CN108387186A - A kind of three-dimensional scanner based on digital micro-mirror device coding - Google Patents

A kind of three-dimensional scanner based on digital micro-mirror device coding Download PDF

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Publication number
CN108387186A
CN108387186A CN201810240822.5A CN201810240822A CN108387186A CN 108387186 A CN108387186 A CN 108387186A CN 201810240822 A CN201810240822 A CN 201810240822A CN 108387186 A CN108387186 A CN 108387186A
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CN
China
Prior art keywords
light
mirror device
digital micro
path adjustment
lens group
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Pending
Application number
CN201810240822.5A
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Chinese (zh)
Inventor
吴庆阳
李奇锋
陈顺治
陈泽锋
黄浩涛
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Shenzhen Technology University
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Shenzhen Technology University
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Publication date
Application filed by Shenzhen Technology University filed Critical Shenzhen Technology University
Priority to CN201810240822.5A priority Critical patent/CN108387186A/en
Publication of CN108387186A publication Critical patent/CN108387186A/en
Priority to PCT/CN2018/104319 priority patent/WO2019179057A1/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518Projection by scanning of the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention is suitable for optical technical field, provides a kind of three-dimensional scanner, including:Projecting cell, for generating directional light and being transmitted to light path adjustment unit, light path adjustment unit, for carrying out light path adjustment to directional light, so that directional light is incident to digital micro-mirror device according to presetting angle, digital micro-mirror device, for parallel light reflection to be entered Varifocal zoom lens group, Varifocal zoom lens group, for exposing to object to be measured after being focused reflected light, and the diffusing reflection light of collection is transmitted through digital micro-mirror device, digital micro-mirror device be additionally operable to will to diffuse line reflection to light path adjustment unit to be adjusted, diffusing reflection light is set to be incident to imaging unit imaging.The embodiment of the present invention using to digital micro-mirror device carry out coding realize simultaneously multiple points are detected, in conjunction with the correspondence of lens focus and depth location in Varifocal zoom lens group, rebuild tri-dimensional facial type, sweep speed is improved, there is higher sweep speed and precision than the device that the prior art provides.

Description

A kind of three-dimensional scanner based on digital micro-mirror device coding
Technical field
The invention belongs to optical technical field more particularly to a kind of 3-D scanning dresses based on digital micro-mirror device coding It sets.
Background technology
With the rapid development of micro- light, mechanical, electrical technology, high-precision, high-efficient detection object fine structure have become the whole world How a big research hotspot in scientific research field, more accurately obtain the heat that object dimensional point cloud data is three-dimensional measurement field Point.There is axial chromatography and very high depth resolution, three-dimensional imaging capability tool just because of confocal measuring technique There is very high precision, can be widely used in medicine, the fields such as industry.
For the three-dimensional rebuilding method of confocal measurement, generally by introducing, conjugation pin hole generates point light source and point is visited at present Survey realizes axial chromatography ability and high-resolution, and mobile lens group is to obtain multiple chromatography faces, then is carried out to multiple chromatography faces Analysis, the focal position according to the picture point of different depth is different, obtains largely as change in depth image focusing area changes Chromatography picture, body surface three-dimensional face type is then gone out according to the reconstruction of relations of depth and focus point, but be conjugated the use of pin hole Cause once to be only capable of detecting a measured point, reconstruction speed is slow, and efficiency is low.
Invention content
Technical problem to be solved by the present invention lies in provide a kind of 3-D scanning dress based on digital micro-mirror device coding It sets, it is intended to the prior art is solved when carrying out three-dimensional reconstruction, because causing once to be only capable of to a measured point using conjugation pin hole It is detected, reconstruction speed is slow, the low problem of efficiency.
The invention is realized in this way a kind of three-dimensional scanner based on digital micro-mirror device coding, including projection are single Member, light path adjustment unit, digital micro-mirror device, Varifocal zoom lens group and imaging unit, the digital micro-mirror device and it is described at As the position of unit is at conjugate relation, wherein:
The projecting cell is transmitted to the light path adjustment unit for generating directional light, and by the directional light;
The light path adjustment unit, for carrying out light path adjustment to the directional light so that the directional light after light path adjustment It is incident to the digital micro-mirror device according to presetting angle;
The digital micro-mirror device, for reflecting the directional light, by reflected light projects to the varifocal mirror Head group, includes not interfere with each other or interfere few light in the reflected light;
The Varifocal zoom lens group, for exposing to object to be measured after being focused the reflected light, to be waited for described The surface for measuring object generates diffusing reflection light;It is additionally operable to collect the diffusing reflection light, the diffusing reflection light is transmitted through institute State digital micro-mirror device;
The digital micro-mirror device is additionally operable to the line reflection that diffuses to the light path adjustment unit, described unrestrained Reflection light is incident to the imaging unit after the light path adjustment unit carries out light path adjustment;
The imaging unit, for being imaged according to the diffusing reflection light.
Further, the projecting cell includes projection light source, the first lens and the second lens;
The projection light source, for generating preset light;
The preset light forms directional light after first lens and second lens.
Further, the light path adjustment unit includes semi-transparent semi-reflecting lens and plane mirror;
The directional light is transmitted to the plane mirror after passing through the semi-transparent semi-reflecting lens, and the plane mirror is by the directional light The digital micro-mirror device is reflexed to according to presetting angle;
The line reflection that diffuses is entered the semi-permeable and semi-reflecting mirror by the plane mirror, and the semi-permeable and semi-reflecting mirror is by institute It states diffusing reflection light and reflexes to the imaging unit according to presetting angle.
Further, the Varifocal zoom lens group includes several liquid lens.
Further, the imaging unit includes imaging lens group and CCD image sensor;
The diffusing reflection light is incident to described image sensor CCD and is imaged after the imaging lens group.
Compared with prior art, the present invention advantageous effect is:The embodiment of the present invention will be projected by light path adjustment unit The directional light that unit generates is incident on digital micro-mirror device, which reflects the directional light, and what is obtained is anti- It includes not interfere with each other or interfere few light to penetrate light, which projects object to be measured after Varifocal zoom lens group, to be measured The diffusing reflection light that amount object generates is emitted to digital micro-mirror device after the Varifocal zoom lens group, and digital micro-mirror device is by diffusing reflection Light be reflected into light path adjustment it is simple eye, the diffusing reflection light after light path adjustment unit will be incident to imaging unit and be imaged. The embodiment of the present invention is according to the reflection of digital micro-mirror device PLC technology micromirror and the fast spy of Varifocal zoom lens group zoom rate Property, conventional confocal three-dimensional measurement is combined with digital micro-mirror device, Varifocal zoom lens group, the coaxial micro- 3-D scanning of structure Device simultaneously detects multiple points using coding realization is carried out to digital micro-mirror device, in conjunction with mirror in Varifocal zoom lens group The correspondence of head focal length and depth location, rebuilds tri-dimensional facial type, improves sweep speed, the device tool provided than the prior art There are higher sweep speed and precision.
Description of the drawings
Fig. 1 is that a kind of structure of three-dimensional scanner encoded based on digital micro-mirror device provided in an embodiment of the present invention is shown It is intended to;
Fig. 2 is a kind of detailed knot of three-dimensional scanner encoded based on digital micro-mirror device provided in an embodiment of the present invention Structure schematic diagram;
Fig. 3 a are the schematic diagrames that object to be measured provided in an embodiment of the present invention is in focal point position;
Fig. 3 b are the schematic diagrames that object to be measured provided in an embodiment of the present invention is in focal position;
Fig. 3 c are the schematic diagrames that object to be measured provided in an embodiment of the present invention is in focal point position.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.
Fig. 1 shows a kind of three-dimensional scanner encoded based on digital micro-mirror device provided in an embodiment of the present invention, packet Projecting cell 101, light path adjustment unit 102, digital micro-mirror device 103, Varifocal zoom lens group 104 and imaging unit 105 are included, number The position of word micro-mirror device 103 and imaging unit 105 at conjugate relation, wherein:
Projecting cell 101 is transmitted to light path adjustment unit 102 for generating directional light, and by the directional light;
Light path adjustment unit 102, for carrying out light path adjustment to the directional light so that the directional light after light path adjustment is pressed It is incident to digital micro-mirror device 103 according to presetting angle;
Digital micro-mirror device 103, for reflecting the directional light, by reflected light projects to the Varifocal zoom lens 104 are organized, includes not interfere with each other or interfere few light in the reflected light;
Varifocal zoom lens group 104, for exposing to object to be measured after being focused the reflected light, in object to be measured Surface generate diffusing reflection light;It is additionally operable to collect the diffusing reflection light, the diffusing reflection light is transmitted through digital micro-mirror Device 103;
Digital micro-mirror device 103 is additionally operable to the line reflection that diffuses to light path adjustment unit 102, described unrestrained anti- It penetrates light and is incident to imaging unit 105 after light path adjustment unit 102 carries out light path adjustment;
Imaging unit 105, for being imaged according to the diffusing reflection light.
Further, Fig. 2 shows the concrete structures of three-dimensional scanner provided in an embodiment of the present invention, wherein:
Projecting cell 101 includes projection light source LS, the first lens LEN1 and the second lens LEN2, and light path adjustment unit 12 wraps Semi-transparent semi-reflecting lens M1 and plane mirror M2 are included, Varifocal zoom lens group 104 includes several liquid lens, and imaging unit 105 includes imaging Lens group LENS and CCD image sensor;
Projection light source LS, for generating preset light, the preset light is through the first lens LEN1 and the second lens Directional light is formed after LEN2, the directional light is transmitted to plane mirror M2 after passing through semi-transparent semi-reflecting lens M1, and plane mirror M2 will be described flat Row light reflexes to digital micro-mirror device DMD according to presetting angle, and plane mirror M2 enters the line reflection that diffuses semi-transparent semi-reflecting Mirror M1 is penetrated, the diffusing reflection light is reflexed to imaging unit 105 by semi-permeable and semi-reflecting mirror M1 according to presetting angle.The diffusing reflection Light is incident to CCD image sensor and is imaged after imaging lens group LENS.
In order to realize the high-acruracy survey to micro- body surface face shape, Fig. 2 shows three-dimensional scanner in, increase The position of light absorbing device 1 and light absorbing device 2, CCD image sensor and digital micro-mirror device DMD are at conjugate relation, projecting cell 101 launch directional light, are projected on plane mirror M2 across semi-transparent semi-reflecting lens M1, and directional light is reflected into digital micro-mirror by plane mirror M2 On device DMD, pass through the coding to digital micro-mirror device DMD so that digital micro-mirror device DMD does not interfere with each other multiple or do After disturbing smaller light reflection, the body surface of object to be measured is mapped to by Varifocal zoom lens group 104, and by digital micro-mirror device Light on another direction of DMD reflections is then absorbed by light absorbing device 2.The body surface of object to be measured passes through diffusing reflection, overflows Reflection light, by the reflection of DMD, is finally captured by CCD image sensor after Varifocal zoom lens group 104, is recorded Image.Multiple tomographic maps, body surface position and diffusing reflection can be obtained as schemed by the focal length variations of Varifocal zoom lens group 104 Shown in 3a to Fig. 3 c, the point on the object of object to be measured is only on focal position, and the diffusing reflection of object passes through varifocal mirror After head group 104, the light that CCD image sensor is reflected by digital micro-mirror device DMD is most, what CCD image sensor captured The light intensity of the point is maximum.By in advance to the focal length variations of liquid lens in Varifocal zoom lens group 104 and the calibration of depth relationship, To obtain the mapping relations of lens focus and depth, in conjunction with the maximum point of light intensity obtained in CCD image sensor, can obtain To with depth information three dimensions point coordinates, three dimensional point cloud is finally sought.
Digital micro-mirror device DMD and confocal three-dimensional measurement are combined by the embodiment of the present invention, by adjusting Varifocal zoom lens Liquid lens in group can carry out scanning probe to multiple points, not only increase speed of detection, can also be directed to different demands Adjustment point cloud density.The embodiment of the present invention, instead of point light source and conjugation pin hole, is gone using digital micro-mirror device DMD reflection lights In addition to point light source and pin hole center not on the same line caused by error.Further, the pixel of digital micro-mirror device DMD Size only has several microns, ensure that the precision of measurement, and uses the focal length variations of the Varifocal zoom lens group comprising liquid lens It is moved instead of lens, improves sweep speed.In the specific use process, it can be obtained simultaneously using color image sensor CCD The texture information for taking dental surface, to carry out further processing.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention All any modification, equivalent and improvement etc., should all be included in the protection scope of the present invention made by within refreshing and principle.

Claims (5)

1. a kind of three-dimensional scanner based on digital micro-mirror device coding, which is characterized in that adjusted including projecting cell, light path Unit, digital micro-mirror device, Varifocal zoom lens group and imaging unit, the position of the digital micro-mirror device and the imaging unit At conjugate relation, wherein:
The projecting cell is transmitted to the light path adjustment unit for generating directional light, and by the directional light;
The light path adjustment unit, for the directional light carry out light path adjustment so that light path adjustment after directional light according to Presetting angle is incident to the digital micro-mirror device;
The digital micro-mirror device, for reflecting the directional light, by reflected light projects to the Varifocal zoom lens group, Include not interfere with each other or interfere few light in the reflected light;
The Varifocal zoom lens group, for exposing to object to be measured after being focused the reflected light, with described to be measured The surface of object generates diffusing reflection light;It is additionally operable to collect the diffusing reflection light, the diffusing reflection light is transmitted through the number Word micro-mirror device;
The digital micro-mirror device is additionally operable to the line reflection that diffuses to the light path adjustment unit, the diffusing reflection Light is incident to the imaging unit after the light path adjustment unit carries out light path adjustment;
The imaging unit, for being imaged according to the diffusing reflection light.
2. three-dimensional scanner as described in claim 1, which is characterized in that the projecting cell includes projection light source, first Lens and the second lens;
The projection light source, for generating preset light;
The preset light forms directional light after first lens and second lens.
3. three-dimensional scanner as described in claim 1, which is characterized in that the light path adjustment unit includes semi-transparent semi-reflecting lens And plane mirror;
The directional light is transmitted to the plane mirror after passing through the semi-transparent semi-reflecting lens, the plane mirror by the directional light according to Presetting angle reflexes to the digital micro-mirror device;
The line reflection that diffuses is entered the semi-permeable and semi-reflecting mirror by the plane mirror, and the semi-permeable and semi-reflecting mirror will be described unrestrained Reflection light reflexes to the imaging unit according to presetting angle.
4. three-dimensional scanner as described in claim 1, which is characterized in that the Varifocal zoom lens group includes several liquid mirrors Head.
5. three-dimensional scanner as described in claim 1, which is characterized in that the imaging unit includes imaging lens group and figure As sensor CCD;
The diffusing reflection light is incident to described image sensor CCD and is imaged after the imaging lens group.
CN201810240822.5A 2018-03-22 2018-03-22 A kind of three-dimensional scanner based on digital micro-mirror device coding Pending CN108387186A (en)

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PCT/CN2018/104319 WO2019179057A1 (en) 2018-03-22 2018-09-06 Three-dimensional scanning device based on digital micro-mirror device coding

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CN109718476A (en) * 2018-12-28 2019-05-07 中国科学院苏州生物医学工程技术研究所 3-D scanning two-photon stimulating system and its stimulating method
CN110031830A (en) * 2019-04-29 2019-07-19 清华大学深圳研究生院 A kind of distance measuring method based on laser line scanning imaging
WO2019179057A1 (en) * 2018-03-22 2019-09-26 深圳技术大学(筹) Three-dimensional scanning device based on digital micro-mirror device coding
TWI696032B (en) * 2018-11-07 2020-06-11 廖正興 3d sensor camera with adjustable field of view or effective area range
CN111504177A (en) * 2020-04-27 2020-08-07 东北大学 High-contrast coding microscopic imaging system and method
CN114111626A (en) * 2021-11-26 2022-03-01 深圳技术大学 Light field camera three-dimensional measuring device and system based on coaxial projection
CN114322821A (en) * 2020-09-29 2022-04-12 沈阳华慧高新技术有限公司 Three-dimensional scanning device and calibration method and measurement method thereof

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WO2019179057A1 (en) * 2018-03-22 2019-09-26 深圳技术大学(筹) Three-dimensional scanning device based on digital micro-mirror device coding
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CN110031830A (en) * 2019-04-29 2019-07-19 清华大学深圳研究生院 A kind of distance measuring method based on laser line scanning imaging
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CN111504177B (en) * 2020-04-27 2021-05-28 东北大学 High-contrast coding microscopic imaging system and method
CN114322821A (en) * 2020-09-29 2022-04-12 沈阳华慧高新技术有限公司 Three-dimensional scanning device and calibration method and measurement method thereof
CN114111626A (en) * 2021-11-26 2022-03-01 深圳技术大学 Light field camera three-dimensional measuring device and system based on coaxial projection
CN114111626B (en) * 2021-11-26 2023-08-22 深圳技术大学 Light field camera three-dimensional measurement device and system based on coaxial projection

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