CN207824219U - A kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT - Google Patents
A kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT Download PDFInfo
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- CN207824219U CN207824219U CN201721739162.2U CN201721739162U CN207824219U CN 207824219 U CN207824219 U CN 207824219U CN 201721739162 U CN201721739162 U CN 201721739162U CN 207824219 U CN207824219 U CN 207824219U
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- laser
- frequency sweep
- sweep oct
- sample
- engraving
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Abstract
The utility model discloses a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT, including：Laser engraving system, frequency sweep OCT systems, the focus of the sample detection laser of the frequency sweep OCT systems is overlapped with the focus of the engraving laser of the laser engraving system, it is technical that frequency sweep OCT image technology is applied to 3-d laser carving, to improve the precision of laser three-dimensional carving device, which can be widely used in laser engraving industry.
Description
Technical field
The invention is related to laser-engraving technique field, more particularly to a kind of 3-d laser carving based on frequency sweep OCT
Device.
Background technology
The 3-d laser carving technology of hard material to three-dimensional CAD model first by carrying out discrete hierarchy slicing, secondly
Triangulation is carried out to model according to serial section profile information, scan path is generated, laser beam is then controlled by scanning means
Selective scanning etching is carried out in substrate surface, forms the planar graph of this layer.After workbench rises, start the slice of a new round
With scanning；Constantly repeat this process, successively accumulate, until entire model slice complete, finally engraving parent on leave or
Cloudy or sun 3-D graphic.Laser engraving forming is used as a kind of advanced manufacturing technology, is answered in many fields at present
With.
Existing 3-d laser carving technology is difficult to realize high-precision engraving, and reason is not controlling during practical engraving
The depth of laser engraving processed, causes to carve excessive or very few, and error is big.
Utility model content
The utility model solve the technical issues of be：Existing laser three-dimensional carving device engraving precision is low, and error is big.
The solution that the utility model solves its technical problem is：A kind of high-precision laser based on frequency sweep OCT is three-dimensional
Carving device, including：Laser engraving system, frequency sweep OCT systems, the focus of the sample detection laser of the frequency sweep OCT systems with
The focus of the engraving laser of the laser engraving system overlaps.
Further, the frequency sweep OCT systems include：Swept light source, speculum, 2-D vibration mirror device, is assembled thoroughly optical splitter
Mirror, detection device, reference mirror, computer, Z axis stepper motor, the swept light source is for sending out sweeping laser, the optical splitter
For the sweeping laser to be divided into sample detection laser and reference laser, the speculum, 2-D vibration mirror device are for successively
It reflects and by the sample detection laser reflection to the convergent lens, the convergent lens is for swashing the sample detection
Light converges on sample to be carved, and the reference mirror is for reflecting the reference laser, and the detection device is for detecting institute
The interference signal of the reference laser of reference mirror reflection and the sample detection laser of sample to be carved reflection is stated, and the interference is believed
Number forming digital signal is sent in the computer, and the computer for controlling Z axis step according to the digital signal
Stepper motor.
Further, filter plate is equipped between the optical splitter and the speculum.
Further, the optical splitter be 2 × 2 fiber couplers, 2 × 2 fiber coupler respectively with the sweep light
Source, detection device, filter plate, the connection of reference mirror light path.
Further, the detection device includes：Balanced detector, 1 × 2 fiber coupler, 1 × 2 fiber coupler
Input terminal connect with 2 × 2 fiber coupler light path, the output end of 1 × 2 fiber coupler respectively with the balance
The positive input of detector is connected with reverse input end light path.
Further, the device of the invention further includes anti-vibration platform, and the anti-vibration platform side is to be carved for placing
Sample, the driving axis connection of the other side and the Z axis stepper motor.
The utility model has the beneficial effects that：The device of the utility model, including frequency sweep OCT systems, the frequency sweep OCT
The focus of the sample detection laser of system is overlapped with the focus of the engraving laser of the laser engraving system, by frequency sweep OCT image
Technology is applied to that 3-d laser carving is technical, and to improve the precision of laser three-dimensional carving device, which can answer extensively
Used in laser engraving industry.
Description of the drawings
It is required in being described below to embodiment in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing to be used is briefly described.Obviously, described attached drawing is a part of the embodiment of the utility model, rather than complete
Portion's embodiment, those skilled in the art without creative efforts, can also be obtained according to these attached drawings it
His design scheme and attached drawing.
Fig. 1 is the structural schematic diagram of the invention device；
Fig. 2 is the flow chart of engraving process.
Specific implementation mode
The technique effect of the design of the utility model, concrete structure and generation is carried out below with reference to embodiment and attached drawing
It clearly and completely describes, to be completely understood by the purpose of this utility model, feature and effect.Obviously, described embodiment
It is a part of the embodiment of the utility model, rather than whole embodiments, it is based on the embodiments of the present invention, the skill of this field
The other embodiment that art personnel are obtained without creative efforts belongs to the model of the utility model protection
It encloses.In addition, all connection/connection relations being previously mentioned in text, not singly refer to component and directly connect, and referring to can be according to specific reality
Situation is applied, by adding or reducing couple auxiliary, to form more preferably coupling structure.Each technology in the invention is special
Sign, can be with combination of interactions under the premise of not conflicting conflict.
Embodiment 1, with reference to figure 1, a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT, including：Laser engraving
System, frequency sweep OCT systems, the engraving of the focus and the laser engraving system of the sample detection laser of the frequency sweep OCT systems
The focus of laser overlaps.
The laser engraving system includes：Laser engraving light source 1,2-D vibration mirror device 11, convergent lens 12, collimating mirror 2.
The frequency sweep OCT systems include：Swept light source 3, optical splitter, collimating mirror 5, convergent lens 6, reference mirror 7, speculum 10, two dimension
Galvanometer device 11, convergent lens 12, detection device, computer 18, Z axis stepper motor 15, the detection device include：Balance is visited
Device 17,1 × 2 fiber coupler 16 are surveyed, the optical splitter is 2 × 2 fiber couplers 4.The laser engraving light source 1 passes through collimation
Device 2 send out engraving laser to 2-D vibration mirror device 11 on, the 2-D vibration mirror device 11 by the engraving laser reflection to convergence
In lens 12, and focused on sample 13 to be carved by convergent lens 12.Swept light source 3 projects very small bandwidth laser simultaneously,
It is divided into sample detection laser and reference laser after into 2 × 2 fiber couplers 4.Sample detection laser is emitted to filter from collimator 8
Mating plate 9 reaches 2-D vibration mirror device 11 after speculum 10, finally focuses on sample 13 to be carved through convergent lens 12
On.As an optimization, the sample to be carved 13 is placed on anti-vibration platform 14, and anti-vibration platform 14 is connected to Z-direction stepping electricity
Machine 15, computer 18 control the movement in 15 progress Z-direction of Z-direction stepper motor.The reference laser is emitted from collimator 5
To convergent lens 6 reversible light path is formed after the reflection of speculum 7.Light beam with light path with reference to information returns to 2 × 2 optical fiber
In coupler 4.
The sample detection laser is reflected by the engraving sample 13, is returned by original optical path, into 2 × 2 fiber couplers 4
Interference light is formed with reference laser.The interference light is divided by 1 × 2 fiber coupler 16 for the identical interference light of two-way, difference
The positive input and reverse input end for being balanced detector 17 receive, and eliminate the DC component of part, the i.e. noises such as background
Signal, last computer 18 acquire interference light signal by DAQ data collecting cards.Computer 18 counts the interference light signal
It calculates, obtains analog voltage, which exports to 2-D vibration mirror device 11 and Z-direction stepper motor 15, controls Z-direction
Stepper motor 15 carries out the movement in Z axis directions, realizes the focusing of engraving laser.It can be to carving sample to defocused engraving laser
Product 13 carry out engraving operation.
The present apparatus passes through the information at frequency sweep OCT system monitoring engravings, feedback control 2-D vibration mirror system 11 and Z-direction
The running of stepper motor 15 realizes the 3-d laser carving of automation.The measurement precision of frequency sweep OCT image technology is high, this
A kind of engraving precision for high-precision laser three dimensional sculpture device based on frequency sweep OCT that utility model provides is up to 20 μm.
Specific engraving process is as follows：
With reference to figure 2, first, laser three-dimensional carving device is established, and three-dimensional CAD is established in computer 18 according to engraving requirement
Model generates the route of 3-d laser carving, and engraving route is then converted signal in order to control.The X in signal and Y-axis will be controlled
The signal in direction is output to 2-D vibration mirror device 11, and 2-D vibration mirror device 11 controls the focus and engraving laser of sample detection laser
Focus moved in X, Y-axis plane；The signal of Z-direction is then output to Z-direction stepper motor 15 to control anti-vibration platform
14 Z-direction moves, and the focus of control sample detection laser and the focus of laser engraving keep overlapping in entire moving process.
Once having reached preset position at the engraving, computer 18 controls at once closes laser engraving light source 1, until moving to
Next place to be carved.By this setting, it is excessive or very few to avoid laser engraving amount, realizes engraving monitoring in real time, reduces
Detection process after processing, greatly improves work efficiency.
The interference light signal for reaching balanced detector 17 in frequency sweep OCT systems follows typical dual-beam in relating to rule：
Formula (1)；
Δ l is the optical path difference detected between laser and reference laser in formula (1)；IS, IRThe respectively light intensity of two-beam；rSR
(Δ l) is the normalization complex cross correlation function of reference laser and detection laser；k0It is the propagation constant of swept light source 3；It is sample
Initial phase of the product light wave relative to reference laser wave；What frequency sweep OCT systematic surveys obtained is at measured matter different depthValue.
According to the detection principle of frequency sweep OCT systems, after establishing three-dimensional CAD model in computer 18, computer 18 calculates three
In dimension space, the midpoint of sample 13 to be carved in the Z-axis direction is determined using the cross section where midpoint as the face of referring to.Selection
Cross section where midpoint is advantageous in that as with reference to face, takes full advantage of the coherence length l of frequency sweep OCT systemsc, such as formula
(2) shown in, i.e. investigative range makes to monitor in real time and is in optimum range always.
Formula (2)
Computer 18 calculates each point to be carved to the distance, delta Z of the plane of referencen, i.e., the light path between exploring laser light and reference laser
Difference.During monitoring interference light signal in real time, as Δ ZnWhen=Δ l, it is default that computer 18 judges that the engraving point has met
Engraving effect, laser engraving light source 1 is closed in control at once, until moving to next place to be carved, recycles this process until carving
It carves process to complete, obtains 3-d laser carving processing finished product.Shown in the precision dz such as formulas (3) of 3-d laser carving.
Formula (3)；
The better embodiment of the utility model is illustrated, but the invention is not limited to the implementation
Example, those skilled in the art can also make without departing from the spirit of the present invention various equivalent modifications or
It replaces, these equivalent modifications or replacement are all contained in the application claim limited range.
Claims (6)
1. a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT, including：Laser engraving system, which is characterized in that also
Including：Frequency sweep OCT systems, the engraving of the focus and the laser engraving system of the sample detection laser of the frequency sweep OCT systems
The focus of laser overlaps.
2. a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT according to claim 1, it is characterised in that：
The frequency sweep OCT systems include：Swept light source, optical splitter, speculum, 2-D vibration mirror device, convergent lens, detection device, ginseng
Mirror, computer, Z axis stepper motor are examined, the swept light source is used for for sending out sweeping laser, the optical splitter by the frequency sweep
Laser is divided into sample detection laser and reference laser, and the speculum, 2-D vibration mirror device are for reflection successively and by the sample
Product examine is surveyed in laser reflection to the convergent lens, and the convergent lens is to be carved for converging in the sample detection laser
On sample, for the reference mirror for reflecting the reference laser, the detection device is used to detect the reference mirror reflection
The interference signal of reference laser and the sample detection laser of sample to be carved reflection, and the interference signal is formed into digital signal
It is sent in the computer, the computer for controlling the Z axis stepper motor according to the digital signal.
3. a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT according to claim 2, it is characterised in that：
Filter plate is equipped between the optical splitter and the speculum.
4. a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT according to claim 3, it is characterised in that：
The optical splitter be 2 × 2 fiber couplers, 2 × 2 fiber coupler respectively with the swept light source, detection device, filtering
Piece, the connection of reference mirror light path.
5. a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT according to claim 4, which is characterized in that
The detection device includes：Balanced detector, 1 × 2 fiber coupler, the input terminal of 1 × 2 fiber coupler and described 2
× 2 fiber coupler light paths connect, and the output end of 1 × 2 fiber coupler is defeated with the forward direction of the balanced detector respectively
Enter end to connect with reverse input end light path.
6. special according to a kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT of claim 2-5 any one of them
Sign is：Further include anti-vibration platform, the anti-vibration platform side is for placing sample to be carved, the other side and the Z axis stepping
The driving axis connection of motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721739162.2U CN207824219U (en) | 2017-12-12 | 2017-12-12 | A kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721739162.2U CN207824219U (en) | 2017-12-12 | 2017-12-12 | A kind of high-precision laser three dimensional sculpture device based on frequency sweep OCT |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107953037A (en) * | 2017-12-12 | 2018-04-24 | 佛山科学技术学院 | A kind of high-precision laser three dimensional sculpture device and method based on frequency sweep OCT |
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2017
- 2017-12-12 CN CN201721739162.2U patent/CN207824219U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107953037A (en) * | 2017-12-12 | 2018-04-24 | 佛山科学技术学院 | A kind of high-precision laser three dimensional sculpture device and method based on frequency sweep OCT |
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| GR01 | Patent grant | ||
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Granted publication date: 20180907 Termination date: 20201212 |