CN106547189A - Reflective digital holographic microscopic imaging system and method based on pulse laser - Google Patents
Reflective digital holographic microscopic imaging system and method based on pulse laser Download PDFInfo
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- CN106547189A CN106547189A CN201611049448.8A CN201611049448A CN106547189A CN 106547189 A CN106547189 A CN 106547189A CN 201611049448 A CN201611049448 A CN 201611049448A CN 106547189 A CN106547189 A CN 106547189A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 28
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 238000012546 transfer Methods 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 238000001093 holography Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims 1
- 230000004313 glare Effects 0.000 abstract description 7
- 238000013461 design Methods 0.000 abstract description 4
- 230000006870 function Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 210000001367 artery Anatomy 0.000 description 2
- 238000009647 digital holographic microscopy Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 210000003462 vein Anatomy 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
- G03H1/0866—Digital holographic imaging, i.e. synthesizing holobjects from holograms
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
- G03H2001/005—Adaptation of holography to specific applications in microscopy, e.g. digital holographic microscope [DHM]
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Abstract
The invention discloses a kind of reflective digital holographic microscopic imaging system and method based on pulse laser, the system includes imaging optical subsystem and the Synchronization Control subsystem for controlling imaging optical subsystem work, and imaging optical subsystem includes pulse laser, laser attenuator assembly, transfer, light beam transfer device and the holographic imaging apparatus for setting gradually；Synchronization Control subsystem includes industrial control host and isochronous controller；The method comprising the steps of：First, build holographic microscopic imaging system；2nd, the Synchronization Control of pulse laser and digital camera；3rd, obtain hologram data；4th, specimen surface three-dimensional appearance hologram image shows.It is of the invention novel in design, by the Synchronization Control to pulse laser and digital camera, high frequency micro vibration sample hologram is obtained, light path interference is completed using four beam splitters, reflection veiling glare is caused to enter hologram by itself part in avoiding light path, hologram quality is high.
Description
Technical field
The invention belongs to digital holographic microscopic imaging technical field, and in particular to a kind of based on the reflective of pulse laser
Digital holographic microscopic imaging system and method.
Background technology
The Digital Holography developed rapidly with computer and improving for digital camera technology, not only inherits
Holographic technique can record, reproduce the advantage of light field phase, and realize light field record, storage and the total digitalization for reproducing,
Thus be widely used.Wherein holographic technique and microtechnique blends the digital holographic microscopy to be formed, and its application covers shape
Looks measurement, microcircuit detection, grain size analyses, biological cell observation, deformation and vibration measurement, and the neck such as parts defects detection
Domain, and achieve some achievements；Wherein reflective digital holographic microscopic imaging technology is mainly used in the three of small items surface
Dimension topography measurement, as by accurate measuring three-dimensional morphology, such as object structures feature, surface face type, sphere can be obtained
The multinomial important index such as circularity, surface roughness, surface smoothness and percent ripple is simultaneously because digital holographic microscopic imaging skill
The unique advantage that art has, can measure with certain depth even pattern of micrometer level depth etc..But, when need shoot or
Person's observation is change frequency micro-vibration or during fluctuation faster, and common continuous laser instrument cannot be just met to dynamically catching
Catch, in addition, the maximum difficulty of current Digital holographic microscopy application is how to effectively improve digital reproduction picture quality, numeral
The noise of image is mainly derived from the acquisition of image and transmitting procedure, and existing research is carried out for the noise of various digital pictures
During analysis, it is proposed that corresponding algorithm is eliminated to the noise of digital picture, and process is complicated.Therefore one kind is needed to realize
The reflective digital holographic microscopic imaging system and method for the surface topography of measurement high-frequency micro-vibration animal body, by with pulse laser
Device cannot catch its relative snapshot hologram as the time of exposure of digital camera is long and time of exposure is relatively short to make up
When the again inadequate problem of light-inletting quantity, while changing conventional photographic imaging device, increase beam splitter and complete light path interference, reduce light path
In cause reflection veiling glare to enter hologram by itself part, the noise that initial data brings before reducing hologram data reconstruct.
The content of the invention
The technical problem to be solved is for above-mentioned deficiency of the prior art, there is provided a kind of to be based on pulse
The reflective digital holographic microscopic imaging system of laser instrument, which is novel in design rationally, and simple structure is completed using four beam splitters
Light path is interfered, it is to avoid causes reflection veiling glare to enter hologram by itself part in light path, hologram quality is high, is easy to promote
Use.
To solve above-mentioned technical problem, the technical solution used in the present invention is：Reflective digital based on pulse laser
Holographic microscopic imaging system, it is characterised in that：Including imaging optical subsystem and for controlling the imaging optical subsystem work
The Synchronization Control subsystem of work, pulse laser that the imaging optical subsystem includes setting gradually, laser attenuator assembly, steering
Device, light beam transfer device and holographic imaging apparatus, the holographic imaging apparatus include the first beam splitter, are arranged on the first beam splitting
The second beam splitter in mirror object light light path and the 3rd beam splitter being arranged in the first beam splitter reference light light path, object light is through the
Two beam splitters and microcobjective are radiated on the solid sample of high frequency micro vibration, and sample is arranged on sample fixed station, reference light
It is radiated on the first reflecting mirror with the perpendicular setting of reference light light beam through the 3rd beam splitter, on sample, is reflected back the second beam splitting
The 4th beam splitters of the reference light Jing conjunction Shu Jinhang that the 3rd beam splitter is reflected back in the object light of mirror and the first reflecting mirror interferes to form complete
Breath figure, the 4th beam splitter are closed and are provided with the light path of beam for gathering the digital camera of the hologram；
The isochronous controller that the Synchronization Control subsystem is included industrial control host and connected with industrial control host outfan, numeral
The input of the input and pulse laser of camera is connected with the outfan of isochronous controller, the outfan of digital camera with
The input of industrial control host connects.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that：Described first
Beam splitter, the second beam splitter, the 3rd beam splitter and the 4th beam splitter are obliquely installed with light beam bearing of trend, the first beam splitter with
The parallel setting of 4th beam splitter, the second beam splitter and the parallel setting of the 3rd beam splitter, the first beam splitter and the second beam splitter
Perpendicular setting.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that：Described first
Beam splitter adopts the splitting ratio of transmitted light and reflected light for 9：1 beam splitter.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that：The laser
Attenuator includes the half-wave plate and Glan prism of the light source bearing of trend for being successively set on pulse laser.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that：The steering
Device by adjustment beam direction the second reflecting mirror and the 3rd speculum group into.
The above-mentioned reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that：The light beam
Transfer device includes the beam expanding lens for setting gradually and collimating mirror.
Meanwhile, the invention also discloses a kind of method and step it is simple, reasonable in design based on the reflective of pulse laser
The method of digital holographic microscopic imaging, it is characterised in that the method is comprised the following steps：
Step one, build holographic microscopic imaging system：Adjustment sample detection surface, installs the optics on optical table
Imaging subsystems carry out holographic imaging to specimen surface, by pulse laser and digital camera connection isochronous controller, while will
Digital camera is connected with industrial control host, initializes the Synchronization Control subsystem；
The Synchronization Control of step 2, pulse laser and digital camera, process are as follows：
Step 201, the time of exposure that digital camera is arranged using industrial control host, arrange pulse laser using isochronous controller
Second delay time of first delay time and digital camera of device；
Step 202, opening pulse laser preheating make pulse laser glisten, while work, arteries and veins are treated in digital camera time delay
Rush the first delay time arranged in step 201 being consumed during laser instrument is preheated, the process of work is treated in digital camera time delay
The second delay time arranged in middle consumption step 201；
Step 203, the laser beam of isochronous controller control pulse laser launch laser beam when reaching pulse width, while
Control digital camera carries out single exposure；
Step 3, acquisition hologram data, process are as follows：
Step 301, laser attenuator assembly are rotated and are decayed to the laser beam of pulse laser transmitting in step 203, are declined
Laser beam after subtracting is adjusted the direction of propagation of laser beam by transfer, then Jing light beam transfer devices reach the first beam splitter；
The laser beam for receiving is divided into object light and reference light by step 302, the first beam splitter, and object light is through the second beam splitting
Mirror, after a branch of transmission, Jing microcobjectives are radiated on sample, and another beam is reflexed to outside light path；Reference light through the 3rd beam splitter,
The first reflecting mirrors of Jing reflection after a branch of transmission, another beam are reflexed to outside light path；The object light that sample is reflected back is through closing Shu Zuoyong's
4th beam splitter, a branch of to be reflected towards the reference interference of light that digital camera and the first reflecting mirror are reflected back, another beam object light is transmitted to
Outside light path；
Step 303, digital camera are recorded to the hologram formed after interference in step 302, and the holography that will be recorded
Diagram data is transmitted to industrial control host；
Step 4, specimen surface three-dimensional appearance hologram image show：First, industrial control host adopts fresnel transform reconstruction method
The hologram data that digital collected by camera is returned is reconstructed, the amplitude and phase data of hologram is obtained；Then, industry control master
Machine adopts Phase- un- wrapping and the algorithm of phase compensation to reproduce the distribution of hologram plane phase；Finally, shown by industrial control host
Specimen surface three-dimensional appearance hologram image.
The present invention has advantages below compared with prior art：
1st, the reflective digital holographic microscopic imaging system based on pulse laser that the present invention is adopted, simple structure, if
Meter is reasonable, and it is convenient to realize.
2nd, the holographic imaging apparatus that the present invention is adopted complete light path using four beam splitters, reflective micro- complete with traditional
Only compared with three beam splitters in breath light path, it is to avoid the veiling glare of the roundtrip caused by itself part in light path enters number
Word camera, reduces the hologram data noise of digital camera collection, improves the quality of hologram, and using effect is good.
3rd, the holographic imaging apparatus that the present invention is adopted compensate the light path of reference light in reference path using the first reflecting mirror,
The relevant efficiency of laser is increased, solves the problems, such as that pulse laser coherence distance is short.
4th, the reflective digital holographic microscopic imaging method based on pulse laser that the present invention is adopted, step are simple, lead to
Isochronous controller is crossed to pulse laser and the Synchronization Control of digital camera, high frequency micro vibration solid sample surface transient is obtained not
Hologram in the same time, is then reconstructed the phase and amplitude of micro-vibration sample hologram, and reproduces hologram by industrial computer
Plane phase is distributed, and three-dimensional appearance hologram image shows, certainty of measurement is high.
In sum, the present invention is novel in design rationally, by the Synchronization Control to pulse laser and digital camera, obtains
High frequency micro vibration sample hologram, completes light path interference using four beam splitters, it is to avoid caused instead by itself part in light path
Penetrate veiling glare and enter hologram, hologram quality is high, is easy to promote the use of.
Below by drawings and Examples, technical scheme is described in further detail.
Description of the drawings
Fig. 1 is the structural representation of the reflective digital holographic microscopic imaging system based on pulse laser that the present invention is adopted
Figure.
Fig. 2 is the structural representation of reflective digital holographic microscopic imaging system in prior art..
Fig. 3 is method flow block diagram of the present invention based on the reflective digital holographic microscopic imaging method of pulse laser.
Description of reference numerals:
1-pulse laser；2-half-wave plate；3-Glan prism；
4-the second reflecting mirror；5-the three reflecting mirror；6-beam expanding lens；
7-collimating mirror；8-the first beam splitter；9-the second beam splitter；
10-microcobjective；11-sample；12-sample fixed station；
13-the three beam splitter；14-the first reflecting mirror；15-the four beam splitter；
16-digital camera；17-isochronous controller；18-industrial computer；
19-the four reflecting mirror.
Specific embodiment
As shown in figure 1, the reflective digital holographic microscopic imaging system based on pulse laser of the present invention, including
Imaging optical subsystem and the Synchronization Control subsystem for controlling the imaging optical subsystem work, optical imagery
System includes pulse laser 1, laser attenuator assembly, transfer, light beam transfer device and the holographic imaging apparatus for setting gradually,
The holographic imaging apparatus include the first beam splitter 8, the second beam splitter 9 being arranged in 8 object light light path of the first beam splitter and set
The 3rd beam splitter 13 in 8 reference light light path of the first beam splitter is put, object light is irradiated through the second beam splitter 9 and microcobjective 10
On the solid sample 11 of high frequency micro vibration, sample 11 is arranged on sample fixed station 12, and reference light is through the 3rd beam splitter 13
It is radiated on the first reflecting mirror 14 with the perpendicular setting of reference light light beam, on sample 11, is reflected back the object light of the second beam splitter 9
Shu Jinhang is closed with the 4th beam splitters of reference light Jing 15 that the 3rd beam splitter 13 is reflected back on the first reflecting mirror 14 to interfere to form holography
Figure, the 4th beam splitter 15 are closed and are provided with the light path of beam for gathering the digital camera 16 of the hologram；
The isochronous controller that the Synchronization Control subsystem is included industrial control host 18 and connected with 18 outfan of industrial control host
17, the input of the input and pulse laser 1 of digital camera 16 is connected with the outfan of isochronous controller 17, digital phase
The outfan of machine 16 is connected with the input of industrial control host 18.
In actually used, isochronous controller 17 is signaled to by industrial control host 18, the control pulse of isochronous controller 17 swashs
Light device 1 and digital camera 16 carry out the shooting of hologram, and the image information of collection is transmitted to control main frame 18 by digital camera 16
Row is processed, and recovers 11 surface transient appearance of sample, in the present embodiment, solid sample of the sample 11 using high frequency micro vibration, due to
The interference distance of the pulse laser that pulse laser 1 sends is limited, if reference light is excessive with the optical path difference of object light, cannot have
Effect is interfered, and the first reflecting mirror 14 is for reference light light filling path difference, raising interference efficiency.
As shown in figure 1, in the present embodiment, first beam splitter 8, the second beam splitter 9, the 3rd beam splitter 13 and the 4th point
Beam mirror 15 is obliquely installed with light beam bearing of trend, the first beam splitter 8 and the 15 parallel setting of the 4th beam splitter, the second beam splitter
9 and the 13 parallel setting of the 3rd beam splitter, the 9 perpendicular setting of the first beam splitter 8 and the second beam splitter.
In actually used, first beam splitter 8, the second beam splitter 9, the 3rd beam splitter 13 and the 4th beam splitter 15 with
Light beam bearing of trend is at 45 ° to be obliquely installed, and facilitates optical path adjusting, the first beam splitter 8 and the 15 parallel setting of the 4th beam splitter, the
The 13 parallel setting of two beam splitters 9 and the 3rd beam splitter, the 9 perpendicular setting of the first beam splitter 8 and the second beam splitter, light beam transmission
The laser that device is transmitted is divided into object light and reference light through the first beam splitter 8, and object light is through the second beam splitter 9, Yi Shutou
After penetrating, Jing microcobjectives 10 are radiated on sample 11, and another beam is reflexed to outside light path, reduce light disturbance；Reference light is through the 3rd
Beam splitter 13, the total reflection of the first reflecting mirrors of Jing 14 light filling path difference after a branch of transmission, another beam are reflexed to outside light path, are reduced veiling glare and are done
Disturb；Fourth beam splitter 15 of the object light that sample 11 is reflected back through conjunction Shu Zuoyong, a branch of digital camera 16 that is reflected towards are anti-with first
The reference interference of light that mirror 14 is reflected back is penetrated, another beam object light is transmitted to outside light path, reduces the impact of veiling glare, improve holography
The quality of figure.
It should be noted that as shown in Fig. 2 traditional holographic microscopic imaging system, the laser Jing that pulse laser 1 sends
It is object light and reference light to cross after expanding and collimating by 8 points of the first beam splitter, and object light is through the second beam splitter 9, a branch of by micro-
Object lens 10 are reflected through the surface of test specimen 11 after amplifying, and again the second beam splitters of Jing 9 are reflected towards the side of digital camera 16 to the beam object light
To；Reference light is being reflected towards digital camera 16 direction through 14 light filling path difference of the first reflecting mirror by the 3rd beam splitter 13, with thing
Light meets and interferes to form hologram, but object light is reflected into the second beam splitter 9 through the 4th reflecting mirror 19 in light path
In, a reverse light beam can be produced at the second beam splitter 9 and enter into the 3rd beam splitter 13, the reverse light beam is through first
After reflecting mirror 14, and reflexed in digital camera 16 by the 3rd beam splitter 13, there is a unnecessary reflected light and enter digital phase
Machine 16 affects the quality of hologram.
In the present embodiment, increase beam splitter, it is to avoid the roundtrip caused by itself part in light path it is spuious
Light enters hologram, improves the quality of hologram.
In the present embodiment, first beam splitter 8 adopts the splitting ratio of transmitted light and reflected light for 9：1 beam splitter.
In the present embodiment, first beam splitter 8 adopts the splitting ratio of transmitted light and reflected light for 9：1 beam splitter be for
Deliberately strengthen the light intensity of object light, facilitate the debugging of light path, improve hologram quality.
In the present embodiment, the laser attenuator assembly includes being successively set on the half of the light source bearing of trend of pulse laser 1
Wave plate 2 and Glan prism 3.
In the present embodiment, pulse laser 1 sends high-power polarized light, polarized light is rotated using half-wave plate 2
And decay is to coordinate digital camera 16 to gather, the transmitance and polarization optical purity of polarized light are increased using Glan prism 3.
In the present embodiment, second reflecting mirror 4 and threeth reflecting mirror 5 group of the transfer by adjustment beam direction
Into.
In the present embodiment, when holographic microscopic imaging system is imaged, need to carry out on optical table, in order to reduce holography
The area occupied of micro imaging system, need to be changed adaptive optics platform to the light path propagated, using the of perpendicular setting
Direction of beam propagation in light path is changed 180 ° by two-mirror 4 and the 3rd reflecting mirror 5, practical and simple to operate.
In the present embodiment, the light beam transfer device includes the beam expanding lens 6 for setting gradually and collimating mirror 7.
In the present embodiment, the diameter of the laser beam that 6 expansible 3rd reflecting mirror 5 of beam expanding lens is launched is while can reduce sharp
The angle of divergence of light beam, maintains the collimation of light beam using collimating mirror 7, provides good light source for imaging system.
The method of the reflective digital holographic microscopic imaging based on pulse laser as shown in Figure 3, comprises the following steps：
Step one, build holographic microscopic imaging system：The adjustment detection of sample 11 surface, installs the light on optical table
Learning imaging subsystems carries out holographic imaging to 11 surface of sample, and pulse laser 1 and digital camera 16 are connected isochronous controller
17, while digital camera 16 is connected with industrial control host 18, initialize the Synchronization Control subsystem；
The Synchronization Control of step 2, pulse laser and digital camera, process are as follows：
Step 201, the time of exposure that digital camera 16 is arranged using industrial control host 18, arrange arteries and veins using isochronous controller 17
Rush the second delay time of first delay time and digital camera 16 of laser instrument 1；
It should be noted that the time delay that the delay time that pulse laser 1 is started working is started working with digital camera 16
Time is different, is respectively provided with the second delay time of first delay time and digital camera 16 of pulse laser 1, be in order that
The moment that the moment that first delay time of pulse laser 1 terminates is terminated with the second delay time of digital camera 16 is identical,
Ensure that pulse laser 1 and digital camera 16 start simultaneously at work.
Step 202, the opening preheating of pulse laser 1 make pulse laser 1 glisten, while work is treated in 16 time delay of digital camera
Make, the first delay time that pulse laser 1 is arranged in consuming step 201 during preheating, 16 time delay of digital camera treat work
The second delay time arranged in step 201 is consumed during work；
Step 203, the laser beam of the control pulse laser 1 of isochronous controller 17 launch laser beam when reaching pulse width,
Controlling digital camera 16 simultaneously carries out single exposure；
Step 3, acquisition hologram data, process are as follows：
Step 301, laser attenuator assembly are rotated and are decayed to the laser beam that pulse laser in step 203 1 is launched, and are declined
Laser beam after subtracting is adjusted the direction of propagation of laser beam by transfer, then Jing light beam transfer devices reach the first beam splitter 8；
The laser beam for receiving is divided into object light and reference light by step 302, the first beam splitter 8, and object light is through the second beam splitting
Mirror 9, after a branch of transmission, Jing microcobjectives 10 are radiated on sample 11, and another beam is reflexed to outside light path；Reference light is through the 3rd point
Beam mirror 13, after a branch of transmission, the first reflecting mirrors of Jing 14 reflect, and another beam is reflexed to outside light path；The object light that sample 11 is reflected back is passed through
The 4th beam splitter 15 of Shu Zuoyong is closed, it is a branch of to be reflected towards the reference interference of light that digital camera 16 and the first reflecting mirror 14 are reflected back,
Another beam object light is transmitted to outside light path；
It should be noted that first beam splitter 8 adopts the splitting ratio of transmitted light and reflected light for 9：1 beam splitter is
In order to obtain stronger object light and faint reference light.
Step 303, digital camera 16 are recorded to the hologram formed after interference in step 302, and complete by what is recorded
Breath diagram data is transmitted to industrial control host 18；
Step 4, specimen surface three-dimensional appearance hologram image show：First, industrial control host 18 is rebuild using fresnel transform
Method is reconstructed to the hologram data that the collection of digital camera 16 is returned, and obtains the amplitude and phase data of hologram；Then, work
Control main frame 18 adopts Phase- un- wrapping and the algorithm of phase compensation to reproduce the distribution of hologram plane phase；Finally, by industry control master
Machine 18 shows 11 three-dimensional surface shape hologram image of sample.
In the present embodiment, the hologram that industrial control host 18 is returned to the collection of digital camera 16 using fresnel transform reconstruction method
Data are reconstructed, the phase data that hologram is tried to achieve according to the arc-tangent value at multiple angle be original phase is compressed to it is positive and negativeIt
Between, as the sign of the molecule denominator of arctan function has corresponded to the sign of phase sinusoidal function and cosine function respectively,
And SIN function and cosine function are the continuous functions with 2 π as cycle, industrial control host 18 adopts Phase- un- wrapping and phase compensation
Algorithm by phase place positive and negativeBetween codomain be converted to codomain of the phase place between positive and negative 2 π, reproduce hologram plane phase
Distribution, shows 11 three-dimensional surface shape hologram image of sample by industrial control host 18, and imaging effect is good.
The above, is only presently preferred embodiments of the present invention, not the present invention is imposed any restrictions, every according to the present invention
Any simple modification, change and equivalent structure change that technical spirit is made to above example, still fall within skill of the present invention
In the protection domain of art scheme.
Claims (7)
1. the reflective digital holographic microscopic imaging system based on pulse laser, it is characterised in that：Including optical imagery subsystem
System and the Synchronization Control subsystem for controlling the imaging optical subsystem work, the imaging optical subsystem are included successively
The pulse laser (1) of setting, laser attenuator assembly, transfer, light beam transfer device and holographic imaging apparatus, it is described it is holographic into
The second beam splitter (9) for include the first beam splitter (8) as device, being arranged in the first beam splitter (8) object light light path and it is arranged on
The 3rd beam splitter (13) in first beam splitter (8) reference light light path, object light is through the second beam splitter (9) and microcobjective (10)
It is radiated on the solid sample (11) of high frequency micro vibration, on sample fixed station (12), reference light is through for sample (11)
Three beam splitters (13) are radiated on the first reflecting mirror (14) with the perpendicular setting of reference light light beam, and is reflected back on sample (11)
The 4th beam splitters of reference light Jing of the 3rd beam splitter (13) are reflected back in the object light and the first reflecting mirror (14) of two beam splitters (9)
(15) close Shu Jinhang to interfere to form hologram, the 4th beam splitter (15) is closed and is provided with for gathering the hologram in the light path of beam
Digital camera (16)；
The isochronous controller that the Synchronization Control subsystem is included industrial control host (18) and connected with industrial control host (18) outfan
(17), outfan phase of the input of the input of digital camera (16) and pulse laser (1) with isochronous controller (17)
Connect, the outfan of digital camera (16) is connected with the input of industrial control host (18).
2., according to the reflective digital holographic microscopic imaging system based on pulse laser described in claim 1, its feature exists
In：First beam splitter (8), the second beam splitter (9), the 3rd beam splitter (13) and the 4th beam splitter (15) are extended with light beam
Direction is obliquely installed, the first beam splitter (8) setting parallel with the 4th beam splitter (15), the second beam splitter (9) and the 3rd beam splitting
The parallel setting of mirror (13), the first beam splitter (8) and the perpendicular setting of the second beam splitter (9).
3. according to the reflective digital holographic microscopic imaging system based on pulse laser described in claim 1 or 2, its feature
It is：First beam splitter (8) adopts the splitting ratio of transmitted light and reflected light for 9：1 beam splitter.
4., according to the reflective digital holographic microscopic imaging system based on pulse laser described in claim 3, its feature exists
In：The laser attenuator assembly includes the half-wave plate (2) and Glan rib of the light source bearing of trend for being successively set on pulse laser (1)
Mirror (3).
5., according to the reflective digital holographic microscopic imaging system based on pulse laser described in claim 3, its feature exists
In：The transfer is made up of second reflecting mirror (4) and the 3rd reflecting mirror (5) in adjustment beam direction.
6., according to the reflective digital holographic microscopic imaging system based on pulse laser described in claim 3, its feature exists
In：The light beam transfer device includes the beam expanding lens (6) for setting gradually and collimating mirror (7).
7. a kind of method for carrying out reflective digital holographic microscopic imaging using system as claimed in claim 3, it is characterised in that
The method is comprised the following steps：
Step one, build holographic microscopic imaging system：Adjustment sample (11) detection surface, installs the optics on optical table
Imaging subsystems carry out holographic imaging to sample (11) surface, by pulse laser (1) and the synchronous control of digital camera (16) connection
Device (17) processed, while digital camera (16) is connected with industrial control host (18), initializes the Synchronization Control subsystem；
The Synchronization Control of step 2, pulse laser and digital camera, process are as follows：
Step 201, the time of exposure that digital camera (16) is arranged using industrial control host (18), are arranged using isochronous controller (17)
Second delay time of first delay time and digital camera (16) of pulse laser (1)；
Step 202, opening pulse laser (1) preheating make pulse laser (1) glisten, while work is treated in digital camera (16) time delay
Make, the first delay time that pulse laser (1) is arranged in consuming step 201 during preheating, digital camera (16) time delay
The second delay time arranged during step 201 is consumed during treating work；
Step 203, the laser beam of isochronous controller (17) control pulse laser (1) launch laser beam when reaching pulse width,
Controlling digital camera (16) simultaneously carries out single exposure；
Step 3, acquisition hologram data, process are as follows：
Step 301, laser attenuator assembly are rotated and are decayed to the laser beam that pulse laser in step 203 (1) is launched, decay
Laser beam afterwards is adjusted the direction of propagation of laser beam by transfer, then Jing light beam transfer devices reach the first beam splitter (8)；
The laser beam for receiving is divided into object light and reference light by step 302, the first beam splitter (8), and object light is through the second beam splitter
(9), after a branch of transmission, Jing microcobjectives (10) are radiated on sample (11), and another beam is reflexed to outside light path；Reference light is through
Three beam splitters (13), the first reflecting mirrors of Jing (14) reflection after a branch of transmission, another beam are reflexed to outside light path；Sample (11) is reflected back
Object light reflect through closing the 4th beam splitter (15) of Shu Zuoyong, a branch of digital camera (16) and the first reflecting mirror (14) of being reflected towards
The reference interference of light returned, another beam object light are transmitted to outside light path；
Step 303, digital camera (16) are recorded to the hologram formed after interference in step 302, and the holography that will be recorded
Diagram data is transmitted to industrial control host (18)；
Step 4, specimen surface three-dimensional appearance hologram image show：First, industrial control host (18) is using fresnel transform reconstruction method
The hologram data that digital camera (16) collection is returned is reconstructed, the amplitude and phase data of hologram is obtained；Then, work
Control main frame (18) reproduces the distribution of hologram plane phase using the algorithm of Phase- un- wrapping and phase compensation；Finally, by industry control
Main frame (18) shows sample (11) three-dimensional surface shape hologram image.
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