CN106969702A - It is a kind of can flexible zoom off-axis digital holography measurement apparatus - Google Patents
It is a kind of can flexible zoom off-axis digital holography measurement apparatus Download PDFInfo
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- CN106969702A CN106969702A CN201710308564.5A CN201710308564A CN106969702A CN 106969702 A CN106969702 A CN 106969702A CN 201710308564 A CN201710308564 A CN 201710308564A CN 106969702 A CN106969702 A CN 106969702A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
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Abstract
Summary：The present invention relates to it is a kind of can flexible zoom off-axis digital holography measurement apparatus, be technically characterized in that：It is vertical direction to carry out reflection to change light path by the first speculum 2 after the laser beam that the laser 1 of horizontal positioned is produced, subsequently into beam-expanding collimation unit 3, it is level to reflect change light path again by the second speculum 4, spectroscope 7 is injected after electric control varifocal lens 5 and microcobjective 6, and then produces two-beam ripple；Wherein a branch of light wave enters imaging device 10 after the reflection of level crossing 8 as reference light；Another Shu Guangbo enters imaging device 10 after the reflection of the surface of testee 9 as object light；Regulation level crossing 8 can control reference light and the angle of object light, make object light with producing off-axis digital holography figure with reference to the interference of light and being recorded by imaging device 10；The information for obtaining testee is finally calculated using digital reconstruction algorithm.The device uses electric control varifocal lens 5, with flexible zoom function, avoid Mechanical Moving, during the regulation of system magnification, greatly improve speed and the degree of accuracy of regulation, and compact conformation, stably, the measuring three-dimensional morphology available for components such as micro optical element, microelectromechanical systems and MOEMSs.
Description
Technical field
The present invention relates to it is a kind of can flexible zoom off-axis digital holography measurement apparatus, belong to that laser digital is holographic and optics
Detection technique field.
Background technology
Digital holography is consistent with traditional optical principle of holography, and difference is that the former recording medium is electrooptical device
CCD or CMOS, instead of traditional holographic silver salt dry plate.The hologram of record is stored in computer with digital image form, then
According to the diffraction process of digital hologram principle simulation hologram, numerical reconstruction obtains the COMPLEX AMPLITUDE of Object light wave.With it is traditional
Optical holographic is compared, the distinguishing feature of digital hologram be need not develop, the fixing chemical treating process such as with bleaching, to device
Stability requirement is not high, it is possible to obtain object quantitative intensity and phase information simultaneously according to COMPLEX AMPLITUDE, can also side
Just the processing such as it is filtered to hologram and reproduction image with digital image processing techniques, to improve image quality.Therefore, number
Word holography is more conducive to carry out accurate quantitative analysis and detection.
It is the improvement on ordinary numbers holographic technique without the digital holographic measurement of lens, simplifies used during record hologram
Imaging optical path, lens are not used between testee and imaging device.A hot topic without the digital holographic imaging of lens
Application direction be cell and microstructure observation, it has very big cost advantage compared to microscope imaging, simple in construction, differentiate
Rate is high, noncontact, and operates more easy.Domestic many colleges and universities deployed to study accordingly, also achieve it is certain into
Really.Master's thesis《Development without the digital holographic imaging observation experiment system of lens》In, it is holographic without lens using voluntarily developing
Imaging system carried out research, Master's thesis to haemocyte etc.《The research of digital holographic microscopic imaging theory and algorithm》Middle design
A digital holographic microscope has simultaneously carried out confirmatory experiment, achieves preferable imaging results.Patent（Publication number
CN105954994A）Describe one kind and field Mean Filtering Algorithm is used in without lens digital holographic microscopic imaging and partially micro-
The image enchancing method for dividing equation to suppress noise.Exist substantially without lens digital holographic micro-measuring device at present following
Problem：One side flexibility is not good enough, i.e., device is once built and finished, and systemic resolution, numerical aperture and enlargement ratio are just unique
It is determined that, measurable object range also mutually should determine that and extremely limited, and operator can not be according to specific measuring condition and specific object
It is adjusted；Another aspect operating distance is small, because being generally required during system building greatly to reduce operating distance as cost
To obtain larger system resolution, drawback is protruded in actual applications.
The content of the invention
The invention aims to solve tradition without systemic resolution, enlargement ratio in lens digital holographic detection device
It is single with numerical aperture, operability difference and operating distance it is small, and Mechanical Moving it is cumbersome and inaccurate the problems such as, proposition one kind can
The off-axis digital holography measurement apparatus of flexible zoom.The system have it is simple in construction and stably, testing cost is low, precision is high, same
When systemic resolution, enlargement ratio, digital aperture the features such as can need to be adjusted flexibly according to testee.
To reach above-mentioned purpose, the present invention is achieved through the following technical solutions：
The present invention it is a kind of can flexible zoom off-axis digital holography measurement apparatus, it is characterised in that including laser 1, first
Speculum 2, beam-expanding collimation unit 3, the second speculum 4, automatically controlled Zoom lens 5, microcobjective 6, spectroscope 7, level crossing 8,
Imaging device 10 and computer 10；
The automatically controlled Zoom lens 5, microcobjective 6, spectroscope 7, level crossing 8 constitute coaxial optical system；In testee 9
The center of the heart, the center of spectroscope 7 and imaging device 10 is on same vertical line.
The optical system of automatically controlled Zoom lens 5 and microcobjective 6 composition, which possesses, to be converted into directional light to assemble ball
The ability of face light wave.
The present invention it is a kind of can flexible zoom off-axis digital holography measurement apparatus, comprise the following steps：
Laser is produced using laser 1, laser is incident upon beam-expanding collimation unit 3 by the first speculum 2；Through beam-expanding collimation unit
The directional light formed after 3 is after the second speculum 4 again secondary reflection, successively by automatically controlled Zoom lens 5 and microcobjective 6, this
Light wave is split into two-beam ripple by spectroscope 7 afterwards；Wherein a branch of light wave enters into after being reflected through level crossing 8 as reference light
As equipment 10；Another Shu Guangbo enters imaging device 10 after the reflection of the surface of testee 9 as object light；Adjust level crossing 8
Reference light and the angle of object light are controlled, makes object light with producing a width off-axis digital holography figure and by imaging device 10 with reference to the interference of light
Record；The phase information for obtaining testee is calculated eventually through digital reconstruction algorithm.
Beneficial effect：
A kind of off-axis digital holography device of flexible variable times of the present invention not only compact conformation, stability is good, easy to operate, and
And result in higher system resolution；Secondly, according to the pattern of object being measured, by controlling automatically controlled Zoom lens
Suitable systemic resolution and enlargement ratio, digital aperture can be flexibly selected to be observed；In addition, operating process is moved without machinery
It is dynamic, with accurate, response speed it is quick, it is easy to operate the characteristics of.Only single holographic figure need to be gathered can obtain small to the present invention
The surface information of object, can realize dynamic measurement.
Brief description of the drawings
Fig. 1 is the embodiment device structural representation in the present invention；
Fig. 2 is one of the situation of embodiments of the invention device when possessing higher systemic resolution and enlargement ratio；
Fig. 3 is one of the situation of embodiments of the invention device when possessing relatively low systemic resolution and enlargement ratio；
Fig. 4 is using Zemax optical design softwares emulation microcobjective 6 and the automatically controlled flexible system at 10mm of zoom lens 5
The emulation light path of numerical aperture change；
Fig. 5 is with the automatically controlled flexible different distance of zoom lens 5, being using Zemax optical design softwares emulation microcobjective 6
System numerical aperture NA value changes situations.
Wherein, 1- lasers, the speculums of 2- first, 3- beam-expanding collimations unit, the speculums of 4- second, 5- are automatically controlled varifocal
Mirror, 6- microcobjectives, 7- spectroscopes, 8- level crossings, 9- testees, 10- imaging devices（CCD or CMOS）, 11- calculate
Machine.
Embodiment
Below in conjunction with the accompanying drawings and the present invention is discussed in detail in embodiment.
It is embodiment device structural representation as shown in Figure 1, the present apparatus includes laser 1, the first speculum 2, expands standard
Straight unit 3, the second speculum 4, automatically controlled Zoom lens 5, microcobjective 6, spectroscope 7, level crossing 8, imaging device 10 and
Computer 11 is constituted.In specific implementation process, adjustment laser 1, the first speculum 2, beam-expanding collimation unit 3, the second speculum
4th, Zoom lens 5, spectroscope 7, level crossing 8 constitute coaxial optical system；Testee 9, spectroscope 7 and imaging device 10
Center is on same vertical curve；The front and back position of level crossing 8 is adjusted, it is arrived light splitting to the distance and testee 9 of spectroscope 7
The distance of mirror 7 is equal；The position of imaging device 10 is adjusted, it is sufficiently close together spectroscope 7；By the inclination for adjusting level crossing 8
Degree so that the angle between the object light reflected through testee 9 and the reference light reflected through level crossing 8 is less than 4
Degree；Laser 1 produces laser beam, and the input after the reflection of the first speculum 2 into collimator and extender unit 3 as light source；
Laser beam forms directional light after entering beam-expanding collimation unit 3, and propagates to the second speculum 4 and reflect into automatically controlled Zoom lens 5
After produce a branch of convergence spherical light wave；According to specific measurement needs, directly by changing the focal length of zoom lens 4, without machinery
Movement quick and convenient can realize the continuously adjustabe of systemic resolution and enlargement ratio.
Be shown in Fig. 2 situation of the embodiments of the invention device when possessing higher systemic resolution and enlargement ratio it
One：By controlling electric control varifocal lens 5 to be focused so that what light beam was produced after electric control varifocal lens 5 and microcobjective 6
Assemble spherical light wave and be divided into two beam Convergent Laser Beams after spectroscope 7, wherein a branch of convergence spherical light wave becomes after focusing
A branch of divergent spherical wave, and it is used as reference light after the reflection of level crossing 8；Reference light is irradiated to imaging device after spectroscope 7
On 10；Another Shu Huiju spherical light waves become a branch of divergent spherical wave after focusing, and vertical irradiation is to the surface of testee 9,
Object light is used as after reflecting；Object light is irradiated to imaging device 10 after spectroscope 7, and on the imaging surface of imaging device 10
Interfere, be derived from a width off-axis digital holography figure.
Be shown in Fig. 3 situation of the embodiments of the invention device when possessing relatively low systemic resolution and enlargement ratio it
One：By controlling automatically controlled Zoom lens 5 to be focused, now light beam passes through the convergence sphere that automatically controlled Zoom lens 5 are produced
Light wave produces a branch of divergent spherical wave after focusing；Divergent spherical wave is divided into two misconvergence of beams spherical waves after spectroscope 7；Wherein
A branch of divergent spherical wave is used as reference light after being reflected through level crossing 8；Reference light is irradiated to imaging device 10 after spectroscope 7
On；Another misconvergence of beams spherical wave vertical irradiation is used as object light to the surface of testee 9 after reflecting；Object light passes through spectroscope 7
Imaging device 10 is irradiated afterwards, and is interfered on the imaging surface of imaging device 10 with reference light, is derived from a width off-axis digital
Hologram.
Fig. 4 is to emulate microcobjective 6 and automatically controlled flexible zoom lens 5 at 10mm using Zemax optical design softwares
The emulation light path of system value varying aperture.Fig. 5 gives microcobjective 6 with automatically controlled flexible zoom lens 5 apart from diverse location
Place, system value aperture NA value changes situations.By actual demand, between fixed microcobjective 6 and automatically controlled flexible zoom lens 5
Relative position.
Claims (3)
1. it is a kind of can flexible zoom off-axis digital holography measurement apparatus, it is characterised in that including laser 1, the first speculum
2nd, beam-expanding collimation unit 3, the second speculum 4, electric control varifocal lens 5, microcobjective 6, spectroscope 7, level crossing 8, imaging device
10 and computer 11；The electric control varifocal lens 5, microcobjective 6, spectroscope 7 and level crossing 8 constitute coaxial optical system；
The center of testee 9, the center of spectroscope 7 and the center of imaging device 10 are on same vertical curve；Operation principle is as follows：Laser 1
Laser is produced, laser after the first speculum 2 by entering to beam-expanding collimation unit 3；What is formed after beam-expanding collimation unit 3 is parallel
Light by reflexing to electric control varifocal lens 5 again after the second speculum 4；Now directional light is through electric control varifocal lens 5 and micro- thing
Enter spectroscope 7 after the optical system that mirror 6 is constituted, be subsequently divided into two-beam ripple；After wherein a branch of light wave reflects through level crossing 8
Enter imaging device 10 as reference light；Another Shu Guangbo enters imaging device after the reflection of the surface of testee 9 as object light
10；Adjust level crossing 8 to control the angle of reference light and object light, make object light with producing a width off-axis digital holography with reference to the interference of light
Scheme and recorded by imaging device 10；The phase information for obtaining testee is calculated finally by digital reconstruction algorithm.
2. it is according to claim 1 it is a kind of can flexible zoom off-axis digital holography measurement apparatus, it is characterised in that：It is described
Automatically controlled Zoom lens 5 are the focus adjustable lens that clear aperture is more than 10mm, and additional 0 ~ 5V control voltage, focal length can be quick
Some particular value in the range of -667mm ~ 286mm is adjusted to, the response time is less than 2.5 milliseconds.
3. it is according to claim 1 it is a kind of can flexible zoom off-axis digital holography measurement apparatus, it is characterised in that：It is described
The optical system of automatically controlled Zoom lens 5 and microcobjective 6 composition has the characteristic of numerical aperture continuous variable, and numerical aperture
NA values adjustable range maximum is more than 0.1.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710308564.5A CN106969702A (en) | 2017-05-04 | 2017-05-04 | It is a kind of can flexible zoom off-axis digital holography measurement apparatus |
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| CN201710308564.5A CN106969702A (en) | 2017-05-04 | 2017-05-04 | It is a kind of can flexible zoom off-axis digital holography measurement apparatus |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109029289A (en) * | 2018-08-14 | 2018-12-18 | 东北大学 | A kind of off-axis light path three-dimensional microstructure measuring system |
| CN110579167A (en) * | 2018-06-08 | 2019-12-17 | 河北工程大学 | Digital image recording experiment system and method |
| CN110992990A (en) * | 2019-10-18 | 2020-04-10 | 北京理工大学深圳研究院 | Diffraction phase type holographic storage device |
| CN112525824A (en) * | 2021-01-09 | 2021-03-19 | 昆明理工大学 | Perovskite film morphology structure detection method based on digital holography |
| CN112729120A (en) * | 2021-01-20 | 2021-04-30 | 浙江大学 | Probe and method for detecting coking of water-cooled wall in severe environment |
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| CN2679644Y (en) * | 2004-03-17 | 2005-02-16 | 南京理工大学 | D.C. light inntensity active shock resisting and shifting interferometer |
| CN101915555A (en) * | 2010-07-09 | 2010-12-15 | 上海理工大学 | Axial scanning method by using electric control varifocal lens as confocal microscope system |
| CN104534980A (en) * | 2015-02-04 | 2015-04-22 | 程灏波 | Reflection type lens-free digital holography measuring device |
| WO2016051283A2 (en) * | 2014-08-12 | 2016-04-07 | Vysoké Učení Technické V Brně | Interferometric system with variable optics for non-coherent light source and method of interferometric system alignment |
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Patent Citations (5)
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| CN1415083A (en) * | 2000-01-04 | 2003-04-30 | Ut-巴特勒有限责任公司 | Improvements to acquistion and replay system for direct-to-digital holography and holovision |
| CN2679644Y (en) * | 2004-03-17 | 2005-02-16 | 南京理工大学 | D.C. light inntensity active shock resisting and shifting interferometer |
| CN101915555A (en) * | 2010-07-09 | 2010-12-15 | 上海理工大学 | Axial scanning method by using electric control varifocal lens as confocal microscope system |
| WO2016051283A2 (en) * | 2014-08-12 | 2016-04-07 | Vysoké Učení Technické V Brně | Interferometric system with variable optics for non-coherent light source and method of interferometric system alignment |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579167A (en) * | 2018-06-08 | 2019-12-17 | 河北工程大学 | Digital image recording experiment system and method |
| CN109029289A (en) * | 2018-08-14 | 2018-12-18 | 东北大学 | A kind of off-axis light path three-dimensional microstructure measuring system |
| CN110992990A (en) * | 2019-10-18 | 2020-04-10 | 北京理工大学深圳研究院 | Diffraction phase type holographic storage device |
| CN112525824A (en) * | 2021-01-09 | 2021-03-19 | 昆明理工大学 | Perovskite film morphology structure detection method based on digital holography |
| CN112729120A (en) * | 2021-01-20 | 2021-04-30 | 浙江大学 | Probe and method for detecting coking of water-cooled wall in severe environment |
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