CN102589484B - Method for detecting indication error of autocollimator and device using the method - Google Patents

Method for detecting indication error of autocollimator and device using the method Download PDF

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CN102589484B
CN102589484B CN201210037685.8A CN201210037685A CN102589484B CN 102589484 B CN102589484 B CN 102589484B CN 201210037685 A CN201210037685 A CN 201210037685A CN 102589484 B CN102589484 B CN 102589484B
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autocollimator
double
digital
under test
collimation system
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CN102589484A (en
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赵东升
贾敏强
孙会庆
曾琰莹
张瑞锋
张健
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Shandong Institute of Metrology
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Abstract

本发明公开了一种自准直仪示值误差检测方法,通过数字式准直系统(4)测量被测自准直仪(2)指示的角度,被测自准直仪指示的角度通过能传递相同角值的双平面反射镜传递给数字式准直系统;调整被测自准直仪,使之产生多个检测点的角值变化,数字式准直系统因此测得相应的多个角值变化,取该两个角值变化的差,得到多个检测点的示值误差,取该多个示值误差的最大值与最小值之差为被测自准直仪的示值误差的最终结果;本发明还公开了应用上述方法的装置。该发明利用了光电技术组成了数字式准直系统,测量被测自准直仪的示值,通过数据记录和计算系统计算出被测自准直光管的示值误差;该装置不需要人工读数、记录和计算,提高了检测效率和准确度。

Figure 201210037685

The invention discloses a method for detecting an indication error of an autocollimator. The digital collimation system (4) measures the angle indicated by the autocollimator (2) to be tested, and the angle indicated by the autocollimator to be tested passes the energy The double-plane reflector that transmits the same angular value is transmitted to the digital collimation system; the autocollimator under test is adjusted to produce angular value changes at multiple detection points, and the digital collimation system therefore measures the corresponding multiple angles Value changes, take the difference between the two angular value changes, get the indication error of multiple detection points, take the difference between the maximum and minimum values of the multiple indication errors as the indication error of the tested autocollimator Final result; the present invention also discloses a device for applying the above method. The invention uses photoelectric technology to form a digital collimation system, measures the indication value of the autocollimator under test, and calculates the indication value error of the autocollimation light tube under test through the data recording and calculation system; the device does not require manual labor Reading, recording and calculation improve detection efficiency and accuracy.

Figure 201210037685

Description

The device of autocollimator error of indication detection method and application the method
Technical field
The present invention relates to apparatus measures field, especially autocollimator indication error detection device and method.
Background technology
Autocollimator is a kind of precision measuring instrument for small angle measurement, the method that detects at present the autocollimator error of indication is the method for introducing according in JJG202-2007 < < autocollimator > > national metrological verification regulations, by gauge block and low-angle somascope, form standard angle, then by autocollimator, measure these standard angles, record its error of indication.The subject matter that this detection method and device exist is: 1. complicated operation, waste time and energy, and personnel to be had relatively high expectations, labour intensity is large; 2. data calculation of complex, because the method relies on artificial reading, detecting data needs manual record and processing, so efficiency is lower, easily makes mistakes.
Summary of the invention
This invents technical matters to be solved is to realize the automatic measurement of the autocollimator error of indication, record and processing, improves detection efficiency and the accuracy of the autocollimator error of indication.
For addressing the above problem, the invention provides a kind of autocollimator error of indication detection method, it is characterized in that: by digital colimated light system, measure the angle of tested autocollimator indication, the angle of tested autocollimator indication passes to digital colimated light system by transmitting the biplane catoptron of same angular value; Adjust tested autocollimator, make it to produce the angle value variation of a plurality of check points, i.e. a i-a 0, a wherein 0initial angle, a iit is the measured value of a plurality of check points of tested autocollimator; The variation that therefore digital colimated light system records corresponding a plurality of angles value, i.e. b i-b 0, b wherein 0corresponding initial value, b iit is the measured value of the corresponding a plurality of check points of digital colimated light system; Obtain the error of indication δ of a plurality of check points ifor δ i=(a i-a 0)-(b i-b 0), get a plurality of δ imaximal value and the net result of the difference of the minimum value error of indication that is tested autocollimator.
The present invention also provides a kind of device of applying described autocollimator error of indication detection method, comprise tested autocollimator 2, it is characterized in that: also comprise digital colimated light system 4 and double mirror fine motion system 3, double mirror fine motion system 3 is placed in the centre of tested autocollimator 2 and digital colimated light system 4, and the biplane catoptron of double mirror fine motion system 3 is for changing the angle of tested autocollimator 2 indications to pass to digital colimated light system 4.
Double mirror in described double mirror fine motion system 3 is the structure that becomes in the plane to have at any angle two or more reflectings surface.
In described double mirror fine motion system 3, there is the device of adjusting double-sided reflecting mirror angle.
Described digital colimated light system 4 comprises: light source 9, light lens 12, spectroscope 10, object lens 11, photoelectric conversion unit 5, data recording are calculated machine system 6, the light that light source 9 sends sees through light lens 12 after spectroscope 10 refractions, pass again object lens 11 by a face vertical reflection of double mirror, then through object lens 11, be mapped to photoelectric conversion unit 5 and be converted to electric signal, be input to data recording and calculate machine system 6.
Described digital colimated light system 4 adopts photo-electric or digital autocollimator.
Useful technique effect of the present invention: this invention has utilized photoelectric technology to form digital colimated light system, measures the indicating value of tested autocollimator by digital colimated light system, calculates the error of indication of tested autocollimator by data recording and computing system.This device does not need artificial reading, record and calculating, has improved detection efficiency and accuracy.
Accompanying drawing explanation
Fig. 1 is structure of the present invention and schematic diagram;
Fig. 2 is schematic diagram before graticule aims at;
Fig. 3 is schematic diagram before graticule aims at;
Fig. 4 is the second structure of the present invention and schematic diagram;
Fig. 5 is the third structure of the present invention and schematic diagram.
In figure: 1, microdrum, 2, tested autocollimator, 3, double mirror fine motion system, 4, digital colimated light system, 5, photoelectric conversion unit, 6, data recording is calculated machine system, and 7, reflection image crosshair, 8, graticule crosshair, 9, light source, 10, spectroscope, 11, object lens, 12, light lens.
Below in conjunction with accompanying drawing, the present invention is further detailed explanation.
Embodiment
As shown in Figure 1: the centre that double mirror fine motion system 3 is placed in to digital colimated light system 4 and tested autocollimator 2; Wherein the double mirror Main Function in double mirror fine motion system 3 is to reflect respectively the light from two sides by parallel tow sides, double mirror can be rotated, and biplane catoptron can be also to become in the plane the structure at any angle with two or more reflectings surface; The light that wherein in digital colimated light system 4, light source 9 sends sees through light lens 12 after spectroscope 10 refractions, pass again object lens 11 by a face vertical reflection of double mirror, then through object lens 11, be mapped to photoelectric conversion unit 5 and be converted to electric signal, be input to data recording and calculate machine system 6, record and calculate; Digital colimated light system 4 also can adopt photo-electric or digital autocollimator; The microdrum 1 of tested autocollimator 2 is adjusted to the initial position a of check point 0, by double mirror fine motion system 3, rotary double-face catoptron, makes the reflection image crosshair 7 of tested autocollimator 2 aim at graticule crosshair 8(as shown in Figure 2,3), digital colimated light system 4 records corresponding initial value b 0and record the indicating value of this initial position, also can be by b 0zero clearing.Rotate the microdrum 1 of tested autocollimator 2, make the graticule crosshair 8 of tested autocollimator 2 navigate to the position a of measured point 1, then by double mirror fine motion system 3, rotary double-face catoptron, makes the reflection image crosshair 7 of tested autocollimator 2 aim at graticule crosshair 8(as shown in Figure 2,3), digital colimated light system 4 records current angle value b 1, b 1be the true angle value that tested autocollimator 2 graticule crosshairs 8 move relative to initial position, tested autocollimator 2 is at the error of indication δ at this check point place 1by formula (1), calculated:
δ 1=(a 1-a 0)-(b 1-b 0) (1)
Again rotate the microdrum 1 of tested autocollimator 2, make the graticule crosshair 8 of tested autocollimator 2 navigate to the position a of next measured point 2, repeat operation above, obtain angle value b 2, measure successively the check point of tested autocollimator, obtain a 3,a 4 ...,a i,a n, b 3,b 4 ...,b i,b n, through type (2) calculates the error of indication δ at each check point place i for:
δ i=(a i-a 0)-(b i-b 0) (2)
Get the net result of the error of indication that the maximal value of the error of indication and the difference of minimum value are tested autocollimator.
As shown in Figure 4, positive and negative two minute surfaces of double mirror can be uneven, and two minute surface can vertically reflect respectively the light with tested autocollimator 2 from digital colimated light system 4.
As shown in Figure 5, positive and negative two minute surfaces of double mirror can be in same plane, and two minute surface can vertically reflect respectively the light with tested autocollimator 2 from digital colimated light system 4.
Although the present invention discloses as above with preferred embodiment; so it is not in order to limit the present invention; in the situation that not deviating from spirit of the present invention and essence thereof; those of ordinary skill in the art are when making according to the present invention various corresponding changes and distortion, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.

Claims (5)

1.一种自准直仪示值误差检测方法,其特征在于:1. A method for detecting an autocollimator indication error, characterized in that: 通过数字式准直系统(4)测量被测自准直仪(2)指示的角度,被测自准直仪指示的角度通过能传递相同角值的双平面反射镜传递给数字式准直系统;The angle indicated by the autocollimator under test (2) is measured by the digital collimation system (4), and the angle indicated by the autocollimator under test is transmitted to the digital collimation system through a double-plane mirror that can transmit the same angle value ; 数字式准直系统中光源发出的光线透过光源透镜经分光镜折射后,又穿过物镜后经双面反射镜的一个面垂直反射,然后透过物镜射到光电转换单元转换为电信号,输入到数据记录计算机系统,进行记录和计算;In the digital collimation system, the light emitted by the light source passes through the light source lens and is refracted by the beam splitter, then passes through the objective lens and is reflected vertically by one side of the double-sided mirror, and then passes through the objective lens to the photoelectric conversion unit to be converted into an electrical signal. input to data recording computer systems for recording and calculation; 在双面反射镜的另一个面一侧,被测自准直仪的测微鼓轮调整到检测点的初始位置a0,旋转双面反射镜,使被测自准直仪的反射像十字丝瞄准分划板十字丝,数字式准直系统测得相应的初始值b0并记录该初始位置的示值;On the other side of the double-sided mirror, the micrometer drum of the autocollimator under test is adjusted to the initial position a 0 of the detection point, and the double-sided mirror is rotated to make the reflection of the autocollimator under test resemble a cross The wire is aimed at the crosshair of the reticle, and the digital collimation system measures the corresponding initial value b 0 and records the indicated value of the initial position; 再旋转被测自准直仪的测微鼓轮,使被测自准直仪的分划板十字丝定位到被测点的位置a1,旋转双面反射镜,使被测自准直仪的反射像十字丝瞄准分划板十字丝,数字式准直系统记录当前的角值b1,b1是被测自准直仪分划板十字丝相对初始位置移动的真实角值,被测自准直仪在该检测点处的示值误差δ1Then rotate the micro-measuring drum of the autocollimator under test so that the reticle reticle of the autocollimator under test is positioned at the position a 1 of the point under test, and rotate the double-sided mirror to make the autocollimator under test The reflection image reticle is aimed at the reticle reticle, and the digital collimation system records the current angle value b 1 , b 1 is the real angle value of the reticle reticle moving relative to the initial position of the measured autocollimator, and the measured The indication error δ 1 of the autocollimator at the detection point; 继续调整被测自准直仪,使之产生多个检测点的角值变化,即ai-a0,其中a0是初始角度,ai是被测自准直仪多个检测点的测量值;数字式准直系统因此测得相应的多个角值的变化,即bi-b0,其中b0是相应的初始值,bi是数字式准直系统相应的多个检测点的测量值;得到多个检测点的示值误差δi为δi=(ai-a0)-(bi-b0),取多个δi的最大值与最小值之差为被测自准直仪的示值误差的最终结果。Continue to adjust the autocollimator under test to make it produce angular value changes of multiple detection points, that is, a i -a 0 , where a0 is the initial angle, and a i is the measured value of multiple detection points of the autocollimator under test ;The digital collimation system therefore measures the changes of multiple corresponding angles, that is, b i -b 0 , where b 0 is the corresponding initial value, and b i is the measurement of multiple detection points corresponding to the digital collimation system value; get the indication error δ i of multiple detection points as δ i = (a i -a 0 )-(b i -b 0 ), take the difference between the maximum and minimum values of multiple δ i as the measured self The final result of the indication error of the collimator. 2.一种应用权利要求1所述的自准直仪示值误差检测方法的装置,包括被测自准直仪(2),其特征在于:还包括数字式准直系统(4)和双面反射镜微动系统(3),双面反射镜微动系统(3)置于被测自准直仪(2)和数字式准直系统(4)的中间,双面反射镜微动系统(3)的双平面反射镜用于将被测自准直仪(2)指示的角度变化传递给数字式准直系统(4);所述数字式准直系统(4)包括:光源(9)、光源透镜(12)、分光镜(10)、物镜(11)、光电转换单元(5)、数据记录计算机系统(6),光源(9)发出的光线透过光源透镜(12)经分光镜(10)折射后,又穿过物镜(11)后经双面反射镜的一个面垂直反射,然后透过物镜(11)射到光电转换单元(5)转换为电信号,输入到数据记录计算机系统(6)。2. A device for applying the autocollimator display value error detection method according to claim 1, comprising the tested autocollimator (2), characterized in that it also includes a digital collimation system (4) and a dual The micro-movement system of the surface mirror (3), the micro-motion system of the double-sided mirror (3) is placed in the middle of the autocollimator (2) and the digital collimation system (4), and the micro-motion system of the double-sided mirror The double-plane reflector of (3) is used to transmit the angle change indicated by the measured autocollimator (2) to the digital collimation system (4); the digital collimation system (4) includes: a light source (9 ), light source lens (12), beam splitter (10), objective lens (11), photoelectric conversion unit (5), data recording computer system (6), the light emitted by the light source (9) passes through the light source lens (12) and is split After being refracted by the mirror (10), it passes through the objective lens (11) and is reflected vertically by one side of the double-sided mirror, and then passes through the objective lens (11) to the photoelectric conversion unit (5) to be converted into an electrical signal and input to the data recorder Computer Systems (6). 3.根据权利要求2所述的应用自准直仪示值误差检测方法的装置,其特征在于:所述双面反射镜微动系统(3)中的双面反射镜是在平面上成任意角度的具有两个或多个反射面的结构。3. The device applying the autocollimator indication error detection method according to claim 2, characterized in that: the double-sided mirror in the double-sided mirror micro-motion system (3) is arranged in any plane Angled structures with two or more reflective surfaces. 4.根据权利要求3所述的应用自准直仪示值误差检测方法的装置,其特征在于:所述双面反射镜微动系统(3)上有调整双面反射镜角度的装置。4. The device applying the autocollimator indication error detection method according to claim 3, characterized in that: the double-sided reflector micro-motion system (3) has a device for adjusting the angle of the double-sided reflector. 5.根据权利要求2所述的应用自准直仪示值误差检测方法的装置,其特征在于:所述数字式准直系统(4)采用光电式或数字式自准直仪。5. The device applying the autocollimator indication error detection method according to claim 2, characterized in that: the digital collimation system (4) adopts a photoelectric or digital autocollimator.
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