CN106547189B - Reflective digital holographic microscopic imaging system and method based on pulse laser - Google Patents
Reflective digital holographic microscopic imaging system and method based on pulse laser Download PDFInfo
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- CN106547189B CN106547189B CN201611049448.8A CN201611049448A CN106547189B CN 106547189 B CN106547189 B CN 106547189B CN 201611049448 A CN201611049448 A CN 201611049448A CN 106547189 B CN106547189 B CN 106547189B
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- 238000003384 imaging method Methods 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims abstract description 28
- 230000003287 optical effect Effects 0.000 claims abstract description 56
- 238000012546 transfer Methods 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 8
- 238000001093 holography Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 230000002452 interceptive effect Effects 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000003111 delayed effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 210000001367 artery Anatomy 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009647 digital holographic microscopy Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 210000003462 vein Anatomy 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
- G03H1/0866—Digital holographic imaging, i.e. synthesizing holobjects from holograms
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
- G03H2001/005—Adaptation of holography to specific applications in microscopy, e.g. digital holographic microscope [DHM]
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Abstract
The invention discloses a kind of reflective digital holographic microscopic imaging system and method based on pulse laser, the system includes imaging optical subsystem and the synchronously control subsystem for controlling imaging optical subsystem work, and imaging optical subsystem includes the pulse laser set gradually, laser attenuator assembly, transfer, light beam transfer device and holographic imaging apparatus；Synchronously control subsystem includes industrial control host and isochronous controller；The method comprising the steps of: one, building holographic microscopic imaging system；Two, the synchronously control of pulse laser and digital camera；Three, hologram data is obtained；Four, specimen surface three-dimensional appearance hologram image is shown.It is of the invention novel in design, by the synchronously control to pulse laser and digital camera, high frequency micro vibration sample hologram is obtained, optical path is completed using four beam splitters and interferes, avoid in optical path causes reflection stray light to enter hologram by itself component, and hologram quality is high.
Description
Technical field
The invention belongs to digital holographic microscopic imaging technical fields, and in particular to a kind of based on the reflective of pulse laser
Digital holographic microscopic imaging system and method.
Background technique
The Digital Holography developed rapidly with computer and improving for digital camera technology not only inherits
Holographic technique can recorde, reproduce the advantages of light field phase, and realize light field record, storage and the total digitalization reproduced,
Thus it is widely used.Wherein holographic technique and microtechnic are blended the digital holographic microscopy to be formed, and application has covered shape
Looks measurement, microcircuit detection, grain size analysis, biological cell observation, deformation and the neck such as vibration measurement and components defects detection
Domain, and achieve some achievements；Wherein reflective digital holographic microscopic imaging technology is mainly used in the three of small items surface
Topography measurement is tieed up, due to passing through accurate measuring three-dimensional morphology, available such as object structures feature, surface face type, spherical surface
The multinomial important index such as circularity, surface roughness, surface smoothness and percent ripple is simultaneously because digital holographic microscopic imaging skill
The unique advantage that art has can be measured with the certain depth even pattern etc. of micrometer level depth.But when need shoot or
Person's observation be the faster micro-vibration of change frequency or fluctuation when, common continuous laser is just unable to satisfy to dynamically catching
It catches, in addition, the maximum difficulty that current Digital holographic microscopy is applied is how to effectively improve digital reproduction picture quality, number
The noise of image is mainly derived from the acquisition and transmission process of image, and existing research is carried out for the noise of various digital pictures
It when analysis, proposes corresponding algorithm and the noise of digital picture is eliminated, process is complicated.Therefore one kind is needed to may be implemented
The reflective digital holographic microscopic imaging system and method for measuring the surface topography of high-frequency micro-vibration animal body, by with pulse laser
Device can not capture its relative snapshot hologram since the time for exposure of digital camera is too long and the time for exposure is relatively short to make up
When light-inletting quantity inadequate problem again, change simultaneously conventional photographic imaging device, increase beam splitter and complete optical path interference, reduce optical path
In cause to reflect stray light by itself component and enter hologram, reduce initial data bring noise before hologram data reconstructs.
Summary of the invention
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is that providing a kind of based on pulse
The reflective digital holographic microscopic imaging system of laser, novel in design rationally structure is simple, is completed using four beam splitters
Optical path interference avoids in optical path and causes reflection stray light to enter hologram by itself component, and hologram quality is high, convenient for promoting
It uses.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: the reflective digital based on pulse laser
Holographic microscopic imaging system, it is characterised in that: including imaging optical subsystem and for controlling the imaging optical subsystem work
The synchronously control subsystem of work, the imaging optical subsystem include the pulse laser, laser attenuator assembly, steering set gradually
Device, light beam transfer device and holographic imaging apparatus, the holographic imaging apparatus include the first beam splitter, are arranged in the first beam splitting
The second beam splitter in mirror object light optical path and the third beam splitter being arranged in the first beam splitter reference light optical path, object light is by the
Two beam splitters and microcobjective are radiated on the solid sample of high frequency micro vibration, and sample is mounted on sample fixed station, reference light
It is radiated at by third beam splitter on the first reflecting mirror of the perpendicular setting of reference light light beam, the second beam splitting is reflected back on sample
The reference light that third beam splitter is reflected back in the object light of mirror and the first reflecting mirror, which closes Shu Jinhang through the 4th beam splitter, interferes to be formed entirely
Breath is schemed, and the digital camera for acquiring the hologram is provided in the optical path of the 4th beam splitter conjunction beam；
The synchronously control subsystem includes industrial control host and the isochronous controller that connects with industrial control host output end, number
The input terminal of camera and the input terminal of pulse laser connect with the output end of isochronous controller, the output end of digital camera with
The input terminal of industrial control host connects.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that: described first
Beam splitter, the second beam splitter, third beam splitter and the 4th beam splitter are obliquely installed with light beam extending direction, the first beam splitter with
The parallel setting of 4th beam splitter, the second beam splitter and the parallel setting of third beam splitter, the first beam splitter and the second beam splitter
Perpendicular setting.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that: described first
Beam splitter uses the splitting ratio of transmitted light and reflected light for the beam splitter of 9:1.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that: the laser
Attenuator includes the half-wave plate and Glan prism for being successively set on the light source extending direction of pulse laser.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that: the steering
Device is made of second reflecting mirror and third reflecting mirror in adjustment beam direction.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that: the light beam
Transfer device includes the beam expanding lens and collimating mirror set gradually.
Meanwhile a kind of the invention also discloses method and steps simple, design is reasonably based on the reflective of pulse laser
The method of digital holographic microscopic imaging, which is characterized in that method includes the following steps:
Step 1: building holographic microscopic imaging system: adjustment sample detects surface, and the optics is installed on optical platform
Imaging subsystems carry out holographic imaging to specimen surface, and pulse laser is connected isochronous controller with digital camera, simultaneously will
Digital camera is connect with industrial control host, initializes the synchronously control subsystem；
Step 2: the synchronously control of pulse laser and digital camera, process are as follows:
Pulse laser is arranged using isochronous controller in step 201, the time for exposure that digital camera is arranged using industrial control host
First delay time of device and the second delay time of digital camera；
Step 202, opening pulse laser preheating make pulse laser glisten, while digital camera is delayed wait work, arteries and veins
Consume the first delay time for being arranged in step 201 during rushing laser preheating, digital camera is delayed process to be worked
The second delay time being arranged in middle consumption step 201；
The laser beam that step 203, isochronous controller control pulse laser emits laser beam when reaching pulse width, simultaneously
It controls digital camera and carries out single exposure；
Step 3: obtaining hologram data, process is as follows:
Step 301, laser attenuator assembly are rotated and are decayed to the laser beam that pulse laser in step 203 emits, and are declined
Laser beam after subtracting is adjusted the direction of propagation of laser beam by transfer, then reaches the first beam splitter through light beam transfer device；
The laser beam received is divided into object light and reference light by step 302, the first beam splitter, and object light passes through the second beam splitting
Mirror is radiated on sample after a branch of transmission through microcobjective, and another beam is reflected into outside optical path；Reference light passes through third beam splitter,
It is reflected after a branch of transmission through the first reflecting mirror, another beam is reflected into outside optical path；The object light that sample is reflected back is by closing Shu Zuoyong's
4th beam splitter, a branch of reference interference of light for being reflected towards digital camera and the first reflecting mirror and being reflected back, another beam object light are transmitted to
Outside optical path；
Step 303, digital camera record the hologram that is formed after interfering in step 302, and by the holography of record
Diagram data is transmitted to industrial control host；
Step 4: specimen surface three-dimensional appearance hologram image is shown: firstly, industrial control host uses fresnel transform reconstruction method
The hologram data of digital camera acquisition back is reconstructed, the amplitude and phase data of hologram are obtained；Then, industry control master
Machine reproduces the distribution of hologram plane phase using Phase- un- wrapping and the algorithm of phase compensation；Finally, being shown by industrial control host
Specimen surface three-dimensional appearance hologram image.
Compared with the prior art, the present invention has the following advantages:
1, the reflective digital holographic microscopic imaging system based on pulse laser that the present invention uses, structure is simple, if
Rationally, it is convenient to realize for meter.
2, the holographic imaging apparatus that uses of the present invention completes optical paths using four beam splitters, and traditional reflective micro- complete
It is only compared with three beam splitters in breath optical path, the stray light for avoiding the roundtrip as caused by itself component in optical path enters number
Word camera reduces the hologram data noise of digital camera acquisition, improves the quality of hologram, using effect is good.
3, the holographic imaging apparatus that the present invention uses compensates the light path of reference light in reference path using the first reflecting mirror,
The relevant efficiency for increasing laser solves the problems, such as that pulse laser coherence distance is short.
4, the reflective digital holographic microscopic imaging method based on pulse laser that the present invention uses, step is simple, leads to
Isochronous controller is crossed to the synchronously control of pulse laser and digital camera, obtains high frequency micro vibration solid sample surface transient not
Then hologram in the same time is reconstructed the phase and amplitude of micro-vibration sample hologram by industrial personal computer, and reproduces hologram
Plane phase distribution, three-dimensional appearance hologram image show that measurement accuracy is high.
In conclusion the present invention is novel in design rationally, by the synchronously control to pulse laser and digital camera, obtain
High frequency micro vibration sample hologram is completed optical path using four beam splitters and is interfered, avoids in optical path and caused instead by itself component
It penetrates stray light and enters hologram, hologram quality is high, convenient for promoting the use of.
Below by drawings and examples, technical scheme of the present invention will be described in further detail.
Detailed description of the invention
Fig. 1 is the structural representation for the reflective digital holographic microscopic imaging system based on pulse laser that the present invention uses
Figure.
Fig. 2 is the structural schematic diagram of reflective digital holographic microscopic imaging system in the prior art.
Fig. 3 is that the present invention is based on the method flow block diagrams of the reflective digital holographic microscopic imaging method of pulse laser.
Description of symbols:
1-pulse laser；2-half-wave plates；3-Glan prisms；
4-the second reflecting mirror；5-third reflecting mirrors；6-beam expanding lens；
7-collimating mirrors；8-the first beam splitter；9-the second beam splitter；
10-microcobjectives；11-samples；12-sample fixed stations；
13-third beam splitters；14-the first reflecting mirror；15-the four beam splitter；
16-digital cameras；17-isochronous controllers；18-industrial personal computers；
19-the four reflecting mirror.
Specific embodiment
As shown in Figure 1, the reflective digital holographic microscopic imaging system of the present invention based on pulse laser, including
Imaging optical subsystem and the synchronously control subsystem to work for controlling the imaging optical subsystem, optical imagery
System includes the pulse laser 1 set gradually, laser attenuator assembly, transfer, light beam transfer device and holographic imaging apparatus,
The holographic imaging apparatus includes the first beam splitter 8, the second beam splitter 9 being arranged in 8 object light optical path of the first beam splitter and sets
The third beam splitter 13 in 8 reference light optical path of the first beam splitter is set, object light is irradiated by the second beam splitter 9 and microcobjective 10
On the solid sample 11 of high frequency micro vibration, sample 11 is mounted on sample fixed station 12, and reference light passes through third beam splitter 13
It is radiated on the first reflecting mirror 14 with the perpendicular setting of reference light light beam, the object light of the second beam splitter 9 is reflected back on sample 11
Shu Jinhang is closed through the 4th beam splitter 15 with the reference light for being reflected back third beam splitter 13 on the first reflecting mirror 14 to interfere to form holography
Scheme, the digital camera 16 for acquiring the hologram is provided in the optical path of the 4th beam splitter 15 conjunction beam；
The synchronously control subsystem includes industrial control host 18 and the isochronous controller that connects with 18 output end of industrial control host
17, the input terminal of digital camera 16 and the input terminal of pulse laser 1 connect with the output end of isochronous controller 17, digital phase
The output end of machine 16 connects with the input terminal of industrial control host 18.
In actual use, isochronous controller 17 is sent a signal to by industrial control host 18, isochronous controller 17 controls pulse and swashs
Light device 1 and digital camera 16 carry out the shooting of hologram, digital camera 16 by the image information of acquisition be transmitted to control host 18 into
Row is handled, recovery 11 surface transient appearance of sample, and in the present embodiment, sample 11 uses the solid sample of high frequency micro vibration, due to
The interference distance for the pulse laser that pulse laser 1 issues is limited, if reference light and the optical path difference of object light are excessive, can not have
Effect is interfered, and the first reflecting mirror 14 is for reference light light filling path difference, raising interference efficiency.
As shown in Figure 1, in the present embodiment, first beam splitter 8, the second beam splitter 9, third beam splitter 13 and the 4th point
Beam mirror 15 is obliquely installed with light beam extending direction, the setting parallel with the 4th beam splitter 15 of the first beam splitter 8, the second beam splitter
9 and the parallel setting of third beam splitter 13, the first beam splitter 8 and the perpendicular setting of the second beam splitter 9.
In actual use, first beam splitter 8, the second beam splitter 9, third beam splitter 13 and the 4th beam splitter 15 with
Light beam extending direction is at 45 ° to be obliquely installed, and facilitates optical path adjusting, the setting parallel with the 4th beam splitter 15 of the first beam splitter 8, and
Two beam splitters 9 and the parallel setting of third beam splitter 13, the first beam splitter 8 and the perpendicular setting of the second beam splitter 9, light beam transmitting
The laser that device transmits is divided into object light and reference light by the first beam splitter 8, and object light passes through the second beam splitter 9, Yi Shutou
It is radiated on sample 11 after penetrating through microcobjective 10, another beam is reflected into outside optical path, reduces light disturbance；Reference light passes through third
Beam splitter 13 is totally reflected light filling path difference through the first reflecting mirror 14 after a branch of transmission, and another beam is reflected into outside optical path, and it is dry to reduce veiling glare
It disturbs；The object light that sample 11 is reflected back passes through the 4th beam splitter 15 for closing Shu Zuoyong, a branch of to be reflected towards digital camera 16 and first instead
The reference interference of light that mirror 14 is reflected back is penetrated, another beam object light is transmitted to outside optical path, reduces the influence of stray light, improve holography
The quality of figure.
It should be noted that as shown in Fig. 2, traditional holographic microscopic imaging system, the laser warp that pulse laser 1 issues
It crosses after expanding and collimating and is divided by the first beam splitter 8 for object light and reference light, object light passes through the second beam splitter 9, a branch of by micro-
By the surface reflection of test specimen 11 after the amplification of object lens 10, which is reflected towards the side of digital camera 16 through the second beam splitter 9 again
To；Reference light is being reflected towards 16 direction of digital camera by 14 light filling path difference of the first reflecting mirror by third beam splitter 13, with object
Light meets and interferes to form hologram, but object light being reflected into the second beam splitter 9 by the 4th reflecting mirror 19 in optical path
In, a reverse light beam can be generated at the second beam splitter 9 and enters third beam splitter 13, which passes through first
It after reflecting mirror 14, and is reflected into digital camera 16 by third beam splitter 13, there are an extra reflected lights to enter digital phase
The quality of the influence hologram of machine 16.
In the present embodiment, increase a beam splitter, avoids the spuious of the roundtrip as caused by itself component in optical path
Light enters hologram, improves the quality of hologram.
In the present embodiment, first beam splitter 8 uses the splitting ratio of transmitted light and reflected light for the beam splitter of 9:1.
In the present embodiment, first beam splitter 8 use the splitting ratio of transmitted light and reflected light for the beam splitter of 9:1 be for
The light intensity for deliberately reinforcing object light, facilitates the debugging of optical path, improves hologram quality.
In the present embodiment, the laser attenuator assembly include be successively set on pulse laser 1 light source extending direction half
Wave plate 2 and Glan prism 3.
In the present embodiment, pulse laser 1 issues high-power polarised light, is rotated using half-wave plate 2 to polarised light
And decaying is that cooperation digital camera 16 acquires, and increases the transmitance and polarization optical purity of polarised light using Glan prism 3.
In the present embodiment, the transfer is by second reflecting mirror 4 in adjustment beam direction and 5 groups of third reflecting mirror
At.
In the present embodiment, when holographic microscopic imaging system is imaged, it need to be carried out on optical platform, in order to reduce holography
The area occupied of micro imaging system need to be changed adaptive optics platform to the optical path of propagation, using the of perpendicular setting
Direction of beam propagation in optical path is changed 180 ° by two-mirror 4 and third reflecting mirror 5, practical and easy to operate.
In the present embodiment, the light beam transfer device includes the beam expanding lens 6 and collimating mirror 7 set gradually.
In the present embodiment, the diameter for the laser beam that the expansible third reflecting mirror 5 of beam expanding lens 6 launches while it can reduce sharp
The angle of divergence of light beam is maintained the collimation of light beam using collimating mirror 7, provides good light source for imaging system.
The method of reflective digital holographic microscopic imaging based on pulse laser as shown in Figure 3, comprising the following steps:
Step 1: building holographic microscopic imaging system: adjustment sample 11 detects surface, and the light is installed on optical platform
It learns imaging subsystems and holographic imaging is carried out to 11 surface of sample, pulse laser 1 and digital camera 16 are connected into isochronous controller
17, while digital camera 16 being connect with industrial control host 18, initialize the synchronously control subsystem；
Step 2: the synchronously control of pulse laser and digital camera, process are as follows:
Arteries and veins is arranged using isochronous controller 17 in step 201, the time for exposure that digital camera 16 is arranged using industrial control host 18
Rush the first delay time of laser 1 and the second delay time of digital camera 16；
It should be noted that the delay that delay time and digital camera 16 that pulse laser 1 is started to work are started to work
Time is different, and the first delay time of pulse laser 1 and the second delay time of digital camera 16 is respectively set, is to make
It is identical at the time of end at the time of first delay time of pulse laser 1 terminates with the second delay time of digital camera 16,
Guarantee that pulse laser 1 and digital camera 16 start simultaneously at work.
Step 202, the opening preheating of pulse laser 1 make pulse laser 1 glisten, while the delay of digital camera 16 is to work
Make, pulse laser 1 consumes the first delay time being arranged in step 201 during preheating, digital camera 16 is delayed to work
The second delay time being arranged in step 201 is consumed during work；
The laser beam that step 203, isochronous controller 17 control pulse laser 1 emits laser beam when reaching pulse width,
Digital camera 16 is controlled simultaneously carries out single exposure；
Step 3: obtaining hologram data, process is as follows:
Step 301, laser attenuator assembly are rotated and are decayed to the laser beam that pulse laser 1 in step 203 emits, and are declined
Laser beam after subtracting is adjusted the direction of propagation of laser beam by transfer, then reaches the first beam splitter 8 through light beam transfer device；
The laser beam received is divided into object light and reference light by step 302, the first beam splitter 8, and object light passes through the second beam splitting
Mirror 9 is radiated on sample 11 after a branch of transmission through microcobjective 10, and another beam is reflected into outside optical path；Reference light is by third point
Beam mirror 13, reflects after a branch of transmission through the first reflecting mirror 14, and another beam is reflected into outside optical path；The object light that sample 11 is reflected back is passed through
The 4th beam splitter 15 of conjunction Shu Zuoyong, a branch of reference interference of light for being reflected towards digital camera 16 and the first reflecting mirror 14 and being reflected back,
Another beam object light is transmitted to outside optical path；
It should be noted that first beam splitter 8 uses the splitting ratio of transmitted light and reflected light to be for the beam splitter of 9:1
Stronger object light and faint reference light in order to obtain.
Step 303, digital camera 16 record the hologram that is formed after interfering in step 302, and by the complete of record
Breath diagram data is transmitted to industrial control host 18；
Step 4: specimen surface three-dimensional appearance hologram image is shown: firstly, industrial control host 18 is rebuild using fresnel transform
The hologram data of the acquisition of digital camera 16 back is reconstructed in method, obtains the amplitude and phase data of hologram；Then, work
It controls host 18 and the distribution of hologram plane phase is reproduced using Phase- un- wrapping and the algorithm of phase compensation；Finally, passing through industry control master
Machine 18 shows 11 three-dimensional surface shape hologram image of sample.
In the present embodiment, hologram of the industrial control host 18 using fresnel transform reconstruction method to the acquisition of digital camera 16 back
Data are reconstructed, according to the phase data that the arc-tangent value at multiple angle acquires hologram be original phase is compressed to it is positive and negativeIt
Between, since the sign of the molecule denominator of arctan function has respectively corresponded the sign of phase sinusoidal function and cosine function,
And SIN function and cosine function are using 2 π as the continuous function in period, industrial control host 18 uses Phase- un- wrapping and phase compensation
Algorithm by phase positive and negativeBetween codomain be converted to codomain of the phase between positive and negative 2 π, reproduce hologram plane phase
Distribution shows that 11 three-dimensional surface shape hologram image of sample, imaging effect are good by industrial control host 18.
The above is only presently preferred embodiments of the present invention, is not intended to limit the invention in any way, it is all according to the present invention
Technical spirit any simple modification to the above embodiments, change and equivalent structural changes, still fall within skill of the present invention
In the protection scope of art scheme.
Claims (2)
1. a kind of reflective digital holographic microscopic imaging of the reflective digital holographic microscopic imaging system based on pulse laser
Method, the reflective digital holographic microscopic imaging system based on pulse laser include imaging optical subsystem and for controlling
The synchronously control subsystem of the imaging optical subsystem work is made, the imaging optical subsystem includes the pulse set gradually
Laser (1), laser attenuator assembly, transfer, light beam transfer device and holographic imaging apparatus, the holographic imaging apparatus include
First beam splitter (8), the second beam splitter (9) being arranged in the first beam splitter (8) object light optical path and setting are in the first beam splitter
(8) the third beam splitter (13) in reference light optical path, object light are radiated at high frequency by the second beam splitter (9) and microcobjective (10)
On the solid sample (11) of micro-vibration, sample (11) is mounted on sample fixed station (12), and reference light passes through third beam splitter
(13) it is radiated on the first reflecting mirror (14) with the perpendicular setting of reference light light beam, sample is reflected back the second beam splitter on (11)
(9) be reflected back in object light and the first reflecting mirror (14) reference light of third beam splitter (13) through the 4th beam splitter (15) close beam into
Row interference forms hologram, and the digital camera for acquiring the hologram is provided in the optical path of the 4th beam splitter (15) conjunction beam
(16)；
The synchronously control subsystem includes industrial control host (18) and the isochronous controller that connects with industrial control host (18) output end
(17), output end phase of the input terminal of the input terminal of digital camera (16) and pulse laser (1) with isochronous controller (17)
It connects, the output end of digital camera (16) connects with the input terminal of industrial control host (18)；
The delay time that pulse laser (1) is started to work is different from the delay time that digital camera (16) is started to work, respectively
First delay time of pulse laser (1) and the second delay time of digital camera (16) are set, are to make pulse laser
It is identical at the time of end at the time of first delay time of device (1) terminates with the second delay time of digital camera (16), guarantee
Pulse laser (1) and digital camera (16) start simultaneously at work；
The laser attenuator assembly includes the half-wave plate (2) and Glan for being successively set on the light source extending direction of pulse laser (1)
Prism (3)；
The light beam transfer device includes the beam expanding lens (6) and collimating mirror (7) set gradually；
First beam splitter (8) uses the splitting ratio of transmitted light and reflected light for the beam splitter of 9:1；
First beam splitter (8), the second beam splitter (9), third beam splitter (13) and the 4th beam splitter (15) prolong with light beam
It stretches direction to be obliquely installed, the first beam splitter (8) setting parallel with the 4th beam splitter (15), the second beam splitter (9) and third point
The parallel setting of Shu Jing (13), the first beam splitter (8) and the second beam splitter (9) perpendicular setting；
It is characterized in that method includes the following steps:
Step 1: building holographic microscopic imaging system: adjustment sample (11) detects surface, and the optics is installed on optical platform
Imaging subsystems carry out holographic imaging to sample (11) surface, by pulse laser (1) control synchronous with digital camera (16) connection
Device (17) processed, while digital camera (16) being connect with industrial control host (18), initialize the synchronously control subsystem；
Step 2: the synchronously control of pulse laser and digital camera, process are as follows:
Step 201, the time for exposure that digital camera (16) are arranged using industrial control host (18), are arranged using isochronous controller (17)
First delay time of pulse laser (1) and the second delay time of digital camera (16)；
Step 202, opening pulse laser (1) preheating make pulse laser (1) to glisten, while digital camera (16) delay is to work
Make, pulse laser (1) consumes the first delay time being arranged in step 201, digital camera (16) delay during preheating
The second delay time being arranged in step 201 is consumed during wait work；
The laser beam that step 203, isochronous controller (17) control pulse laser (1) emits laser beam when reaching pulse width,
Digital camera (16) are controlled simultaneously carries out single exposure；
Step 3: obtaining hologram data, process is as follows:
Step 301, laser attenuator assembly are rotated and are decayed to the laser beam that pulse laser in step 203 (1) emits, decaying
Laser beam afterwards is adjusted the direction of propagation of laser beam by transfer, then reaches the first beam splitter (8) through light beam transfer device；
The laser beam received is divided into object light and reference light by step 302, the first beam splitter (8), and object light passes through the second beam splitter
(9), it is radiated on sample (11) after a branch of transmission through microcobjective (10), another beam is reflected into outside optical path；Reference light is by the
Three beam splitters (13), reflect after a branch of transmission through the first reflecting mirror (14), and another beam is reflected into outside optical path；Sample (11) is reflected back
Object light by closing the 4th beam splitter (15) of Shu Zuoyong, a branch of digital camera (16) and the first reflecting mirror (14) of being reflected towards are reflected
The reference interference of light returned, another beam object light are transmitted to outside optical path；
Step 303, digital camera (16) record the hologram that is formed after interfering in step 302, and by the holography of record
Diagram data is transmitted to industrial control host (18)；
Step 4: specimen surface three-dimensional appearance hologram image is shown: firstly, industrial control host (18) uses fresnel transform reconstruction method
The hologram data of digital camera (16) acquisition back is reconstructed, the amplitude and phase data of hologram are obtained；Then, work
It controls host (18) and the distribution of hologram plane phase is reproduced using Phase- un- wrapping and the algorithm of phase compensation；Finally, passing through industry control
Host (18) shows sample (11) three-dimensional surface shape hologram image.
2. reflective digital holographic microscopic imaging method described in accordance with the claim 1, it is characterised in that: the transfer by
Second reflecting mirror (4) and third reflecting mirror (5) in adjustment beam direction form.
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