CN102589471A - Parallel confocal detection system and method - Google Patents
Parallel confocal detection system and method Download PDFInfo
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- CN102589471A CN102589471A CN2012100575902A CN201210057590A CN102589471A CN 102589471 A CN102589471 A CN 102589471A CN 2012100575902 A CN2012100575902 A CN 2012100575902A CN 201210057590 A CN201210057590 A CN 201210057590A CN 102589471 A CN102589471 A CN 102589471A
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Abstract
The invention discloses a parallel confocal detection system and a parallel confocal detection method. The system comprises a mono-color LED (light-emitting diode) light source, a digital micro-lens, two lenses, a beam splitter prism, an electric-control variable focal length lens, a detection pinhole, a light strength detector, a voltage controller and a PC (personnel computer). Lights sent out by the mono-color LED light source are irradiated on the surface of the digital micro-lens through a light collection lens and a light source is modulated by the digital micro-lens to form a pinhole array; the lights are changed into a parallel light beam by the lens to be focused on the surface of an object to be detected; the lights reflected by the object to be detected are emitted into a light strength array detector; and a sample is transversely or axially scanned through a digital micro-lens device. A voltage on the electric-control variable focal length lens is controlled by the PC to change a focal length of the variable focal length lens for a tiny value delta f, and a light strength numerical value on the detector is recorded; the axial position of the corresponding point of the object to be detected is obtained according to the light strength value obtained by scanning; and the surface outline of the whole object to be detected is measured. According to the parallel confocal detection system and parallel confocal detection method, the stability and the scanning speed of the system can be improved.
Description
Technical field
The invention belongs to the confocal imaging technical field, relate to a kind of confocal detection system, relate in particular to a kind of parallel confocal detection system; Simultaneously, the invention still further relates to the parallel confocal detection method of above-mentioned parallel confocal detection system.
Background technology
Nineteen fifty-seven, the post-doctor M.Minsky of Harvard University has proposed the notion of confocal imaging first, and purpose is to hope to eliminate the multiple scattered light that ordinary optical microscope produces when surveying sample, and he proposes a kind of new imaging model-confocal imaging for this reason.In this imaging model, introduce pointolite, and make it to image on the measured object surface, the light of measured object reflection is received by very little light intensity detector (can think point probe).When pointolite, measured object and point probe three conjugation, the light intensity that point probe receives is maximum, and when measured surface departed from conjugate plane, the light intensity that point probe receives diminished, and this character shows that the position of measured surface is confirmable.But owing to received the restriction of scientific and technological level at that time, confocal technology comes to a halt in application always, does not have any major progress.Up to the eighties; Because the significant development of microelectronics, photoelectron technology; Confocal technology just becomes the focus of research, and wherein Wilson and Sheppard have proposed the new ideas that the flying spot profile scanning obtains whole audience three-dimensional depth information, and confocal technology is applied to whole audience three-D profile detection range.
In confocal three-D profile detection range, need carry out axial scan and transversal scanning to sample.The purpose of axial scan is to measure the height of this point, because confocal microscope adopts the spot scan technology, so must carry out the measurement that transversal scanning could be accomplished the whole surface of sample to sample.Most uses is the axial displacement platform in the existing axial scan technology, and the high precision displacement platform is complex structure not only, and cost is high, and sweep velocity is slow, has influenced measuring speed greatly.The Li Mingzhou of Xi'an Communications University etc. are installed to one to the thickness different lens movably on the rotating disk, change optical path difference through them, thereby realize axial scanning.But, owing to introduce mechanical rotation, so influenced measuring accuracy greatly.And parallel transversal scanning technology mainly contains Nipkow dish and microlens array, can solve the problem of single-point type confocal microscope, but Nipkow dish and microlens array optical parametric after making can not be realized flexible measuring with regard to confirming.
Summary of the invention
Technical matters to be solved by this invention is: a kind of parallel confocal detection system is provided, can improves the stability and the sweep velocity of system.
In addition, the present invention also provides a kind of parallel confocal detection method, can improve the stability and the sweep velocity of system.
For solving the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of parallel confocal detection system, said system comprises: monochromatic LED light source, digital micro-mirror, two lens, Amici prism, automatically controlled Zoom lens, detecting pinhole, light intensity detector, voltage controller, PC;
The light that the monochromatic LED light source sends is through shining the digital micro-mirror surface through collecting lens; Light source is formed pinhole array by digital micro-mirror modulation back; Scioptics become parallel beam again; Through the measured object surface of no polarization splitting prism, automatically controlled Zoom lens, focusing, the light of measured object reflection incides on the light intensity detector array through automatically controlled Zoom lens, Amici prism, lens detecting pinhole; Through the PC recording light intensity, realize horizontal or axial scan to sample through DMD;
Be added to the voltage on the automatically controlled Zoom lens through PC control then, thereby make the focal length of Zoom lens change a small value Δ f, write down the light intensity numerical value on the detector this moment again; According to the light intensity value that obtains after the scanning, obtain the axial position of measured object corresponding point; Realize the axial scan on whole measured object surface, thus can be to the measurement of whole measured object surface profile.
A kind of parallel confocal detection method of above-mentioned parallel confocal detection system, this method specifically comprises the steps:
1) light that sends of monochromatic LED light source is through shining the digital micro-mirror surface through collecting lens; Light source is formed pinhole array by digital micro-mirror modulation back; Scioptics become parallel beam again, and through the measured object surface of no polarization splitting prism, automatically controlled Zoom lens, focusing, the light of measured object reflection is through Zoom lens, Amici prism, lens detecting pinhole; Incide on the light intensity detector array, through the PC recording light intensity;
2) PC is added to the voltage on the automatically controlled Zoom lens through voltage controller control; Thereby make the focal length of Zoom lens change a small value Δ f; Δ f is less than 1um, and write down the light intensity numerical value on the detector this moment again, and the frequency n of axial scan is a bit larger tham N=H/ Δ f usually; According to the light intensity value that obtains after the scanning, obtain the axial position of measured object corresponding point;
3) open or close according to the micro mirror on the control figure micro mirror element through PC, realize scanning, suppose that the cycle of the virtual pinhole array that micro mirror array generates is T, through T to the measured object surface
2After the inferior scanning, accomplish measurement to whole measured object surface one deck.
Beneficial effect of the present invention is: parallel confocal detection system and method that the present invention proposes; The zooming liquid lens of using is through after two electrode application voltage to these lens; The refractive index of inner liquid crystal will form centrosymmetric exponential distribution; Cause the deviation of light, thereby reach the lens that spotlight effect is realized focal length variations.Compare with traditional autofocus lens, liquid lens has that volume is little, reaction velocity is fast, power consumption is little, the degree of accuracy advantages of higher.
Through the micro mirror on the control dmd chip, just can form the pinhole array of arbitrary shape, the confocal picture point of corresponding these pin holes of light intensity detector array (CCD or CMOS) pixel just can be surveyed the cofocus scanning imaging.Parallel like this scan mode not only improves scan efficiency greatly, also has the higher efficiency of light energy utilization, and does not have mechanical vibration effect, has improved the stability of system.
Zooming liquid lens that the present invention adopts and DMD have not only been realized the scanning of axial nothing machinery, and have been realized laterally also line scanning respectively as the axial scan means and the transversal scanning method of confocal detection system, improved measuring speed greatly.Solve the mechanical vibration that the conventional confocal microscopes axial scan brings, friction and simple scan speed and waited problem slowly, increased reliability and measuring accuracy.
The device that the present invention proposes can be widely used in the measuring three-dimensional profile of MEMS, semiconductor devices.With respect to traditional confocal microscopy, have and improved sweep velocity, realized flexible measuring, do not have the advantage of machinery vibration.
Description of drawings
Fig. 1 is the composition synoptic diagram of parallel confocal detection system of the present invention.
Embodiment
Specify the preferred embodiments of the present invention below in conjunction with accompanying drawing.
Embodiment one
See also Fig. 1; The present invention has disclosed a kind of parallel confocal detection system, and said system comprises: monochromatic LED light source 1, condenser 2, digital micro-mirror 3, control panel 4, two lens 6, spectroscope 5, automatically controlled Zoom lens 8, detecting pinhole, light intensity detector 10, voltage controller 7, PC11, baffle 12.
The light that monochromatic LED light source 1 sends is through shining digital micro-mirror DMD 3 surfaces through condenser 2; Through control panel 4 digital micro-mirror DMD 3 modulation backs are formed pinhole array; Through no polarization splitting prism 5, (part is not absorbed plate 12 absorptions through the light of spectroscope 5, light intensity detector array CCD/CMOS 10 receiving light powers is not impacted) is again through tube lens 6 earlier; Become parallel beam; Through automatically controlled Zoom lens 8, focus on measured object 9 surfaces, the light of measured object reflection through Zoom lens 8, tube lens 6, Amici prism 5, incide on the light intensity detector array CCD/CMOS 10, through PC 11 recording light intensities.Pass through the PC11 recording light intensity at last, thereby realize transversal scanning.Realize transversal scanning through DMD, make the efficiency of light energy utilization and sweep velocity be improved significantly sample.
PC11 is through voltage controller 7; Control is added to the voltage on the automatically controlled Zoom lens 8; Cause the variation of inner liquid-crystal refractive-index, thereby make the focal length of Zoom lens change a small value Δ f (its size is usually less than 1um), the frequency n of axial scan is a bit larger tham N=H/ Δ f usually.The light intensity value that obtains after focal length through the control zooming liquid lens and the scanning obtains the axial position of measured object corresponding point, thereby realizes axial scan.Through controlling automatically controlled Zoom lens focal length sample is carried out axial scan, obtain the tomographic map of measured object.
This system adopts the mode of the scanning that laterally vertically walks abreast not have mechanical 3-D scanning.According to perhaps " OFF " realization scanning surperficial of the micro mirror on the programmed control DMD " ON ", suppose that the cycle of the virtual pinhole array that micro mirror array generates is T, through PC11 through T to measured object
2After the inferior scanning, accomplish measurement to whole measured object surface one deck.When control figure micro mirror DMD 3 carries out transversal scanning; The voltage controller 7 of this system applies applies voltage for zooming liquid lens 8; Through changing the logical light radius that voltage changes lens, the refractive index of the thickness of liquid crystal layer and liquid crystal layer center and edge poor, the focal length of control zooming liquid lens and scan after the light intensity value that obtains; Obtain the axial position of measured object corresponding point, thereby realize axial scan.Computer control software be responsible for carry out and the relevant digital micro-mirror DMD 3 that obtains of line scanning and the data 8 and the focal length relevant data thereof of voltage controller thereof; Handle through PC11; Thereby obtain corresponding three-dimensional data, carry out three-dimensional reconstruction and can realize that a kind of parallel confocal that does not have machinery scanning detects.
Embodiment two
A kind of parallel confocal detection method of above-mentioned parallel confocal detection system, this method specifically comprises the steps:
1) light that sends of monochromatic LED light source is through shining the digital micro-mirror surface through collecting lens; Light source is formed pinhole array by digital micro-mirror modulation back; Scioptics become parallel beam again, and through the measured object surface of no polarization splitting prism, automatically controlled Zoom lens, focusing, the light of measured object reflection is through Zoom lens, Amici prism, lens detecting pinhole; Incide on the light intensity detector array, through the PC recording light intensity;
2) PC is added to the voltage on the automatically controlled Zoom lens through voltage controller control; Thereby make the focal length of Zoom lens change a small value Δ f; Δ f is less than 1um, and write down the light intensity numerical value on the detector this moment again, and the frequency n of axial scan is a bit larger tham N=H/ Δ f usually; According to the light intensity value that obtains after the scanning, obtain the axial position of measured object corresponding point;
3) open or close according to the micro mirror on the control figure micro mirror element through PC, realize scanning, suppose that the cycle of the virtual pinhole array that micro mirror array generates is T, through T to the measured object surface
2After the inferior scanning, accomplish measurement to whole measured object surface one deck.
In sum; Parallel confocal detection system and method that the present invention proposes; The zooming liquid lens of using is through after two electrode application voltage to these lens; The refractive index of inner liquid crystal will form centrosymmetric exponential distribution, causes the deviation of light, thereby reaches the lens that spotlight effect is realized focal length variations.Compare with traditional autofocus lens, liquid lens has that volume is little, reaction velocity is fast, power consumption is little, the degree of accuracy advantages of higher.
Here description of the invention and application is illustrative, is not to want with scope restriction of the present invention in the above-described embodiments.Here the distortion of the embodiment that is disclosed and change are possible, and the replacement of embodiment is known with the various parts of equivalence for those those of ordinary skill in the art.Those skilled in the art are noted that under the situation that does not break away from spirit of the present invention or essential characteristic, and the present invention can be with other form, structure, layout, ratio, and realize with other assembly, material and parts.Under the situation that does not break away from the scope of the invention and spirit, can carry out other distortion and change here to the embodiment that is disclosed.
Claims (2)
1. a parallel confocal detection system is characterized in that, said system comprises: monochromatic LED light source, digital micro-mirror, two lens, Amici prism, automatically controlled Zoom lens, detecting pinhole, light intensity detector, voltage controller, PC;
The light that the monochromatic LED light source sends is through shining the digital micro-mirror surface through collecting lens; Light source is formed pinhole array by digital micro-mirror modulation back; Scioptics become parallel beam again; Through the measured object surface of no polarization splitting prism, automatically controlled Zoom lens, focusing, the light of measured object reflection incides on the light intensity detector array through automatically controlled Zoom lens, Amici prism, lens detecting pinhole; Through the PC recording light intensity, realize horizontal or axial scan to sample through DMD;
Be added to the voltage on the automatically controlled Zoom lens through PC control then, thereby make the focal length of Zoom lens change a small value Δ f, write down the light intensity numerical value on the detector this moment again; According to the light intensity value that obtains after the scanning, obtain the axial position of measured object corresponding point; Realize the axial scan on whole measured object surface, thus can be to the measurement of whole measured object surface profile.
2. the parallel confocal detection method of the described parallel confocal detection system of claim 1 is characterized in that, this method specifically comprises the steps:
1) light that sends of monochromatic LED light source is through shining the digital micro-mirror surface through collecting lens; Light source is formed pinhole array by digital micro-mirror modulation back; Scioptics become parallel beam again, and through the measured object surface of no polarization splitting prism, automatically controlled Zoom lens, focusing, the light of measured object reflection is through Zoom lens, Amici prism, lens detecting pinhole; Incide on the light intensity detector array, through the PC recording light intensity;
2) PC is added to the voltage on the automatically controlled Zoom lens through voltage controller control; Thereby make the focal length of Zoom lens change a small value Δ f; Δ f is less than 1um, and write down the light intensity numerical value on the detector this moment again, and the frequency n of axial scan is a bit larger tham N=H/ Δ f usually; According to the light intensity value that obtains after the scanning, obtain the axial position of measured object corresponding point;
3) open or close according to the micro mirror on the control figure micro mirror element through PC, realize scanning, suppose that the cycle of the virtual pinhole array that micro mirror array generates is T, through T to the measured object surface
2After the inferior scanning, accomplish measurement to whole measured object surface one deck.
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| CN107121422A (en) * | 2017-06-21 | 2017-09-01 | 中国科学院苏州生物医学工程技术研究所 | A kind of parallel confocal microscopic imaging device and method based on digital micromirror array |
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| CN108387186A (en) * | 2018-03-22 | 2018-08-10 | 深圳技术大学（筹） | A kind of three-dimensional scanner based on digital micro-mirror device coding |
| CN108508031A (en) * | 2017-02-28 | 2018-09-07 | 上海微电子装备（集团）股份有限公司 | A kind of double-side detecting device and detection method |
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| DE102021117116A1 (en) | 2021-07-02 | 2023-01-05 | Stiftung für Lasertechnologien in der Medizin und Meßtechnik an der Universität Ulm ILM, Körperschaft des öffentlichen Rechts | Measuring device for the optical measurement of an object |
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| CN103812749A (en) * | 2014-01-24 | 2014-05-21 | 杭州华三通信技术有限公司 | Method and device for mapping VLAN (Virtual Local Area Network) among DC (Data Center) sites |
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| CN107543508A (en) * | 2016-06-27 | 2018-01-05 | 陈亮嘉 | Optical system and object surface three-dimensional shape detection method using same |
| CN108508031A (en) * | 2017-02-28 | 2018-09-07 | 上海微电子装备（集团）股份有限公司 | A kind of double-side detecting device and detection method |
| CN107121422A (en) * | 2017-06-21 | 2017-09-01 | 中国科学院苏州生物医学工程技术研究所 | A kind of parallel confocal microscopic imaging device and method based on digital micromirror array |
| CN108387186A (en) * | 2018-03-22 | 2018-08-10 | 深圳技术大学（筹） | A kind of three-dimensional scanner based on digital micro-mirror device coding |
| WO2019179057A1 (en) * | 2018-03-22 | 2019-09-26 | 深圳技术大学（筹） | Three-dimensional scanning device based on digital micro-mirror device coding |
| CN112998647A (en) * | 2019-12-20 | 2021-06-22 | 财团法人金属工业研究发展中心 | Electrowetting control optical scanning probe |
| CN111913294A (en) * | 2020-09-07 | 2020-11-10 | 中国工程物理研究院机械制造工艺研究所 | Non-mechanical scanning structured light microscopic three-dimensional imaging device and imaging method |
| DE102021117116A1 (en) | 2021-07-02 | 2023-01-05 | Stiftung für Lasertechnologien in der Medizin und Meßtechnik an der Universität Ulm ILM, Körperschaft des öffentlichen Rechts | Measuring device for the optical measurement of an object |
| DE102021117116B4 (en) | 2021-07-02 | 2023-10-26 | Stiftung für Lasertechnologien in der Medizin und Meßtechnik an der Universität Ulm ILM, Körperschaft des öffentlichen Rechts | Measuring device, method and medical measuring device for the optical measurement of an object |
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Application publication date: 20120718 |