CN101915555A - Axial scanning method by using electric control varifocal lens as confocal microscope system - Google Patents
Axial scanning method by using electric control varifocal lens as confocal microscope system Download PDFInfo
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- CN101915555A CN101915555A CN 201010223061 CN201010223061A CN101915555A CN 101915555 A CN101915555 A CN 101915555A CN 201010223061 CN201010223061 CN 201010223061 CN 201010223061 A CN201010223061 A CN 201010223061A CN 101915555 A CN101915555 A CN 101915555A
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Abstract
The invention relates to an axial scanning method by using an electric control varifocal lens as a confocal microscope system, which comprises the following steps of: constructing the confocal microscope system with the electric control varifocal lens; axially scanning a point (x, y) on a sample by controlling the focal length of the electric control varifocal lens so as to obtain the light intensity values of a detector when the focal length of the varifocus lens is different; and calculating the axial position of the point on the sample by using a extremum search method or Gaussian fitting method, and adjusting the position of the sample by using a X-Y displacement table to obtain the morphologic graph of the surface of the whole sample. The method realizes axial non-mechanical scanning, not only improves the safety of the system, but also greatly increases the scanning speed. Moreover, the complexity and the cost of the system are reduced.
Description
Technical field
The present invention relates to a kind of scanning technique, particularly a kind of axial scan technology that adopts automatically controlled Zoom lens as confocal microscope system.
Background technology
1957, the post-doctor M.Minsky of Harvard University has proposed the notion of confocal imaging first, and purpose is to wish to eliminate the multiple scattered light that ordinary optical microscope produces when surveying sample, and he proposes a kind of new imaging model-confocal imaging for this reason.Introduce pointolite in this imaging model, and make it to image on the measured object surface, the light of measured object reflection is received by very little light intensity detector (can think point probe).When pointolite, measured object and point probe three conjugation, the light intensity maximum that point probe receives, when measured surface departed from conjugate plane, the light intensity that point probe receives diminished, and this character shows that the position of measured surface is confirmable.But owing to be subjected to the restriction of scientific and technological level at that time, confocal technology comes to a halt in application always, does not have any major progress.Up to the eighties, because the significant development of microelectronics, photoelectron technology, confocal technology just becomes the focus of research, and wherein Wilson and Sheppard have proposed the new ideas that the flying spot profile scanning obtains whole audience three-dimensional depth information, and confocal technology is applied to whole audience three-D profile detection range.
In confocal three-D profile detection range, axial scan is very important, and it is directly connected to actual axle to measuring accuracy.Most uses is the axial displacement platform in the existing axial scan technology, and the high precision displacement platform is complex structure not only, the cost height, and sweep velocity is slow, has influenced measuring speed greatly.The Li Mingzhou of Xi'an Communications University etc. are installed to one to the different eyeglass of thickness movably on the rotating disk, change optical path difference by them, thereby realize axial scanning.But, owing to introduce mechanical rotation, so influenced measuring accuracy greatly.
Summary of the invention
The present invention be directed to the existing axial scan mode cost height that adopts the displacement platform, the problem that sweep velocity is slow, a kind of employing electric control varifocal lens has been proposed as the confocal microscope system axial scanning method, three-dimensional confocal detection system based on automatically controlled Zoom lens carries out axial scan to each layer, focal length by accurate control Zoom lens axially successively scans object, sweep velocity is fast, has reduced cost.
Technical scheme of the present invention is: a kind of employing electric control varifocal lens specifically comprises the steps: as the confocal microscope system axial scanning method
1) wavelength that sends of laser instrument is that the 633nm laser beam forms the light beam with angle of divergence by the illumination pin hole, again by first lens, become parallel beam, focus on the measured object surface by no polarization splitting prism and automatically controlled Zoom lens successively, the light of measured object reflection is through Zoom lens, Amici prism, the second lens detecting pinhole, incide on the light intensity detector, by the PC recording light intensity;
2) PC is controlled the voltage that is added on the automatically controlled Zoom lens by voltage controller, thereby make the focal length of Zoom lens change a small value Δ f, write down the light intensity numerical value on the detector this moment again, repeat to adjust focal length, obtain corresponding light intensity, according to the light intensity value that obtains after the scanning, can obtain the axial position of measured object corresponding point;
3) move the measured object that is fixed on the displacement platform by PC control X-Y displacement platform then, repeating step 1) and 2) the position scanning of moving the back corresponding point, up to the scanning of finishing whole measured object surface, thereby realization is to the measurement of whole measured object surface profile.
Described step 2) mid-focal length changes a small value Δ f, and Δ f is less than 1um.Repeating to adjust focal length is n, i.e. the number of times of axial scan, and greater than H/ Δ f, wherein H is the maximum height value on measured object surface.
Beneficial effect of the present invention is: the present invention adopts electric control varifocal lens as the confocal microscope system axial scanning method, has realized the scanning of axial nothing machinery, has not only improved the stability of system, and has improved sweep velocity greatly.And the complexity and the cost of system have been reduced.
Description of drawings
Fig. 1 adopts the confocal microscope system light path synoptic diagram of electric control varifocal lens for the present invention.
Embodiment
By controlling automatically controlled Zoom lens focal length sample is carried out axial scan, utilize X-Y displacement platform that sample is carried out the scanning position change, obtain the tomographic map of measured object.At last the tomographic map that collects is carried out three-dimensional reconstruction, obtain the surface profile map of measured object.The concrete confocal microscope system light path synoptic diagram that adopts electric control varifocal lens as shown in Figure 1, system comprises LASER Light Source 1, illumination pin hole 2, two lens 3 and 8, Amici prism 4, automatically controlled Zoom lens 5, detecting pinhole 10, light intensity detector 11, two-dimension displacement platform 7, voltage controller 9, PC 12.Laser 1 light beam forms the light beam with certain angle of divergence by illumination pin hole 2, scioptics 3 again, become parallel beam, measured object 6 surfaces by no polarization splitting prism 4,5 focusing of automatically controlled Zoom lens, the light of measured object 6 reflections is through Zoom lens 5, Amici prism 4, lens 8, detecting pinhole 10, incide on the light intensity detector 11, by PC 12 recording light intensities.PC 12 is controlled the voltage that is added on the automatically controlled Zoom lens 5 by voltage controller 9, thereby changes the focal length of Zoom lens 5, moves (measured object is fixed on the displacement platform) by PC 12 control X-Y displacement platforms 7.
Implementation method:
1) wavelength that sends of laser instrument 1 is that the 633nm laser beam forms the light beam with certain angle of divergence by illumination pin hole 2, scioptics 3 again, become parallel beam, focus on measured object 6 surfaces by no polarization splitting prism 4, automatically controlled Zoom lens 5, the light of measured object 6 reflections is through Zoom lens 5, Amici prism 4, lens 8 detecting pinholes 10, incide on the light intensity detector 11, by PC 12 recording light intensities.
2) PC 12 is controlled the voltage that is added on the automatically controlled Zoom lens 5 by voltage controller 9, thereby make the focal length of Zoom lens 5 change a small value Δ f (its size is usually less than 1um), write down the light intensity numerical value on the detector 11 this moment again, the frequency n of axial scan is a bit larger tham N=H/ Δ f usually, and wherein H is the maximum height value on measured object surface.According to the light intensity value that obtains after the scanning, we can obtain the axial position of measured object corresponding point.
3) move the measured object 6 that is fixed on the displacement platform by PC 12 control X-Y displacement platforms 7 then, thereby realize the scanning on whole measured object surface, thus can be to the measurement of whole measured object surface profile.
Claims (3)
1. one kind is adopted electric control varifocal lens as the confocal microscope system axial scanning method, it is characterized in that, specifically comprises the steps:
1) wavelength that sends of laser instrument (1) forms the light beam with angle of divergence for the 633nm laser beam by illumination pin hole (2), again by first lens (3), become parallel beam, focus on measured object (6) surface by no polarization splitting prism (4) and automatically controlled Zoom lens (5) successively, the light of measured object (6) reflection is through Zoom lens (5), Amici prism (4), second lens (8) detecting pinholes (10), incide on the light intensity detector (11), by PC (12) recording light intensity;
2) PC (12) is controlled the voltage that is added on the automatically controlled Zoom lens (5) by voltage controller (9), thereby make the focal length of Zoom lens (5) change a small value Δ f, write down the light intensity numerical value on the detector (11) this moment again, repeat to adjust focal length, obtain corresponding light intensity, light intensity value according to obtaining after the scanning utilizes extremum search method or Gauss curve fitting method to calculate the axial location of measured object corresponding point;
3) move the measured object (6) that is fixed on the displacement platform (7) by PC (12) control X-Y displacement platform (7) then, repeating step 1) and 2) the position scanning of moving the back corresponding point, up to the scanning of finishing whole measured object surface, thereby realization is to the measurement of whole measured object surface profile.
According to the described employing electric control varifocal lens of claim 1 as the confocal microscope system axial scanning method, it is characterized in that described step 2) mid-focal length changes a small value Δ f, Δ f is less than 1um.
According to the described employing electric control varifocal lens of claim 2 as the confocal microscope system axial scanning method, it is characterized in that described step 2) to repeat to adjust focal length be n, i.e. the number of times of axial scan, greater than H/ Δ f, wherein H is the maximum height value on measured object surface.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102589471A (en) * | 2012-03-06 | 2012-07-18 | 上海理工大学 | Parallel confocal detection system and method |
| CN103837515A (en) * | 2014-03-17 | 2014-06-04 | 北京理工大学 | Confocal automatic regulation device |
| CN104406951A (en) * | 2014-12-19 | 2015-03-11 | 北京理工大学 | Automatic focusing detection device for micro-fluidic chip |
| CN106773585A (en) * | 2017-02-10 | 2017-05-31 | 深圳大学 | Transmission-type digital holographic microscopic imaging device based on electric control varifocal lens |
| CN106767431A (en) * | 2016-12-09 | 2017-05-31 | 西安交通大学 | A kind of confocal micro-displacement measuring device of length scanning and method |
| CN106842878A (en) * | 2017-02-10 | 2017-06-13 | 深圳大学 | Reflective digital holographic microscopic imaging device based on electric control varifocal lens |
| CN106969702A (en) * | 2017-05-04 | 2017-07-21 | 北京理工大学深圳研究院 | It is a kind of can flexible zoom off-axis digital holography measurement apparatus |
| CN110068268A (en) * | 2019-03-19 | 2019-07-30 | 天津大学 | Circular Nose Cutting Edge lathe tool geometric parameter three-dimensional detection system and method based on zoom measurement |
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| JPH10111216A (en) * | 1996-10-08 | 1998-04-28 | Nikon Corp | Detection optical equipment for short wavelength |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102589471A (en) * | 2012-03-06 | 2012-07-18 | 上海理工大学 | Parallel confocal detection system and method |
| CN103837515A (en) * | 2014-03-17 | 2014-06-04 | 北京理工大学 | Confocal automatic regulation device |
| CN104406951A (en) * | 2014-12-19 | 2015-03-11 | 北京理工大学 | Automatic focusing detection device for micro-fluidic chip |
| CN106767431A (en) * | 2016-12-09 | 2017-05-31 | 西安交通大学 | A kind of confocal micro-displacement measuring device of length scanning and method |
| CN106767431B (en) * | 2016-12-09 | 2019-04-16 | 西安交通大学 | A kind of confocal micro-displacement measuring device of length scanning and method |
| CN106773585A (en) * | 2017-02-10 | 2017-05-31 | 深圳大学 | Transmission-type digital holographic microscopic imaging device based on electric control varifocal lens |
| CN106842878A (en) * | 2017-02-10 | 2017-06-13 | 深圳大学 | Reflective digital holographic microscopic imaging device based on electric control varifocal lens |
| CN106969702A (en) * | 2017-05-04 | 2017-07-21 | 北京理工大学深圳研究院 | It is a kind of can flexible zoom off-axis digital holography measurement apparatus |
| CN110068268A (en) * | 2019-03-19 | 2019-07-30 | 天津大学 | Circular Nose Cutting Edge lathe tool geometric parameter three-dimensional detection system and method based on zoom measurement |
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Application publication date: 20101215 |