CN207424368U - A kind of controllable super-resolution microscope equipment of focusing based on spherical micro-nano liquid lens - Google Patents
A kind of controllable super-resolution microscope equipment of focusing based on spherical micro-nano liquid lens Download PDFInfo
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Abstract
The utility model discloses a kind of controllable super-resolution microscope equipment of the focusing based on spherical micro-nano liquid lens, including:Laser, speculum, the first lens group, dichroic mirror, linear polarizer, microcobjective, packaging cartridge, spherical micro-nano liquid lens, microflow channels, micro-displacement platform, sample stage, the second lens group, image device, computer control system.The computer control system control microflow channels in packaging cartridge discharge or absorb the drop of certain volume, and then regulate and control the radius of spherical micro-nano liquid lens, realize the zoom of spherical micro-nano liquid lens.The utility model is directed to the shortcomings of existing micro-nano structure focus characteristics are uncontrollable, propose a kind of controllable super-resolution microscope equipment of the focusing based on spherical micro-nano liquid lens, the device generates photon nanojet using spherical micro-nano liquid lens, by regulating and controlling spherical micro-nano liquid lens focus characteristics, in the case of no mechanical oscillatory structure, the scanning to sample different depth is realized;And the scanning that micro-displacement platform regulation and control sample stage realizes horizontal direction, the three-dimensional super-resolution micro-imaging of complete paired samples can be combined.
Description
Technical field
The utility model is related to optical microphotograph imaging fields, and in particular to a kind of focusing based on spherical micro-nano liquid lens
Controllable super-resolution microscope equipment.
Background technology
Since Abbe in 1873 proposes the concept of optical diffraction limit, optical diffraction limit how has been broken through, obtains higher
The high-definition picture of quality is always the hot spot of academia's research.Until the appearance of super-resolution optical imaging technique, breaches
The resolution limit of conventional light microscope provides unprecedented solution for area researches such as life science, biocytologies
Certainly scheme.At present, the super-resolution optical microtechnic of mainstream is broadly divided into:The fluorescent emission proposed with S.W.Hell et al. is lost
Microscopy for representative target switch with read microtechnic and with E.Betzig et al. propose photosensitive positioning microscopy and
The random optical that X.Zhuang et al. is proposed rebuilds random switching of the microscopy for representative with reading microtechnic.Above-mentioned two class is shown
Although microtechnology can realize super-resolution micro-imaging, there are still shortcoming, such as:System structure is complicated, cost
Higher, mechanical oscillatory structure is difficult to avoid that when realizing 3-D scanning.
And micro-nano structure is utilized to generate photon nanojet effect, sub-wavelength focusing is carried out, realizes the side of super-resolution imaging
Method, due to have the characteristics that simple in structure, cost is relatively low, without mechanical oscillatory structure, obtained more and more researchers in recent years
Concern.2017, in the 66th phase《Acta Physica Sinica》, Zhou Rui et al. delivers entitled《Microballoon oversubscription based near field optic
Distinguish microeffect》Paper in, adjusted by carrying out the method that ring carves concentric ring, central shielding and surface coat in microsphere surface
Photon nanojet caused by microballoon is saved, breaks through diffraction limit, realizes super-resolution micro-imaging.It is however single micro- in the structure
Focus characteristics caused by ball can not regulate and control, therefore can not carry out super-resolution micro-imaging, flexibility to the different depth of sample
It is poor, it can not realize the three-dimensional microscopy of sample.
The content of the invention
The utility model can not there are focus characteristics when super-resolution micro-imaging is realized near field for existing micro-nano structure
A kind of the shortcomings of control, it is proposed that the controllable super-resolution microscope equipment of focusing based on spherical micro-nano liquid lens.The device utilizes ball
Shape micro-nano liquid lens generate photon nanojet, by regulating and controlling spherical micro-nano liquid lens focus characteristics, in no mechanical structure
In the case of vibration, the scanning to sample different depth is realized;And micro-displacement platform regulation and control sample stage can be combined and realize level
The scanning in direction, the three-dimensional super-resolution micro-imaging of complete paired samples.
A kind of controllable super-resolution microscope equipment of focusing based on spherical micro-nano liquid lens, including:Laser, speculum,
First lens group, dichroic mirror, linear polarizer, microcobjective, packaging cartridge, spherical micro-nano liquid lens, microflow channels, micro-displacement platform,
Sample stage, the second lens group, image device, computer control system;
The light beam of the laser output is incided on speculum, and incident beam is reflected into the first lens group by speculum,
Light beam after the first lens group enters dichroic mirror, is incided into after dichroiscopic transmission on linear polarizer, from linear polarization
The linearly polarized light of device outgoing is incided on the back focal plane of microcobjective, and parallel beam incident is formed after microcobjective in ball
On shape micro-nano liquid lens, reach the photon nanojet of super-resolution effect, spray in the generation of spherical micro-nano liquid lens opposite side
The sample on nano-photon excitation sample stage penetrated generates fluorescence;
Fluorescence is reversely collected by microcobjective, and the fluorescence collected by microcobjective is emitted on linear polarizer, fluorescence warp
Dichroiscopic surface is incided into after crossing linear polarizer, after dichroiscopic reflection, imager is focused on by the second lens group
Part is implemented as picture.
In the utility model, first lens group includes two convex lenses, for collimating.
In the utility model, second lens group includes two convex lenses, for focusing on.
In the utility model, the dichroic mirror shows as Laser Output Beam height thoroughly, and to the fluorescence of electromagnetic radiation
It shows as high anti-;The height thoroughly, refers to that transmissivity is more than 98% for Laser Output Beam;The height is anti-, refers to
For the fluorescence of electromagnetic radiation, reflectivity is more than 98%.
In the utility model, the linear polarizer is used to modulate the light beam into linearly polarized light, the electric field of the linearly polarized light
Direction of vibration is horizontal direction, i.e., vertical with by the beam Propagation direction of linear polarizer.
In the utility model, the lower substrate of the packaging cartridge is glass slide, and side group plate is spacer bar;The sample stage embeds
In in micro-displacement platform;The micro-displacement platform allows level side of the sample stage along plane where sample stage for regulating and controlling sample stage
To movement.
In the utility model, when the photon nanojet refers to that spherical micro-nano drop is irradiated through collimated light beam, opposite
In a diameter of sub-wavelength or half sub-wavelength, the angle of divergence of the spherical micro-nano liquid lens opposite side generation of collimated light beam irradiation
Small, focusing luminous intensity height and focal length are more than 2Or less than 2Focal beam spot.
In the utility model, the computer control system control microflow channels in packaging cartridge discharge or absorb liquid, into
And regulate and control the radius of spherical micro-nano liquid lens.The radius of the spherical shape micro-nano liquid lens is bigger, corresponding spherical shape micro-nano drop
The focal length of lens is bigger, you can by the way that the regulation and control of micro-nano liquid lens radius are realized with the tune to spherical micro-nano liquid lens focal length
Control.The focal length of the spherical shape micro-nano liquid lens is from the end face of spherical micro-nano liquid lens to photon nanojet focusing center
Distance.
In the utility model, the super-resolution effect refers to utilize photon nanometer caused by spherical micro-nano liquid lens
The halfwidth of injection is less than the half of laser transmitting light beam wavelength.The halfwidth refers to that light intensity is largest light intensity
During half, the width of corresponding photon nanojet.
Preferably, the light beam wavelength scope of the laser output is 570 nanometers to 670 nanometers.
Preferably, the material of the spherical shape micro-nano liquid lens is water.
Preferably, the microcobjective numerical aperture is 1.35.
Compared with the prior art, the utility model has technique effect beneficial below:
1st, the utility model is realized and sample different depth is swept by regulating and controlling spherical micro-nano liquid lens focus characteristics
It retouches, no mechanical oscillatory structure, scanning accuracy is high;
2nd, the utility model light path is simple, builds conveniently, and spherical micro-nano liquid lens material is water, is easily obtained, cost
It is cheap.
Description of the drawings
The structural principle of focusing controllable super-resolution microscope equipment of Fig. 1 the utility model based on spherical micro-nano liquid lens
Schematic diagram;
Wherein:Laser 1, speculum 2, the first lens group 3, dichroic mirror 4, linear polarizer 5, microcobjective 6, packaging cartridge 7,
Spherical micro-nano liquid lens 8, microflow channels 9, micro-displacement platform 10, sample stage 11, the second lens group 12, image device 13, computer
Control system 14.
Fig. 2 is the matched curve figure of the focal lengths of spherical micro-nano liquid lens on radius in specific embodiment.
Fig. 3 is the matched curve figure of the halfwidth of photon nanojet on radius in specific embodiment.
Specific embodiment
The utility model is described in detail with reference to Figure of description, but the utility model is not limited to this.
It is the controllable super-resolution microscope equipment signal of focusing of the utility model based on spherical micro-nano liquid lens as shown in Figure 1
Figure, including:Laser 1, speculum 2, the first lens group 3, dichroic mirror 4, linear polarizer 5, microcobjective 6, packaging cartridge 7, spherical shape
Micro-nano liquid lens 8, microflow channels 9, micro-displacement platform 10, sample stage 11, the second lens group 12, image device 13, computer control
System 14.
Wherein, laser 1 produces LE-LS-589-XXT type visible rays for Li Ou Electro-optical Technology, INC. (US) 62 Martin Road, Concord, Massachusetts 017 of Shenzhen and partly leads
The all solid state laser of body pumping, power are 1-4500 milliwatts, and operation wavelength is 589 nanometers.
The light beam that laser 1 exports is incided on speculum 2, and incident beam is reflected into the first lens group 3 by speculum 2,
Light beam after the first lens group 3 collimation enters dichroic mirror 4, is incided into after the transmission of dichroic mirror 4 on linear polarizer 5,
The linearly polarized light electric field oscillation direction obtained after the modulation of linear polarizer 5 is horizontal direction, i.e. the light with passing through linear polarizer 5
Beam transmission direction is vertical, and the linearly polarized light being emitted from linear polarizer 5 is incided on the back focal plane of microcobjective 6.
The lower substrate of packaging cartridge 7 is the glass slide that material is silica, and side group plate is spacer bar, is placed in packaging cartridge 7
Micro-displacement platform 10, sample stage 11 are embedded in micro-displacement platform 10;The collimated light beam being emitted after microcobjective 6 passes through packaging cartridge
7 lower substrate is incident on spherical micro-nano liquid lens 8, and compared with the spherical micro-nano liquid lens irradiated parallel to light beam
8 opposite sides generate photon nanojet.
The spherical micro-nano that radius is 0.3,0.4,0.5,0.6,0.7,0.8,0.9,1.0 micron is chosen in the present embodiment respectively
Liquid lens 8 calculate the focus characteristics of the spherical micro-nano liquid lens 8 of different radii.
The photon nanojet of spherical micro-nano liquid lens 8 is studied by Maxwell's spherical coordinates equation, selects FDTD-
Solution business softwares carry out photon receive injection optical field distribution exact numerical simulation, carry out the accurate of maxwell equation group
It solves, then Gauss curve fitting is carried out with origin softwares.It is high by corresponding focal length after origin softwares progress Gauss curve fitting and half
Width is distinguished as shown in Figures 2 and 3 on the matched curve of radius.The radius of spherical micro-nano liquid lens 8 is bigger, corresponding spherical shape
The focal length of micro-nano liquid lens 8 is longer, the halfwidth of photon nanojet caused by corresponding spherical shape micro-nano liquid lens 8
It is bigger, but radius 0.6 micron to 0.7 micron and 0.8 micron to 0.9 micron of two section when, this two sections of sections are right respectively
The focal length for the spherical micro-nano liquid lens 8 answered is almost unchanged, and the halfwidth of photon nanojet gradually increases;When radius exists
0.3 micron to 0.4 micron of section when, the focal length of spherical micro-nano liquid lens 8 gradually increases, and halfwidth is almost unchanged.
The sample on photon nanojet excitation sample stage 11 that spherical micro-nano liquid lens 8 generate in the present embodiment is glimmering
Light after reversely being collected by microcobjective 6 by the fluorescence that sample surfaces generate, is emitted on linear polarizer 5, fluorescence is through linear polarizer
The surface of dichroic mirror 4 is incided into after 5, after the reflection of dichroic mirror 4, is focused on by the second lens group 12, by image device 13
It collects and is imaged.
Wherein, computer control system 14 connects microflow channels 9, by program driving microflow channels 9 in the packaging cartridge 7 release or
The drop of certain volume is absorbed, controls the radius of spherical micro-nano liquid lens 8, the change of the radius of spherical micro-nano liquid lens 8
The focus characteristics of spherical micro-nano liquid lens 8 can be influenced, so as to fulfill the regulation and control to spherical 8 focal length of micro-nano liquid lens.
The super apochromatic objectives of UPLSAP0100XS of Olympus Corp can be selected in microcobjective 6 in the present embodiment,
Enlargement ratio is 100 times, numerical aperture 1.35.
The DCC1545M type high-resolution black and white CMOS phases of Thorlabs companies can be selected in image device 13 in the present embodiment
Machine, pixel are 1280 × 1024.
11 material of sample stage is silica in the present embodiment, and the sample on sample stage 11 is by fluorescent dye Calcium
Crimson is calibrated in advance, and meeting generation wavelength is 615 nanometers after fluorescent dye is subject to the light beam that wavelength is 589 nanometers to irradiate
Fluorescence.
The present embodiment changes the focal length of spherical micro-nano liquid lens 8 by changing the radius of spherical micro-nano liquid lens 8,
As shown in Fig. 2, the scanning to sample different depth can be realized in the case of no mechanical oscillatory structure;Different spherical shape micro-nano liquid
The halfwidth of the corresponding photon nanojet of radius of lens 8 is dripped, as shown in figure 3, respectively less than 250 nanometers, i.e., less than laser
Emit the half of light beam wavelength, reach super-resolution focus effect;Regulate and control sample stage 11 along sample stage with reference to micro-displacement platform 10
The horizontal direction movement of 11 place planes, realizes the scanning to observing samples various dimensions, accuracy of observation is improved, so as to fulfill three-dimensional
Super-resolution micro-imaging.
It is last it should be noted that embodiment of above is only to illustrate the technical solution of patent and unrestricted, this field
Those of ordinary skill for do not depart from this patent principle on the premise of, several variations and modifications can also be made, this should also be regarded
For the protection domain of this patent.
Claims (7)
1. a kind of controllable super-resolution microscope equipment of focusing based on spherical micro-nano liquid lens, which is characterized in that including laser,
It is speculum, the first lens group, dichroic mirror, linear polarizer, microcobjective, packaging cartridge, spherical micro-nano liquid lens, microflow channels, micro-
Displacement platform, sample stage, the second lens group, image device, computer control system;
The light beam of the laser output is incided on speculum, and incident beam is reflected into the first lens group by speculum, is passed through
Light beam after first lens group enters dichroic mirror, incides on linear polarizer after dichroiscopic transmission, goes out from linear polarizer
The linearly polarized light penetrated is incided on the back focal plane of microcobjective, and parallel beam incident is formed after microcobjective spherical micro-
It receives on liquid lens, photon nanojet effect, the nano-photon excitation of injection is generated in spherical micro-nano liquid lens opposite side
Sample on sample stage generates fluorescence;
Fluorescence is reversely collected by microcobjective, and the fluorescence collected by microcobjective is emitted on linear polarizer, and fluorescence passes through line
Dichroiscopic surface is incided into after polarizer, after dichroiscopic reflection, image device is focused on by the second lens group, it is real
Ready-made picture.
2. the controllable super-resolution microscope equipment of a kind of focusing based on spherical micro-nano liquid lens according to claim 1,
It is characterized in that:The light beam wavelength scope of the laser output is 570 nanometers to 670 nanometers.
3. the controllable super-resolution microscope equipment of a kind of focusing based on spherical micro-nano liquid lens according to claim 1,
It is characterized in that:The material of the spherical shape micro-nano liquid lens is water.
4. the controllable super-resolution microscope equipment of a kind of focusing based on spherical micro-nano liquid lens according to claim 1,
It is characterized in that:The collimated light beam irradiation that the spherical shape micro-nano liquid lens are emitted through microscope can generate photon nanojet.
5. the controllable super-resolution microscope equipment of a kind of focusing based on spherical micro-nano liquid lens according to claim 4,
It is characterized in that:When the photon nanojet refers to that spherical micro-nano liquid lens are irradiated through collimated light beam, compared with directional light
Beam irradiation spherical micro-nano liquid lens opposite side generate an a diameter of sub-wavelength or half sub-wavelength, the angle of divergence it is small, focus on
Luminous intensity is high and focal length is more than 2Or less than 2Focal beam spot.
6. the controllable super-resolution microscope equipment of a kind of focusing based on spherical micro-nano liquid lens according to claim 1,
It is characterized in that:The computer control system control microflow channels in packaging cartridge discharge or absorb the drop of certain volume, and then
The radius of the spherical micro-nano liquid lens of regulation and control.
7. the controllable super-resolution microscope equipment of a kind of focusing based on spherical micro-nano liquid lens according to claim 1,
It is characterized in that:The microcobjective numerical aperture is 1.35.
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Cited By (4)
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CN107831589A (en) * | 2017-12-04 | 2018-03-23 | 中国计量大学 | A kind of controllable super-resolution microscope equipment of focusing based on spherical micro-nano liquid lens |
CN112505009A (en) * | 2020-11-12 | 2021-03-16 | 中国科学院长春光学精密机械与物理研究所 | Super surface lens and fluorescence signal collection system formed by same |
CN115113308A (en) * | 2022-07-06 | 2022-09-27 | 重庆大学 | Super-resolution imaging lens with angle amplification function |
US11474283B2 (en) * | 2020-06-30 | 2022-10-18 | Uchicago Argonne, Llc | Super resolution for magneto-optical microscopy |
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Cited By (6)
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CN107831589A (en) * | 2017-12-04 | 2018-03-23 | 中国计量大学 | A kind of controllable super-resolution microscope equipment of focusing based on spherical micro-nano liquid lens |
CN107831589B (en) * | 2017-12-04 | 2024-02-02 | 中国计量大学 | Focusing controllable super-resolution microscopic device based on spherical micro-nano liquid drop lens |
US11474283B2 (en) * | 2020-06-30 | 2022-10-18 | Uchicago Argonne, Llc | Super resolution for magneto-optical microscopy |
CN112505009A (en) * | 2020-11-12 | 2021-03-16 | 中国科学院长春光学精密机械与物理研究所 | Super surface lens and fluorescence signal collection system formed by same |
CN115113308A (en) * | 2022-07-06 | 2022-09-27 | 重庆大学 | Super-resolution imaging lens with angle amplification function |
CN115113308B (en) * | 2022-07-06 | 2024-05-14 | 重庆大学 | Super-resolution imaging lens with angle amplifying function |
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