CN201026206Y - Spectral OCT image forming apparatus based on optical scan delay line - Google Patents
Spectral OCT image forming apparatus based on optical scan delay line Download PDFInfo
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- CN201026206Y CN201026206Y CNU2007201084669U CN200720108466U CN201026206Y CN 201026206 Y CN201026206 Y CN 201026206Y CN U2007201084669 U CNU2007201084669 U CN U2007201084669U CN 200720108466 U CN200720108466 U CN 200720108466U CN 201026206 Y CN201026206 Y CN 201026206Y
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Abstract
The utility model discloses a spectral domain OCT (Optical Coherence Tomography) imaging device based on the rapid-scanning optical delay line. Introduction of the rapid-scanning optical delay line into spectral domain OCT system reference arm can at the same time realize the achromatic phase shifting and system dispersion compensation of the reference light. In particular, when the introduction is based on the double-grating rapid-scanning optical delay line, the group-velocity dispersion and the third-order dispersion that change in a large scope of change and can be combined with any symbols can be generated, so that the dispersion of the reference arm and the sample arm in the spectral domain OCT system obtain an accurate match. The achromatic phase shifting and the dispersion compensation can ensure the axial resolution of the spectral domain OCT system and at the same time eliminate the coherent noises and double the imaging depth of the system. The utility model has a great significance to the plural spectral domain OCT systems with super-high resolution.
Description
Technical Field
The utility model relates to an Optical Coherence Tomography (OCT) technique especially relates to a spectral domain OCT imaging device based on optical scanning delay line.
Background
Optical Coherence Tomography (OCT for short) is a new Optical imaging technique, which can realize non-contact, non-damage, high-resolution imaging of tissue structure and physiological function in vivo, and has wide application in early detection of diseases and in biopsy field.
The spectral domain OCT system collects the spectral components of interference signals in parallel through the high-speed CCD, can obtain the depth information of a sample without axial scanning, and has the characteristics of high speed and high sensitivity. However, the spectral domain OCT has a disadvantage of coherent noise such as mutual interference signals between layers of a sample and self-coherent interference signals of a light source. Meanwhile, the depth information is obtained by carrying out inverse Fourier transformation on the interference spectrum in the real number form collected on the CCD, and the result of Fourier transformation of the real function is Hermite conjugation, so that information items are symmetrical, and the detection depth of the spectral domain OCT system is limited.
The method for eliminating the coherent noise of the spectral domain OCT and expanding the detection depth of the spectral domain OCT is realized by forming a complex form of spectral interference signals. The phase shift is usually realized by moving a reflector of a reference arm by a piezoelectric ceramic driver, a five-step phase shift method is usually adopted, a complex value of a spectral component of an interference signal between a sample and the reference arm is reconstructed by the interference spectral signal obtained after each phase shift, and then inverse Fourier change is carried out, so that coherent noise is eliminated, and the imaging depth is doubled.
Because the OCT system uses a broadband light source to obtain a micron-sized axial resolution, the spectral domain OCT system that uses a piezoelectric ceramic driver to implement phase shifting inevitably has a dispersion problem, which may cause an error in reconstructing an interference spectrum complex signal after phase shifting, which is more obvious in the ultra-high resolution spectral domain OCT system. Meanwhile, in order to avoid the reduction of the axial resolution due to the system dispersion, the spectral domain OCT system adopting the phase shifting method enables the dispersion of the reference arm and the dispersion of the sample arm to be matched through a subsequent numerical dispersion compensation algorithm so as to achieve the optimal resolution. In software dispersion compensation, a predefined image sharpness function is maximized by an iterative process, where the system dispersion is considered to be compensated. However, due to the limitation of the iterative algorithm, the real-time performance of the software dispersion compensation algorithm is not good, and meanwhile, the software dispersion compensation algorithm can only compensate the system dispersion within a small range.
Disclosure of Invention
An object of the utility model is to provide a spectral domain OCT image device based on optical scanning delay line. At the reference arm of the spectral domain OCT system, a fast optical scanning delay line is adopted to realize the phase modulation without dispersion, and simultaneously, the fast optical scanning delay line is used as a dispersion compensation element, so that the dispersion of the reference arm and the dispersion of the sample arm can be matched. In particular, when a fast optical scanning delay line based on a double grating is employed, the system dispersion can be compensated to the third order in a wide range.
The purpose of the utility model is realized through the following technical scheme:
1. a spectral domain OCT imaging method based on optical scanning delay line comprises the following steps:
introducing a rapid optical scanning delay line system into a reference arm of a spectral domain OCT system, and simultaneously realizing phase modulation of reference light and compensation of chromatic dispersion of the system; particularly, when a double-grating rapid optical scanning delay line is adopted, compared with a single-grating optical scanning delay line, the system chromatic dispersion can be accurately compensated in a larger range; the method comprises the following specific steps:
1) Synchronizing a galvanometer in an optical scanning delay line in a reference arm, a scanning probe of a sample arm and a linear array CCD in a detection unit through a synchronous timing circuit to acquire interference spectrum signals;
2) By adjusting optical scanning delayDistance x between rotating shaft and optical axis of in-line galvanometer 0 And the defocusing amount delta z of the grating, and the system dispersion is compensated while the reference light is subjected to non-dispersion phase modulation; when a double-grating rapid optical scanning delay line is adopted, the distance between the two gratings is adjusted, group velocity dispersion and third-order dispersion of any symbol combination with a larger variation range compared with a single-grating optical scanning delay line can be generated, and the dispersion of a reference arm and the dispersion of a sample arm in a spectral domain OCT system are accurately matched;
3) In a scanning period of a galvanometer in the optical scanning delay line, the linear array CCD is controlled by a synchronous time sequence circuit to detect interference spectrum signals at different moments, and the interference spectrum signals are transmitted into a PC through a special interface; in PC, reconstructing a complex expression of the interference spectrum signal by various existing phase-shifting algorithms, such as a three-step method, a four-step method and a five-step method; and then the information of one axial scanning can be obtained through inverse Fourier transform.
2. A spectral domain OCT imaging device based on optical scanning delay line:
the system comprises a broadband light source, an optical isolator, a broadband optical fiber coupler, four polarization controllers, a scanning probe, a detection unit and an optical scanning delay line; the low-coherence light from the broadband light source enters the broadband fiber coupler through the first polarization controller and the optical isolator, one path of the split light enters a reference arm formed by an optical scanning delay line through the second polarization controller, the other path of the split light enters a scanning probe through the third polarization controller, the interference of the two paths of returned light is connected with a detection unit through the fourth polarization controller, and finally the interference of the two paths of returned light is processed in a computer to reconstruct an image.
The scanning probe is as follows: the device comprises a collimating lens, a scanning galvanometer and a focusing lens; and the optical signal entering from the third polarization controller is irradiated on the sample through the collimating lens, the scanning galvanometer and the focusing lens.
The detection unit: the device comprises a first collimating mirror, a transmission grating, a double-cemented achromat and a linear array CCD; an interference light signal entering from the fourth polarization controller is focused on the linear array CCD after passing through the first collimating lens, the transmission grating and the double-cemented achromatic lens; the electric signal generated on the linear array CCD is transmitted into the computer by the image acquisition card.
The optical scanning delay line: the device comprises a first blazed grating, a second collimating mirror, a first plane reflecting mirror, a first Fourier transform lens and a first scanning galvanometer; the first blazed grating is parallel to the first Fourier transform lens, and the distance between the first blazed grating and the front focal plane of the first Fourier transform lens is an adjustable defocusing amount delta z; the first scanning galvanometer is positioned on the back focal plane of the first Fourier transform lens; an included angle between the normal lines of the second collimating mirror and the first plane reflecting mirror and the normal line of the first blazed grating is a blazed angle of the first blazed grating; the second collimating mirror is positioned right above the first plane reflecting mirror; the distance between the rotating shaft and the optical axis of the first scanning galvanometer is an adjustable variable x 0 。
The optical scanning delay line: the device comprises a second blazed grating, a third collimating mirror, a second plane reflecting mirror, a second Fourier transform lens and a second scanning galvanometer; the third blazed grating is parallel to the second Fourier transform lens, and the distance between the third blazed grating and the front focal plane of the second blazed grating is an adjustable defocusing amount delta z; the second scanning galvanometer is positioned on the back focal plane of the second Fourier transform lens; the distance between the rotating shaft and the optical axis of the second scanning galvanometer is an adjustable variable x 0 (ii) a The second blazed grating and the third blazed grating are parallel to each other, the scribed lines of the second blazed grating and the third blazed grating are parallel to each other, and the distance between the second blazed grating and the third blazed grating is an adjustable amount d; the included angle between the third collimating mirror and the normal of the second blazed grating is an adjustable inclination angle, and the included angle is adjusted to ensure that the central wavelength is lambda 0 The light is diffracted by the second blazed grating and the third blazed grating and then is emitted along the direction of the optical axis; the third collimating mirror is positioned right above the second plane reflecting mirror; the distance between the rotating shaft and the optical axis of the second scanning galvanometer is an adjustable variable x 0 。
Compared with the background art, the utility model discloses the beneficial effect who has is:
1. a dispersion-free phase shift is achieved. The reference light can be subjected to dispersion-free phase shift through the optical scanning delay line, so that the phase shift error caused by the bandwidth of a light source is eliminated, and the subsequent algorithm error is avoided. By non-dispersive phase shifting, the interference light between the sample and reference arms can be constructed in complex form. Spectral signal, thereby eliminating coherent noise and doubling the imaging depth.
2. Hardware compensates for system dispersion. In an optical scanning delay line, system dispersion is compensated by adjusting the defocus amount of the grating. Especially when a double grating optical scanning delay line is used, the independent variable of the grating distance is increased, group velocity dispersion and third-order dispersion which change in a wide range can be generated, and therefore the system dispersion can be compensated to the third order. The method has important significance in an ultrahigh-resolution spectral domain OCT system.
3. The dispersion-free phase shift and the dispersion compensation are simultaneously realized by optically scanning the delay line. The compactness and reliability of the spectral domain OCT system can be achieved.
Drawings
Fig. 1 is a system diagram of an embodiment of the present invention, wherein the reference arm is a single grating optical scanning delay line;
FIG. 2 is a schematic diagram of the structure of a reference arm of a spectral domain OCT system when the reference arm is a dual grating optical scanning delay line;
fig. 3 is a block diagram of a control system of the spectral domain OCT system based on an optical scanning delay line according to the present invention.
In the figure: 1. a broadband light source, 2, an optical isolator, 3, a broadband optical fiber coupler, 4, a polarization controller, 5, a collimating lens, 6, a scanning galvanometer, 7, a focusing lens, 8, a sample, 9, a blazed grating, 10, a collimating lens, 11, a plane mirror, 12, a Fourier transform lens, 13, a scanning galvanometer, 14, a collimating lens, 15, a transmission grating, 16, a double-cemented achromat lens, 17, a linear array CCD (charge coupled device), 18, a blazed grating, 19, a blazed grating, 20, an image acquisition card, 21, a computer, 22, a scanning probe, 23, an optical scanning delay line, 24 and a detection unit.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
As shown in fig. 1, the present invention includes a broadband light source 1, an optical isolator 2, a broadband fiber coupler 3, four polarization controllers 4, a scanning probe 22, a detection unit 24 and an optical scanning delay line 23; the low-coherence light from the broadband light source 1 enters the broadband fiber coupler 3 through the first polarization controller 4 and the optical isolator 2, after the light is split, one path enters a reference arm formed by an optical scanning delay line 23 through the second polarization controller 4, the other path enters the scanning probe 22 through the third polarization controller 4, the interference of the two paths of returned light is connected with the detection unit 24 through the fourth polarization controller 4, and finally the interference is processed in the computer 21 to reconstruct an image.
The scanning probe 22: comprises a collimating lens 5, a scanning galvanometer 6 and a focusing lens 7; the optical signal entered from the third polarization controller 4 is irradiated onto the sample 8 through the collimator lens 5, the scanning galvanometer 6, and the focusing lens 7.
The detection unit 24: the device comprises a first collimating lens 14, a transmission grating 15, a double-cemented achromat lens 16 and a linear array CCD17; an interference light signal entering from the fourth polarization controller 4 passes through the first collimating lens 14, the transmission grating 15 and the double-cemented achromat 16 and is focused on the linear array CCD17; the electrical signal generated on the linear array CCD17 is transmitted to the computer 21 through the image acquisition card 20.
The optical scanning delay line 23: comprises a first blazed grating 9, a second collimating mirror 10, a first plane mirror 11, a first Fourier transform lens 12 and a first scanning galvanometer 13; the first blazed grating 9 is parallel to the first Fourier transform lens 12, and the distance from the front focal plane of the first blazed grating is an adjustable defocusing amount delta z; the first scanning galvanometer 13 is positioned on the back focal plane of the first Fourier transform lens 12; second collimating mirror 10 and first planeThe included angle between the normal of the reflector 11 and the normal of the first blazed grating 9 is the blaze angle of the first blazed grating 9; the second collimating mirror 10 is positioned right above the first plane reflecting mirror 11; the distance between the rotating shaft and the optical axis of the first scanning galvanometer 13 is an adjustable variable x 0 。
As shown in fig. 2, the optical scanning delay line 23: the device comprises a second blazed grating 18, a third blazed grating 19, a third collimating mirror 10, a second plane reflecting mirror 11, a second Fourier transform lens 12 and a second scanning galvanometer 13; wherein the third blazed grating 19 is parallel to the second Fourier transform lens 12 and is in front of the sameThe distance of the surface is an adjustable defocusing amount delta z; the second scanning galvanometer 13 is positioned on the back focal plane of the second Fourier transform lens 12; the distance between the rotating shaft and the optical axis of the second scanning galvanometer 13 is an adjustable variable x 0 (ii) a The second blazed grating 18 and the third blazed grating 19 are parallel to each other, and the lines thereof are also parallel to each other, and the distance between the two is an adjustable amount d; the included angle between the third collimating mirror 10 and the normal of the second blazed grating 18 is an adjustable inclination angle, and the size of the included angle is adjusted to enable the central wavelength to be lambda 0 The light is diffracted by the second blazed grating 18 and the third blazed grating 19 and then is emitted along the optical axis direction; the third collimating mirror 10 is positioned right above the second plane reflecting mirror 11; the distance between the rotating shaft and the optical axis of the second scanning galvanometer 13 is an adjustable variable x 0 。
As shown in fig. 1, low coherence light emitted from a broadband light source 1 enters a broadband fiber coupler 3 through a polarization controller 4 and an optical isolator 2, the split light enters a reference arm and a sample arm through the polarization controller 4 respectively, the light of the reference arm is collimated by a collimating mirror 10 and split by a blazed grating, each spectral component is focused on a scanning lens 13 through a fourier transform lens 12, modulated by the scanning lens 13, returned to the blazed grating 9 through the fourier transform lens 12 again, diffracted again by the blazed grating 9, and projected on a plane mirror 11. The spectral components reflected by the plane mirror 11 return along the original path and are finally synthesized into the same light beam, the light beam returns to the broadband optical fiber coupler 3, the light beams returned by the same product arm interfere with each other, then enter the detection unit 24, are divided into various wavelengths by the transmission grating 15, and then are focused on the linear array CCD17 by the double-cemented achromatism lens 16. Finally, the interference spectral components are transmitted to a computer 21 for processing through an image acquisition card 20.
In fig. 1, after the reference light passes through the optical scanning delay line 23, the phase of the light wave with wavelength λ changes:
φ(k)=2kδ+2kΔzcosβ+2kx 0 θ-2kθfsinβ (1)
where k is the wavenumber and k =2 pi/λ, δ is the initial optical path difference, which can be considered to be δ =0, θ is the rotation angle of the scanning galvanometer 13, f is the focal length of the fourier transform lens 12, and β is represented by psin β = m (λ - λ:) 0 ) Determining p is the grating constant, λ 0 Is the center wavelength, and the Taylor is expanded to:
wherein D k =-8π 2 m 2 Δz/p 2 k 0 3 D k ′=24π 2 m 2 Δz/p 2 k 0 4 By varying Δ z, D can be varied k And D k ' so that Group Velocity Dispersion (GVD) and third-order dispersion (TOD) in the system can be compensated. A plane mirror is placed on a sample arm, inverse Fourier transform is carried out on interference spectrum signals to obtain the value of A-scan, the width of an envelope is changed by adjusting delta z at the moment, and when the half width of the envelope is basically matched with the coherence length of the broadband light source 1, the delta z at the moment can be considered to compensate the chromatic dispersion of the system. While regulating x 0 =-mfλ 0 P, where phi (k) is approximately equal to 2x 0 θk 0 +2Δzk
The interference signal after dispersion compensation is split by the transmission grating 15 and focused on the linear array CCD17 by the double-cemented achromatic lens 16, and the interference spectrum signal collected by any pixel point of the linear array CCD17 is as follows:
from the above equation, the interference spectral components between the reference arm and the sample arm can be seen, with the phase term 4 × (X-Y) 0 k 0 θ does not vary with k, thus achieving dispersion-free phase modulation. And the scanning galvanometer 6 of the reference arm, the scanning galvanometer 13 in the optical scanning delay line 23 and the exposure time of the linear array CCD17 in the detection unit are controlled by a synchronous circuit to acquire signals. If the frequency of the scanning galvanometer 6 in the sample arm is set to be 30Hz, the frequency of the scanning galvanometer 13 in the optical scanning delay line 23 is set to be 500Hz, 5 interference spectrum signals are acquired at equal intervals by controlling the linear array CCD17 through the synchronous circuit in one period of the scanning galvanometer 13 in the optical scanning delay line 23, and then interference spectrum signal values under different phase shift amounts are obtained, at the moment, the phase and the amplitude of the interference spectrum signals can be calculated by using the existing five-step phase shift algorithm, and the interference spectrum signals in a complex form are obtained as follows:
at this time, the obtained complex interference spectrum signal is subjected to inverse Fourier transform, so that the depth information of the primary A-scan with the mirror image and the coherent noise eliminated can be obtained, and the detection depth is doubled.
Fig. 2 is a schematic diagram of an optical scanning delay line with a double grating as a reference arm. In which the blazed grating 18 and the blazed grating 19 are placed in parallel and their scribes are parallel to each other. Compared with the optical scanning delay line of the single grating shown by the reference arm in fig. 1, the reference light enters the optical scanning delay line through the collimating mirror 10, is split by the blazed grating 18 and the blazed grating 19, passes through the fourier transform lens 12 and the scanning vibrating mirror 13 in sequence, is reflected by the plane reflecting mirror 11, and then returns to the broadband optical fiber coupler 3 along the original path. The phase change phi (k) of the optical wave with the wave number k is related to the spacing d between the two blazed gratings. The double-grating optical scanning delay line can generate a dispersion compensation amount in a larger range compared with a single-grating optical scanning delay line by adjusting the grating distance d and the grating defocusing amount delta z, and can simultaneously compensate the Group Velocity Dispersion (GVD) and the third-order dispersion (TOD) of the system.
Fig. 3 is a block diagram of a control system of a spectral domain OCT system based on an optical scanning delay line. The interference spectrum signal collected by the linear array CCD17 is transmitted to the computer 21 by the image collecting card 20. The computer 21 simultaneously generates synchronous timing to control the scanning galvanometer 13 in the optical scanning delay line 23 and the scanning probe 22 of the sample arm. In a scanning period of the scanning galvanometer 13 in the optical scanning delay line 23, the computer 21 controls the linear array CCD17 to collect 5 interference spectrum signals at the same interval time, and after the scanning period of the scanning galvanometer 13 is finished, the computer 21 controls the scanning probe 22 to scan the next transverse position.
Claims (5)
1. A spectral domain OCT imaging device based on optical scanning delay line is characterized in that: the device comprises a broadband light source (1), an optical isolator (2), a broadband optical fiber coupler (3), four polarization controllers (4), a scanning probe (22), a detection unit (24) and an optical scanning delay line (23); low-coherence light from a broadband light source (1) enters a broadband optical fiber coupler (3) through a first polarization controller (4) and an optical isolator (2), after light splitting, one path of light enters a reference arm formed by an optical scanning delay line (23) through a second polarization controller (4), the other path of light enters a scanning probe (22) through a third polarization controller (4), interference of two paths of returned light is connected with a detection unit (24) through a fourth polarization controller (4), and finally the interference of the two paths of light is processed in a computer (21) to reconstruct an image.
2. An optical scanning delay line based spectral domain OCT imaging device according to claim 1, characterized in that said scanning probe (22): comprises a collimating lens (5), a scanning galvanometer (6) and a focusing lens (7); the light signal entering from the third polarization controller (4) is irradiated on a sample (8) through a collimating lens (5), a scanning galvanometer (6) and a focusing lens (7).
3. An optical scanning delay line based spectral domain OCT imaging device according to claim 1, characterized in that said detection unit (24): the device comprises a first collimating mirror (14), a transmission grating (15), a double-cemented achromat (16) and a linear array CCD (17); an interference light signal entering from the fourth polarization controller (4) passes through the first collimating mirror (14), the transmission grating (15) and the double-cemented achromat lens (16) and is focused on the linear array CCD (17); the electric signal generated on the linear array CCD (17) is transmitted into a computer (21) through an image acquisition card (20).
4. An optical scanning delay line based spectral domain OCT imaging device according to claim 1, characterized in that said optical scanning delay line (23): comprises a first blazed grating (9), a second collimating mirror (10), a first plane reflecting mirror (11), a first Fourier transform lens (12) and a first scanning galvanometer (13); the first blazed grating (9) is parallel to the first Fourier transform lens (12), and the distance between the first blazed grating and the front focal plane of the first blazed grating is adjustable and is away from the focal length delta z; the first scanning galvanometer (13) is positioned on the back focal plane of the first Fourier transform lens (12); the included angle between the normal of the second collimating mirror (10) and the first plane reflecting mirror (11) and the normal of the first blazed grating (9) is the blazed angle of the first blazed grating (9); the second collimating mirror (10) is positioned right above the first plane reflecting mirror (11); the distance between the rotating shaft and the optical axis of the first scanning galvanometer (13) is an adjustable variable x 0 。
5. An optical scanning delay line based spectral domain OCT imaging device according to claim 1, characterized in that said optical scanning delay line (23): comprises a second blazed grating (18), a third blazed grating (19), a third collimating mirror (10), a second plane reflecting mirror (11), a second Fourier transform lens (12) and a second scanning galvanometer (13); the third blazed grating (19) is parallel to the second Fourier transform lens (12), and the distance between the third blazed grating and the front focal plane of the second Fourier transform lens is an adjustable defocusing amount delta z; the second scanning galvanometer (13) is positioned on the back focal plane of the second Fourier transform lens (12); the distance between the rotating shaft and the optical axis of the second scanning galvanometer (13) is an adjustable variable x 0 (ii) a Second oneThe blazed grating (18) and the third blazed grating (19) are parallel to each other, and the grooves thereof are also parallel to each other, and the distance between the two is an adjustable amount d; the included angle between the third collimating mirror (10) and the normal line of the second blazed grating (18) is an adjustable inclination angle, and the size of the included angle is adjusted to enable the central wavelength to be lambda 0 The light is diffracted by the second blazed grating (18) and the third blazed grating (19) and then is emitted along the direction of an optical axis; the third collimating mirror (10) is positioned right above the second plane reflecting mirror (11); the distance between the rotating shaft and the optical axis of the second scanning galvanometer (13) is an adjustable variable x 0 。
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Cited By (4)
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CN102494623A (en) * | 2011-11-11 | 2012-06-13 | 中国科学院光电技术研究所 | Method for non-contact measuring center to center distance of lens optical surfaces and measuring device |
CN103263248A (en) * | 2013-05-09 | 2013-08-28 | 浙江大学 | Bifocal binocular optical coherence tomography (OCT) real-time imaging system and method on basis of ring cavity frequency sweep |
CN108318143A (en) * | 2017-12-18 | 2018-07-24 | 中国科学院西安光学精密机械研究所 | The measuring system of high-repetition-rate ultrashort light pulse carrier envelope phase |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102494623A (en) * | 2011-11-11 | 2012-06-13 | 中国科学院光电技术研究所 | Method for non-contact measuring center to center distance of lens optical surfaces and measuring device |
CN102494623B (en) * | 2011-11-11 | 2014-05-07 | 中国科学院光电技术研究所 | Measuring method of non-contact measuring device of center to center distance of lens optical surfaces |
CN103263248A (en) * | 2013-05-09 | 2013-08-28 | 浙江大学 | Bifocal binocular optical coherence tomography (OCT) real-time imaging system and method on basis of ring cavity frequency sweep |
CN108318143A (en) * | 2017-12-18 | 2018-07-24 | 中国科学院西安光学精密机械研究所 | The measuring system of high-repetition-rate ultrashort light pulse carrier envelope phase |
CN109458959A (en) * | 2018-12-24 | 2019-03-12 | 南京理工大学 | A kind of change inclination angle phase shift grazing-incidence interferometer measuring device and method |
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