CN204313798U - A kind of laser beam in-situ calibration device - Google Patents

A kind of laser beam in-situ calibration device Download PDF

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Publication number
CN204313798U
CN204313798U CN201420849722.XU CN201420849722U CN204313798U CN 204313798 U CN204313798 U CN 204313798U CN 201420849722 U CN201420849722 U CN 201420849722U CN 204313798 U CN204313798 U CN 204313798U
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China
Prior art keywords
hole
scaling board
laser beam
utility
ccd camera
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Expired - Fee Related
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CN201420849722.XU
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Chinese (zh)
Inventor
李斌
熊忠星
李沨
郑飞
刘红奇
毛新勇
彭芳瑜
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The utility model provides a kind of laser beam in-situ calibration device, comprises scaling board, levelling device, CCD camera and processor; Described scaling board is arranged on levelling device, and it has three through holes, and wherein the first through hole is vertical with third through-hole line with the first through hole with the second through hole line; Described CCD camera is used for having the scaling board of hot spot to carry out imaging to projection; Described processor is used for carrying out to imaging the drift angle that digital image analysis obtains laser beam and machine tool chief axis.The utility model drives laser displacement sensor by the motion of each axle of lathe, adopts the image of CCD camera shooting laser beam spot on scaling board, by the azimuth characteristic of digital image analysis Accurate Measurement laser beam, to compensate the measurement result in later stage.

Description

A kind of laser beam in-situ calibration device
Technical field
The utility model relates to mensuration beam direction characteristic calibration technique field, and in particular, the utility model relates to a kind of laser beam in-situ calibration device.
Background technology
Laser measuring technique is as a kind of contactless measuring technique, and its measuring accuracy and efficiency are greatly improved compared to traditional contactless gauge head, more and more extensive in the application of detection field.Laser measurement principle utilizes laser displacement sensor to launch beam of laser to beat on testee surface, by receiving reflected light, measures the distance of object to laser displacement sensor.
For the free form surface class part that some are large-scale, as large-scale spiral paddle blade, the measurement of the parts such as turbine chamber, utilize existing machine tool often, then the detection that laser displacement sensor carries out External Shape is carried, in testing process, the laser that laser displacement sensor is launched is tried one's best and machine tool chief axis axis coaxle, but due to the positioning error of alignment error or lathe itself, the actual direction of laser beam and main-shaft axis can be caused to have certain deviation, this deviation brings very large error can to final measurement result, therefore in the urgent need to a kind of can the deviation of Accurate Calibration beam direction, to compensate the measurement result in later stage, thus guarantee measuring accuracy.
Utility model content
For some defects and the new demand of existing calibration technique, the utility model provides a kind of laser beam in-situ calibration device, laser displacement sensor is driven by the motion of each axle of lathe, adopt the image of CCD camera shooting laser beam spot on scaling board, by the azimuth characteristic of digital image analysis Accurate Measurement laser beam, to compensate the measurement result in later stage.
One realizes described laser beam in-situ calibration device, comprises scaling board, levelling device, CCD camera and processor; Described scaling board is arranged on levelling device, and it has three through holes, and wherein the first through hole is vertical with third through-hole line with the first through hole with the second through hole line; Described CCD camera is used for having the scaling board of hot spot to carry out imaging to projection; Described processor carries out to imaging the drift angle that digital image analysis obtains laser beam and machine tool chief axis.
Advantageous Effects of the present utility model is embodied in:
The utility model utilizes the motion of each axle of lathe to drive laser displacement sensor along the orbiting motion of setting, the image of CCD camera shooting laser beam projects on scaling board, three steps are only needed just to complete the collection of three images, do not need the reading utilizing laser displacement sensor itself, the measuring error avoiding sensor affects calibration result, complicated equation is not needed yet, demarcation flow process is simple and convenient, can the deviation of Calibration of Laser Shu Fangxiang, to compensate the measurement result in later stage, thus ensure measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the utility model apparatus structure and imaging schematic diagram, and Fig. 1 (a) is apparatus structure diagram, and Fig. 1 (b) is imaging schematic diagram;
Fig. 2 is demarcation process flow diagram of the present utility model;
Fig. 3 is the drift angle schematic diagram calculation of the utility model laser beam and machine tool chief axis, and Fig. 3 (a) is the drift angle schematic diagram under lathe coordinate system, and Fig. 3 (b) is the drift angle schematic diagram under demarcation coordinate system.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.In addition, if below in described each embodiment of the utility model involved technical characteristic do not form conflict each other and just can mutually combine.
Laser displacement sensor, in installation process, due to tool locating error or other reasons, causes the direction of laser beam and anticipation to have certain deviation, therefore needs to calibrate laser beam direction in space.
See Fig. 1, the device that the utility model also provides, comprises scaling board, levelling device, CCD camera and processor; Described scaling board is arranged on levelling device, and it has three through holes, and wherein the first through hole is vertical with third through-hole line with the first through hole with the second through hole line; Described CCD camera is used for having the scaling board of hot spot to carry out imaging to projection; Described processor carries out to imaging the drift angle that digital image analysis obtains laser beam and machine tool chief axis.Figure, 1 (a) gives device schematic diagram, and in Fig. 1 (b), 01,02,03 represents three through holes on scaling board, and the spacing in 01,02 hole and 01,03 hole is D.
Scaling board preferably ceramic material, ceramic wafer is good diffuse-reflective material, is widely used in Experiments of Optics, has good optical property.
See Fig. 2, the course of work of said apparatus is:
(1) leveling scaling board makes it vertical with machine Z-axis, and described scaling board has three through holes, and the first through hole is vertical with third through-hole line with the first through hole with the second through hole line;
(2) use laser displacement sensor Emission Lasers bundle to form the first hot spot 1 to scaling board, projection is had to the scaling board imaging of the first hot spot 1, picture one as shown in Figure 1;
(3) order about laser displacement sensor displacement L in lathe Y direction, use laser displacement sensor Emission Lasers bundle to form the second hot spot 2 to scaling board, projection is had to the scaling board imaging of the second hot spot 2, picture two as shown in Figure 1;
(4) order about laser displacement sensor displacement H in machine Z-axis direction, use laser displacement sensor Emission Lasers bundle to form the 3rd hot spot 3 to scaling board, projection is had to the scaling board imaging of the 3rd hot spot 3, picture three as shown in Figure 1;
(5) calculate the drift angle of laser beam and machine tool chief axis, see Fig. 3, be specially:
On scaling board with the first through hole for demarcating coordinate origin, the first through hole and the second through hole line are for demarcating coordinate system X-axis, and the first through hole and third through-hole line are for demarcating coordinate system Y-axis;
Be the coordinate under demarcation coordinate system by the coordinate conversion of first, second and third hot spot in imaging, be designated as (x 1, y 1), (x 2, y 2), (x 3, y 3); According to the coordinate of two through holes in picture and the actual range D on ceramic scaling board, be demarcating the coordinate under coordinate system by the coordinate transformation of three hot spot points in picture, D determines scale amplifying and minification in conversion.Build the first hot spot and the second hot spot line equation L 12: a 1x+b 1y+c 1=0, a 1, b 1and c 1for straight-line equation coefficient; And build the second hot spot and the 3rd hot spot line equation L 23: a 2x+b 2y+c 2=0, a 2, b 2and c 2for straight-line equation coefficient;
Calculate laser beam and machine Z-axis angle ∠ α=arctan (L/H);
Calculate the projection of laser beam in lathe XOY plane and angle ∠ β=arctan ((a of lathe Y-axis 1* b 2-a 2* b 1)/(a 1* a 2+ b 1* b 2)).
Above-mentioned steps moves for lathe Y-axis, is not limited to this, applicable equally to lathe X-axis.
Consider convenience of calculation, the first through hole of preferred described scaling board is equal with third through-hole spacing with the first through hole with the second through-hole spacing.
The utility model method and apparatus can be demarcated beam direction error under the various mounting means of laser displacement sensor, adapts to site environment, does not need the survey measurements utilizing laser displacement sensor itself, does not need complicated matrix operation.
In the utility model, laser displacement sensor adopts mounting means vertically downward, and lathe can be with dynamic sensor to move upward in XYZ tri-sides, the coordinate information of the measuring point on measurement target object.Can be used for setting up the three-dimensional model of object after the coordinate information collection of measuring point.Under other measurement environment or other mounting means, sensor equally can along axis of motion, and method of the present utility model is not limited to installs vertically downward.
Example:
The utility model implemented by the bright lathe of Mick, and shown in sensor and CCD camera mounting means figure below, scaling board is placed on platen, and worktable itself is level, with the level condition of clock gauge inspection scaling board before experiment.What this experiment sensor adopted is mounting means vertically downward, and Machine Tool Positioning Accuracy is at 2um, and CCD camera is 5,000,000 pixels, and scaling board is of a size of 60mm*60mm, and through-hole diameter is 2mm.Distance D=40mm between through hole 01,02 and through hole 01,03.
According to demarcating steps, the picture of experiment shooting is as shown below, the distance L=30mm that lathe moves in the X direction, the distance H=50mm that lathe declines in Z-direction.
Experiment has carried out 10 times altogether, and at every turn by the angular setting 0.5 ° of laser beam, the method then utilizing the utility model to provide is demarcated, and experimental data is as shown in the table.Experimental result shows, when lathe positioning error is 2um, time CCD camera pixel is 5,000,000, adopts scaling method described in the utility model, and the error calibrating laser beam drift angle is no more than 0.05 °, and the utility model has very high precision and efficiency.
Sequence number Actual angle Demarcate angle Error
1 0.5° 0.512° 0.012°
2 1.0° 1.028° 0.028°
3 1.5° 1.535° 0.035°
4 2.0° 2.048° 0.048°
5 2.5° 2.542° 0.042°
6 3.0° 3.012° 0.012°
7 3.5° 3.547° 0.047°
8 4.0° 4.049° 0.049°
9 4.5° 4.536° 0.036°
10 5.0° 5.028° 0.028°
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.

Claims (3)

1. a laser beam in-situ calibration device, is characterized in that, comprises scaling board, levelling device, CCD camera and processor; Described scaling board is arranged on levelling device, and it has three through holes, and wherein the first through hole is vertical with third through-hole line with the first through hole with the second through hole line; Described CCD camera is used for having the scaling board of hot spot to carry out imaging to projection; Described processor is used for carrying out to imaging the drift angle that digital image analysis obtains laser beam and machine tool chief axis.
2. device according to claim 1, is characterized in that, described scaling board adopts stupalith.
3. device according to claim 1 and 2, is characterized in that, the first through hole of described scaling board is equal with third through-hole spacing with the first through hole with the second through-hole spacing.
CN201420849722.XU 2014-12-26 2014-12-26 A kind of laser beam in-situ calibration device Expired - Fee Related CN204313798U (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104567690A (en) * 2014-12-26 2015-04-29 华中科技大学 Field calibration method and device for laser beams
CN104988928A (en) * 2015-05-25 2015-10-21 浙江省围海建设集团股份有限公司 Method for monitoring foundation pit excavation horizontal displacement in real-time manner based on digital images
CN106679566A (en) * 2017-01-19 2017-05-17 佛山职业技术学院 Quick detector of large format tiles
CN106767419A (en) * 2017-01-19 2017-05-31 佛山职业技术学院 A kind of significantly furring tile method for quick based on optical detection
CN107205146A (en) * 2016-03-16 2017-09-26 中航华东光电(上海)有限公司 Multifunction automatic calibration system and its scaling method
CN107941153A (en) * 2017-12-29 2018-04-20 厦门大学 A kind of vision system of laser ranging optimization calibration
CN108257137A (en) * 2017-11-27 2018-07-06 南京浩梁景信息科技有限公司 A kind of angle measurement method and system of the automatic interpretation of view-based access control model hot spot
CN109175737A (en) * 2018-10-31 2019-01-11 中国科学院西安光学精密机械研究所 A kind of adjustment method of laser beam and the machine spindle direction of motion depth of parallelism
CN110031887A (en) * 2019-04-30 2019-07-19 清华大学 Beam spot caliberating device and method
CN113495259A (en) * 2020-04-07 2021-10-12 广东博智林机器人有限公司 MEMS scanning mirror deflection angle calibrating device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104567690A (en) * 2014-12-26 2015-04-29 华中科技大学 Field calibration method and device for laser beams
CN104567690B (en) * 2014-12-26 2017-08-01 华中科技大学 A kind of laser beam field calibration method and device
CN104988928A (en) * 2015-05-25 2015-10-21 浙江省围海建设集团股份有限公司 Method for monitoring foundation pit excavation horizontal displacement in real-time manner based on digital images
CN107205146A (en) * 2016-03-16 2017-09-26 中航华东光电(上海)有限公司 Multifunction automatic calibration system and its scaling method
CN106679566A (en) * 2017-01-19 2017-05-17 佛山职业技术学院 Quick detector of large format tiles
CN106767419A (en) * 2017-01-19 2017-05-31 佛山职业技术学院 A kind of significantly furring tile method for quick based on optical detection
CN108257137A (en) * 2017-11-27 2018-07-06 南京浩梁景信息科技有限公司 A kind of angle measurement method and system of the automatic interpretation of view-based access control model hot spot
CN107941153A (en) * 2017-12-29 2018-04-20 厦门大学 A kind of vision system of laser ranging optimization calibration
CN109175737A (en) * 2018-10-31 2019-01-11 中国科学院西安光学精密机械研究所 A kind of adjustment method of laser beam and the machine spindle direction of motion depth of parallelism
CN110031887A (en) * 2019-04-30 2019-07-19 清华大学 Beam spot caliberating device and method
CN110031887B (en) * 2019-04-30 2022-01-04 清华大学 Electron beam spot calibration device and method
CN113495259A (en) * 2020-04-07 2021-10-12 广东博智林机器人有限公司 MEMS scanning mirror deflection angle calibrating device

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Granted publication date: 20150506

Termination date: 20211226