus comprising: a light receiving unit that receives reflected light or transmitted light from an object to be inspected irradiated with light by the light irradiation unit.   The light amount adjusting member includes a light shielding region in which a base material constituting the light amount adjusting member shields light emitted from the light emitting portion of the light irradiation unit, and a part of the base material constituting the light amount adjusting member. The appearance inspection apparatus according to claim 1, further comprising: an opening or a notch provided, and a transmission region that transmits light emitted from the light emitting unit.   The appearance inspection apparatus according to claim 2, wherein the light amount adjustment member is a flat plate-shaped member that is larger than the light emitting portion of the light irradiation unit. The light irradiation unit is a linear light source extending linearly along the first direction,
The light receiving unit is a line sensor camera in which a plurality of light receiving elements are arranged in parallel with the first direction,
The said light quantity adjustment member movement control part moves the said light quantity adjustment member along the 2nd direction perpendicular | vertical to the said 1st direction, The Claim 1 characterized by the above-mentioned. Appearance inspection device. It further includes a placement unit movement control unit that reciprocates the placement unit along one direction,
The light quantity adjustment member movement control unit moves the light quantity adjustment member in conjunction with the reciprocation of the placement unit by the placement unit movement control unit. Appearance inspection device described in 1.

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