CN107543508A - Optical system and object surface three-dimensional shape detection method using same - Google Patents
Optical system and object surface three-dimensional shape detection method using same Download PDFInfo
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Abstract
The invention discloses an optical system and a method for detecting the three-dimensional shape of an object surface or internal light reflection interface. The method projects at least one point light source generated by the light modulation unit to at least one position of an object surface or an internal light reflection interface. And the image capturing device receives at least one reflected object light reflected by the at least one depth position to generate a specific optical diffraction image corresponding to the depth, wherein the specific optical diffraction image is provided with at least one optical diffraction pattern. The detection method uses the precise depth displacement to record the optical diffraction patterns corresponding to each depth, so as to form a database with a plurality of optical diffraction patterns. And performing normalized image matching operation on the measured optical diffraction pattern and a plurality of optical diffraction pattern samples by using a control and calculation unit on the optical diffraction pattern obtained by measuring the three-dimensional appearance depth of the surface or the internal light reflection interface of the object so as to determine the precise depth information corresponding to the position of the optical diffraction pattern.
Description
Technical field
The present invention is a kind of high speed overall situation formula optical system and detection techniques by synchronous multiple spot optical scanner, particularly
Refer to and a kind of detect body surface or internal light reflection interface (back side containing object) three-dimensional appearance using scattering pattern image
A kind of optical system, and body surface or internal light reflection interface three-dimensional appearance method for detecting using the system.
Background technology
Color confocal microscope system is one of method for measuring object surface three-dimensional morphology, can measure machinery or semiconductor
The information such as rank height, line width, groove width and depth in structure, so as processing procedure improve or qualification rate detection it is important according to
According to.This technology is most proposed early in nineteen fifty-seven by Marvin's Min Si bases (Marvin Minsky).Colored confocal principle is by incidence
Optical dispersion, multiple detected lights with the different depths of focus are formed, form the measurement mechanism of optical profile type vertical scanning, application is this
Mode detects determinand, can obtain the optical section image of different depth, passes through pin hole (pinhole) and carries out signal out of focus
Filtering, the reflected light outside focal zone and scattering light are filtered out, retain focusing surface information, and by computers by obtained by different depth
Optical section image reconstruction get up, you can try to achieve the three-dimensional space image information of determinand.
Such as United States Patent (USP) US.Pat.No.6, a kind of confocal wafer detection system disclosed in 934,019, light source projects
Light field focuses on different focal positions by lens.Due to for a light field, therefore pass through the light by the reflection on wafer to be measured
Only have a kind of light field of color to pass through filtering unit via the reflection of spectroscope 14 in field.By mobile determinand either
Mobile optical texture, to measure the apparent height of diverse location on wafer to be measured.Although aforementioned techniques can measure determinand
Apparent height, but because the position focused on is point light field, therefore the position detected each time is only single-point, therefore can survey
The three-dimensional surface shape for measuring whole determinand not only takes but also reduces the production efficiency of processing procedure.Further, since the light of reflection
Field is single colored light, therefore can directly be analyzed by spectrometer sensing.
In addition, and for example United States Patent (USP) US.Pat.No.5, a kind of confocal microscopy device disclosed in 785,651.In the technology
In, the confocal microscopy device is accurate by no color differnece using polychromatic light field caused by a light source (polychromatic light)
Straight lens (achromatic collimator lens), then form the collimated light field of no color differnece and are projected to Fresnel light
Learn on component.Formed after Fresnel optical modules as wavelength is different and have the scattered light field of different focus points, with detection
The three-dimensional surface shape of determinand.In the art, similarly, also it is that light field is modulated into different wave length and focused on not
With the point of position, because the position detected each time is only single-point, therefore the surface three dimension of whole determinand can be measured that
Pattern not only takes but also reduces the production efficiency of processing procedure.Further, since the light field of reflection is single colored light, therefore directly by feeling
Surveying component sensing can analyze.In addition, and for example being total to disclosed in U.S. Published Application US.Pub.No.2004/0109170
Burnt detection sensor, it is also that light field is divided into different wave length and focused on respectively on different focal positions.
Although colored confocal detected light is because of having the different depths of focus, and can exempt conventional vertical scanning,
Because the motion of vertical movement mechanism is to the vibration problem caused by measurement board, but there still have several parts to have to be to be solved
Part：
Firstth, when multiple spot is measured and penetrated simultaneously, close to light out of focus between measurement point and veiling glare overlapping, easily life is laterally dry
The noise problem of (cross talk) is disturbed, in the prior art, in order to reduce the problem of interfering between light, more before spectrometer
Face set pin hole (pinhole), though but such a mode can reduce interference, if apply measuring object bivariate table
Face pattern or need high-resolution measurement when, then need coordinate transverse shifting, can thus increase measurement needed for when
Between and vibrate influence to measurement accuracy, therefore the mode of general confocal measuring three-dimensional morphology is still applied and surveyed in single-point mostly
Amount field.
Secondth, spectrometer volume takes up space and parsed the problem of spectrum is time-consuming.In the prior art, in order to go back original surface
Three-dimensional appearance is, it is necessary to pass through the spectrum of slit either pinhole arrangement by spectrometer detecting, and then find out corresponding detecting position
Wavelength of light and its luminous intensity, so as to reduce the depth of the position correspondence.Using the mode of spectrometer have it is several have it is to be overcome
Part, be the bulky of spectrometer first, take up space.Further, since spectrometer reduction spectral information is time-consuming not to have survey
Amount efficiency, it is main reasons is that for each measurement site, and the spectrum of expansion is the spectrum of dimension, if to one
For linear measurement position, expansion is exactly a two-dimension spectrum, is calculated in measuring speed and data and belongs to adverse conditions,
Generally measuring speed is greatly reduced.It follows that each spectrometer is disposably parsed, it is exactly at most a line
The measured zone of property, therefore, if to measure a face, this just has to the scanning by transverse shifting, thus not only
Increase the time of measurement, more likely because horizontal mechanical scanning motion causes vibration problem to measurement board, so as to influence to survey
Accuracy of measurement.
At present on optical microphotograph confocal measuring technique, the acquisition of measurement signal is mainly by single corresponding to fathoming
Light intensity or spectral information, by mechanical or optical profile type axial depth scan mode, carry out axial measurement light intensity or spectrum
The peak-seeking calculation method of information, search out the depth location of confocal.Because single light intensity or spectral information are easily by optical sensor
Noise measuring system unstability or measuring environment variation extreme influence so that measured acquisition depth information hold
Very big measurement error is also easy to produce, it measures precision and is affected, so as to can not further lift more superior grade, this
The key issue urgently broken through for current optical microphotograph confocal measurement method.
Summary, therefore need a kind of optical system and the body surface or internal light reflection interface using the system badly
(back side containing object) three-dimensional appearance method for detecting solves the problem that prior art.
The content of the invention
The present invention provides a kind of optical system and body surface or internal light reflection interface three-dimensional appearance method for detecting, its profit
With digital optical modulation unit, such as：Digital minitype reflector component (digital mirror device, DMD) or liquid crystal on silicon
Component (liquid crystal on silicon, LCOS), multiple spot lights with specific range are produced, are projected to object
Surface or internal light reflection interface, carry out multi-channel optical scanning, so measure optical diffraction pattern (or point spread function,
Point Spread Function (PSF)), then by establishing the optical diffraction pattern sample database on depth, will be to be measured
The optical diffraction pattern of an at least position carries out computing cross-correlation with the optical diffraction image sample in database on thing, with
Know its corresponding depth.Because the present invention is by light-modulating cell, the incident beam modulated is projected to determinand into multiple spot lights
Surface, therefore can be greatly reduced and produce Horizonal Disturbing (cross talk) noise because luminous point overlaps, and then improve three-dimensional
The degree of accuracy of the depth survey of pattern or measurement interface.
The invention provides a kind of optical system and body surface or internal light reflection interface three-dimensional appearance method for detecting, its
One-dimensional or two-dimentional array spot light can be produced, passes through the position switching of spot light and detecing for collocation image capturing device
Survey rate (frame detection rate), carry out the global formula of high speed (full-field) body surface or internal light reflection interface
D surface contouring so that optical system provided by the invention can not only click (quaisi-single shot) by standard
Mode quickly obtains (Full field) surface profile information of overall importance of determinand, and it is more for the overall situation to click metering system for wherein standard
Point confocal measurement mode, and from the real-time measurement for being used in online (in-situ).In addition, by the metering system clicked,
Can in order to avoid because perpendicularly or transversely motion scan when, caused vibration is to the negative effect caused by measurement result, measurement
As a result accuracy can be lifted significantly.
In one embodiment, the present invention provides a kind of optical system, including the capture of a light source module, an object lens, an image
Equipment and a control and computing unit.The wideband light source module, to produce to a little less light source.The object lens to by this extremely
A little less light source projects are to an at least position for a body surface or internal light reflection interface.The image capturing device, to connect
At least one reflection object light by least position reflection is received, to produce corresponding optical diffraction image, it has at least one
Optical diffraction pattern, the depth that each optical diffraction pattern precisely can correspond on the body surface or internal light reflection interface
Position.The control and computing unit, by the optical diffraction pattern that each position is corresponded in the optical diffraction image and multiple optics
Diffraction pattern sample carries out computing, to determine the depth of each position.
In another embodiment, the present invention provides a kind of body surface or internal light reflection interface three-dimensional appearance detecting side
Method, comprise the following steps：First, produce to a little less light source；Then, should be to a little less light source projects to a thing with an object lens
Body surface face or an at least depth location for internal light reflection interface；Then, at least reverberation for reflecting an at least position
Light passes through the object lens；Next, by this, at least a reverberation light guide leads to an image capturing device；Afterwards, image capture is set
Fully feel survey this at least one reflection object light and produce an optical diffraction image, its have to should an at least depth location at least one
Optical diffraction pattern.Finally, an at least optical diffraction pattern is captured respectively from the optical diffraction image, and by each optics
Diffraction pattern carries out computing with multiple optical diffraction pattern samples, to determine corresponding each body surface or internal light reflection interface
The depth information of measurement position.
In one embodiment, wherein determining that the method for the depth of each position comprises the following steps：First, a number is established
According to storehouse, it has the optical diffraction pattern sample of multiple corresponding different depths.Then, by each optical diffraction pattern captured
Computing is carried out with the optical diffraction pattern sample of multiple corresponding different depths of the spot light position in database corresponding thereto,
With produce it is multiple on optical diffraction pattern sample regular cross-correlation (normalized cross correlation,
NCC) numerical value.Finally, with corresponding to the optical diffraction pattern sample corresponding to maximum in the plurality of regular cross correlation value
Depth, using as to should optical diffraction pattern position fathom.Wherein, the database is established to comprise the following steps：Carry
For a minute surface, its surface has one first distance with the object lens；Dispersion is produced via the composition lens with least one correction spot light
After be incident upon on the minute surface；From the reflection object light of the mirror-reflection via the object lens after, be led to the image capturing device and
Produce correction optical diffraction image (the calibrated optical diffractive on first distance
Patterns), it has an at least optical diffraction pattern sample, and it corresponds to a correction spot light respectively；Capture respectively on this
An at least optical diffraction pattern sample for first distance；First distance is changed to a second distance, further obtains pass
Another correction optical diffraction image of second distance after change；And at least light on the second distance is captured respectively
Learn diffraction pattern sample.
Brief description of the drawings
Figure 1A is optical system first embodiment schematic diagram provided by the invention；
Figure 1B is optical system second embodiment schematic diagram provided by the invention；
Fig. 1 C are optical system 3rd embodiment schematic diagram provided by the invention；
Fig. 1 D are optical system fourth embodiment schematic diagram provided by the invention；
Fig. 2A and Fig. 2 B are light-operated switch and change its reflection direction schematic diagram；
Fig. 2 C are to emulate spot light schematic diagram using light-modulating cell；
Fig. 3 is to illustrate Joseph von fraunhofer 1787-1826 diffraction schematic diagram；
Fig. 4 A are captured the diffraction image on a body surface or internal light reflection interface by image capturing device；
Fig. 4 B and Fig. 4 C are the optical diffraction image of different exposure time；
Fig. 5 A and Fig. 5 B are the 3D Computer Simulation schematic diagrames on Fig. 4 A and Fig. 4 B optical diffraction image luminous intensity；
Fig. 6 is that construction database changes simultaneously mirror position schematic diagram；
Fig. 7 is the luminous intensity schematic diagram of each pixel in optical diffraction pattern sample；
Fig. 8 is that each optical diffraction pattern and corresponding multiple optical diffraction pattern samples calculate relation signal
Figure；
Fig. 9 is regular cross-correlation and depth curve schematic diagram；And
Figure 10 is that light-modulating cell converts spot light schematic diagram.
Description of reference numerals：2- optical systems；20- light source modules；200- light sources；201- collimates microscope group；202- light modulations
Unit；203rd, 203a-, 203b- light-operated switch；21st, 21a- object lens；22nd, 22a- image capturing devices；23- is controlled with calculating list
Member；24- spectrum groupwares；25- multiplies microscope carrier；26- focuses on microscope group；50- optical diffraction patterns；511~511n- optical diffraction pattern samples
This；8th, 8a- determinands；80- level crossings；81- bottom surfaces；82- inner planes；Crack inside 83- determinands is either internal
Hollow structure；90- incident lights；91- collimated light fields；93rd, 93a-, 93b- object light.
Embodiment
Alterations will be referred to below, and various exemplary embodiments can be more fully described, shown in alterations
Some exemplary embodiments.However, concept of the present invention may embody in many different forms, and should not be construed as limited by herein
Middle illustrated exemplary embodiments.Specifically, there is provided these exemplary embodiments cause the present invention will be it is detailed and complete,
And the category for concept of the present invention fully being passed on to those who familiarize themselves with the technology.In all schemas, can be lavished praise on oneself in order to clear layer and
The size and relative size in area.Similar numeral indicates similar assembly all the time.Schema will be coordinated to illustrate with various embodiments below
The magnetic sensing device, however, following embodiments and be not used to limitation the present invention.
As shown in Figure 1A, the figure is optical system embodiment schematic diagram provided by the invention.The optical system 2 includes one
Light source module 20, an object lens 21, an image capturing device 22 and a control and computing unit 23.The wideband light source module 20,
To produce to a little less light source.This to a little less light source can be single point light source, present one-dimensional array spot light or
It is the spot light that two-dimensional array is presented.In one embodiment, the light source module 20 includes a light source 200, one collimation microscope group 201
An and light-modulating cell 202.The light source 200 is to produce an incident light 90, and the incident light 90 of the present embodiment is broadband light, example
Such as：White light source, but system is not limited, such as：Laser can also be realized.The collimation microscope group 201 receives the incident light 90, so
Afterwards by the incident light collimationization, a collimated light field 91 is formed, is projected to light-modulating cell 202.The light-modulating cell 202, can be with
The effect of pinhole filter is produced, the collimated light field 91 is modulated into this to a little less light source.The light-modulating cell 202 can be with
Select as digital minitype reflector component (digital mirror device, DMD) or liquid crystal on silicon component (liquid
crystal on silicon,LCOS)。
Foregoing light-modulating cell 202, there are multiple light-operated switches 203, the path of light can be changed according to control signal.
Such as：By taking the DMD components shown in Fig. 2A as an example, there are light-modulating cell 202 multiple reflecting assemblies into two-dimensional array to make
For light-operated switch 203, only represented in figure with four.In general, light-operated switch 203 at least opens (on) and closes (off)
State.Light-operated switch 203 can change its angle rotated by the control of electric signal, and then the state of on or off is presented.When
When there are light projection to multiple light-operated switches 203, the path of reflected light can be determined according to the direction of its deflection.In one embodiment,
As shown in Figure 2 B, when light-operated switch 203a is in the state opened, its reflecting assembly can deflect to an angle, and light is reflected
To object lens, when light-operated switch 203b is in the state closed, light can be reflexed to elsewhere by its reflecting assembly.In one embodiment,
As shown in Figure 2 C, can be the unit of a generation spot light with 4 light-operated switch 203a (2x2), and light-operated around it opens
The yawing moment for closing 203b is different with the light-operated switch 203a yawing moments as spot light.Light-operated switch as spot light
203a institutes yawing moment, can be by guides reflected light to object lens.In addition, by such multi-channel optical scan mode, it is more when having
When individual spot light produces, due to its mutually transverse space length D, it can thus be avoided confocal measurement is believed between adjacent measurement points
Number cross-interference issue generation.And LCOS be then by liquid crystal be used as light by or the switch that does not pass through, this hair can also be used as
Light-modulating cell in bright, its component being well known to those skilled in the art, it will not be described here.
Return shown in Figure 1A, there is a spectrum groupware 24 between the object lens 21 and the light-modulating cell 202, to incite somebody to action
Object lens 21 are directed to from the light-modulating cell 202 to a little less light source.The image capturing device 22 is according to the species of object lens
It is and different.In one embodiment, if the object lens 21 are the object lens of general focusing, image capturing device 22 can be
Colored or monochromatic image capturing device, to produce the optical diffraction for including GTG either multiple color (optical wavelength)
Image, wherein monochromatic image capturing device can be the monochromatic CCD of 12.It is noted that depth survey scope and object lens
The depth of focus have very big relation, if we use high numerical aperture (numerical aperture, NA), although can be with
Increase measurement slope (measuring slope), but select the object lens with high NA to reduce its depth focused on.In order to
Take into account high na value and do not reduce the scope of measurable depth distance excessively, in another embodiment, as shown in Figure 1B, the object lens
21a can use axial dispersion object lens (axial chromatic objectives), such as：Refraction type or diffraction mode dispersion thing
Mirror, meanwhile, image capturing device 22a just selects the image capturing device of colour, such as：12bit colored CCDs.Implement one
In example, each spot light of incidence is divided into a variety of coloured light by the dispersion object lens 21a, and the present embodiment is with feux rouges R, green glow G and indigo plant
Light B is represented.At a distance of a distance D between the focus point of each coloured light.So, it can be ensured that in chromatic image capture device
On, it can capture with distinctive optical diffraction image, with the corresponding regular cross-correlation coefficient of sharp follow-up searching
Peak value, and then the three-dimensional appearance of body surface or internal light reflection interface (back side containing object) can be rebuild.
Return shown in Figure 1A, object lens 21 are to by least direct light field is projected to be arranged at and multiplies one on microscope carrier 25 and treat surely
Thing 8 is surveyed, the object light 93 reflected by the determinand 8 then follows original optical path and returns to object lens 21, then the light splitting projection by spectrum groupware 23
To image capturing device 22.Image capturing device 22 receives at least one reflection object light 93 by least position reflection, with production
A raw corresponding optical diffraction image, it has the optical diffraction pattern for corresponding to an at least position.
In addition to the framework of Figure 1B dispersion object lens, as shown in Figure 1 C, it is another reality of framework of axial dispersion object lens
A configuration diagram is applied, the light-modulating cell 202 in the present embodiment unlike Figure 1B framework produces pinhole filter twice
Effect, that is, light source 200, such as：White light source, incident light is produced, is then projected to light modulation by spectrum groupware 24
Unit 202, now light-modulating cell 202 play the part of the role of first time pinhole filter, by the incident beam modulated into a little less light source
Collimation microscope group 201 is reflexed to again.The mode of this modulation can control the first area of the light-modulating cell 202 by control signal
The collimated broadband light is modulated into this to a little less light source, so as to reflex to dispersion object lens 21a, and controls the light-modulating cell
The second area that first area periphery is surrounded in 202 reflexes to the collimated incident light different from dispersion object lens 21a's
Region.
The rear of spot light dispersion is projected on determinand 8 by the dispersion object lens 21a.The reverberation reflected by determinand 8
Light follows original optical path, is projected to the light-modulating cell 202 again, and now light-modulating cell 202 plays the part of the angle of second of pinhole filter
Color, it is, the reflection object light is reflexed to the light splitting group by the first area for controlling the light-modulating cell 202 by control signal
Part 24, and control the second area for being surrounded on first area periphery in the light-modulating cell 202 to lead to the reverberation light guide
Different from the region of the spectrum groupware 24.Receive reflection object light spectrum groupware 24, then by the reflection object light light splitting be directed to it is poly-
Burnt microscope group 26, so as to focus on the image capturing device 22a for being projected to colour, such as：Produced on 12bit colored CCDs optics around
Projection picture.Confocal effect can be increased by the framework of the pinhole filter twice of light-modulating cell 202 in Fig. 1 C, it is clear to increase axially solution
Degree.To illustrate that Fig. 1 C object lens are not using dispersion object lens 21a as limitation, or in general object lens.If use one
As object lens, then image capturing device 22a is then using monochromatic image capturing device.
It is the embodiment for measuring object surface appearance depth in Figure 1A~1C, but diffraction is utilized according to the present invention
Pattern reduces the technology of tested surface pattern, is not restricted to measure the pattern of body surface, in another embodiment, can enter one
Step utilizes the light source projects with penetrability on the test object, so as to measure determinand internal light reflection interface (containing object
The back side) pattern.So-called inside, can be the lower surface that determinand contacts with plummer, or the structure inside determinand
Face, such as defect either hollow structure etc., as shown in figure iD, in the present embodiment with Figure 1A optical system framework for
Bright, incident light caused by light source in the present embodiment is the light source for having to determinand penetrability, in one embodiment, example
Such as：Light source selects infrared light, and determinand is Silicon Wafer, under this framework, penetrates determinand 8a, and anti-in determinand 8a bottom surface
Penetrate, form object test light 93a, then reflect by object lens 21 and formed on image capturing device 22 to should determinand bottom surface shape
The diffraction image of looks depth.In addition, in another embodiment, in object under test 8a, if in crack either internal layer
Hollow structure 83, incident light either can reflect to form object test light 93b in the fracture faces on hollow structure surface, and be caught in image
Obtain produced in equipment 22 to should fracture faces or endothecium structure surface diffraction pattern.It is noted that although Fig. 1 D are to scheme
1A optical system illustrates, but not using the optical system as using limiting, Figure 1B and Fig. 1 C optical system can also answer
With.
Next the principle of optical diffraction image of the present invention is illustrated, optically, Joseph von fraunhofer 1787-1826 diffraction (Fraunhofer
Diffraction), also known as far-field diffraction, it is the one kind for fluctuating diffraction, in electromagnetic wave by occurring when circular hole or slit, causes
The imaging size observed changes, and the origin cause of formation is the far-field position of observation station, and has gradually by the outside diffracted wave of circular hole
The property of plane wave.It is long-range in the present invention due to the distance from spot light caused by light-modulating cell 202 to determinand 8
Produce the size of spot light in light-modulating cell 202, such as the size of 2x2 light-operated switch, therefore, can be applicable Fu Lang and
The principle of striking diffraction.
In one embodiment, because the array of light-operated switch 203 that spot light is produced in light-modulating cell 202 can be considered rectangle
Spot light, therefore can be analyzed with framework as shown in Figure 3.In figure 3, S represents spot light plane, and wherein hatched example areas represents
Light is reflexed to the light-operated switch 203b in other places, and white space then represents the light-operated switch 203a that light is reflexed to object lens 21.
Therefore white space can be considered as the spot light of rectangle.S ' then represents the plane of optical diffraction pattern, according to above-mentioned framework, leads to
Crossing the spot light each position P on caused optical diffraction pattern in S ' planes light field u (x, y, z) can be represented as
As shown in formula (1)：
Wherein z is distance of the spot light to optical diffraction pattern plane S ', and A is light source amplitude, and a, b are to represent white space
The size of rectangle spot light.When origin makes the center of rectangle spot light into, the result that is integrated can be obtained such as formula
(2) shown in：
Shown in wherein β such as following formulas (3)：
Shown in wherein γ such as following formulas (4)：
Wherein φ represents optical diffraction angle along the Y direction.
According to Figure 1A framework, when the distance of determinand and light source changes, difference gathers (in and out focus) out of focus
Optical diffraction pattern can be captured by image capturing device, and the intensity distribution of each position is then on the optical diffraction pattern
As shown in formula (5)：
Return shown in Figure 1A, control then can be according to the optical diffraction image and number of determinand 8 with computing unit 23
According to the optical diffraction pattern sample in storehouse, determine to answer the depth of the position of each spot light on the surface of determinand 8.That is, with
The databases being electrically connected with computing unit 23 are controlled to be placed with multiple optical diffraction patterns of corresponding multiple spot light positions
Sample, and have the optical diffraction pattern of each corresponding spot light in optical diffraction image, therefore each control and calculating
Unit 23 captures each optical diffraction pattern, and it is corresponded to multiple optical diffractions of identical point light source position with database
Pattern sample carries out regular cross-correlation (NCC) calculation, and control can determine to be measured with computing unit 23 according to the result of calculation
To should depth possessed by the position of spot light on thing surface.
Further, the control becomes the position of spot light with the change of computing unit 23, often changes once, just obtains another
Optical diffraction image, the same optical diffraction pattern with corresponding difference light source position, capture and come and then and respective point
Multiple optical diffraction pattern samples of light source position calculate, and can obtain accordingly changing on determinand surface the point light of position
Depth information possessed by the position in source.Wait to be collected into the optics on multiple positions on body surface or internal light reflection interface
Diffraction pattern, and after calculating and learning its depth information, you can with so that rebuild determinand three-dimensional surface shape.To be illustrated
It is, if to utilize light-modulating cell 202 to change spot light position, can be depending on reconstructed image resolution, such as fruit dot light
The quantity in source is more than enough, also forms the resolution ratio needed for detecting enough, then can be with single pick-up image.In addition, for more
For the control mode of secondary switching point light source position, the position and speed due to controlling light-operated switch change spot light is more than quickly
The detecting rate of image capturing device pick-up image, therefore the detecting rate of image capturing device is faster, then representing can be quickly complete
Into the scanning of body surface or internal light reflection interface.By such scan mode, the transverse direction that can avoid using at present is swept
The mechanism action retouched, and then reduce the interference that shakes in measurement, the speed for completing three-dimensional surface shape detecting of lifting with it is accurate
Property.
Next the method for explanation present invention measurement body surface or internal light reflection interface three-dimensional appearance, is walked first
Rapid 30 provide optical system 2 as shown in Figure 1, and provide a database with multiple optical diffraction pattern samples, and this is more
The sample information of the corresponding optical wavelength of optical diffraction pattern sample is opened, the present embodiment is white light.Wherein, the optical diffraction figure is established
The database of case sample includes the following steps, as shown in fig. 6, first carry out step 300 places plummer 25 by a level crossing 80
On, then with step 301 light source module 20 is produced to a little less light source, it is white light source, so as to be thrown via the object lens 21
It is incident upon on the level crossing 80.In the embodiment of step 301, explained with the spot lights of multiple two-dimensional arrays.Step
In 31, multiple incident lights that object lens 21 are reflexed to via light-modulating cell 202, image capturing device 22 is reflexed to from level crossing 80
On.Then step 302 is carried out, controls the pick-up image of image capturing device 22, the optics of image as shown in Figure 4 A under capturing
Diffraction image.It is noted that because the present embodiment has multiple spot lights, therefore optical diffraction image corresponding to generation is also
With multiple optical diffraction patterns.Each optical diffraction pattern being subtracted, as shown in Fig. 4 B or Fig. 4 C, its difference is to expose
The difference of light time span.And Fig. 5 A and Fig. 5 B are then the optical diffraction pattern luminous intensity computers of corresponding diagram 4B and Fig. 4 C respectively
Simulating image.
Return shown in Fig. 6, followed by step 303, depth scan is carried out to the level crossing 80 and is captured corresponding deep
The optical diffraction image of degree.Each depth h0~hn takes an optical diffraction image, and each image all has multiple phases
The optical diffraction pattern of corresponding points light source position.For example, arrived when image capturing device 22 captures on current mirror position h0
Optical diffraction image after, the position h0 for then changing the level crossing shifts to h1, for example, pass through piezoelectric element (PZT) adjust
After to next position h1, continue to capture the optical diffraction image on changing position.Due to the confocal poly- effect out of focus of optics
Should, each spot light is unique in optical diffraction pattern caused by each depth location.By changing level crossing depth
After spending position from h0 to hn, that is, when all depth of depth bounds corrected are done, each spot light is corresponded to
Position can obtain the optical diffraction pattern of the different known depths of multiple correspondences, and these optical diffraction patterns can be used as to be sentenced in the future
The comparison optical diffraction pattern sample of disconnected determinand case depth.Therefore, stored in database on multiple corresponding light modulations
Multiple optical diffraction pattern samples possessed by spot light position caused by unit 202.
To be illustrated, in order to avoid body surface or internal light reflection interface reflection rate are different, and cause step 33 to be taken
The problem of luminous intensity of the optical diffraction pattern obtained differs, in another embodiment, further can be to each depth institute
The diffraction pattern sample on each spot light is captured, carries out normalized computing, shown in its equation such as formula (6)：
By taking the optical diffraction pattern sample shown in Fig. 7 as an example, it is the image of 5x5 pixels (pixel), wherein hatched example areas
Highlights is represented, white space represents dark portion.Each pixel (P0~P24) is corresponding with luminous intensity I0 (x, y)~I24 (x, y).Through
Luminous intensity In0 (x, the y)~In24 (x, y) crossed after normalization is then calculated with equation (6).Wherein Imax and Imin
It is most strong light intensity value and most weak light intensity value in I0 (x, y)~I24 (x, y) before being represented as normalization.Fig. 7's
In example, most strong is light intensity value possessed by P12 pixels, most the weak light intensity value for P0.Therefore, equation (6)
Imax and Imin cans are learnt.Then, by luminous intensity possessed by each pixel, substitute into equation (6) and calculate, i.e.,
Regular light intensity value possessed by each pixel can be obtained.Therefore, for each spot light position, it is had
The optical diffraction pattern sample of each depth may pass through normalized calculation so that optical diffraction pattern sample it is every
One pixel all has normalized light intensity value.
Similarly, for the combination for dispersion object lens and chromatic image capture device, framework as shown in Figure 1B, then can build
The optical diffraction pattern sample of the optical wavelength on a variety of corresponding different colours is found out, in one embodiment, because chromatic image
Capture device has the filtering unit of three kinds of colors (RGB), therefore, can be created as red optics diffraction pattern sample, green
Optical diffraction pattern sample and blue optical diffraction pattern sample, the optical diffraction pattern sample of each color can be through
Equation (6) is crossed to carry out regular calculation so that each pixel of optical diffraction pattern sample has normalized light
Intensity level.It is noted that establishing database only needs to carry out at the beginning of setting up measuring system and completing, the depth light obtained by it
Diffraction pattern sample is learned, can be as the later foundation for determining determinand case depth.
After step 30, it next can enter the step 31 of the measurement of trade determinand three-dimensional surface shape, in this step
In, it can complete standard by the control of multiple pointolite arrays and the detecting rate of cooperation image capturing device and click (quasi-
Single shot) global formula (full-field) three-dimensional surface shape scanning, with obtain one on determinand surface extremely
The optical diffraction image of a few position.For example, as shown in figure 1, work as object lens 21 by multiple points caused by light-modulating cell 202
Light source, when being projected on the surface of determinand 8, image capturing device 22 can be captured to a diffraction image, each around
There are multiple optical diffraction patterns on projection picture, correspond to multiple spot lights respectively.Each optical diffraction pattern is by multiple pixels
Formed, each pixel has corresponding light intensity value, and this light intensity value is sensed by image capturing device 22 and obtained.
After the optical diffraction image for obtaining determinand, then, then step 32 is carried out by image comparison step, such as just
The mode that ruleization cross-correlation (normalized cross correlation) compares, to determine to correspond to spot light on determinand
Depth.In this step, first from database selection to should possessed by the spot light position of optical diffraction image it is multiple
Optical diffraction pattern sample, each optical diffraction pattern sample correspond to a depth value.Next, according to equation (7),
Each optical diffraction pattern is captured from optical diffraction image, and calculates each optical diffraction pattern and each optics
One regular cross correlation value (normalized cross correlation, NCC) of diffraction pattern sample.
As shown in figure 8, wherein label 50 is represented in optical diffraction image caused by image capturing device, on determinand
The optical diffraction pattern that ad-hoc location on surface is reflected by some light source projects, and label 511 then represents data to 511n
In storehouse to should spot light position multiple optical diffraction pattern samples, the corresponding depth of each optical diffraction pattern sample
Value.The brightness value I (x, y) of each pixel of optical diffraction image, and pixel institute corresponding to each optical diffraction pattern sample
The regular brightness value R (x, y) having, it can be calculated by equation (7), so as to obtain a NCC value.Therefore, optics
Diffraction pattern 50 can obtain multiple NCC0~NCCn values after computing is carried out with 511~511n of multiple optical diffraction samples.
Because each optical diffraction sample 511 is to the corresponding depth of 511n, therefore each NCC value equally corresponds to a depth,
By the corresponding depth of multiple NCC values NCC0~NCCn, regular cross correlation value as shown in Figure 9 and depth can be built up
Spend relation curve.It can be seen that it has a maximum from curve, the maximum NCC values represent the optical diffraction figure of determinand
Case and to should NCC values both optical diffraction pattern samples it is closest.Therefore, last step 33, as from the plurality of
In NCC values NCC0~NCCn, find out maximum NCC values, and with the corresponding depth value of the NCC values, as on determinand to should
The depth of optical diffraction pattern position.It is maximum in 250 μm its local NCC value of depth by taking Fig. 9 as an example, therefore can represent and treat
Survey on thing surface to should its depth of the position of optical diffraction pattern 50 be 250 μm.Similarly, the optics corresponding to other spot lights
Diffraction pattern is also to find out corresponding depth according to foregoing mode.Finally, according to the depth of the multiple spot light positions of multiple correspondences
Degree, you can by single time optical diffraction image capture, to carry out the shape of body surface or internal light reflection interface overall situation formula
Looks measurement scanning, and then the complete two dimension for rebuilding determinand surface either three-dimensional appearance.
It is noted that for the framework shown in Figure 1B or Fig. 1 C, chromatic image capture device 22a can be produced pair
Answer the optical diffraction image of a variety of optical wavelength, it is to be noted that, foregoing optical wavelength can be that single wavelength either one is continuous
Wavelength period is formed.In one embodiment, it is red optical diffraction image, green optical diffraction image and blue optical diffraction
Image.The optical diffraction pattern on each position in the optical diffraction image of each color is in the light with corresponding color
Learn diffraction pattern sample to calculate, regular cross correlation value and the depth relationship that can equally obtain corresponding different colours are bent
Line.Finally, maximum NCC values are being found out from multiple curves, and with the corresponding depth value of the NCC values, as right on determinand
Should optical diffraction pattern position depth.
If in addition, it is noted that to increase Measurement Resolution, the position of spot light can be converted again, such as schemed
Shown in 10, wherein when first time point, if shown in the left region in spot light position that light-modulating cell 202 is modulated,
Light guide is also led into object lens during the state wherein opened at 203a, during the state closed at 203b, light guide is also led into elsewhere.When
When having captured optical diffraction image, control makes it change the position of spot light with computing unit control light-modulating cell 202,
The state as described in the right region in Figure 10 is formed, can so depth survey be carried out to determinand table diverse location, to carry
High-resolution.
Summary, due to optical system provided by the invention with body surface or internal light reflection interface (containing object
The back side) pattern method for detecting can utilize digital light, and synchronize multiple spot optical scanner and carry out the global formula surface three dimension of high speed
Pattern is detected, and solves existing confocal detecting body surface or internal light reflection interface (back side containing object) three-dimensional appearance
The problem of caused optical crosstalk, therefore the detecting degree of accuracy and efficiency can be lifted, while also avoid prior art from needing
Influence of the caused vibrations to Detection results when transversely or vertically scan.
The better embodiment or reality described above for only recording technological means used by the present invention solves the problems, such as presentation
Example is applied, is not used for limiting the scope of patent working of the present invention.It is i.e. all to be consistent with scope of the invention as claimed context, or
The equivalent changes and modifications done according to scope of the invention as claimed, it is all that the scope of the present invention is covered.
Claims (24)
- A kind of 1. optical system, it is characterised in that including：One light source module, to produce to a little less light source；One object lens, to by this to a little less light source projects to an at least position for a body surface or internal light reflection interface；One image capturing device, to receive at least one reflection object light by least position reflection, to produce corresponding one Optical diffraction image, it has an at least optical diffraction pattern, and each optical diffraction pattern is to should body surface or interior lights A pattern depth location in reflective interface；AndOne control and computing unit, the optical diffraction pattern of each pattern depth location and more will correspond in the optical diffraction image Individual optical diffraction pattern sample carries out computing, to determine the pattern depth of each body surface or internal light reflection interface position.
- 2. optical system according to claim 1, it is characterised in that the light source module also includes：One light source, to produce an incident light；One collimation microscope group, the incident light to be collimated；AndOne light-modulating cell, the collimated incident light is modulated into this to a little less light source.
- 3. optical system according to claim 2, it is characterised in that it further comprises there is a spectrum groupware, the light splitting Component is arranged between the collimation microscope group and the light-modulating cell, and the object lens are a dispersion object lens, wherein, the incident light passes through The spectrum groupware is projected to the light-modulating cell, and the light-modulating cell into a little less light source, then reflexes to the incident beam modulated The collimation microscope group, and then this is collimated to a little less light source and is directed to the dispersion object lens, the dispersion object lens are by spot light dispersion The body surface or internal light reflection interface are projected to afterwards, so as to produce the reflection object light, the reflection object light follows original optical path, The light-modulating cell is projected to again, and the reflection object light is reflexed to the spectrum groupware by the light-modulating cell again, the spectrum groupware Reflection object light light splitting is directed to the image capturing device.
- 4. optical system according to claim 2, it is characterised in that the light-modulating cell is digital minitype reflector component Or liquid crystal on silicon component.
- 5. optical system according to claim 2, it is characterised in that the incident light is broadband light or single-frequency light.
- 6. optical system according to claim 1, it is characterised in that the control and computing unit are by each optical diffraction figure Case and the plurality of optical diffraction pattern sample carry out computing so that each optical diffraction pattern produce relative to the plurality of optics around Penetrate multiple regular cross-correlation numerical value of pattern sample, the corresponding depth of numerical value of each regular cross-correlation, the control With computing unit using maximum regular cross correlation value corresponding to depth as corresponding optical diffraction pattern body surface or The pattern depth of position on internal light reflection interface.
- 7. optical system according to claim 1, it is characterised in that one-dimensional spot light battle array should be formed to a little less light source The pointolite array of row or two dimension.
- 8. optical system according to claim 1, it is characterised in that at a distance of a distance between each spot light, so as to not Produce crosstalk.
- 9. optical system according to claim 8, it is characterised in that the control controls the light source module to produce with computing unit Raw multiple spot lights, scanned with completing the accurate global formula three-dimensional surface shape clicked, and then obtain one on determinand surface Multiple positions optical diffraction image.
- 10. optical system according to claim 1, it is characterised in that the object lens are a dispersion object lens, and image capture is set Standby is a chromatic image capture device, and to produce multiple optical diffraction images, each optical diffraction image is a kind of corresponding ripple The optical diffraction image that long light is formed in its deep focus position.
- 11. optical system according to claim 10, it is characterised in that the dispersion object lens be a refraction type dispersion object lens or Optical diffraction formula dispersion object lens.
- 12. a kind of body surface or internal light reflection interface three-dimensional appearance method for detecting, it is characterised in that include following step Suddenly：Produce to a little less light source；With an object lens by least pattern depth to a little less light source projects to a body surface or internal light reflection interface Position；At least one reflection object light for reflecting an at least pattern depth location passes through the object lens；By this, at least a reverberation light guide leads to an image capturing device；The image capturing device senses at least one reflection object light and produces an optical diffraction image, and it has to should at least one An at least optical diffraction pattern for pattern depth location；AndCapture an at least optical diffraction pattern respectively from the optical diffraction image, and by each optical diffraction pattern with it is multiple Optical diffraction pattern sample carries out computing, to determine that the pattern of corresponding each body surface or internal light reflection interface position is deep Degree.
- 13. body surface according to claim 12 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In extremely a little less light source forms one-dimensional pointolite array or the pointolite array of two dimension for this.
- 14. body surface according to claim 12 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In producing this and comprise the following steps to the method for a little less light source：A light source is provided to produce an incident light；The incident light is collimated with a collimation microscope group, and the incident light of collimation is directed to a light-modulating cell；AndControl the first area of the light-modulating cell that the collimated broadband light is modulated into this to a little less light source, so as to be directed to this Object lens, and the second area that first area periphery is surrounded in the light-modulating cell is controlled, the collimated incident light is directed to Different from the region of the object lens.
- 15. body surface according to claim 12 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In producing this and comprise the following steps to the method for a little less light source：A light source is provided to produce an incident light；The incident light is collimated with a collimation microscope group, and the incident light of collimation is directed to a light-modulating cell；AndControl the light-modulating cell to produce multiple spot lights and scanned with completing the accurate global formula three-dimensional surface shape clicked.
- 16. body surface according to claim 12 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In producing this and comprise the following steps to the method for a little less light source：A light source is provided to produce an incident light；The incident light is collimated with a collimation microscope group, and the incident light of collimation is guided into a spectrum groupware；The incident light is divided and is directed to a light-modulating cell by the spectrum groupware；AndControl the first area of the light-modulating cell that the collimated broadband light is modulated into this to a little less light source, so as to be directed to this Dispersion object lens, and the second area that first area periphery is surrounded in the light-modulating cell is controlled, by the collimated incident light guide Lead to the region different from the dispersion object lens.
- 17. body surface according to claim 12 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In producing this and comprise the following steps to the method for a little less light source：A light source is provided to produce an incident light；The incident light is collimated with a collimation microscope group, and the incident light of collimation is guided into a spectrum groupware；The incident light is divided and is directed to a light-modulating cell by the spectrum groupware；AndControl the light-modulating cell to produce multiple spot lights and connect with completing the accurate global formula body surface clicked or internal light reflection Mouth three-dimensional appearance scanning.
- 18. body surface according to claim 16 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In, it include modulate the reflection object light the step of：Control the first area of the light-modulating cell that the reverberation light guide is led into the spectrum groupware, and control the light-modulating cell In be surrounded on the first area periphery second area, the reverberation light guide is led to the region different from the spectrum groupware；With AndThe reflection object light is divided by the spectrum groupware, and is directed to the image capturing device.
- 19. body surface according to claim 15 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In the light-modulating cell is digital minitype reflector component or liquid crystal on silicon component.
- 20. body surface according to claim 15 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In the incident light is broadband light or single-frequency light.
- 21. body surface according to claim 12 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In determining that the method for the pattern depth of each body surface or internal light reflection interface position comprises the following steps：A database is established, it has the sample information of at least one optical wavelength, and each sample information includes multiple corresponding different The optical diffraction pattern sample of depth；By the multiple corresponding different of the spot light position in each optical diffraction pattern and database captured corresponding thereto The optical diffraction pattern sample of depth carries out computing, to produce multiple cross-correlation numerical value on optical diffraction pattern sample；With AndUsing the depth corresponding to the optical diffraction pattern sample corresponding to maximum in the plurality of cross correlation value as to should light Learn the pattern depth of diffraction pattern position.
- 22. body surface according to claim 20 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In the method for establishing the sample information of each optical wavelength comprises the following steps：A minute surface is provided, its surface has one first depth distance with the object lens；It is incident to after producing dispersion via the composition lens with least one correction spot light of corresponding specific wavelength of light on the minute surface；From the reflection object light of the mirror-reflection via the object lens after, be led to the image capturing device and produce on this first One correction optical diffraction image of depth distance, it has an at least optical diffraction pattern sample, and it corresponds to a check point respectively Light source；At least optical diffraction pattern sample on first depth distance is captured respectively；First distance is changed to one second depth distance, further obtains another school on the second depth distance after change Positive optical diffraction image；AndAt least optical diffraction pattern sample on second depth distance is captured respectively.
- 23. body surface according to claim 21 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In it includes carrying out the step of normalization is calculated to each optical diffraction pattern sample respectively.
- 24. body surface according to claim 21 or internal light reflection interface three-dimensional appearance method for detecting, its feature exist In the object lens are a dispersion object lens, and the image capturing device is a chromatic image capture device, multiple corresponding different to produce The correction optical diffraction image of optical wavelength.
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