CN203011847U - Micropore rapidly-detecting device based on luminous flux - Google Patents
Micropore rapidly-detecting device based on luminous flux Download PDFInfo
- Publication number
- CN203011847U CN203011847U CN 201220405054 CN201220405054U CN203011847U CN 203011847 U CN203011847 U CN 203011847U CN 201220405054 CN201220405054 CN 201220405054 CN 201220405054 U CN201220405054 U CN 201220405054U CN 203011847 U CN203011847 U CN 203011847U
- Authority
- CN
- China
- Prior art keywords
- micropore
- axis
- luminous flux
- measured
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000004907 flux Effects 0.000 title claims abstract description 63
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 239000013307 optical fiber Substances 0.000 claims description 56
- 238000012360 testing method Methods 0.000 claims description 38
- 239000000835 fiber Substances 0.000 claims description 17
- 238000012546 transfer Methods 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000003321 amplification Effects 0.000 claims description 5
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 31
- 238000005516 engineering process Methods 0.000 abstract description 9
- 230000003287 optical effect Effects 0.000 abstract description 7
- 230000009471 action Effects 0.000 abstract description 3
- 230000007547 defect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 15
- 238000001914 filtration Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229940085805 fiberall Drugs 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 238000001303 quality assessment method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000012372 quality testing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model discloses a micropore rapidly-detecting device based on luminous flux, the device respectively acquires luminous flux permeating through a micropore to be detected and a standard mircopore by a luminous flux detecting device. By comparing a current measurement value corresponding to the luminous flux permeating through the micropore to be detected with a current standard value corresponding to the luminous flux permeating through the standard micropore, the device is used for evaluating the quality of the micropore to be detected. The device can implement high efficiency and accuracy measurement of geometric parameters of the micropore, and can effectively resolves actual demands of micropore rapid detection in an industrial field. The device resolves a defect that a measurement result cannot fully reflect geometric shape characteristics of a thin and long micropore in an action length range because of field depth restriction of an optical system when traditional micropore measurement based on a microscopic image technology. The device can effectively judge problems whether dirt and burr exist, micropore dimension is out-of-tolerance and micropore is worn.
Description
Technical field
The utility model utilizes modern advanced photoelectron technology to measure the geometric properties of micropore, is specially a kind of micropore device for fast detecting based on luminous flux.
Background technology
Along with developing rapidly of industrial technology and modern science and technology, the machine-building level constantly improves and presents microminiaturized development trend, and the application of micropore device in machinery, instrument, aviation, electronics, biologic medical and textile industry is more and more extensive.On aircraft industry, geostationary satellite attitude and orbit control low-thrust rocket ejector filler hole diameter is all below 400 μ m, micropore quality in these micropore devices directly affects the performance of complete machine, when therefore these being had micropore class part proposition precision or ultraprecise processing, also its accuracy of detection and speed are had higher requirement.
Micro measurement is an important content in dimensional measurement, and be characterized in: the measuring appliance activity space is restricted, and operation adjustment inconvenience and measurement efficient are low.The common quality problems of micropore have:
A, micropore size are overproof;
B, micropore axis and the reference field error of perpendicularity are overproof;
The defectives such as foreign matter that there are burr in c, hole surface, do not wash.
During according to measurement, whether gauge head contacts with tested hole wall and is divided into contact type measurement and non-contact measurement, the contact method measurement mainly contains coordinate measuring machine mensuration, miking method etc., their shortcoming is the mechanically deform that the existence of contact force can cause measuring staff and gauge head, easily causes larger error; Non-cpntact measurement mainly contains optical imagery method, capacitance method etc., but measuring speed is slow and complicated operation, is not suitable for micropore in enormous quantities and detects.Domestic measuring method commonly used is to utilize image processing techniques that micropore is detected at present, but detection efficiency is lower, can not satisfy growing industrialization demand.
The utility model content
The utility model provides a kind of micropore device for fast detecting based on luminous flux for the deficiencies in the prior art, realizes efficient, the accurate measurement of micropore geometric parameter, the actual demand that can effectively solve industrial circle micropore fast detecting.When the solution tradition was carried out micro measurement based on the micro-image technology, due to the restriction of the optical system depth of field, measurement result can not reflect the shortcoming of how much shape characteristics in elongated micropore action length scope comprehensively.Can judge effectively whether the micropore inwall exists whether dirt, burr, pore size overproof, whether micropore reach the problems such as wearing and tearing.
For realizing above technical purpose, the utility model will be taked following technical scheme:
A kind of micropore device for fast detecting based on luminous flux for detection of the micropore to be measured of offering on test specimen to be checked, comprises three-dimensional working platform, light source and is used for gathering the device for detecting luminous flux that light source sees through the micropore luminous flux to be measured of offering on test specimen to be checked; Light source, test specimen to be checked, device for detecting luminous flux are arranged on three-dimensional working platform respectively, and light source, device for detecting luminous flux are divided into the both sides of test specimen to be checked; Device for detecting luminous flux comprises the first fibre-optical splice, optical fiber, photodetector and the second fibre-optical splice, every row micropore to be measured of offering on each test specimen to be checked all configures an optical fiber, a photodetector accordingly, one end of each optical fiber is by the first fibre-optical splice and connect, the other end is fixedly mounted on three-dimensional working platform by the second fibre-optical splice and after connecing, and each photodetector is arranged on respectively on the second fibre-optical splice corresponding to corresponding optical fiber; Described test specimen to be measured under the driving of three-dimensional working platform, realize the micropore to be measured offered on test specimen to be measured and light source over against; Described device for detecting luminous flux is realized the spacing adjustment between micropore to be measured that the micropore to be measured offered on optical fiber and test specimen to be measured offers on, optical fiber and the test specimen to be measured under the driving of three-dimensional working platform.
Described three-dimensional working platform comprises base, column, X-axis precise guide rail, the accurate transfer table of X-axis, Y-axis precise guide rail, Y-axis precision stage, Z axis precise guide rail and Z axis precision stage; The accurate transfer table of X-axis is done the X-direction reciprocating linear by the X-axis precise guide rail with respect to base and is moved, and the X-axis precise guide rail is laid on base along the X-direction of base; The Y-axis precision stage is done the Y-direction reciprocating linear by the Y-axis precise guide rail with respect to base and is moved, and described Y-axis precise guide rail is erected at base top by support, and the Y-axis precise guide rail to set up direction consistent with the Y direction of base; The Z axis precision stage is connected with the Y-axis precision stage is removable by the Z axis precise guide rail, and the Z axis precise guide rail is layed in the Y-axis precision stage, and the laying direction of Z axis precise guide rail is consistent with the Z-direction of base.
Described test specimen to be measured is fixedly mounted on the accurate transfer table of X-axis by fixture; Device for detecting luminous flux is fixedly mounted on the Z axis precision stage; Light source is positioned at the accurate transfer table of X-axis below, and the accurate transfer table of X-axis is provided with transmission region corresponding to the position of light source.
Described the first fibre-optical splice is the Linear Array Realtime fibre-optical splice, comprise the first joint body and be opened in Linear Array Realtime optical fiber mounting hole on the first joint body, on distribution between each optical fiber mounting hole of Linear Array Realtime optical fiber mounting hole and test specimen to be measured, the distribution of each micropore to be measured is consistent, and the two ends of the first joint body offer respectively the first jiont treatment hole, the Linear Array Realtime fibre-optical splice is connected with the Z axis precision stage by the first jiont treatment hole, and each optical fiber mounting hole of Linear Array Realtime optical fiber mounting hole is connected with corresponding optical fiber respectively.
Described the second fibre-optical splice, comprise the second joint body and be opened in Linear Array Realtime fiber optic hub, Linear Array Realtime photodetector mounting hole on the second joint body, Linear Array Realtime fiber optic hub, Linear Array Realtime photodetector mounting hole are communicated with setting correspondingly, each fiber optic hub of Linear Array Realtime fiber optic hub is connected with corresponding optical fiber respectively, and all embed in each photodetector mounting hole of Linear Array Realtime photodetector mounting hole, the photodetector that detects corresponding optical fiber luminous flux is arranged, and the inwall of each photodetector mounting hole is the black setting; In addition, the two ends of the second joint body offer respectively the second jiont treatment hole, and the second fibre-optical splice is connected with the Z axis precision stage by the second jiont treatment hole.
The signal output part of each photodetector is connected with the corresponding signal input end of multichannel feeble signal processor respectively, and this feeble signal processor comprises pre-amplification circuit, filtering circuit and the main amplifying circuit that is linked in sequence.
According to above technical scheme, can realize following beneficial effect:
1, the utility model will compare through the corresponding current measurement value of micropore luminous flux to be measured and the corresponding current standard value of luminous flux that sees through the standard micropore, to pass judgment on micropore quality to be measured, hence one can see that: the method has overcome when carrying out micro measurement based on the micro-image technology in prior art effectively, due to the restriction of the optical system depth of field, measurement result can not reflect the shortcoming of how much shape characteristics in elongated micropore action length scope comprehensively; In addition, the basis that method described in the utility model can effectively be carried out the micropore quality assessment is: in the analytical industry field, to the demand of micropore quality testing, the common quality problems of micropore have: a) micropore size is overproof; B) micropore axis and the reference field error of perpendicularity are overproof; C) the hole surface defectives such as foreign matter that have burr, do not wash.And above-mentioned several situation can cause all comparing with calibrated standard figures by the output intensity of micropore that there is some difference, so find the data processing techniques such as criterion by threshold value setting or gross error, can judge fast the micropore that has mass defect.
2, the utility model adopts photodetector to see through micropore luminous flux measurement to be measured, reason is: the output of photodetector often to incide its photosurface on luminous flux be directly proportional, so the size of the photocurrent of photodetector can reflect the size of measurement to be checked, be that photocurrent is the function I=f (Q) of quantity of information Q value to be detected, this is a kind of information conversion of analog quantity; In addition, this measuring system adopts the photovoltaic detector silicon photocell as sensor, and silicon photocell is a large-area photodiode, and it can be the light energy conversion that incides its surface electric energy, is based on the photovoltaic detector that the light volta effect is made.Because the response frequency of photodetector is very high, in above-mentioned measuring process, the Linear Array Realtime sensor can scan the output intensity signal of a plurality of micropores on workpiece simultaneously, realize the parallel measurement of many micropores geometric parameter, amplification in addition, filtering and denoising step are completed by metering circuit, compare greatly shortening with the single hole detection based on machine vision its detection time, to be reduced to from tens of minutes tens of seconds detection time for the part plate with thousands of micropores, thereby greatly improve the detection efficiency of micropore.
3, the utility model adopts three-dimensional working platform at the cooperative motion of three directions of XYZ, realize that the light of light source emission, the axis of micropore (standard micropore/test microvia), the axis of optical fiber all are in same straight line, hence one can see that: this regulative mode is easy, reliable.
4, the utility model adopt multichannel feeble signal processor to the current signal of each photodetector input amplify, filtering, denoising, with the most of noise filtering in this current signal, improve signal to noise ratio (S/N ratio), improve measuring accuracy.
Description of drawings
Fig. 1 is the structural representation of the micropore device for fast detecting based on luminous flux described in the utility model;
Each label title in Fig. 1: 1-base; 2-X-axis precise guide rail; The accurate transfer table of 3-X-axis; 4-support; The 5-the second fibre-optical splice; 6-Y-axis precise guide rail; 7-Y-axis precision stage; 8-multichannel feeble signal treatment circuit; 9-Z axis precision stage; 10-photodetector; 11-optical fiber; The 12-the first fibre-optical splice; 13-light source; 14-micropore to be measured;
Fig. 2 is the structural representation of the first fibre-optical splice, and wherein: (a) being front view, is (b) vertical view;
Fig. 3 is the structural representation of the second fibre-optical splice, and wherein: (a) being front view, is (b) vertical view.
Fig. 4 is single channel feeble signal treatment circuit schematic diagram, comprising pre-amplification circuit, the voltage-controlled low-pass filter circuit of second order and main amplifying circuit.
Embodiment
Accompanying drawing discloses the structural representation of the related preferred embodiment of the utility model without limitation; Explain the technical solution of the utility model below with reference to accompanying drawing.
micropore method for quick based on luminous flux described in the utility model, for detection of the micropore quality to be measured of offering on test specimen to be checked, see through this micropore quality to be measured of luminous flux evaluation of micropore to be measured by mensuration, specifically comprise the following steps: (1) arranges light source in a side of standard specimen, and at the opposite side of standard specimen, device for detecting luminous flux is set, the photodetector that this device for detecting luminous flux comprises optical fiber and is arranged on optical fiber one end, the optical fiber other end is to the standard specimen setting, wherein: light source is LED array formula light source, in fact, light source described in the utility model is as long as detect the even of territory for having to cover, stablizing parallel area source gets final product, during detection of dynamic, a plurality of micropores of every row pass through the Photoelectric Detection passage of top separately successively by driving the X-axis precision stage, realize the Quick Measurement of micropore, (2) by photodetector, gather luminous flux corresponding photocurrent standard value after Optical Fiber Transmission that light source sees through the standard micropore, if the gauge orifice of each row is identical, ignore the impact of fibre loss, difference of the photocurrent of each row output is mainly to be caused by light source light illumination and the photodetector sensitivity at gauge orifice place, therefore, can carry out corresponding error compensation by the difference between the photocurrent of each row gauge orifice output, during collection, the axis of the light of light source emission, the axis that is in acquisition state standard micropore, optical fiber all is in same straight line, (3) standard specimen with step (1) is replaced by test specimen to be measured, pass through photodetector, read luminous flux corresponding photocurrent measured value after Optical Fiber Transmission that light source sees through micropore to be measured, during collection, the axis of the light of light source emission, the axis that is in acquisition state micropore to be measured, optical fiber all is in same straight line, (4) the photocurrent measured value that micropore to be measured is corresponding and the photocurrent standard value of standard micropore are compared, and can carry out the quality assessment of this micropore to be measured.
Fig. 1 discloses a kind of device of realizing above-mentioned micropore method for quick based on luminous flux particularly, comprises three-dimensional working platform, light source and is used for gathering the device for detecting luminous flux that light source sees through the micropore luminous flux to be measured of offering on test specimen to be checked; Light source, test specimen to be checked, device for detecting luminous flux are arranged on three-dimensional working platform respectively, and light source, device for detecting luminous flux are divided into the both sides of test specimen to be checked; Device for detecting luminous flux comprises the first fibre-optical splice, optical fiber, photodetector and the second fibre-optical splice, every row micropore to be measured of offering on each test specimen to be checked all configures an optical fiber, a photodetector accordingly, one end of each optical fiber is by the first fibre-optical splice and connect, the other end is fixedly mounted on three-dimensional working platform by the second fibre-optical splice and after connecing, and each photodetector is arranged on respectively on the second fibre-optical splice corresponding to corresponding optical fiber; Described test specimen to be measured under the driving of three-dimensional working platform, realize the micropore to be measured offered on test specimen to be measured and light source over against; Described device for detecting luminous flux is realized the spacing adjustment between micropore to be measured that the micropore to be measured offered on optical fiber and test specimen to be measured offers on, optical fiber and the test specimen to be measured under the driving of three-dimensional working platform.
Optical fiber described in the utility model, be the plastics Optic transmission fiber, it is the luminous flux transmission apparatus, be used for the emergent light flux of micropore to be measured is delivered to photodetector, realize opto-electronic conversion, its core diameter can comprise the emergent light flux of micropore fully between 1mm to 2mm, lightweight, soft, good toughness has good mechanical property.
Described three-dimensional working platform, by driving micropore to be measured, photodetector motion, realize that the micropore device for fast detecting based on luminous flux described in the utility model is at three-dimensional space motion, make the relative position between micropore to be measured, photodetector satisfy the measurement requirement, comprise base, column, X-axis precise guide rail, the accurate transfer table of X-axis, Y-axis precise guide rail, Y-axis precision stage, Z axis precise guide rail and Z axis precision stage; The accurate transfer table of X-axis is done the X-direction reciprocating linear by the X-axis precise guide rail with respect to base and is moved, and the X-axis precise guide rail is laid on base along the X-direction of base; The Y-axis precision stage is done the Y-direction reciprocating linear by the Y-axis precise guide rail with respect to base and is moved, and described Y-axis precise guide rail is erected at base top by support, and the Y-axis precise guide rail to set up direction consistent with the Y direction of base; The Z axis precision stage is connected with the Y-axis precision stage is removable by the Z axis precise guide rail, and the Z axis precise guide rail is layed in the Y-axis precision stage, and the laying direction of Z axis precise guide rail is consistent with the Z-direction of base; Described test specimen to be measured is fixedly mounted on the accurate transfer table of X-axis by fixture; Device for detecting luminous flux is fixedly mounted on the Z axis precision stage; Light source is positioned at the darkroom that the accurate transfer table of X-axis below arranges, and the accurate transfer table of X-axis is provided with transmission region corresponding to the position of light source.
Photodetector 10 described in the utility model is important sensing elements of the present utility model, and the emergent light flux of micropore to be measured is optical quantities, need to utilize electrooptical device to be converted to electrical quantities, then utilizes advanced electronic technology to carry out subsequent treatment; Photodetector is highly sensitive, response is fast, and its short-circuit current and the micropore area linear, therefore be easy to measure the geometrical property of micropore.
the first fibre-optical splice described in the utility model, be used for fixing the relative position of optical fiber 11 and micropore 14 to be measured, on joint, the distribution of optic fibre hole is according to the distribution design of each micropore to be measured on condition of work and test specimen to be measured, as Fig. 2 (a), (b) shown in, be the Linear Array Realtime fibre-optical splice, comprise the first joint body and be opened in Linear Array Realtime optical fiber mounting hole on the first joint body, on distribution between each optical fiber mounting hole of Linear Array Realtime optical fiber mounting hole and test specimen to be measured, the distribution of each micropore to be measured is consistent, and the two ends of the first joint body offer respectively the first jiont treatment hole, the Linear Array Realtime fibre-optical splice is connected with the Z axis precision stage by the first jiont treatment hole, to limit the degree of freedom of this first fibre-optical splice, and each optical fiber mounting hole of Linear Array Realtime optical fiber mounting hole is connected with corresponding optical fiber respectively.
the second fibre-optical splice described in the utility model, purpose is to avoid photodetector to be subjected to the interference of extraneous parasitic light, affect the accuracy of detection of micropore, as Fig. 3 (a), (b) shown in, comprise the second joint body and be opened in Linear Array Realtime fiber optic hub on the second joint body, Linear Array Realtime photodetector mounting hole, the Linear Array Realtime fiber optic hub, Linear Array Realtime photodetector mounting hole is communicated with setting correspondingly, each fiber optic hub of Linear Array Realtime fiber optic hub is connected with corresponding optical fiber respectively, and all embed in each photodetector mounting hole of Linear Array Realtime photodetector mounting hole, the photodetector that detects corresponding optical fiber luminous flux is arranged, and the inwall of each photodetector mounting hole is the black setting, in addition, the two ends of the second joint body offer respectively the second jiont treatment hole, and the second fibre-optical splice is connected with the Z axis precision stage by the second jiont treatment hole.
due to micropore size tens of between hundreds of micron, so the signal that photodetector receives is very faint, simultaneously, existence such as thermonoise due to various noises, shot noise etc., the signal of photodetector output often is deeply buried among noise, therefore, to carry out pre-service to such feeble signal, with with most of noise filtering, improve signal to noise ratio (S/N ratio), improve measuring accuracy, therefore, the signal output part of each photodetector described in the utility model is connected with the corresponding signal input end of multichannel feeble signal processor respectively, this multichannel feeble signal processor comprises the pre-amplification circuit that is linked in sequence, the voltage-controlled low-pass filter circuit of second order and main amplifying circuit come output amplitude suitable, and filter out the signal to be detected of most of noise, Fig. 4 discloses the schematic diagram of single channel feeble signal treatment circuit, multichannel feeble signal treatment circuit is the parallel stacks of a plurality of single channel.
The course of work of the micropore device for fast detecting based on luminous flux described in the utility model is as follows:
Step 1: open parallel surface light source 13 even, stable in the darkroom, preheating makes its output reach steady state (SS) about ten minutes, and avoiding light intensity to change in testing process affects measurement result;
Step 2: each passage is demarcated, motion by X, Y-axis makes directional light axis, micropore axis, shaft axis of optic fibre be located on the same line, read the data of collection by photodetector, the difference that judges each channel data is that error compensation is carried out in the collection of follow-up data; Error compensation principle described in the utility model is as follows: because the output of the photocurrent of photodetector is directly proportional to the area of micropore, illuminance and the detector sensitivity of light source, therefore take the measured value of first row as standard, the numerical value of other row and its ratio are the penalty coefficient of these row; When test to be measured the time, the measured value of other row is all divided by corresponding penalty coefficient, eliminated the error effect of the optical light source and detector at each row micropore place; Have can cover detect the territory evenly, stablize parallel area source, during detection of dynamic, micropore of each row is realized the Quick Measurement of micropore successively by the Photoelectric Detection passage of top separately.
Step 3: workpiece for measurement is placed on the X-axis precision stage, and positions with clamp device, the distribution that makes the hole is consistent with the distribution of optical fiber directly over it;
Step 4: the motion by X, Y-axis drive micropore on workpiece be positioned at the plastics Optic transmission fiber under, receive the emergent light flux of micropore, mobile Z direction precision stage makes optical fiber be positioned at 1-2mm left and right directly over micropore, has not only avoided the loss of micropore luminous flux but also has avoided the incident of extraneous parasitic light;
Step 5: the other end of optical fiber is connected with photodetector, carries out opto-electronic conversion, and the electric weight of output can be realized the real-time demonstration of measurement data by utilizing data collecting card access host computer after multichannel feeble signal processor 8;
Step 6: make the every row micropore on workpiece measure by the luminous flux detection passage of top separately successively by driving the X-axis precision stage, in measuring process, workpiece can uniform motion, when micropore did not need to suspend through time under sensor, therefore improved greatly the micropore detection efficiency;
Step 7: the data of detection utilize host computer can realize real-time demonstration, find the data processing techniques such as criterion by threshold value setting or gross error, can judge fast the micropore that has mass defect.
In sum, the utility model is the complex detection system that the various technology such as light harvesting, mechanical, electrical, computing machine are integrated as can be known, realizes detecting intelligent and visual.Area is a convenient tolerance of micropore (hole that diameter 500 μ m are following) overall dimensions, and implement than being easier to, the first step that micropore is measured is to measure its area according to the size of micropore output light flux, then the area with the canonical reference hole compares, and can think that this micropore is defective if measurement result exceeds given threshold values.Utilize optical system to carry out non-cpntact measurement to micropore, determine its area according to the luminous flux of micropore, mechanical system realizes the robotization of detection, and advanced integrated circuit carries out Quick Acquisition and processing to measuring-signal, utilizes at last the real-time demonstration of computer realization measurement result.This cover measuring system can realize quick, the Measurement accuracy of micropore, greatly improves detection efficiency.
Claims (6)
1. micropore device for fast detecting based on luminous flux, for detection of the micropore to be measured of offering on test specimen to be checked, it is characterized in that: comprise three-dimensional working platform, light source and be used for gathering the device for detecting luminous flux that light source sees through the micropore luminous flux to be measured of offering on test specimen to be checked; Light source, test specimen to be checked, device for detecting luminous flux are arranged on three-dimensional working platform respectively, and light source, device for detecting luminous flux are divided into the both sides of test specimen to be checked; Device for detecting luminous flux comprises the first fibre-optical splice, optical fiber, photodetector and the second fibre-optical splice, the micropore to be measured of offering on each test specimen to be checked all configures an optical fiber, a photodetector accordingly, one end of each optical fiber is by the first fibre-optical splice and connect, the other end is fixedly mounted on three-dimensional working platform by the second fibre-optical splice and after connecing, and each photodetector is arranged on respectively on the second fibre-optical splice corresponding to corresponding optical fiber; Described test specimen to be measured under the driving of three-dimensional working platform, realize the micropore to be measured offered on test specimen to be measured and light source over against; Described device for detecting luminous flux is realized the spacing adjustment between micropore to be measured that the micropore to be measured offered on optical fiber and test specimen to be measured offers on, optical fiber and the test specimen to be measured under the driving of three-dimensional working platform.
2. according to claim 1 based on the micropore device for fast detecting of luminous flux, it is characterized in that: described three-dimensional working platform comprises base, column, X-axis precise guide rail, the accurate transfer table of X-axis, Y-axis precise guide rail, Y-axis precision stage, Z axis precise guide rail and Z axis precision stage; The accurate transfer table of X-axis is done the X-direction reciprocating linear by the X-axis precise guide rail with respect to base and is moved, and the X-axis precise guide rail is laid on base along the X-direction of base; The Y-axis precision stage is done the Y-direction reciprocating linear by the Y-axis precise guide rail with respect to base and is moved, and described Y-axis precise guide rail is erected at base top by support, and the Y-axis precise guide rail to set up direction consistent with the Y direction of base; The Z axis precision stage is connected with the Y-axis precision stage is removable by the Z axis precise guide rail, and the Z axis precise guide rail is layed in the Y-axis precision stage, and the laying direction of Z axis precise guide rail is consistent with the Z-direction of base.
3. according to claim 2 based on the micropore device for fast detecting of luminous flux, it is characterized in that: described test specimen to be measured is fixedly mounted on the accurate transfer table of X-axis by fixture; Device for detecting luminous flux is fixedly mounted on the Z axis precision stage; Light source is positioned at the accurate transfer table of X-axis below, and the accurate transfer table of X-axis is provided with transmission region corresponding to the position of light source.
4. according to claim 2 based on the micropore device for fast detecting of luminous flux, it is characterized in that: described the first fibre-optical splice is the Linear Array Realtime fibre-optical splice, comprise the first joint body and be opened in Linear Array Realtime optical fiber mounting hole on the first joint body, on distribution between each optical fiber mounting hole of Linear Array Realtime optical fiber mounting hole and test specimen to be measured, the distribution of each micropore to be measured is consistent, and the two ends of the first joint body offer respectively the first jiont treatment hole, the Linear Array Realtime fibre-optical splice is connected with the Z axis precision stage by the first jiont treatment hole, and each optical fiber mounting hole of Linear Array Realtime optical fiber mounting hole is connected with corresponding optical fiber respectively.
5. according to claim 2 based on the micropore device for fast detecting of luminous flux, it is characterized in that: described the second fibre-optical splice, comprise the second joint body and be opened in Linear Array Realtime fiber optic hub on the second joint body, Linear Array Realtime photodetector mounting hole, the Linear Array Realtime fiber optic hub, Linear Array Realtime photodetector mounting hole is communicated with setting correspondingly, each fiber optic hub of Linear Array Realtime fiber optic hub is connected with corresponding optical fiber respectively, and all embed in each photodetector mounting hole of Linear Array Realtime photodetector mounting hole, the photodetector that detects corresponding optical fiber luminous flux is arranged, and the inwall of each photodetector mounting hole is the black setting, in addition, the two ends of the second joint body offer respectively the second jiont treatment hole, and the second fibre-optical splice is connected with the Z axis precision stage by the second jiont treatment hole.
6. according to claim 2 based on the micropore device for fast detecting of luminous flux, it is characterized in that: the signal output part of each photodetector is connected with the corresponding signal input end of multichannel feeble signal processor respectively; This feeble signal processor comprises the voltage-controlled low-pass filter circuit of pre-amplification circuit, second order and the main amplifying circuit that is linked in sequence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220405054 CN203011847U (en) | 2012-08-16 | 2012-08-16 | Micropore rapidly-detecting device based on luminous flux |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220405054 CN203011847U (en) | 2012-08-16 | 2012-08-16 | Micropore rapidly-detecting device based on luminous flux |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203011847U true CN203011847U (en) | 2013-06-19 |
Family
ID=48603429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220405054 Expired - Fee Related CN203011847U (en) | 2012-08-16 | 2012-08-16 | Micropore rapidly-detecting device based on luminous flux |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203011847U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297261A (en) * | 2014-10-14 | 2015-01-21 | 北京工业大学 | Deep-hole inner-wall imaging system |
| CN107913857A (en) * | 2016-10-09 | 2018-04-17 | 中国计量大学 | A kind of brake block liner plate physical dimension detects sorting unit |
| CN108152635A (en) * | 2018-01-08 | 2018-06-12 | 西安科技大学 | A kind of three-phase ac signal vasculum |
| CN109540919A (en) * | 2018-12-24 | 2019-03-29 | 雷果科技无锡有限公司 | A kind of break detection device |
| CN111948334A (en) * | 2020-07-20 | 2020-11-17 | 西安近代化学研究所 | Propellant combustion speed testing device |
-
2012
- 2012-08-16 CN CN 201220405054 patent/CN203011847U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297261A (en) * | 2014-10-14 | 2015-01-21 | 北京工业大学 | Deep-hole inner-wall imaging system |
| CN107913857A (en) * | 2016-10-09 | 2018-04-17 | 中国计量大学 | A kind of brake block liner plate physical dimension detects sorting unit |
| CN108152635A (en) * | 2018-01-08 | 2018-06-12 | 西安科技大学 | A kind of three-phase ac signal vasculum |
| CN109540919A (en) * | 2018-12-24 | 2019-03-29 | 雷果科技无锡有限公司 | A kind of break detection device |
| CN109540919B (en) * | 2018-12-24 | 2023-10-31 | 雷果科技无锡有限公司 | Broken knife detection device |
| CN111948334A (en) * | 2020-07-20 | 2020-11-17 | 西安近代化学研究所 | Propellant combustion speed testing device |
| CN111948334B (en) * | 2020-07-20 | 2022-07-15 | 西安近代化学研究所 | Propellant combustion speed testing device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102830122B (en) | Based on micropore rapid detection method and the device of luminous flux | |
| CN203011847U (en) | Micropore rapidly-detecting device based on luminous flux | |
| US8699012B2 (en) | Optical fiber alignment measurement method and apparatus | |
| CN104101744B (en) | Probe clamp, and LED rapid lightening testing apparatus and method | |
| CN105953739B (en) | Transverse deformation measurement system and method based on laser irradiation intensity change | |
| CN103615992B (en) | Method and device for detecting roughness of inner surface of micro-pore | |
| CN106839992A (en) | A kind of laser micro-displacement detection means based on PSD | |
| CN105588847A (en) | Great-depth OCT (optical coherence tomograph) scanning device and method for nearly transparent minerals | |
| CN108592829A (en) | A kind of measuring device and method of non-cpntact measurement deep hole inside surface roughness | |
| CN202339188U (en) | Collimating laser two-dimensional displacement measurement system | |
| CN101097169A (en) | High precision ray radiation standard seeker roomage response homogeneity measuring systems and method thereof | |
| CN105911394A (en) | PIN-PET optical receiving assembly automatic test system | |
| CN101893679A (en) | Direct-current measuring device for quantum efficiency of solar cell and using method thereof | |
| CN205594105U (en) | PIN -FET opto -receiver module automatic test system | |
| CN109341504A (en) | A kind of automatic calibration position of platform seat calibration method | |
| CN102818607B (en) | Weighing device and method | |
| CN212379757U (en) | Synchronous acquisition system for three-axis five-degree-of-freedom measuring head data of machine tool | |
| CN107202679A (en) | A kind of photoelectric integral type test system and photoelectric test method | |
| CN202814885U (en) | Raw silk knot electronic inspection device | |
| CN206724905U (en) | 2 quintic element measuring instruments of network connector | |
| CN203432983U (en) | Biological micro-sample measuring system | |
| CN216645594U (en) | Automatic light source measuring instrument | |
| CN203148392U (en) | Automatic detection device for diameter of grinding rod | |
| CN221077581U (en) | Broadband light interference type roughness measuring device based on common-path transmission | |
| CN217032758U (en) | Light intensity detector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130619 Termination date: 20160816 |