CN107953037A - A kind of high-precision laser three dimensional sculpture device and method based on frequency sweep OCT - Google Patents
A kind of high-precision laser three dimensional sculpture device and method based on frequency sweep OCT Download PDFInfo
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- CN107953037A CN107953037A CN201711316718.1A CN201711316718A CN107953037A CN 107953037 A CN107953037 A CN 107953037A CN 201711316718 A CN201711316718 A CN 201711316718A CN 107953037 A CN107953037 A CN 107953037A
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- sweep oct
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- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000001514 detection method Methods 0.000 claims abstract description 30
- 238000010147 laser engraving Methods 0.000 claims abstract description 23
- 239000000835 fiber Substances 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000002441 reversible effect Effects 0.000 claims description 4
- 238000010408 sweeping Methods 0.000 claims description 3
- 241000208340 Araliaceae Species 0.000 claims 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 claims 1
- 235000003140 Panax quinquefolius Nutrition 0.000 claims 1
- 238000001914 filtration Methods 0.000 claims 1
- 235000008434 ginseng Nutrition 0.000 claims 1
- 230000008569 process Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005314 correlation function Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
Abstract
The invention discloses a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT, including：Laser engraving system, frequency sweep OCT systems, the focus of the sample detection laser of the frequency sweep OCT systems is overlapped with the focus of the engraving laser of the laser engraving system, it is technical that frequency sweep OCT image technology is applied to 3-d laser carving, so as to improve the precision of laser three-dimensional carving device, which can be widely used in laser engraving industry.On the other hand, the three dimensional sculpture method based on apparatus of the present invention is additionally provided, so as to fulfill the high accuracy of 3-d laser carving.
Description
Technical field
The invention is related to laser-engraving technique field, more particularly to a kind of 3-d laser carving based on frequency sweep OCT
Device and method.
Background technology
The 3-d laser carving technology of hard material to three-dimensional CAD model first by carrying out discrete hierarchy slicing, secondly
Triangulation is carried out to model according to serial section profile information, scanning pattern is generated, laser beam is then controlled by scanning means
Scan and etch in making choice property of substrate surface, form the planar graph of this layer.After workbench rises, start the section of a new round
With scanning；Constantly repeat this process, successively accumulate, until whole model slice complete, finally engraving parent on leave or
Cloudy or sun 3-D graphic.Laser engraving forming is used as a kind of advanced manufacturing technology, is answered in many fields at present
With.
Existing 3-d laser carving technology is difficult to realize high-precision engraving, and reason is not controlling during actual engraving
The depth of laser engraving processed, causes to carve excessive or very few, and error is big.
The content of the invention
Present invention solves the technical problem that it is：Existing laser three-dimensional carving device engraving precision is low, and error is big.
The solution that the present invention solves its technical problem is one side：A kind of high-precision laser based on frequency sweep OCT
Three dimensional sculpture device, including：Laser engraving system, it is characterised in that further include：Frequency sweep OCT systems, the frequency sweep OCT systems
The focus of sample detection laser overlapped with the focus of the engraving laser of the laser engraving system.
Further, the frequency sweep OCT systems include：Swept light source, optical splitter, speculum, 2-D vibration mirror device, convergence are saturating
Mirror, detection device, reference mirror, computer, Z axis stepper motor, the swept light source are used to send sweeping laser, the optical splitter
For the sweeping laser to be divided into sample detection laser and reference laser, the speculum, 2-D vibration mirror device are used for successively
Reflect and by the sample detection laser reflection into the convergent lens, the convergent lens is used to swash the sample detection
Light is converged on sample to be carved, and the reference mirror is used to reflect the reference laser, and the detection device is used to detect institute
The interference signal of the reference laser of reference mirror reflection and the sample detection laser of sample to be carved reflection is stated, and the interference is believed
Number formed digital signal be sent in the computer, the computer be used for according to the Digital Signals Z axis walk
Stepper motor.
Further, filter plate is equipped between the optical splitter and the speculum.
Further, the optical splitter is 2 × 2 fiber couplers, 2 × 2 fiber coupler respectively with the sweep light
Source, detection device, filter plate, the connection of reference mirror light path.
Further, the detection device includes：Balanced detector, 1 × 2 fiber coupler, 1 × 2 fiber coupler
Input terminal be connected with 2 × 2 fiber coupler light path, the output terminal of 1 × 2 fiber coupler respectively with the balance
The positive input of detector is connected with reverse input end light path.
Further, the device of the invention further includes anti-vibration platform, and the anti-vibration platform side is used to place to be carved
Sample, the driving axis connection of opposite side and the Z axis stepper motor.
On the other hand, a kind of high-precision laser three dimensional sculpture method based on frequency sweep OCT, the method are based on frequency sweep OCT
High-precision laser three dimensional sculpture device, including step：Default engraving requires and establishes three-dimensional CAD model as requested；According to
The three-dimensional CAD model generation engraving route；According to the engraving route control 2-D vibration mirror device, the movement of Z axis stepper motor；
Once having reached default position at engraving, laser engraving light source is closed in control at once, until moving to next place to be carved.
The beneficial effects of the invention are as follows：On the one hand, the device of the invention, including frequency sweep OCT systems, the frequency sweep OCT systems
The focus of the sample detection laser of system is overlapped with the focus of the engraving laser of the laser engraving system, by frequency sweep OCT image skill
Art is applied to that 3-d laser carving is technical, so as to improve the precision of laser three-dimensional carving device, which can extensive use
In laser engraving industry.
On the other hand, method of the invention is based on the device of the invention, so as to fulfill the high accuracy of 3-d laser carving.
Brief description of the drawings
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described.Obviously, described attached drawing is the part of the embodiment of the present invention, rather than is all implemented
Example, those skilled in the art without creative efforts, can also obtain other designs according to these attached drawings
Scheme and attached drawing.
Fig. 1 is the structure diagram of the invention device；
Fig. 2 is the flow chart of engraving process.
Embodiment
Carried out clearly below with reference to the technique effect of the design of embodiment and attached drawing to the present invention, concrete structure and generation
Chu, be fully described by, to be completely understood by the purpose of the present invention, feature and effect.Obviously, described embodiment is this hair
Bright part of the embodiment, rather than whole embodiments, based on the embodiment of the present invention, those skilled in the art is not paying
The other embodiment obtained on the premise of creative work, belongs to the scope of protection of the invention.In addition, be previously mentioned in text
All connection/connection relations, not singly refer to component and directly connect, and refer to be added deduct by adding according to specific implementation situation
Few couple auxiliary, to form more preferably draw bail.Each technical characteristic in the invention, in not conflicting conflict
Under the premise of can be with combination of interactions.
Embodiment 1, with reference to figure 1, a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT, including：Laser engraving
System, frequency sweep OCT systems, the focus of the sample detection laser of the frequency sweep OCT systems and the engraving of the laser engraving system
The focus of laser overlaps.
The laser engraving system includes：Laser engraving light source 1,2-D vibration mirror device 11, convergent lens 12, collimating mirror 2.
The frequency sweep OCT systems include：Swept light source 3, optical splitter, collimating mirror 5, convergent lens 6, reference mirror 7, speculum 10, two dimension
Galvanometer device 11, convergent lens 12, detection device, computer 18, Z axis stepper motor 15, the detection device include：Balance is visited
Device 17,1 × 2 fiber coupler 16 are surveyed, the optical splitter is 2 × 2 fiber couplers 4.The laser engraving light source 1 passes through collimation
Device 2 sends engraving laser to 2-D vibration mirror device 11, and the 2-D vibration mirror device 11 is by the laser reflection of carving to convergence
In lens 12, and focused on by convergent lens 12 on sample 13 to be carved.Swept light source 3 projects very small bandwidth laser at the same time,
It is divided into sample detection laser and reference laser after into 2 × 2 fiber couplers 4.Sample detection laser is emitted to filter from collimater 8
Mating plate 9,2-D vibration mirror device 11 is reached after speculum 10, finally focuses on sample 13 to be carved through convergent lens 12
On.As an optimization, the sample to be carved 13 is placed on anti-vibration platform 14, and anti-vibration platform 14 is connected to Z-direction stepping electricity
Machine 15, computer 18 control Z-direction stepper motor 15 to carry out the movement in Z-direction.The reference laser is emitted from collimater 5
To convergent lens 6, after the reflection of speculum 7, reversible light path is formed.Light beam with light path with reference to information returns to 2 × 2 optical fiber
In coupler 4.
The sample detection laser is reflected by the engraving sample 13, is returned by original optical path, into 2 × 2 fiber couplers 4
Interference light is formed with reference laser.The interference light is divided for the identical interference light of two-way, difference by 1 × 2 fiber coupler 16
The positive input and reverse input end for being balanced detector 17 receive, and eliminate the DC component of part, the i.e. noise such as background
Signal, last computer 18 gather interference light signal by DAQ data collecting cards.Computer 18 counts the interference light signal
Calculate, obtain analog voltage, which exports to 2-D vibration mirror device 11 and Z-direction stepper motor 15, controls Z-direction
Stepper motor 15 carries out the movement on Z direction of principal axis, realizes the focusing of engraving laser.Can be to carving sample to defocused engraving laser
Product 13 carry out engraving operation.
The present apparatus passes through the information at frequency sweep OCT system monitoring engravings, feedback control 2-D vibration mirror system 11 and Z-direction
The running of stepper motor 15, realizes the 3-d laser carving of automation.The measurement precision of frequency sweep OCT image technology is high, this
A kind of engraving precision of the high-precision laser three dimensional sculpture device based on frequency sweep OCT provided is invented up to 20 μm.
Specific engraving process is as follows：
With reference to figure 2, first, laser three-dimensional carving device is established, and three-dimensional CAD is established in computer 18 according to engraving requirement
Model, generates the route of 3-d laser carving, and engraving route then is converted into control signal.By the X and Y-axis in control signal
The signal output in direction controls the focus and engraving laser of sample detection laser to 2-D vibration mirror device 11,2-D vibration mirror device 11
Focus moved in X, Y-axis plane；The signal of Z-direction is then output to Z-direction stepper motor 15 to control anti-vibration platform
14 Z-direction moves, and controls the focus of sample detection laser to keep overlapping with the focus of laser engraving in whole moving process.
Once having reached default position at the engraving, computer 18 controls at once closes laser engraving light source 1, until moving to
Next place to be carved.By this setting, it is excessive or very few to avoid laser engraving amount, realizes engraving monitoring in real time, reduces
Detection process after processing, greatly improves work efficiency.
The interference light signal for reaching balanced detector 17 in frequency sweep OCT systems follows typical dual-beam in relating to rule：
Formula (1)；
Δ l is the optical path difference detected between laser and reference laser in formula (1)；IS, IRThe respectively light intensity of two-beam；rSR
(Δ l) is the normalization complex cross correlation function of reference laser and detection laser；k0It is the propagation constant of swept light source 3；It is sample
Product light wave relative to reference laser ripple initial phase；What frequency sweep OCT systematic surveys obtained is at measured matter different depthValue.
According to the detection principle of frequency sweep OCT systems, after establishing three-dimensional CAD model in computer 18, computer 18 calculates three
In dimension space, the midpoint of sample 13 to be carved in the Z-axis direction, determines to be used as the face of referring to using the cross section where midpoint.Selection
Cross section where midpoint is advantageous in that as with reference to face, takes full advantage of the coherence length l of frequency sweep OCT systemsc, such as formula
(2) shown in, i.e. investigative range makes to monitor in real time and is in optimum range all the time.
Computer 18 calculates each point to be carved to the distance, delta Z of the plane of referencen, i.e., the light path between exploring laser light and reference laser
Difference.During monitoring interference light signal in real time, as Δ ZnDuring=Δ l, it is default that computer 18 judges that the engraving point has met
Engraving effect, laser engraving light source 1 is closed in control at once, until moving to next place to be carved, circulates this process until carving
Carve process to complete, obtain 3-d laser carving processed finished products.Shown in the precision dz such as formulas (3) of 3-d laser carving.
The better embodiment of the present invention is illustrated above, but the invention is not limited to the implementation
Example, those skilled in the art can also make a variety of equivalent modifications on the premise of without prejudice to spirit of the invention or replace
Change, these equivalent modifications or replacement are all contained in the application claim limited range.
Claims (7)
1. a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT, including：Laser engraving system, it is characterised in that also
Including：Frequency sweep OCT systems, the focus of the sample detection laser of the frequency sweep OCT systems and the engraving of the laser engraving system
The focus of laser overlaps.
A kind of 2. high-precision laser three dimensional sculpture device based on frequency sweep OCT according to claim 1, it is characterised in that：
The frequency sweep OCT systems include：Swept light source, optical splitter, speculum, 2-D vibration mirror device, convergent lens, detection device, ginseng
Mirror, computer, Z axis stepper motor are examined, the swept light source is used to send sweeping laser, and the optical splitter is used for the frequency sweep
Laser is divided into sample detection laser and reference laser, and the speculum, 2-D vibration mirror device are used for reflection successively and by the samples
Product examine surveys laser reflection into the convergent lens, and the convergent lens is used to converge in the sample detection laser to be carved
On sample, the reference mirror is used to reflect the reference laser, and the detection device is used to detect the reference mirror reflection
The interference signal of reference laser and the sample detection laser of sample to be carved reflection, and the interference signal is formed into digital signal
It is sent in the computer, the computer is used for the Z axis stepper motor according to the Digital Signals.
A kind of 3. high-precision laser three dimensional sculpture device based on frequency sweep OCT according to claim 2, it is characterised in that：
Filter plate is equipped between the optical splitter and the speculum.
A kind of 4. high-precision laser three dimensional sculpture device based on frequency sweep OCT according to claim 3, it is characterised in that：
The optical splitter is 2 × 2 fiber couplers, 2 × 2 fiber coupler respectively with the swept light source, detection device, filtering
Piece, the connection of reference mirror light path.
A kind of 5. high-precision laser three dimensional sculpture device based on frequency sweep OCT according to claim 4, it is characterised in that
The detection device includes：Balanced detector, 1 × 2 fiber coupler, the input terminal of 1 × 2 fiber coupler and described 2
× 2 fiber coupler light paths connect, and the output terminal of 1 × 2 fiber coupler is positive defeated with the balanced detector respectively
Enter end to connect with reverse input end light path.
6. according to a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT of claim 1-5 any one of them, it is special
Sign is：Anti-vibration platform is further included, the anti-vibration platform side is used to place sample to be carved, opposite side and the Z axis stepping
The driving axis connection of motor.
A kind of 7. high-precision laser three dimensional sculpture method based on frequency sweep OCT, it is characterised in that the method is based on frequency sweep OCT
High-precision laser three dimensional sculpture device, including step：Default engraving requires and establishes three-dimensional CAD model as requested；According to
The three-dimensional CAD model generation engraving route；According to the engraving route control 2-D vibration mirror device, the movement of Z axis stepper motor；
Once having reached default position at engraving, laser engraving light source is closed in control at once, until moving to next place to be carved.
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| CN109807471A (en) * | 2019-02-01 | 2019-05-28 | 佛山科学技术学院 | A kind of laser mark printing device and method |
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| WO2020107336A1 (en) * | 2018-11-29 | 2020-06-04 | 合刃科技（深圳）有限公司 | Welding trajectory tracking method, method and system |
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| WO2020107336A1 (en) * | 2018-11-29 | 2020-06-04 | 合刃科技（深圳）有限公司 | Welding trajectory tracking method, method and system |
| CN111344102A (en) * | 2018-11-29 | 2020-06-26 | 合刃科技（深圳）有限公司 | Welding track tracking method, device and system |
| CN109807471A (en) * | 2019-02-01 | 2019-05-28 | 佛山科学技术学院 | A kind of laser mark printing device and method |
| CN109807471B (en) * | 2019-02-01 | 2024-03-26 | 佛山科学技术学院 | Laser marking device and method |
| CN110899988A (en) * | 2019-11-27 | 2020-03-24 | 佛山科学技术学院 | Laser marking focusing control method |
| CN110899988B (en) * | 2019-11-27 | 2021-04-23 | 佛山科学技术学院 | Laser marking focusing control method |
| WO2021164202A1 (en) * | 2020-02-21 | 2021-08-26 | 苏州大学 | Dual-field-of-view optical coherence tomography imaging system and material thickness measurement method |
| WO2021204960A1 (en) * | 2020-04-09 | 2021-10-14 | Trumpf Laser Gmbh | Method, machine tool and computer program for sensing a workpiece position by means of oct |
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