CN202351017U - Measuring instrument based on microscopic imaging for optical parameters of polymer planar waveguide - Google Patents
Measuring instrument based on microscopic imaging for optical parameters of polymer planar waveguide Download PDFInfo
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- CN202351017U CN202351017U CN2011204312108U CN201120431210U CN202351017U CN 202351017 U CN202351017 U CN 202351017U CN 2011204312108 U CN2011204312108 U CN 2011204312108U CN 201120431210 U CN201120431210 U CN 201120431210U CN 202351017 U CN202351017 U CN 202351017U
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- 230000003287 optical effect Effects 0.000 title claims abstract description 22
- 229920000642 polymer Polymers 0.000 title claims abstract description 16
- 238000003384 imaging method Methods 0.000 title claims abstract description 13
- 238000007654 immersion Methods 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000010408 film Substances 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 9
- 230000010287 polarization Effects 0.000 claims description 6
- 238000005259 measurement Methods 0.000 abstract description 8
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 239000004606 Fillers/Extenders Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 4
- 229920006254 polymer film Polymers 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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Abstract
The utility model discloses a measuring instrument based on microscopic imaging for the optical parameters of a polymer planar waveguide, comprising a laser light source, a polarizing component group, an extender lens group, a reflector, an oil immersion microscope objective with a high numerical aperture, refractive index-matching oil, a planar waveguide, a beam splitter, a condenser lens group, and a CCD (charge-coupled device) image sensor. A laser emitted by the light source passes through the polarizing component group, the extender lens group, the reflector and the beam splitter, and then passes through the oil immersion microscope objective with a high numerical aperture, after that, the laser is irradiated on the planar waveguide with a wide angle range; the incident light is converted to a guided wave mode in the planar waveguide at some specific irradiation angle, and the light beams at other irradiation angles are reflected by the waveguide, and then converged on the CCD image sensor after through the oil immersion microscope objective with a high numerical aperture, the beam splitter, and the condenser lens group; and the important optical parameters of the planar waveguide can be calculated finally. The measuring instrument based on microscopic imaging for the optical parameters of a polymer planar waveguide disclosed by the utility model is simple and compact in structure, without the need of angle scanning, high in spatial resolution, capable of realizing real-time monitoring, and suitable for high-efficiency and real-time measurement for the parameters of a planar waveguide.
Description
Technical Field
The utility model relates to a technical field of optical waveguide device optical parameter sign, in particular to polymer planar waveguide optical parameter measuring apparatu based on micro-imaging.
Background
The planar waveguide is a basic component in integrated optics, the polymer planar waveguide has the advantages of low loss, high bandwidth, easiness in processing and the like, so that the polymer planar waveguide has wider application, and the measurement of optical parameters is one of essential elements for manufacturing efficient and reliable optical waveguide devices. The existing method for measuring optical parameters of planar waveguide is mainly based on the angular scanning method (i.e. M-line method) of prism, and solves transcendental equation by means of computer to obtain waveguide parameters. The main problems are as follows:
1. the operation is inconvenient. The M-line method for measuring the effective refractive index of the waveguide needs a specific prism coupler (theta-2 theta instrument) and needs point-by-point scanning of angles, so that the speed is low, the time consumption is long, and the operation process is complicated.
2. The calculation is complex. The matrix algorithm has large calculation amount, and the solution of the model eigen equation needs computer assistance.
3. Limitations are presented. The structure can only excite the resonant guided mode in one-dimensional direction, and the spatial resolution is lower; real-time measurement or monitoring cannot be achieved.
Disclosure of Invention
The utility model aims at overcoming the not enough of current detection technique, providing a polymer planar waveguide optical parameter's measuring apparatu based on microscopic imaging, its simple structure is compact, and spatial resolution is high, need not the angle scanning, but real-time supervision is suitable for high efficiency, the real-time measurement of planar waveguide parameter.
The utility model discloses realize the technical scheme of above-mentioned purpose as follows:
a microscopic imaging based polymer planar waveguide optical parameter measuring instrument, comprising: the device comprises a laser light source, a polarizing element group, a beam expanding lens group, a reflector, a high numerical aperture oil immersion microscope objective, refractive index matching oil, a planar waveguide, a beam splitter, a beam bunching lens group and a CCD image sensor; wherein,
the polarizing element group is a polarizing element group consisting of a polarizer and 1/2 wave plates and is used for changing the polarization direction of the laser;
the planar waveguide is a four-layer structure consisting of a glass substrate, a metal film, a polymer film and an air layer above the metal film, wherein the metal film is evaporated or sputtered on the glass substrate, and the polymer film is spin-coated on the metal film;
the laser emitted by the laser source forms linearly polarized light after passing through the polarizing element group; after the beam is expanded by the beam expanding lens group, the beam is irradiated on the interface of the glass substrate and the metal film through a reflector, a high numerical aperture oil immersion microscope objective and refractive index matching oil in a wide angle range, under certain specific angles, the angles correspond to dark arcs on an optical image of a back focal plane one by one, and a guided wave mode transmitted in a planar waveguide is excited, namely a guided mode; the light irradiating the planar waveguide is transmitted and then passes through the high numerical aperture oil immersion microscope objective, the beam splitter and the beam focusing lens group to be imaged on the CCD image sensor, the CCD image sensor records the optical image of the reflected light field on the focal plane behind the microscope objective, and the effective refractive indexes of various excited guided modes are calculated by reading the dark arc position and the radius in the imaging. Further, after the laser light source passes through the beam expansion, the entrance pupil of the whole high-numerical-aperture oil-immersed microscope objective is covered; the planar waveguide can be irradiated in a wide angle range, so that various guided modes transmitted in the planar waveguide can be simultaneously excited.
Further, high spatial resolution is obtained by using the high-numerical-aperture oil immersion microscope objective, and micro-area measurement is realized; meanwhile, the same high-numerical-aperture oil immersion microscope objective is utilized to realize the collection imaging of incident light focusing excitation guided mode and reflected light, and the instrument structure is simplified.
Further, by rotating 1/2 wave plate, dark arc direction in optical image of back focal plane of high numerical aperture oil-immersed microscope can be controlled to judge polarization state of excited various guided modes.
The utility model discloses technical scheme's principle does:
the laser light source irradiates the planar waveguide in a wide angle range through the designed light path. Exciting various guided modes existing in the waveguide at certain specific incidence angles; incident light fields corresponding to these anglesThe energy is converted into various guided modes transmitted in the planar waveguide, and then dark arcs with different radiuses are generated on reflected light field images of a focal plane behind the high-numerical-aperture oil-immersed microscope objective. The method utilizes the dark arc radius (R is f.nsin theta, R is the dark arc radius, f is the focal length of the high numerical aperture oil immersion microscope objective lens, n is the refractive index of the refractive index matching oil, theta is the excitation angle of the guided mode) and the field radius (R is f.nsin theta) displayed on the CCD image sensor and the field radius (R is f.nsin theta)m，θmMaximum viewing angle) of different guided modes, and calculating the excitation angles of different guided modes and the effective refractive indexes of the guided modes.
The utility model discloses advantage compared with the conventional art does:
1. the structure is simple: the polarized light illumination and the microscope objective focus excite the guided mode, the CCD images the back focal plane of the objective, the effective refractive indexes of all guided modes are directly measured by utilizing the guided modes with different dark arc radiuses corresponding to different propagation constants, and the structure is simple and compact;
2. high efficiency: the angle scanning is not needed, the measurement is directly carried out by an imaging method, the measurement time is short, the operation is convenient, and the efficiency is high; meanwhile, the influence of external factors such as temperature, humidity, other laser irradiation and the like on the effective refractive index of the guided mode can be dynamically monitored in real time;
3. high resolution: due to the central symmetry of the structure of the micro objective, various guided modes transmitted in the planar waveguide can be simultaneously excited in a two-dimensional space, and the micro objective is used for focusing light beams to realize micro-area measurement with high spatial resolution.
4. The mode analysis is convenient: the CCD image sensor is used for observing the position and the radius of a dark arc in an image, and the polarization, the excitation angle and the effective refractive index of various guided modes are directly calculated.
Drawings
Fig. 1 is a schematic structural diagram of a polymer planar waveguide optical parameter measuring instrument based on microscopic imaging according to the present invention;
wherein, 1, a laser light source; 2. a polarizer; 3. 1/2 a wave plate; 4. a beam expanding lens group; 5. a mirror; 6. high numerical aperture oil immersion microscope objective; 7. refractive index matching oil; 8. a glass substrate; 9. a metal thin film; 10. a polymer film; 11. a beam splitter; 12. a condenser lens group; 13. a CCD image sensor.
Detailed Description
The present invention is described in further detail below with reference to the attached drawing figures and the detailed description, wherein like reference numerals refer to like elements throughout.
Referring to fig. 1, the optical parameter measuring instrument based on the polymer planar waveguide of microscopic imaging comprises: the device comprises a laser light source 1, a polarizing element group (comprising a polarizer 2 and a 1/2 wave plate 3), a beam expanding lens group 4, a reflector 5, a high numerical aperture oil immersion microscope objective 6 (hereinafter referred to as microscope objective 6), refractive index matching oil 7, a glass substrate 8, a metal film 9, a polymer film 10, a beam splitter 11, a beam focusing lens group 12 and a CCD image sensor 13. Specifically, the planar waveguide to be measured is formed by evaporating or sputtering a metal thin film (e.g., a silver film with a thickness of 45 nm) on a glass substrate 8, further spin-coating a polymer thin film 10 (e.g., polymethyl methacrylate with a thickness of 500 nm) with a certain thickness, and connecting the dried polymer thin film with a microscope objective 6 (e.g., 60X, n.a. ═ 1.42) through matching oil 7 with a refractive index of 1.516; the laser emitted by the laser source 1 passes through the polarization component group with the changed polarization state to form linearly polarized light; the beam expanding lens group 4 expands incident light to a pupil entrance surface which can cover the whole microscope objective 6, and after the incident light is reflected by the reflector 5, the incident light is converged on the waveguide structure through the microscope objective 6 and is reflected at the interface of the glass substrate 8 and the metal film 9; the reflected light is collected by the microscope objective 6, reflected by the beam splitter 11, and the reflected light field distribution on the back focal plane of the microscope objective 6 is imaged on the photosensitive surface of the CCD13 by the beam focusing lens group 12, so that the reflected light field optical image of the back focal plane of the objective can be obtained.
The details of the present invention not described in detail belong to the known technology in the art. The above embodiments are only for illustrating the technical solution of the present invention and are not limited within the scope of the specific embodiments, and it is obvious to those skilled in the art that various changes are made within the spirit and scope of the present invention defined and determined by the claims, and all the inventions utilizing the inventive concept are protected.
Claims (1)
1. A polymer planar waveguide optical parameter measuring instrument based on microscopic imaging is characterized in that: the measuring instrument comprises: the device comprises a laser light source (1), a polarizing element group, a beam expanding lens group (4), a reflector (5), a high-numerical-aperture oil immersion microscope objective (6), refractive index matching oil (7), a planar waveguide, a beam splitter (11), a beam focusing lens group (12) and a CCD image sensor (13);
the polarizing element group is a polarizing element group consisting of a polarizer (2) and an 1/2 wave plate (3) and is used for changing the polarization direction of laser;
the planar waveguide is a four-layer structure consisting of a glass substrate (8), a metal thin film (9), a polymer thin film (10) and an air layer above the glass substrate, wherein the metal thin film (9) is evaporated or sputtered on the glass substrate (8), and the polymer thin film (10) is spin-coated on the metal thin film (9);
the laser emitted by the laser source (1) forms linearly polarized light after passing through the polarizing element group; after the beam is expanded by the beam expanding lens group (4), the beam passes through the reflector (5), the high-numerical-aperture oil-immersed microscope objective (6) and the refractive index matching oil (7) and irradiates the interface of the glass substrate (8) and the metal film (9) in a wide angle range, under certain specific angles, the angles correspond to dark arcs on an optical image of a back focal plane one by one, and a guided wave mode transmitted in the planar waveguide, namely a guided mode for short, is excited; incident light energy at the angles is converted into guided mode light field energy, most light beams at other angles are reflected back by the planar waveguide, reflected light is collected by the high numerical aperture oil immersion microscope objective (6) and then imaged on the CCD image sensor (13) through the beam splitter (11) and the beam focusing lens group (12), the CCD image sensor (13) records reflected light field optical images on a focal plane behind the high numerical aperture oil immersion microscope objective (6), and effective refractive indexes of various excited guided modes are calculated by reading dark arc positions and radiuses in the imaged images.
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| CN2011204312108U CN202351017U (en) | 2011-11-03 | 2011-11-03 | Measuring instrument based on microscopic imaging for optical parameters of polymer planar waveguide |
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| CN2011204312108U CN202351017U (en) | 2011-11-03 | 2011-11-03 | Measuring instrument based on microscopic imaging for optical parameters of polymer planar waveguide |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102426093A (en) * | 2011-11-03 | 2012-04-25 | 中国科学技术大学 | Microscopic imaging-based polymer planar waveguide optical parameter measuring apparatus |
| CN107703104A (en) * | 2017-09-30 | 2018-02-16 | 北京航空航天大学 | Wavelength modulation system surface plasma microscope equipment based on microcobjective |
| CN108956571A (en) * | 2018-07-27 | 2018-12-07 | 南京理工大学 | It is a kind of that ccd target surface is imaged on based on compromising emanation and the calibration method and device of positioning surface angle error are installed |
| CN112665618A (en) * | 2020-12-17 | 2021-04-16 | 安徽中元新材料技术有限公司 | Morphology-based wavelength sensitive mode extraction device and method |
| CN112665619A (en) * | 2020-12-17 | 2021-04-16 | 安徽中元新材料技术有限公司 | Automatic extraction device and method for high-sensitivity sensing mode |
| CN113192397A (en) * | 2021-04-12 | 2021-07-30 | 湖北第二师范学院 | Microscopic imaging device based on finite distance optical imaging system |
-
2011
- 2011-11-03 CN CN2011204312108U patent/CN202351017U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102426093A (en) * | 2011-11-03 | 2012-04-25 | 中国科学技术大学 | Microscopic imaging-based polymer planar waveguide optical parameter measuring apparatus |
| CN107703104A (en) * | 2017-09-30 | 2018-02-16 | 北京航空航天大学 | Wavelength modulation system surface plasma microscope equipment based on microcobjective |
| CN108956571A (en) * | 2018-07-27 | 2018-12-07 | 南京理工大学 | It is a kind of that ccd target surface is imaged on based on compromising emanation and the calibration method and device of positioning surface angle error are installed |
| CN108956571B (en) * | 2018-07-27 | 2023-12-15 | 南京理工大学 | Calibration method and device based on error of included angle between ccd target surface and installation positioning surface of leakage radiation imaging |
| CN112665618A (en) * | 2020-12-17 | 2021-04-16 | 安徽中元新材料技术有限公司 | Morphology-based wavelength sensitive mode extraction device and method |
| CN112665619A (en) * | 2020-12-17 | 2021-04-16 | 安徽中元新材料技术有限公司 | Automatic extraction device and method for high-sensitivity sensing mode |
| CN112665618B (en) * | 2020-12-17 | 2022-05-17 | 安徽中元新材料技术有限公司 | Morphology-based wavelength sensitive mode extraction device and method |
| CN112665619B (en) * | 2020-12-17 | 2022-05-20 | 安徽中元新材料技术有限公司 | Automatic extraction device and method for high-sensitivity sensing mode |
| CN113192397A (en) * | 2021-04-12 | 2021-07-30 | 湖北第二师范学院 | Microscopic imaging device based on finite distance optical imaging system |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120725 Termination date: 20141103 |
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