CN109975233B - A non-condensable gas layer measurement device and method based on laser attenuation - Google Patents

A non-condensable gas layer measurement device and method based on laser attenuation Download PDF

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CN109975233B
CN109975233B CN201910189030.4A CN201910189030A CN109975233B CN 109975233 B CN109975233 B CN 109975233B CN 201910189030 A CN201910189030 A CN 201910189030A CN 109975233 B CN109975233 B CN 109975233B
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范利武
张天宇
牟林巍
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Zhejiang University ZJU
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    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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Abstract

The invention discloses a device and a method for measuring a non-condensable gas layer based on laser attenuation, and belongs to the field of measurement of condensation experiments. The system comprises an optical measurement system consisting of a laser, a beam splitter, a reflector, a guide rail and the like, a visual condensation experimental body consisting of a condensation cavity, a semiconductor cold stage, an intracavity reflector, an optical window and the like, and a data acquisition and processing system consisting of a laser beam detector, a data acquisition instrument and a computer. The visual condensation experimental body is used for condensation experiments, and the distribution characteristics of the non-condensation layer are obtained by comparing signals of the measurement laser and the reference laser. The invention realizes the in-situ measurement of the noncondensable gas layer near the condensing surface in the condensing experiment process of the noncondensable gas-containing steam with different structural surfaces and different experiment parameters through the optical measurement system.

Description

一种基于激光衰减的不凝气层测量装置及方法A non-condensable gas layer measurement device and method based on laser attenuation

技术领域technical field

本发明涉及一种基于激光衰减的不凝气层测量装置及方法,属于冷凝实验测量领域。The invention relates to a non-condensable gas layer measurement device and method based on laser attenuation, and belongs to the field of condensation experiment measurement.

背景技术Background technique

在工业生产中时常可见水蒸气的冷凝过程。多数工业设备中的水蒸气冷凝往往伴随着少量的不凝性气体存在,比如,在乏汽在发电厂凝汽器中凝结的过程中,由于凝汽器内存在一定真空度,长时间运行会有部分空气进入;中央空调在夏天制冷时,空气中的水蒸气可能会在蒸发器盘管表面凝结;多级闪蒸海水淡化系统中闪蒸蒸汽的冷凝往往也伴随着一定量的不凝性气体存在。根据研究,即使含量很低的不凝气存在也会对蒸汽的冷凝过程产生极大的影响。当蒸汽在冷表面发生凝结时,蒸汽形成凝液附着在表面上,而气流中所含的不凝气由于扩散作用聚集在表面附近形成一层气层。这层不凝气层会导致表面附近的蒸汽分压下降,饱和温度降低进而导致传热温差减小,降低冷凝过程的传热驱动力;同时,由于表面附近形成了高浓度的不凝气层,其浓度梯度与蒸汽的浓度梯度相反,增加了蒸汽向表面的扩散阻力,削弱蒸汽冷凝的传质过程,从而更加抑制了冷凝过程。由此可见,不凝气层的形成是制约冷凝过程强化的关键环节,因此,对含不凝气的水蒸气冷凝过程中不凝气层的特性进行研究具有重要意义。The condensation process of water vapor is often seen in industrial production. The condensation of water vapor in most industrial equipment is often accompanied by the presence of a small amount of non-condensable gas. For example, in the process of condensing spent steam in the condenser of a power plant, due to the existence of a certain degree of vacuum in the condenser, long-term operation will Some air enters; when the central air conditioner cools in summer, the water vapor in the air may condense on the surface of the evaporator coil; the condensation of the flash steam in the multi-stage flash seawater desalination system is often accompanied by a certain amount of non-condensability. Gas is present. According to research, even the presence of very low content of non-condensable gas will have a great impact on the condensation process of steam. When the steam condenses on the cold surface, the steam forms condensate and adheres to the surface, and the non-condensable gas contained in the airflow accumulates near the surface due to diffusion to form a gas layer. This layer of non-condensable gas layer will cause the partial pressure of vapor near the surface to decrease, the saturation temperature will decrease, which will reduce the heat transfer temperature difference and reduce the heat transfer driving force of the condensation process; at the same time, due to the formation of a high-concentration non-condensable gas layer near the surface. , its concentration gradient is opposite to that of steam, which increases the diffusion resistance of steam to the surface, weakens the mass transfer process of steam condensation, and further inhibits the condensation process. It can be seen that the formation of the non-condensable gas layer is the key link restricting the strengthening of the condensation process. Therefore, it is of great significance to study the characteristics of the non-condensable gas layer during the condensation process of water vapor containing non-condensable gas.

关于含不凝气蒸汽冷凝的实验研究中,目前大多只研究了不凝气含量、成分等对于冷凝换热系数的影响,并未有与不凝气层测量等相关的工作。傅里叶变换红外光谱(FTIR)可以实现对混合气体中水蒸气浓度的在线测量,但是测量时需要将待测气体通入FTIR分析仪,并不适合在冷凝实验过程中对不凝气层进行原位测量。为了在经典的冷凝模型上建立起适用于各种新型微纳结构强化表面的理论模型,同时为了验证对冷凝过程的数值模拟的可靠性,采用准确的实验方法对结果进行检验必不可少。In the experimental research on the condensation of steam containing non-condensable gas, most of them only study the influence of non-condensable gas content and composition on the condensation heat transfer coefficient, and there is no work related to the measurement of non-condensable gas layer. Fourier Transform Infrared Spectroscopy (FTIR) can realize online measurement of water vapor concentration in mixed gas, but the gas to be measured needs to be passed into the FTIR analyzer during measurement, which is not suitable for non-condensable gas layer during condensation experiments. In situ measurement. In order to establish a theoretical model suitable for various new types of micro-nanostructure reinforced surfaces based on the classical condensation model, and to verify the reliability of the numerical simulation of the condensation process, it is essential to use accurate experimental methods to verify the results.

发明内容SUMMARY OF THE INVENTION

本发明针对目前的技术问题,提出了一种基于激光衰减的不凝气层测量装置及方法。本发明通过光学测量系统实现对冷凝腔体内含不凝气蒸汽的激光衰减测量,利用数据采集与处理系统对测量激光和参考激光光强的差值进行分析进而得出测量路径上的不凝气浓度梯度和不凝气层厚度,为实现对含不凝气蒸汽冷凝现象的更深一步研究提供有效手段。Aiming at the current technical problems, the present invention proposes a non-condensable gas layer measurement device and method based on laser attenuation. The invention realizes the laser attenuation measurement of the non-condensable gas vapor in the condensation cavity through the optical measurement system, and uses the data acquisition and processing system to analyze the difference between the light intensity of the measurement laser and the reference laser to obtain the non-condensable gas on the measurement path. The concentration gradient and the thickness of the non-condensable gas layer provide an effective means for further research on the condensation phenomenon of steam containing non-condensable gas.

本发明的目的是这样实现的:The object of the present invention is achieved in this way:

一种基于激光衰减的不凝气层测量装置包括光学测量系统、可视化冷凝实验体、数据采集与处理系统;A non-condensable gas layer measurement device based on laser attenuation includes an optical measurement system, a visualized condensation experiment body, and a data acquisition and processing system;

所述的可视化冷凝实验体包括腔内反射镜和光学视窗;所述的可视化冷凝实验体一侧装有光学视窗,与所述一侧相对的另一侧内壁面装有腔内反射镜;The visualized condensation experiment body includes an intra-cavity reflector and an optical window; one side of the visualized condensation experiment body is provided with an optical window, and the inner wall surface of the other side opposite to the one side is provided with an intra-cavity reflector;

数据采集与处理系统包括第一光束探测器、第二光束探测器、数据采集仪和计算机;The data acquisition and processing system includes a first beam detector, a second beam detector, a data acquisition instrument and a computer;

所述的光学测量系统由激光器、第一分束镜、第一反射镜、第二反射镜、第三反射镜、第二分束镜、第三分束镜、导轨组成;The optical measurement system is composed of a laser, a first beam splitter, a first reflector, a second reflector, a third reflector, a second beam splitter, a third beam splitter, and a guide rail;

第一分束镜位于激光器发射的激光光路上,且第一分束镜的法线方向与所述激光光路存在夹角;第一分束镜对激光进行反射和透射,第一反射镜布置在第一分束镜的透射光路上,且其法线方向与透射光路存在夹角;第二反射镜布置在第一分束镜的反射光路上,且其法线方向与反射光路存在夹角;第三反射镜布置在第二反射镜的反射光路上,且其法线方向与反射光路存在夹角;第二分束镜、第三分束镜分别布置在第一反射镜、第三反射镜的反射光路上,且其法线方向与分别与反射光路存在夹角;The first beam splitter is located on the laser light path emitted by the laser, and there is an included angle between the normal direction of the first beam splitter and the laser light path; the first beam splitter reflects and transmits the laser light, and the first reflector is arranged on the On the transmitted light path of the first beam splitter, and its normal direction has an included angle with the transmitted light path; the second reflector is arranged on the reflected light path of the first beam splitter, and its normal direction has an included angle with the reflected light path; The third reflector is arranged on the reflected light path of the second reflector, and its normal direction has an included angle with the reflected light path; the second beam splitter and the third beam splitter are respectively arranged on the first reflector and the third reflector The reflected light path of , and its normal direction has an included angle with the reflected light path;

第一分束镜的透射光束经第一反射镜后进入第二分束镜,第二分束镜的反射光束经光学视窗进入冷凝腔体,经腔内反射镜反射进入第二光束探测器;第一分束镜的反射激光经第二反射镜、第三反射镜后进入第三分束镜,第三分束镜的透射光束经第二分束镜反射后进入第二光束探测器,作为参考光束;The transmitted beam of the first beam splitter enters the second beam splitter after passing through the first reflector, the reflected beam of the second beam splitter enters the condensation cavity through the optical window, and is reflected by the intra-cavity reflector and enters the second beam detector; The reflected laser light of the first beam splitter enters the third beam splitter after passing through the second mirror and the third mirror, and the transmitted beam of the third beam splitter is reflected by the second beam splitter and then enters the second beam detector as reference beam;

第一分束镜的反射光束经第二反射镜、第三反射镜后进入第三分束镜,第三分束镜的反射光束经光学视窗进入冷凝腔体,经腔内反射镜反射进入第一光束探测器;第一分束镜的透射光束经第一反射镜后进入第二分束镜,第二分束镜的透射光束经第三分束镜反射后进入第一光束探测器,作为测量光束;The reflected beam of the first beam splitter enters the third beam splitter after passing through the second mirror and the third mirror, the reflected beam of the third beam splitter enters the condensation cavity through the optical window, and is reflected by the intra-cavity mirror and enters the third beam splitter. a beam detector; the transmitted beam of the first beam splitter enters the second beam splitter after passing through the first reflecting mirror, and the transmitted beam of the second beam splitter is reflected by the third beam splitter and then enters the first beam detector, as measuring beam;

所述的第一光束探测器与第二分束镜安装在同一滑动平台上,第二光束探测器与第三分束镜安装在另一滑动平台上,两个滑动平台安装在导轨上;两个滑动平台的位移均通过计算机控制导轨实现;计算机通过数据采集仪分别与第一光束探测器和第二光束探测器相连。The first beam detector and the second beam splitter are mounted on the same sliding platform, the second beam detector and the third beam splitter are mounted on another sliding platform, and the two sliding platforms are mounted on the guide rails; The displacement of each sliding platform is realized by the computer-controlled guide rail; the computer is connected with the first beam detector and the second beam detector respectively through the data acquisition instrument.

优选的,所述的第一分束镜将激光分成等光强的两束,最终分别进入光束探测器,以实现在滑动平台移动时仍能保持参考光束与测量光束等环境衰减,两个光束探测器接受到的光强差值即为由两路径上不凝气浓度差异形成,经过数据处理即可得到测量光束处的不凝气浓度。Preferably, the first beam splitter divides the laser into two beams of equal light intensity, and finally enters the beam detector respectively, so as to maintain the environmental attenuation of the reference beam and the measurement beam when the sliding platform moves, and the two beams The light intensity difference received by the detector is formed by the difference of the non-condensable gas concentration on the two paths, and the non-condensable gas concentration at the measurement beam can be obtained after data processing.

优选的,所述的可视化冷凝实验体为测量主体还包括冷凝腔体、半导体冷台、保温材料、测试表面、布风板和温度传感器;所述的布风板、温度传感器位于冷凝腔体的一个壁面上;半导体冷台位于与所述的一个壁面相对的另一壁面上,布风板设在蒸汽入口处以减小蒸汽流速,保证腔内蒸汽均匀,减小气体流动对冷凝的影响;腔内反射镜法线方向与参考光束平行;温度传感器插入冷凝腔体,用于监控腔内混合蒸汽温度。测试表面粘贴于半导体冷台的制冷面上,制冷面其余部分包覆保温材料。Preferably, the visualized condensation experiment body is a measurement body and further includes a condensation cavity, a semiconductor cold stage, a thermal insulation material, a test surface, an air distribution plate and a temperature sensor; the air distribution plate and the temperature sensor are located in the condensation cavity. one wall surface; the semiconductor cooling stage is located on the other wall surface opposite to the one wall surface, and the air distribution plate is arranged at the steam inlet to reduce the steam flow rate, ensure the uniformity of the steam in the cavity, and reduce the influence of the gas flow on the condensation; the cavity The normal direction of the internal mirror is parallel to the reference beam; the temperature sensor is inserted into the condensation cavity to monitor the temperature of the mixed steam in the cavity. The test surface is pasted on the cooling surface of the semiconductor cold table, and the rest of the cooling surface is covered with thermal insulation material.

优选的,所述的冷凝腔体各个壁面设有电加热装置,防止蒸汽在壁面上冷凝。Preferably, each wall surface of the condensation cavity is provided with an electric heating device to prevent steam from condensing on the wall surface.

优选的,所述的冷凝腔体壁面还开有若干个法兰接口用于连接外部管路、设备或用于安装传感器。Preferably, the wall of the condensation chamber is further provided with several flange interfaces for connecting external pipelines, equipment or for installing sensors.

优选的,所述的第一光束探测器、第二光束探测器可以检测入射光束的光强并由数据采集仪输入计算机查看、存储。Preferably, the first beam detector and the second beam detector can detect the light intensity of the incident beam and input it into the computer for viewing and storage by the data acquisition instrument.

第二分束镜的反射光束与第三分束镜的透射光束共同进入第二光束探测器,构成参考光束,测量无不凝气部分;第二分束镜的透射光束与第三分束镜的反射光束共同进入第三光束探测器,构成测量光束,测量混合气部分;两个光束探测器接受到的光强差值即为由两路径上水蒸气浓度差异形成;The reflected beam of the second beam splitter and the transmitted beam of the third beam splitter enter the second beam detector together to form a reference beam to measure the non-condensable part; the transmitted beam of the second beam splitter and the third beam splitter The reflected beams enter the third beam detector together to form a measurement beam and measure the gas mixture; the light intensity difference received by the two beam detectors is formed by the difference in water vapor concentration on the two paths;

第一分束镜将激光分成等光强的两束,最终分别进入光束探测器,以实现在滑动平台移动时仍能保持参考光束与测量光束等环境衰减,保证测量精度;The first beam splitter divides the laser into two beams of equal intensity, and finally enters the beam detector respectively, so as to maintain the environmental attenuation of the reference beam and the measurement beam when the sliding platform moves, and ensure the measurement accuracy;

所述的冷凝腔体可以为含不凝气蒸汽冷凝提供真空环境,以控制不凝气的成分,冷凝腔体开有多个法兰接口用于仪表与管路的连接,腔体各个壁面内均敷设电加热装置与保温棉;所述的半导体冷态通过方形法兰插入冷凝腔体,冷端在腔体内用于测试表面的控温,冷台四周包裹保温材料;The condensation chamber can provide a vacuum environment for the condensation of non-condensable steam to control the composition of non-condensable gas. The condensation chamber is provided with a plurality of flange interfaces for the connection between the instrument and the pipeline. Electric heating device and thermal insulation cotton are installed; the semiconductor cold state is inserted into the condensation cavity through a square flange, the cold end is used in the cavity to control the temperature of the test surface, and the cooling table is surrounded by thermal insulation materials;

所述的测试表面通过导热胶与半导体冷台连接以减小接触热阻,实现表面温度均匀;The test surface is connected with the semiconductor cold stage through thermal conductive glue to reduce contact thermal resistance and achieve uniform surface temperature;

所述的数据采集仪通过分析光束探测器采集到的光强差异,根据光束强度衰减与不凝气浓度间的关系计算出测量光束所经过路径处的不凝气浓度;随着测量光束从测试表面处向远处移动,测得的不同距离处的不凝气浓度数据被传回计算机;同时可以计算不凝气的浓度梯度,根据浓度梯度数据判断不凝气层的边界或范围。The data acquisition instrument calculates the non-condensable gas concentration at the path where the measurement beam passes by analyzing the light intensity difference collected by the beam detector, according to the relationship between the beam intensity attenuation and the non-condensable gas concentration; When the surface moves far away, the measured non-condensable gas concentration data at different distances are sent back to the computer; at the same time, the concentration gradient of the non-condensable gas can be calculated, and the boundary or range of the non-condensable gas layer can be judged according to the concentration gradient data.

本发明还公开了一种基于激光衰减的不凝气层测量方法:The invention also discloses a non-condensable gas layer measurement method based on laser attenuation:

首先,启动激光器,将滑动平台调节到合适位置,测量光束在测试表面一端,参考光束在蒸汽入口一端;打开计算机与数据采集仪,记录初始数据;First, start the laser, adjust the sliding platform to an appropriate position, the measurement beam is at one end of the test surface, and the reference beam is at the steam inlet end; turn on the computer and data acquisition instrument, and record the initial data;

然后,按照含不凝气蒸汽在真空腔体内测试表面上冷凝的相应过程开始冷凝实验;由于不凝气在实验之前通入,实验中认为靠近蒸汽入口端不凝气含量为零;每个实验工况达到稳态后,调节测量光束从近测试表面一侧向远处移动,记录移动轨迹上的光强数据。由于光束只在不凝气中发生衰减,衰减程度由计算机获取两光束探测器的接收光强得到,且根据贝尔-兰贝特定律,衰减程度与不凝气浓度之间存在以下关系:Then, the condensation experiment was started according to the corresponding process of condensation of non-condensable gas on the test surface in the vacuum chamber; since the non-condensable gas was introduced before the experiment, the non-condensable gas content near the steam inlet was considered to be zero in the experiment; each experiment After the working condition reaches a steady state, adjust the measurement beam to move from the side near the test surface to the far side, and record the light intensity data on the moving track. Since the beam is only attenuated in the non-condensable gas, the attenuation degree is obtained by obtaining the received light intensity of the two beam detectors by the computer, and according to the Bell-Lambert law, there is the following relationship between the attenuation degree and the non-condensable gas concentration:

Figure BDA0001993795910000041
Figure BDA0001993795910000041

α(ν)=S(T)×g(ν-ν0)×N, (2)α(ν)=S(T)×g(ν-ν 0 )×N, (2)

其中,I为接收光强,I0为入射光强,-α(ν)为不凝气的吸收系数,P为气体的总压强,L为吸收路径的长度(此处即为两倍的腔体内宽度);T为气体的温度,S(T)为线吸收强度,g(ν—ν0)为不凝气分子的归一化常数,N为单位压强、单位体积吸收气体的总分子数;Among them, I is the received light intensity, I 0 is the incident light intensity, -α(ν) is the absorption coefficient of the non-condensable gas, P is the total pressure of the gas, and L is the length of the absorption path (here, twice the cavity body width); T is the temperature of the gas, S(T) is the linear absorption intensity, g(ν—ν 0 ) is the normalization constant of the non-condensable gas molecules, and N is the total number of molecules absorbed by the gas per unit pressure and unit volume ;

根据理想气体状态方程,有:According to the ideal gas equation of state, we have:

Figure BDA0001993795910000042
Figure BDA0001993795910000042

其中,c是气体体积比,K为波尔兹曼常数;线吸收强度与不凝气分子的归一化常数可从数据库中获取,故不凝气浓度即为:Among them, c is the gas volume ratio, K is the Boltzmann constant; the normalization constant of the line absorption intensity and the non-condensable gas molecules can be obtained from the database, so the non-condensable gas concentration is:

Figure BDA0001993795910000051
Figure BDA0001993795910000051

其中,Et为第一光束探测器的接收光强(测量光束光强),Er为第二光束探测器的接收光强(参考光束光强)。Wherein, E t is the received light intensity (measurement beam light intensity) of the first beam detector, and E r is the received light intensity (reference beam light intensity) of the second light beam detector.

根据各处不凝气的浓度进而得到不凝气层边界位置和浓度梯度;当测量光束与参考光束紧贴时测量光束返回,重复多次以监测不凝气层的动态变化;According to the concentration of non-condensable gas everywhere, the boundary position and concentration gradient of non-condensable gas layer are obtained; when the measurement beam is close to the reference beam, the measurement beam returns, and it is repeated many times to monitor the dynamic change of the non-condensable gas layer;

最后,每个工况的测量重复三次取平均值作为最终的测量结果,记录并保存;待所有工况测量完成之后,关闭光学测量系统与数据采集与处理系统,结束冷凝实验,测量完成。Finally, the measurement of each working condition is repeated three times and the average value is taken as the final measurement result, which is recorded and saved; after the measurement of all working conditions is completed, the optical measurement system and the data acquisition and processing system are turned off, the condensation experiment is ended, and the measurement is completed.

本发明的有益效果是:The beneficial effects of the present invention are:

(1)利用了激光在不同浓度的水蒸气中衰减程度的不同,高精度的测量含不凝气蒸汽冷凝过程中不凝气层的分布特性,为进一步研究不凝气层对于传热传质的影响提供有效途径;(1) Using the different attenuation degrees of the laser in different concentrations of water vapor, the distribution characteristics of the non-condensable gas layer during the condensation process of the non-condensable gas steam can be measured with high precision. In order to further study the effect of the non-condensable gas layer on heat and mass transfer to provide an effective means of influence;

(2)可以实现不同冷凝压力、多种冷凝表面、多种不凝气成分和浓度下的不凝气层分布特性测量,为各种冷凝强化表面的强化效果提供参考依据;(2) It can realize the measurement of the distribution characteristics of the non-condensable gas layer under different condensation pressures, various condensation surfaces, various non-condensable gas components and concentrations, and provide a reference for the strengthening effect of various condensation-strengthening surfaces;

(3)属于非接触测量方法,避免了微探头取样等接触式测量法带来的对不凝气层的干扰,提高可靠性;(3) It is a non-contact measurement method, which avoids the interference to the non-condensable gas layer caused by contact measurement methods such as micro-probe sampling, and improves reliability;

(4)通过数据采集仪和计算机在线监测冷凝过程中不凝气层的变化过程。(4) The change process of the non-condensable gas layer during the condensation process is monitored online by the data acquisition instrument and the computer.

附图说明Description of drawings

图1是本发明的示意图;Fig. 1 is the schematic diagram of the present invention;

图2是可视化冷凝实验体剖面图。Figure 2 is a cross-sectional view of a visualized condensation experimental body.

图中:激光器1、第一分束镜2、第一反射镜3、第二反射镜4、第三反射镜5、第二分束镜6、第二光束探测器7、第三分束镜8、第一光束探测器9、导轨10、可视化冷凝实验体11、腔内反射镜12、数据采集仪13、计算机14、冷凝腔体15、半导体冷台16、保温材料17、测试表面18、布风板19、温度传感器20、光学视窗21、第二接收光路22、第一接收光路23。In the figure: laser 1, first beam splitter 2, first reflector 3, second reflector 4, third reflector 5, second beam splitter 6, second beam detector 7, third beam splitter 8. First beam detector 9, guide rail 10, visual condensation experiment body 11, intracavity mirror 12, data acquisition instrument 13, computer 14, condensation cavity 15, semiconductor cold stage 16, thermal insulation material 17, test surface 18, The air distribution plate 19 , the temperature sensor 20 , the optical window 21 , the second receiving light path 22 , and the first receiving light path 23 .

具体实施方式Detailed ways

下面结合附图对本发明做进一步详细的描述:Below in conjunction with accompanying drawing, the present invention is described in further detail:

如图1和2所示,在本发明的一个具体实施例中,基于激光衰减的不凝气层测量装置包括光学测量系统、可视化冷凝实验体、数据采集与处理系统;所述的可视化冷凝实验体包括腔内反射镜12和光学视窗21;所述的可视化冷凝实验体一侧装有光学视窗21,与所述一侧相对的另一侧内壁面装有腔内反射镜12;数据采集与处理系统包括第一光束探测器9、第二光束探测器7、数据采集仪13和计算机14;所述的光学测量系统由激光器1、第一分束镜2、第一反射镜3、第二反射镜4、第三反射镜5、第二分束镜6、第三分束镜8、导轨10组成;As shown in Figures 1 and 2, in a specific embodiment of the present invention, the non-condensable gas layer measurement device based on laser attenuation includes an optical measurement system, a visualized condensation experiment body, and a data acquisition and processing system; the visualized condensation experiment The body includes an intra-cavity mirror 12 and an optical window 21; one side of the visualized condensation experiment body is provided with an optical window 21, and the inner wall surface of the other side opposite to the one side is provided with an intra-cavity mirror 12; The processing system includes a first beam detector 9, a second beam detector 7, a data acquisition instrument 13 and a computer 14; the optical measurement system is composed of a laser 1, a first beam splitter 2, a first mirror 3, a second The reflector 4, the third reflector 5, the second beam splitter 6, the third beam splitter 8, and the guide rail 10 are composed;

第一分束镜2位于激光器1发射的激光光路上,且第一分束镜2的法线方向与所述激光光路存在夹角;第一分束镜2对激光进行反射和透射,第一反射镜3布置在第一分束镜2的透射光路上,且其法线方向与透射光路存在夹角;第二反射镜4布置在第一分束镜2的反射光路上,且其法线方向与反射光路存在夹角;第三反射镜5布置在第二反射镜4的反射光路上,且其法线方向与反射光路存在夹角;第二分束镜6、第三分束镜8分别布置在第一反射镜3、第三反射镜5的反射光路上,且其法线方向与分别与反射光路存在夹角;The first beam splitter 2 is located on the laser light path emitted by the laser 1, and the normal direction of the first beam splitter 2 has an included angle with the laser light path; the first beam splitter 2 reflects and transmits the laser light, and the first beam splitter 2 reflects and transmits the laser light. The mirror 3 is arranged on the transmitted light path of the first beam splitter 2, and its normal direction has an angle with the transmitted light path; the second mirror 4 is arranged on the reflected light path of the first beam splitter 2, and its normal There is an included angle between the direction and the reflected light path; the third reflector 5 is arranged on the reflected light path of the second reflector 4, and its normal direction has an included angle with the reflected light path; the second beam splitter 6, the third beam splitter 8 They are respectively arranged on the reflected light paths of the first reflector 3 and the third reflector 5, and their normal directions have an included angle with the reflected light paths respectively;

第一分束镜2的透射光束经第一反射镜3后进入第二分束镜6,第二分束镜6的反射光束经光学视窗21进入冷凝腔体15,经腔内反射镜12反射进入第二光束探测器7;第一分束镜2的反射激光经第二反射镜4、第三反射镜5后进入第三分束镜8,第三分束镜8的透射光束经第二分束镜6反射后进入第二光束探测器7,作为参考光束;The transmitted beam of the first beam splitter 2 enters the second beam splitter 6 after passing through the first reflector 3 , and the reflected beam of the second beam splitter 6 enters the condensation cavity 15 through the optical window 21 and is reflected by the intra-cavity reflector 12 Enter the second beam detector 7; the reflected laser light of the first beam splitter 2 enters the third beam splitter 8 after passing through the second mirror 4 and the third mirror 5, and the transmitted beam of the third beam splitter 8 passes through the second beam splitter 8. After being reflected by the beam splitter 6, it enters the second beam detector 7 as a reference beam;

第一分束镜2的反射光束经第二反射镜4、第三反射镜5后进入第三分束镜8,第三分束镜的8反射光束经光学视窗21进入冷凝腔体15,经腔内反射镜12反射进入第一光束探测器9;第一分束镜2的透射光束经第一反射镜3后进入第二分束镜6,第二分束镜6的透射光束经第三分束镜8反射后进入第一光束探测器9,作为测量光束;The reflected beam of the first beam splitter 2 enters the third beam splitter 8 after passing through the second mirror 4 and the third mirror 5, and the 8 reflected beams of the third beam splitter enter the condensation cavity 15 through the optical window 21, The intra-cavity mirror 12 reflects into the first beam detector 9; the transmitted beam of the first beam splitter 2 enters the second beam splitter 6 after passing through the first mirror 3, and the transmitted beam of the second beam splitter 6 passes through the third beam splitter 6. After being reflected by the beam splitter 8, it enters the first beam detector 9 as a measuring beam;

所述的第一光束探测器9与第二分束镜8安装在同一滑动平台上,第二光束探测器7与第三分束镜6安装在另一滑动平台上,两个滑动平台安装在导轨10上;两个滑动平台的位移均通过计算机14控制导轨10实现;计算机14通过数据采集仪13分别与第一光束探测器9和第二光束探测器7相连。The first beam detector 9 and the second beam splitter 8 are mounted on the same sliding platform, the second beam detector 7 and the third beam splitter 6 are mounted on another sliding platform, and the two sliding platforms are mounted on the same sliding platform. On the guide rail 10; the displacement of the two sliding platforms is realized by controlling the guide rail 10 through the computer 14;

在本发明的另一个具体实施例中,所述的第一分束镜将激光分成等光强的两束,最终分别进入光束探测器,以实现在滑动平台移动时仍能保持参考光束与测量光束等环境衰减,两个光束探测器接受到的光强差值即为由两路径上不凝气浓度差异形成,经过数据处理即可得到测量光束处的不凝气浓度。In another specific embodiment of the present invention, the first beam splitter divides the laser into two beams of equal intensity, and finally enters the beam detector respectively, so as to maintain the reference beam and the measurement when the sliding platform moves. When the light beam and other environments are attenuated, the difference in light intensity received by the two beam detectors is formed by the difference in the non-condensable gas concentration on the two paths. After data processing, the non-condensable gas concentration at the measurement beam can be obtained.

在本发明的另一个优选实施例中,所述的可视化冷凝实验体为测量主体还包括冷凝腔体15、半导体冷台16、保温材料17、测试表面18、布风板19和温度传感器20;所述的布风板19、温度传感器20位于冷凝腔体15的一个壁面上;半导体冷台16位于与所述的一个壁面相对的另一壁面上,布风板19设在蒸汽入口处以减小蒸汽流速,保证腔内蒸汽均匀,减小气体流动对冷凝的影响;腔内反射镜12法线方向与参考光束平行;温度传感器20插入冷凝腔体,用于监控腔内混合蒸汽温度。测试表面粘贴于半导体冷台的制冷面上,制冷面其余部分包覆保温材料。In another preferred embodiment of the present invention, the visualized condensation experimental body is a measurement body and further includes a condensation cavity 15, a semiconductor cold stage 16, a thermal insulation material 17, a test surface 18, an air distribution plate 19 and a temperature sensor 20; The air distribution plate 19 and the temperature sensor 20 are located on one wall surface of the condensation chamber 15; the semiconductor cold stage 16 is located on the other wall surface opposite to the one wall surface, and the air distribution plate 19 is located at the steam inlet to reduce the temperature. The steam flow rate ensures uniform steam in the cavity and reduces the effect of gas flow on condensation; the normal direction of the mirror 12 in the cavity is parallel to the reference beam; the temperature sensor 20 is inserted into the condensing cavity to monitor the temperature of the mixed steam in the cavity. The test surface is pasted on the cooling surface of the semiconductor cold table, and the rest of the cooling surface is covered with thermal insulation material.

优选的,所述的冷凝腔体15各个壁面设有电加热装置,防止蒸汽在壁面上冷凝。Preferably, each wall surface of the condensation cavity 15 is provided with an electric heating device to prevent steam from condensing on the wall surface.

优选的,所述的冷凝腔体15壁面还开有若干个法兰接口用于连接外部管路、设备或用于安装传感器。Preferably, the wall surface of the condensation cavity 15 is further provided with several flange interfaces for connecting external pipelines, equipment or for installing sensors.

优选的,所述的第一光束探测器9、第二光束探测器7可以检测入射光束的光强并由数据采集仪13输入计算机14查看、存储。Preferably, the first light beam detector 9 and the second light beam detector 7 can detect the light intensity of the incident light beam and input it into the computer 14 by the data acquisition instrument 13 for viewing and storage.

本发明的基于激光衰减的不凝气层测量方法如下所述:The non-condensable layer measurement method based on laser attenuation of the present invention is as follows:

首先,启动激光器,将滑动平台调节到合适位置,测量光束在测试表面一端,参考光束在蒸汽入口一端;打开计算机与数据采集仪,记录初始数据;First, start the laser, adjust the sliding platform to an appropriate position, the measurement beam is at one end of the test surface, and the reference beam is at the steam inlet end; turn on the computer and data acquisition instrument, and record the initial data;

然后,按照含不凝气蒸汽在真空腔体内测试表面上冷凝的相应过程开始冷凝实验;由于不凝气在实验之前通入,实验中认为靠近蒸汽入口端不凝气含量为零;每个实验工况达到稳态后,调节测量光束从近测试表面一侧向远处移动,记录移动轨迹上的光强数据。由于光束只在不凝气中发生衰减,衰减程度由计算机获取两光束探测器的接收光强得到,且根据贝尔-兰贝特定律,衰减程度与不凝气浓度之间存在以下关系:Then, the condensation experiment was started according to the corresponding process of condensation of non-condensable gas on the test surface in the vacuum chamber; since the non-condensable gas was introduced before the experiment, the non-condensable gas content near the steam inlet was considered to be zero in the experiment; each experiment After the working condition reaches a steady state, adjust the measurement beam to move from the side near the test surface to the far side, and record the light intensity data on the moving track. Since the beam is only attenuated in the non-condensable gas, the attenuation degree is obtained by obtaining the received light intensity of the two beam detectors by the computer, and according to the Bell-Lambert law, there is the following relationship between the attenuation degree and the non-condensable gas concentration:

Figure BDA0001993795910000071
Figure BDA0001993795910000071

α(ν)=S(T)×g(ν-ν0)×N,α(ν)=S(T)×g(ν-ν 0 )×N,

其中,I为接收光强,I0为入射光强,-α(ν)为不凝气的吸收系数,P为气体的总压强,L为吸收路径的长度(此处即为两倍的腔体内宽度);T为气体的温度,S(T)为线吸收强度,g(ν—ν0)为不凝气分子的归一化常数,N为单位压强、单位体积吸收气体的总分子数;Among them, I is the received light intensity, I 0 is the incident light intensity, -α(ν) is the absorption coefficient of the non-condensable gas, P is the total pressure of the gas, and L is the length of the absorption path (here, twice the cavity body width); T is the temperature of the gas, S(T) is the linear absorption intensity, g(ν—ν 0 ) is the normalization constant of the non-condensable gas molecules, and N is the total number of molecules absorbed by the gas per unit pressure and unit volume ;

根据理想气体状态方程,有:According to the ideal gas equation of state, we have:

Figure BDA0001993795910000081
Figure BDA0001993795910000081

其中,c是气体体积比,K为波尔兹曼常数;线吸收强度与不凝气分子的归一化常数可从数据库中获取,故不凝气浓度即为:Among them, c is the gas volume ratio, K is the Boltzmann constant; the normalization constant of the line absorption intensity and the non-condensable gas molecules can be obtained from the database, so the non-condensable gas concentration is:

Figure BDA0001993795910000082
Figure BDA0001993795910000082

其中,Et为第一光束探测器的接收光强(测量光束光强),Er为第二光束探测器的接收光强(参考光束光强)。Wherein, E t is the received light intensity (measurement beam light intensity) of the first beam detector, and E r is the received light intensity (reference beam light intensity) of the second light beam detector.

根据各处不凝气的浓度进而得到不凝气层边界位置和浓度梯度;当测量光束与参考光束紧贴时测量光束返回,重复多次以监测不凝气层的动态变化;According to the concentration of non-condensable gas everywhere, the boundary position and concentration gradient of non-condensable gas layer are obtained; when the measurement beam is close to the reference beam, the measurement beam returns, and it is repeated many times to monitor the dynamic change of the non-condensable gas layer;

最后,每个工况的测量重复三次取平均值作为最终的测量结果,记录并保存;待所有工况测量完成之后,关闭光学测量系统与数据采集与处理系统,结束冷凝实验,测量完成。Finally, the measurement of each working condition is repeated three times and the average value is taken as the final measurement result, which is recorded and saved; after the measurement of all working conditions is completed, the optical measurement system and the data acquisition and processing system are turned off, the condensation experiment is ended, and the measurement is completed.

Claims (7)

1. A non-condensable gas layer measuring device based on laser attenuation is characterized by comprising an optical measuring system, a visual condensation experimental body and a data acquisition and processing system;
the visual condensation experimental body comprises an intracavity reflector (12) and an optical window (21); an optical window (21) is arranged on one side of the visual condensation experimental body, and an intracavity reflector (12) is arranged on the inner wall surface of the other side opposite to the one side;
the data acquisition and processing system comprises a first light beam detector (9), a second light beam detector (7), a data acquisition instrument (13) and a computer (14);
the optical measurement system consists of a laser (1), a first beam splitter (2), a first reflector (3), a second reflector (4), a third reflector (5), a second beam splitter (6), a third beam splitter (8) and a guide rail (10);
the first beam splitter (2) is positioned on a laser light path emitted by the laser (1), and an included angle exists between the normal direction of the first beam splitter (2) and the laser light path; the first beam splitter (2) reflects and transmits laser, the first reflector (3) is arranged on a transmission light path of the first beam splitter (2), and an included angle exists between the normal direction of the first reflector and the transmission light path; the second reflecting mirror (4) is arranged on a reflecting light path of the first beam splitter (2), and an included angle exists between the normal direction of the second reflecting mirror and the reflecting light path; the third reflector (5) is arranged on the reflection light path of the second reflector (4), and the normal direction of the third reflector and the reflection light path form an included angle; the second beam splitter (6) and the third beam splitter (8) are respectively arranged on the reflection light paths of the first reflector (3) and the third reflector (5), and included angles exist between the normal direction of the second beam splitter and the reflection light paths respectively;
the transmitted light beam of the first beam splitter (2) enters the second beam splitter (6) after passing through the first reflector (3), the reflected light beam of the second beam splitter (6) enters the condensation cavity (15) through the optical window (21), and enters the second light beam detector (7) after being reflected by the intracavity reflector (12); the reflected laser of the first beam splitter (2) enters a third beam splitter (8) after passing through a second reflector (4) and a third reflector (5), and the transmitted beam of the third beam splitter (8) enters a second beam detector (7) after being reflected by a second beam splitter (6) and is used as a reference beam;
the reflected light beam of the first beam splitter (2) enters a third beam splitter (8) after passing through a second reflector (4) and a third reflector (5), the reflected light beam of the third beam splitter (8) enters a condensation cavity (15) through an optical window (21), and is reflected by an in-cavity reflector (12) to enter a first light beam detector (9); the transmitted light beam of the first beam splitter (2) enters the second beam splitter (6) after passing through the first reflector (3), and the transmitted light beam of the second beam splitter (6) enters the first light beam detector (9) after being reflected by the third beam splitter (8) to be used as a measuring light beam;
the first beam detector (9) and the second beam splitter (8) are arranged on the same sliding platform, the second beam detector (7) and the third beam splitter (6) are arranged on the other sliding platform, and the two sliding platforms are arranged on the guide rail (10); the displacement of the two sliding platforms is realized by controlling the guide rail (10) through a computer (14); the computer (14) is respectively connected with the first beam detector (9) and the second beam detector (7) through the data acquisition instrument (13).
2. The measuring device as claimed in claim 1, wherein the first beam splitter splits the laser beam into two beams of equal intensity, and the two beams of equal intensity finally enter the beam detectors respectively, so as to achieve the purpose of maintaining the attenuation of the reference beam and the measuring beam in the same environment when the sliding platform moves, the difference between the intensities received by the two beam detectors is formed by the difference between the concentrations of the non-condensable gases in the two paths, and the concentration of the non-condensable gas at the measuring beam can be obtained through data processing.
3. The measuring device according to claim 1, wherein the visual condensation experimental body is a measuring body and further comprises a condensation cavity (15), a semiconductor cold stage (16), a heat insulating material (17), a test surface (18), a wind distribution plate (19) and a temperature sensor (20); the air distribution plate (19) and the temperature sensor (20) are positioned on one wall surface of the condensation cavity (15); the semiconductor cooling platform (16) is positioned on the other wall surface opposite to the one wall surface, and the air distribution plate (19) is positioned at the steam inlet and used for reducing the influence of gas flow on condensation; the normal direction of the intracavity reflector (12) is parallel to the reference beam; the temperature sensor (20) measures the temperature of the mixed steam in the cavity, the testing surface is stuck on the refrigerating surface of the semiconductor cold stage, and the rest part of the refrigerating surface is coated with a heat-insulating material.
4. A measuring device according to claim 1, characterized in that each wall of the condensation chamber (15) is provided with electric heating means to prevent condensation of steam on the wall.
5. The measuring device according to claim 1, characterized in that the wall of the condensation chamber (15) is further provided with a plurality of flange interfaces for connecting external pipes, equipment or for installing sensors.
6. The measuring device according to claim 1, characterized in that the first beam detector (9) and the second beam detector (7) can detect the intensity of the incident beam and input the intensity into the computer (14) for viewing and storing by the data collector (13).
7. A laser attenuation based non-condensable gas layer measurement method using the apparatus of claim 1, wherein:
firstly, starting a laser (1), adjusting a sliding platform to a working position, wherein a measuring beam is arranged at one end of a test surface (18), and a reference beam is arranged at one end of a steam inlet; opening a computer (14) and a data acquisition instrument (13) and recording initial data;
then, starting a condensation experiment according to a corresponding process of condensation of the non-condensable gas-containing vapor on the test surface (18) in the condensation chamber (15); after each experiment working condition reaches a stable state, adjusting the measuring light beam to move from one side close to the test surface (18) to a far side, recording light intensity data on a moving track, returning the measuring light beam when the measuring light beam is tightly attached to the reference light beam, and repeating for multiple times to monitor the dynamic change of the non-condensable layer;
finally, repeating the measurement of each working condition for three times, taking the average value as a final measurement result, and recording and storing the average value; and after all the working conditions are measured, closing the optical measuring system and the data acquisition and processing system, ending the condensation experiment, and finishing the measurement.
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