CN109029289A - A kind of off-axis light path three-dimensional microstructure measuring system - Google Patents
A kind of off-axis light path three-dimensional microstructure measuring system Download PDFInfo
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- CN109029289A CN109029289A CN201810919196.2A CN201810919196A CN109029289A CN 109029289 A CN109029289 A CN 109029289A CN 201810919196 A CN201810919196 A CN 201810919196A CN 109029289 A CN109029289 A CN 109029289A
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- reflective mirror
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
A kind of off-axis light path three-dimensional microstructure measuring system of the invention, comprising: image-forming objective lens, interference device and image collecting device.Interference device includes laser light source, Amici prism, the first reflective mirror, the second reflective mirror, fine tuning reflective mirror and reference objective lens.Laser beam exports two-beam after the first reflective mirror injects Amici prism, and the imaged object lens of light beam are mapped on sample, and the imaged object lens of reflected light, Amici prism reach image collecting device and form object light；Second beam light injects fine tuning reflective mirror through the second reflective mirror, reference objective lens, reflected light is reflected into image collecting device through reference objective lens, the second reflective mirror and Amici prism and forms reference light, 1.52 °~7.57 ° of off-axis angle is formed between object light and reference light to form off-axis interference, the interference hologram recorded using image collecting device.The present invention overcomes the micro- holographic light path light wave curvature of traditional pre-amplification by light path design and is difficult to the difficulty adjusted.Whole system is compact-sized, and anti-noise ability is high.
Description
Technical field
The invention belongs to field of photoelectric technology, specially a kind of off-axis light path three-dimensional microstructure measuring system.
Background technique
1948, Britain nationality Hungary scientist D.Gabor proposed a kind of electron waves record object using object diffraction
The method of amplitude and phase, improves the resolution ratio of electron microscope, and this method is named as holography by Gabor.Until previous generation
The fast development recorded the end of the eighties and charge-coupled device at the beginning of the nineties (CCD), holography eliminate the reliance on chemical record material, and
Digital record can be passed through.
Macroscopic surface topography measurement method, can generally be divided into contact and contactless two major classes.Typical contact
Formula measurement is exactly atomic force microscope (AFM), and contact type measurement relies on its mechanical probes contact body surface to obtain pattern
Information, it is easy to which irremediable loss is caused to sample.It is contactless to be obtained as electron microscope using the method being imaged point by point
Intensified image is obtained, object form has been obtained, but must observe under vacuum.Digital holographic microscopy is a kind of based on Diffraction of light wave
With the imaging and measuring technique of principle of interference, it can obtain the amplitude and phase information of Object light wave simultaneously, obtain measured object
Three-dimensional appearance, while having the advantages that non-contact, real-time, the big depth of field, high-resolution and phase contrast imaging.Off-axis digital holography is aobvious
It is micro-, by the control to reference light optical axis and object light optical axis included angle, so that two optical axises finally reach CCD at a certain angle.Full
Under the requirement of sufficient sampling thheorem and frequency spectrum separation, solve the problems, such as that direct transmission light is difficult to eliminate with conjugate image.
The introducing of pre-amplification imaging optical path object lens often introduces the additive phase factor.It is usually added and expands in the optical path
A series of optical element de-regulation light wave curvature such as mirror and collimating mirror, optical path is often sufficiently complex in this case, space structure
It is excessive.The decline of whole system anti-noise ability, excessive optical element bring other Aberration Problems, affect measurement accuracy.And
Large-scale laser is mostly used, Image Acquisition is confined in laboratory.Or the method for double-exposure, shoot reference hologram.But
Whether there is or not sample information region, and during double exposing, the stability of system not can guarantee this object under test that requires.These
Greatly limit the application of Digital holographic microscopy.
Summary of the invention
In order to solve the above technical problems, the object of the present invention is to provide a kind of off-axis light path three-dimensional microstructure measurement systems
System.By increasing reference objective lens in reference light optical path, changes the position of reference planes mirror, the curvature tune of light wave can be realized
Section, and then offset the object light object lens bring additive phase factor.It is compact-sized, it does not need to introduce excessive optical element, reduce
Unnecessary aberration, system anti-noise ability improve.Image Acquisition only needs single exposure, avoids outer in double exposure interval
The interference of boundary's factor.It tests laser light source and uses semiconductor laser, structure is simple, and easy to carry, cost is relatively low.
The present invention provides a kind of off-axis light path three-dimensional microstructure measuring system, comprising: pedestal is mounted on the base
Xyz micro-displacement platform and the image-forming objective lens being successively set on above xyz micro-displacement platform, interference device and image collector
It sets；The interference device includes shell and setting laser light source inside the shell, Amici prism, the first reflective mirror, second reflective
Mirror, fine tuning reflective mirror and reference objective lens；
The laser beam that the laser light source issues injects Amici prism, Amici prism output after the first mirror reflection
Two-beam, the imaged object lens injection of the first beam reflected light are irradiated on the sample on xyz micro-displacement platform, and the reflected light of sample is again
Image collecting device, which is reached, by image-forming objective lens, Amici prism forms object light；Second beam transmitted light of Amici prism output is through the
Two reflective mirrors, reference objective lens inject fine tuning reflective mirror, fine tuning reflective mirror output reflected light through reference objective lens, the second reflective mirror and
Amici prism is re-reflected into image collecting device and forms reference light, and 1.52 °~7.57 ° of formation is off-axis between object light and reference light
Angle and then the off-axis interference of formation, the interference hologram recorded using image collecting device.
In off-axis light path three-dimensional microstructure measuring system of the invention, the fine tuning reflective mirror is mounted on vertical microbit
It moves on platform, the angle of adjustment fine tuning reflective mirror can realize the adjusting of off-axis angle, and the position for adjusting vertical micro-displacement platform can be real
It is adjusted referring now to the light path of light, adjusting xyz micro-displacement platform can make object light light path imaging clear, and then send out object light and reference light
Raw off-axis interference forms hologram.
In off-axis light path three-dimensional microstructure measuring system of the invention, the laser light source, Amici prism, first are instead
On the porous plate that light microscopic, the second reflective mirror, vertical micro-displacement platform and reference objective lens installation are set inside the shell.
In off-axis light path three-dimensional microstructure measuring system of the invention, laser beam that the laser light source issues with
The first reflective mirror is injected in 45 ° of angles with normal, the reflected light of the first reflective mirror output is divided to inject with normal in 45 ° of angles
Prism, the second beam transmitted light of Amici prism output is to inject the second reflective mirror in 45 ° of angles with normal.
In off-axis light path three-dimensional microstructure measuring system of the invention, the Amici prism includes prism square cage and sets
Two right-angle prisms being placed in prism square cage, the inclined-plane gluing of two right-angle prisms form one, the inclined-plane of right-angle prism with
The optical axis of laser light source angle at 45 °, so that the light intensity ratio of the first beam reflected light of Amici prism output and the second beam transmitted light
For 1:1.
In off-axis light path three-dimensional microstructure measuring system of the invention, the prism square cage is equipped with multiple connecting rods,
The mirror holder of image-forming objective lens is fixedly connected with the connecting rod.
In off-axis light path three-dimensional microstructure measuring system of the invention, image-forming objective lens and reference objective lens all use 10
Again, operating distance is the infinity nikon object lens of 10.5mm, while counteracting single object lens light equipped with image-forming objective lens and reference objective lens
Road bring phase additional factor.
It further include passing through with described image acquisition device in off-axis light path three-dimensional microstructure measuring system of the invention
The host computer that data line is connected, the host computer are based on Matlab software programming program and handle interference hologram.
Off-axis light path three-dimensional microstructure measuring system provided by the invention, solves current pre-amplified digital holographic microphotography
The additive phase that technology is introduced by curvature difference is because of subproblem.Compared to addition collimating mirror, beam expanding lens and other auxiliary optical
The way of element, optical element is few, avoids other Aberration Problems that other elements introduce；Optical path is compact, whole system anti-noise
Ability is promoted.Image Acquisition only needs single exposure, convenience and high-efficiency.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of off-axis light path three-dimensional microstructure measuring system of the invention；
Fig. 2 is the schematic diagram of internal structure of interference device of the invention；
Fig. 3 is the schematic diagram of off-axis light path of the invention；
Fig. 4 is laboratory sample for the two-dimensional appearance figure under no reference light action；
Fig. 5 is the hologram that a kind of off-axis light path three-dimensional microstructure measuring system measurement through the invention obtains；
Fig. 6 is the three-dimensional microstructure figure obtained by host computer to hologram processing reduction.
Specific embodiment
Off-axis light path three-dimensional microstructure measuring system of the invention is illustrated with reference to the accompanying drawing.
As shown in Figure 1, a kind of off-axis light path three-dimensional microstructure measuring system of the invention, comprising: pedestal 5 is mounted on
Xyz micro-displacement platform 4 on pedestal 5 and image-forming objective lens 3, the interference device 2 for being successively set on 4 top of xyz micro-displacement platform
With image collecting device 1.
As shown in Fig. 2, the interference device 2 includes shell 24 and the laser light source 21 being arranged in shell 24, light splitting rib
Mirror 22, the first reflective mirror 23, the second reflective mirror 28, vertical micro-displacement platform 25, fine tuning reflective mirror 26 and reference objective lens 27.It is described
Laser light source 21, Amici prism 22, the first reflective mirror 23, the second reflective mirror 28, vertical micro-displacement platform 25 and reference objective lens 27
It is mounted on the porous plate 29 set in shell 24.Fine tuning reflective mirror 26 is mounted on vertical micro-displacement platform 25.The light splitting rib
Mirror 22 includes prism square cage and two right-angle prisms being set in prism square cage, and the inclined-plane gluing of two right-angle prisms forms one
Body, the inclined-plane of right-angle prism and the optical axis angle at 45 ° of laser light source 21, so that reflected light and transmitted light that Amici prism 22 exports
Light intensity ratio be 1:1.Prism square cage is equipped with multiple connecting rods, and the mirror holder of image-forming objective lens 3 is fixedly connected with the connecting rod.
As shown in figure 3, the laser beam that laser light source 21 issues injects Amici prism 22 after the reflection of the first reflective mirror 23,
Amici prism 22 exports two-beam, and the imaged object lens 3 of the first beam reflected light project the sample being irradiated on xyz micro-displacement platform 4
On, the reflected light of sample reaches image collecting device 1 using image-forming objective lens 3, Amici prism 22 and forms object light；Amici prism 22
Second beam transmitted light of output injects fine tuning reflective mirror 26 through the second reflective mirror 28, reference objective lens 27, and fine tuning reflective mirror 26 exports
Reflected light through reference objective lens 27, the second reflective mirror 28 and Amici prism 22 be re-reflected into image collecting device 1 formed reference light,
1.52 °~7.57 ° of off-axis angle is formed between object light and reference light and then forms off-axis interference, is remembered using image collecting device 1
The interference hologram obtained under record.
When it is implemented, the laser beam that the laser light source 21 issues is reflective to inject first in 45 ° of angles with normal
Mirror 23, the reflected light of the first reflective mirror 23 output to inject Amici prisms 22 in 45 ° of angles with normal, what Amici prism 22 exported
Second beam transmitted light is to inject the second reflective mirror 28 in 45 ° of angles with normal.Angle by adjusting fine tuning reflective mirror 26 can be real
The adjusting of existing off-axis angle, the position for adjusting vertical micro-displacement platform 25 up and down can realize that the light path of reference light is adjusted, it is micro- to adjust xyz
Displacement platform 4 can make object light light path imaging clear, and then make object light and reference light that off-axis interference occur and form hologram.
When it is implemented, the host computer that described image acquisition device 1 is connected by data line, the host computer is based on
Matlab software programming program handles interference hologram.
If the laser of this experiment of Fig. 2 use is the semiconductor laser of wavelength 633nm, there is good coherence.Using point
After a branch of homogeneous beam is divided into two beams by light prism, two-beam is allowed to be overlapped within a certain area, form new waveform, interferes item
There are corresponding relationships with sample surfaces elevation information for line phase information.The interference pattern that the information of amplitude and phase-modulation is formed is also referred to as
For hologram.
When it is implemented, Multiple Type can be used in image collecting device 1, the present embodiment selection is OLYMPUS E-
M5Mark camera, valid pixel 40,000,000；The present embodiment image-forming objective lens 3 and reference objective lens 27 all use 10 times, operating distance for
The infinity nikon object lens of 10.5mm can achieve micron order lateral resolution, while be equipped with image-forming objective lens 3 and reference objective lens
27 counteract single object lens optical path bring phase additional factor.He-Ne laser can be used in laser light source 21 or semiconductor swashs
Light, the present embodiment selection is general semiconductor laser, and laser beam size is fine-tuning, the light of normal regulating to diameter 10mm
Spot；The present embodiment Amici prism 22 is the long 25.4cm of rib, conventional engine Amici prism.
The step of acquiring hologram using off-axis light path three-dimensional microstructure measuring system of the invention is as follows:
1) image collecting device 1 is connected, the mirror holder of image-forming objective lens 3 is connected to the company on the prism square cage of Amici prism 22
On extension bar, by there is M3 holding screw that the position of image-forming objective lens 3 is fixed on mirror holder.First reflective mirror 23 and second is reflective
Mirror 28 is installed on porous plate, is allowed to and horizontal plane angle at 45 °.Fine tuning reflective mirror 26 is mounted on vertical micro-displacement platform 25,
Vertical micro-displacement platform 25 is installed on porous plate again, the light path for realizing reference path is facilitated to adjust and off-axis angle adjusting.Point
Light prism 22, laser light source 21, vertical micro-displacement platform 25, objective lens 27 are each attached on the porous plate of shell 2.
2) laser light source 21 and image collecting device 1 are opened, reflects through the first reflective mirror 23, is reflected by Amici prism 22
The hot spot of sample primarily determines observation area on to xyz micro-displacement platform 4.Xyz micro-displacement platform 4 is adjusted, so that object light image
In relatively clear position.At this time by the adjustment to fine tuning reflective mirror 26 pitch angle and left and right angle, generate it
Not only out of plumb reaches image collecting device 1 to reference light, but also has lap with object light；By moving in the front-back direction, it is ensured that two
Beam light optical path difference is suitable, just guarantees off-axis at this time and interferes.
3) by data line connecting communication, the parameter of setting image collecting device 1 makes it for image collecting device 1 and host computer
Reach best shooting effect, part can also be configured to acquisition parameters by host computer；Image Acquisition is captured by host computer
The experiment hologram that device 1 obtains.
Host computer carries out three-dimensional structure and rebuilds mainly to hologram processing including the following steps:
S1: off-axis light path three-dimensional microstructure measuring device is selected to obtain the hologram of sample to be tested；
S2: the hologram described in step S1 carries out FFT calculating, realizes that airspace is converted to frequency domain, and carry out frequency domain filtering, selects
Take corresponding+1 grade of item corresponding spectrum in frequency domain information；
S3: corresponding real image partial frequency spectrum is obtained to the step S2 and does Diffraction Calculation；
S4: the step S3 Diffraction Calculation result is object light complex amplitude, obtains wrapped phase value using object light complex amplitude；
S5: the wrapped phase value described in step S4 does Phase- un- wrapping calculating, restores original phase；
S6: the true phase obtained using step S5 completes the reconstruction of sample three-dimensional appearance.
Fig. 4 to Fig. 5 is one embodiment of the present of invention, and laboratory sample is 50 lines/mm reflecting grating, wherein Fig. 4
For the two-dimensional appearance figure under no reference light action, Fig. 5 is the hologram that the sample obtains through the invention.Fig. 6 is by upper
The digital micro-nano three-dimensional appearance figure obtained after machine processing.The digital micro-nano three-dimensional appearance obtained through the invention, it is convenient to these
Object structures carry out the extraction and further processing of topographic data, and realize and be simple and efficient, lossless observation.
The foregoing is merely presently preferred embodiments of the present invention, the thought being not intended to limit the invention, all of the invention
Within spirit and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (8)
1. a kind of off-axis light path three-dimensional microstructure measuring system characterized by comprising pedestal, the xyz being mounted on the base
Micro-displacement platform and the image-forming objective lens being successively set on above xyz micro-displacement platform, interference device and image collecting device；Institute
State interference device include shell and setting laser light source inside the shell, it is Amici prism, the first reflective mirror, the second reflective mirror, micro-
Adjust reflective mirror and reference objective lens；
The laser beam that the laser light source issues injects Amici prism after the first mirror reflection, and Amici prism exports two beams
Light, the imaged object lens injection of the first beam reflected light are irradiated on the sample on xyz micro-displacement platform, the reflected light of sample using
Image-forming objective lens, Amici prism reach image collecting device and form object light；Second beam transmitted light of Amici prism output is anti-through second
Light microscopic, reference objective lens inject fine tuning reflective mirror, and the reflected light of fine tuning reflective mirror output is through reference objective lens, the second reflective mirror and light splitting
Prism be re-reflected into image collecting device formed reference light, between object light and reference light formed 1.52 °~7.57 ° off-axis angle into
And off-axis interference is formed, the interference hologram recorded using image collecting device.
2. off-axis light path three-dimensional microstructure measuring system as described in claim 1, which is characterized in that the fine tuning reflective mirror
It is mounted on vertical micro-displacement platform, the angle of adjustment fine tuning reflective mirror can realize the adjusting of off-axis angle, adjust vertical micro-displacement
The position of platform can realize that the light path of reference light is adjusted, and adjusting xyz micro-displacement platform can make object light light path imaging clear, and then make
Object light and reference light occur off-axis interference and form hologram.
3. off-axis light path three-dimensional microstructure measuring system as claimed in claim 2, which is characterized in that the laser light source,
Amici prism, the first reflective mirror, the second reflective mirror, vertical micro-displacement platform and reference objective lens install the porous plate set inside the shell
On.
4. off-axis light path three-dimensional microstructure measuring system as described in claim 1, which is characterized in that the laser light source hair
Laser beam out is to inject the first reflective mirror in 45 ° of angles with normal, and the reflected light of the first reflective mirror output to be in normal
45 ° of angles inject Amici prism, and the second beam transmitted light of Amici prism output is reflective to inject second in 45 ° of angles with normal
Mirror.
5. off-axis light path three-dimensional microstructure measuring system as claimed in claim 4, which is characterized in that the Amici prism packet
Two right-angle prisms for including prism square cage and being set in prism square cage, the inclined-plane gluing of two right-angle prisms form one, directly
The inclined-plane of angle prism and the optical axis of laser light source angle at 45 °, so that the first beam reflected light of Amici prism output and the second beam are saturating
The light intensity ratio for penetrating light is 1:1.
6. off-axis light path three-dimensional microstructure measuring system as claimed in claim 5, which is characterized in that the prism square cage is set
There are multiple connecting rods, the mirror holder of image-forming objective lens is fixedly connected with the connecting rod.
7. off-axis light path three-dimensional microstructure measuring system as described in claim 1, which is characterized in that image-forming objective lens and reference
Object lens all use 10 times, operating distance is equipped with image-forming objective lens and reference objective lens and supports for the infinity nikon object lens of 10.5mm
Disappeared single object lens optical path bring phase additional factor.
8. off-axis light path three-dimensional microstructure measuring system as described in claim 1, which is characterized in that further include and the figure
As the host computer that acquisition device is connected by data line, it is holographic to interference that the host computer is based on Matlab software programming program
Figure is handled.
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| CN110017776A (en) * | 2019-05-17 | 2019-07-16 | 山东大学 | Digital holographic microscope aberration absolute Calibrating Method and system based on sequential shifts and chebyshev approximating polynomial |
| CN110108201A (en) * | 2019-04-26 | 2019-08-09 | 华南理工大学 | The high-precision off-axis digital holography microscope equipment and imaging method of transflector double mode |
| CN112304241A (en) * | 2020-10-27 | 2021-02-02 | 衡阳市智谷科技发展有限公司 | Object morphology testing method based on digital holography |
| CN112525824A (en) * | 2021-01-09 | 2021-03-19 | 昆明理工大学 | Perovskite film morphology structure detection method based on digital holography |
| CN113155049A (en) * | 2021-03-25 | 2021-07-23 | 深圳市海塞姆科技有限公司 | Light path system and fixation method of monocular three-dimensional image acquisition system |
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| CN113945168A (en) * | 2020-07-17 | 2022-01-18 | 致茂电子(苏州)有限公司 | Surface topography measurement system and method |
| CN112304241A (en) * | 2020-10-27 | 2021-02-02 | 衡阳市智谷科技发展有限公司 | Object morphology testing method based on digital holography |
| CN112525824A (en) * | 2021-01-09 | 2021-03-19 | 昆明理工大学 | Perovskite film morphology structure detection method based on digital holography |
| CN113155049A (en) * | 2021-03-25 | 2021-07-23 | 深圳市海塞姆科技有限公司 | Light path system and fixation method of monocular three-dimensional image acquisition system |
| CN114719747A (en) * | 2022-03-11 | 2022-07-08 | 华南理工大学 | Micro-displacement vision measurement device and method based on double light paths |
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Application publication date: 20181218 |