CN109307481B - High-speed sensing confocal microscopic measurement method - Google Patents
High-speed sensing confocal microscopic measurement method Download PDFInfo
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- CN109307481B CN109307481B CN201811343690.5A CN201811343690A CN109307481B CN 109307481 B CN109307481 B CN 109307481B CN 201811343690 A CN201811343690 A CN 201811343690A CN 109307481 B CN109307481 B CN 109307481B
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Abstract
The invention relates to a high-speed sensing confocal microscopic measurement method, and belongs to the technical field of optical imaging and detection. The method comprises the steps of subtracting data groups on two sides of a confocal axial characteristic curve from each other in a staggered mode, dividing the data groups into a sensing characteristic curve by adding, determining an axial scanning interval as a staggered quantity when a sample is scanned axially, subtracting a maximum light intensity value and a second maximum light intensity value in axial scanning data after scanning is finished, dividing the maximum light intensity value and the second maximum light intensity value into an adding value, and accurately calculating the position of an extreme point of the confocal axial characteristic curve by using the sensing characteristic curve. The axial scanning interval set when the invention is used for scanning a sample is the size of the dislocation quantity, and the axial scanning interval is large, so that the imaging efficiency of the existing confocal measuring method can be obviously improved; meanwhile, the sensing characteristic curve of the method is very sensitive to the change of the axial position of the sample, so that the accuracy of calculating the position of the extreme point of the confocal axial characteristic curve by the method is higher than that of the existing confocal measuring method. The invention provides a new technical approach for the field of confocal imaging/detection.
Description
Technical Field
The invention relates to a high-speed sensing confocal microscopic measurement method. The method can be used for measuring and positioning three-dimensional fine structures, micro steps, micro grooves, integrated circuit line widths, surface appearances, surfaces and the like. Belongs to the technical field of optical imaging and detection.
Background
The concept of confocal microscopy was first proposed by american scholars m.minsky in 1957 and obtained US patent No. US3013467 in 1961. The point light source, the point object and the point detector are arranged at conjugate positions corresponding to each other by the confocal microscope, so that a point illumination and point detection microscopic imaging system with unique chromatographic capability in optical microscopic imaging is formed.
The basic principle of the confocal microscope is shown in fig. 1, light emitted by a light source is focused on the surface of a measured sample by an objective lens through a spatial filtering pinhole and a spectroscope, measuring light which is reflected by the measured sample and carries sample information returns along the original path, and the measuring light from the sample is finally focused into a pinhole arranged in front of a photoelectric detector through the reflection of the spectroscope. The photoelectric detector is used for point detection and mainly receives measuring light from the focal point of the objective lens, and return light outside the focal point is blocked by the pinhole. When the object is located at the focal plane F, the light intensity received by the photodetector is the largest, and when the object deviates from the focal plane F, the reflected light is focused at a certain position in front of or behind the pinhole, and at this time, the photodetector only receives a small portion of light energy, that is, the light intensity detected by the object when out of focus is weaker than that at the focal plane, so that the confocal axial response curve 13 shown in fig. 2 can be detected by the photodetector, and the height position of the sample can be measured by obtaining the position of the extreme point of the confocal axial response curve.
Common methods for obtaining the position of the extreme point of the confocal axial response curve include a maximum value method, a centroid method, a gaussian function fitting method and a polynomial fitting method. The accuracy of the extreme point position of the curve obtained by the methods is influenced by the number of effective data points on a Main lobe (Main lobe) of the axial characteristic curve, and the accuracy of obtaining the extreme point position is seriously influenced if the number of the effective data points is too small. Increasing the number of effective points on the axial characteristic curve Main lobe to improve the accuracy will cause the reduction of the scanning efficiency. Therefore, the conventional method cannot achieve both accuracy and speed.
Disclosure of Invention
The invention aims to solve the problem that the prior art can not take the precision and the speed into consideration, and provides a high-speed sensing confocal microscopic measurement method, wherein the axial scanning interval set by the method during sample scanning is larger than that of the conventional confocal measurement method, so that the imaging efficiency of the conventional confocal measurement method can be obviously improved; meanwhile, the sensing characteristic curve obtained by the method is very sensitive to the change of the axial position of the sample, so that the sensitivity and the precision of the method for calculating the extreme point position of the confocal characteristic curve are higher than those of the conventional confocal measuring method, and the method can simultaneously improve the acquisition precision and the scanning efficiency of the extreme point position.
The purpose of the invention is realized by the following technical scheme.
A high-speed sensing confocal microscopic measurement method is divided into two cases due to different ways of acquiring sensing characteristic curves, and the steps of the two cases are respectively introduced below.
Case one includes the following steps:
determining the maximum value M of the confocal axial intensity response value, and dividing the confocal axial intensity response value into a left side data group and a right side data group by taking M as a boundary;
step two, keeping the right side data set still, translating the left side data set along the transverse coordinate S to obtain a left side right shift data set, and intersecting the left side right shift data set and the right side data set;
step three, respectively carrying out interpolation processing on the same abscissa point on the right side data group and the left side right shift data group, subtracting two data points with the same abscissa in the two groups of data after interpolation processing, and then dividing the data points by the added value of the data points so as to obtain a left side right shift subtraction and addition data group;
and fourthly, subtracting the left side right phase shift by adding data sections which are near zero values in the data group and sensitive to axial displacement change, and performing polynomial fitting to obtain a left side right shift sensing characteristic curve and a left side right shift sensing characteristic equation zL(I)＝amIm+am-1Im-1+…+a2I2+a1I+a0Will be equation zL(I) Constant term of (a)0Replacing the left side edge with S/2 to finally obtain a left side edge right shift sensing characteristic equation as zL(I)＝amIm+am-1Im-1+…+a2I2+a1I+S/2；
Step five, axially scanning the tested sample by taking the translation amount S as an axial scanning interval to obtain a light intensity maximum value point I in axial scanning data23And the light intensity second maximum value point I in the axial scanning data24；
Sixthly, comparing the maximum light intensity point I in the axial scanning data23And the light intensity second maximum value point I in the axial scanning data24Respective corresponding axial position when I24Corresponding axial position greater than I23At the corresponding axial position, will I25＝(I23-I24)/(I23+I24) Substituting the left side edge right shift sensing characteristic equation, and calculating to obtain h as zL(I25) (ii) a When I is23Corresponding axial position greater than I24At the corresponding axial position, will I25＝(I24-I23)/(I24+I23) Substituting the left side edge right shift sensing characteristic equation, and calculating to obtain h as zL(I25)；
Step seven, comparing the maximum value point I of the light intensity in the axial scanning data23And the light intensity second maximum value point I in the axial scanning data24And (4) subtracting h obtained in the sixth step from the larger position in the two axial positions to obtain the accurate position f of the focal point of the confocal measuring system at the corresponding axial positions.
Case two includes the following steps:
determining the maximum value M of the confocal axial intensity response value, and dividing the confocal axial intensity response value into a left side data group and a right side data group by taking M as a boundary;
keeping the left side data set still, enabling the right side data set to translate along the transverse coordinate-S to obtain a right side left-shift data set, and enabling the right side left-shift data set and the left side data set to be intersected;
step three, respectively carrying out interpolation processing on the same abscissa point on the left side data group and the right side left shift data group, subtracting two data points with the same abscissa in the two groups of data after interpolation processing, and then dividing the data points by the added value of the data points so as to obtain a right side left shift subtraction and addition data group;
step four, taking the left phase shift of the right side to subtract and divide the data section which is near the zero value in the addition data group and is sensitive to the axial displacement to carry out polynomial fitting to obtain a left phase shift sensing characteristic curve of the right side and a left phase shift sensing characteristic equation z of the right sideR(I)＝amIm+am-1Im-1+…+a2I2+a1I+a0Will be equation zR(I) Constant term of (a)0Replacing the left side of the right side of the left side of the right side of the left side ofR(I)＝amIm+am-1Im-1+…+a2I2+a1I-S/2；
Step five, taking the translation amount S as the axial directionAxially scanning the tested sample at the scanning interval to obtain the maximum light intensity point I in the axially scanned data23And the light intensity second maximum value point I in the axial scanning data24；
Sixthly, comparing the maximum light intensity point I in the axial scanning data23And the light intensity second maximum value point I in the axial scanning data24Respective corresponding axial position when I24Corresponding axial position greater than I23At the corresponding axial position, will I25＝(I23-I24)/(I23+I24) Substituting the right side left shift sensing characteristic equation, and calculating to obtain h as zR(I25) (ii) a When I is23Corresponding axial position greater than I24At the corresponding axial position, will I25＝(I24-I23)/(I24+I23) Substituting the right side left shift sensing characteristic equation, and calculating to obtain h as zR(I25)；
Step seven, comparing the maximum value point I of the light intensity in the axial scanning data23And the light intensity second maximum value point I in the axial scanning data24And (4) subtracting h obtained in the sixth step from the smaller position in the two axial positions to obtain the accurate position f of the focal point of the confocal measuring system at the corresponding axial positions.
In the first and second cases of the invention, the translation amount S of the data set along the transverse coordinate is determined by the requirements of measurement precision and measurement efficiency.
In the fourth step of the first case and the second case of the invention, the processing process is accelerated by directly performing straight line fitting on the data segments.
Advantageous effects
1. The operation of obtaining the sensing characteristic equation through fitting only needs to be carried out once and stored for one set of equipment, and the stored sensing characteristic equation is called when the sample is actually scanned;
2. in the actual scanning of the sample, the translation quantity S is taken as an axial scanning interval, and the S is larger than the axial scanning interval of the traditional confocal measuring method, so that the scanning efficiency of the invention is higher than that of the traditional confocal measuring method; ,
3. the invention obtains the sensing characteristic curve by translating data points at two sides of the maximum confocal axial intensity response value, subtracting the data points and dividing the data points by adding, and the sensing characteristic curve is very sensitive to the change of the axial position of the sample, so that the position of the extreme point of the confocal axial response calculated by using the sensing characteristic curve is more sensitive and has higher precision than that of the common method. Therefore, the invention improves the measurement efficiency and the measurement precision at the same time.
Drawings
FIG. 1 is a schematic view of a confocal microscope;
FIG. 2 is a confocal microscope axial response theory plot;
FIG. 3 is a schematic diagram of a sensing characteristic equation obtained by right shifting left side data according to the high-speed sensing confocal microscopic measurement method of the present invention;
FIG. 4 is a schematic diagram of a sensing characteristic equation obtained by left shifting right side data according to the high-speed sensing confocal microscopic measurement method of the present invention;
FIG. 5 shows the sensing characteristic equation obtained by right shifting left side data in the high-speed sensing confocal microscopy method at the maximum light intensity point I23Axial position data is less than light intensity second maximum value point I24Calculating a schematic diagram of the position of the confocal axial response extreme point during axial position data;
FIG. 6 shows the sensing characteristic equation obtained by right shifting left side data in the high-speed sensing confocal microscopy method at the maximum light intensity point I23Axial position data is larger than light intensity second maximum value point I24Calculating a schematic diagram of the position of the confocal axial response extreme point during axial position data;
FIG. 7 shows the sensing characteristic equation obtained by left shift of right side data in the high-speed sensing confocal microscopy method of the invention at the maximum light intensity point I23Axial position data is less than light intensity second maximum value point I24Calculating a schematic diagram of the position of the confocal axial response extreme point during axial position data;
FIG. 8 is a graph of the sensing characteristic equation at the maximum light intensity point I obtained by left shift of the right side data according to the high-speed sensing confocal microscopy method of the present invention23Axial position data is larger than light intensity second maximum value point I24Calculating confocal axial response extremum point position during axial position dataA schematic diagram of (a);
FIG. 9 is a diagram of confocal microscopy imaging of a high-speed sensing confocal microscopy method according to an embodiment of the present invention;
fig. 10 is a confocal beam scanning imaging example of the high-speed sensing confocal microscopy method of the invention.
Wherein, 1-laser, 2-lens, 3-spatial filtering pinhole, 4-collimating mirror, 5-spectroscope, 6-objective, 7-sample, 8-workbench, 9-condenser, 10-pinhole, 11-photoelectric detector, 12-computer measurement and control system, 13-confocal axial response curve, 14-confocal axial intensity response value, 15-left side data group, 16-right side data group, 17-left side right shift data group, 18-left side right shift subtraction by addition data group, 19-left side right shift sensing characteristic curve, 20-right side left shift data group, 21-right side left shift subtraction by addition data group, 22-right side left shift sensing characteristic curve, 23-light intensity maximum value point I in axial scanning data.2324-light intensity second maximum value point I in axial scanning data24、25-I23And I24Divided by the addition data, 26-two-dimensional beam scanner.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Example 1
The embodiment of the invention is realized based on the confocal microscopic imaging device shown in fig. 9, and the working process is as follows: laser emitted by the laser 1 sequentially passes through the lens 2, the spatial filtering pinhole 3, the collimating mirror 4 and the spectroscope 5, then is focused on the surface of a sample 7 by the objective 6, reflected light reflected by the surface of the sample 7 passes through the objective 6 again and is reflected to the condenser 9 by the spectroscope 5, the condenser 9 focuses the reflected light to a pinhole 10 positioned at the focal position of the condenser, a photoelectric detector 11 positioned behind the pinhole 10 is used for detecting intensity information of a corresponding confocal axial position of a transmitted pinhole, and when the sample 7 slightly moves near the focal surface of the objective 6 along the optical axis direction, the photoelectric detector 11 can detect a confocal axial intensity response value 14. In FIG. 9, the sample x-y-z is moved by the stage 8, and the signal of the photodetector is processed by the computer measurement and control system 12.
As shown in FIG. 3, the left data of the high-speed sensing confocal micro-measurement method is shifted to the right to obtain the sensing characteristic equation zL(I) The process comprises the following steps:
step one, as shown in fig. 9, a certain measurement point N (x, y) on a sample 7 is selected, so that an objective lens 6 focuses a light spot to axially scan the measurement point, and meanwhile, a photodetector 11 detects a confocal axial intensity response value 14 of the axial position of the sample, which is denoted as i (z), as shown in fig. 3, where x, y, and z are coordinates of the horizontal position and the axial height position of the sample measurement point, respectively;
step two, as shown in fig. 3, determining a maximum value M of the confocal axial intensity response value 14, and dividing the confocal axial intensity response value into a left side data group 15 and a right side data group 16 by taking M as a boundary;
step three, as shown in fig. 3, keeping the right side data group 16 still, and translating the left side data group 15 along the transverse coordinate S to obtain a left side right shift data group 17, wherein the left side right shift data group 17 and the right side data group 16 are intersected;
step four, as shown in fig. 3, the same abscissa point interpolation processing is respectively carried out on the right side data group 16 and the left side right shift data group 17, two data points with the same abscissa in the two groups of data after the interpolation processing are subtracted, and then the subtracted data points are divided by the added value of the two data points to obtain a left side right shift subtracted and divided added data group 18;
step five, taking left side right phase shift to subtract and divide the data section (such as AB range shown in figure 3) which is near the zero value of the added data group 18 and sensitive to the axial shift to carry out cubic polynomial fitting to obtain a left side right shift sensing characteristic curve 19 and a sensing characteristic equation zL(I)＝a3I3+a2I2+a1I+a0Will be equation zL(I) The constant term of the sensor is replaced by S/2 to finally obtain a sensing characteristic equation zL(I)＝a3I3+a2I2+a1I+S/2。
As shown in FIG. 4, the right side data of the high-speed sensing confocal micro-measurement method is shifted to the left to obtain a sensing characteristic equation zR(I) The process comprises the following steps:
step one, as shown in fig. 9, a certain measurement point N (x, y) on a sample 7 is selected, so that an objective lens 6 focuses a light spot to axially scan the measurement point, and meanwhile, a photodetector 11 detects a confocal axial intensity response value 14 of the axial position of the sample, which is denoted as i (z), as shown in fig. 4, where x, y, and z are coordinates of the horizontal position and the axial height position of the sample measurement point, respectively;
step two, as shown in fig. 4, determining a maximum value M of the confocal axial intensity response value 14, and dividing the confocal axial intensity response value into a left side data group 15 and a right side data group 16 by taking M as a boundary;
step three, as shown in fig. 4, the left side data set 15 is kept still, the right side data set 16 is translated along the transverse coordinate-S to obtain a right side left-shift data set 20, and the right side left-shift data set 20 and the left side data set 15 are converged;
step four, as shown in fig. 4, the same abscissa point interpolation processing is respectively performed on the left side data group 15 and the right side left shift data group 20, two data points with the same abscissa in the two groups of data after interpolation processing are subtracted and then divided by the added value thereof, and a right side left shift subtraction-divided added data group 21 is obtained;
step five, taking the right side left shift to subtract and divide the data section (such as AB range shown in figure 4) which is near the zero value of the added data group 21 and sensitive to the axial shift to carry out cubic polynomial fitting to obtain a right side left shift sensing characteristic curve 22 and a sensing characteristic equation zR(I)＝a3I3+a2I2+a1I+a0Will be equation zR(I) The constant term of the sensor is replaced by-S/2 to finally obtain a sensing characteristic equation zR(I)＝a3I3+a2I2+a1I-S/2。
Example 2
Sensing characteristic equation z obtained by right shifting left side data by adopting method of the inventionL(I) The specific steps for performing the single point height measurement are described below in conjunction with FIG. 9:
step one, selecting a certain measuring point N (x, y) on a sample 7, enabling an objective 6 to focus a light spot to axially scan the measuring point at an axial interval S, and simultaneously detecting a confocal axial intensity response value of each axial position of the sample by a photoelectric detector 11, as shown in fig. 5 and 6, wherein x, y and z are three-dimensional position coordinates of the sample measuring point respectively;
step two, as shown in fig. 5 and 6, finding the maximum light intensity point I in the axial scanning data of the confocal axial intensity response value23And the light intensity second maximum value point I in the axial scanning data24；
Step three, comparing the maximum light intensity point I in the axial scanning data23And the light intensity second maximum value point I in the axial scanning data24The axial position of each is as I24Corresponding axial position greater than I23At the corresponding axial position, the subtraction is divided by the addition data I as shown in FIG. 525＝(I23-I24)/(I23+I24) Substitution into zL(I)＝a3I3+a2I2+a1I + S/2, and h is calculated to be zL(I25) By use of I24The corresponding axial position is reduced by h so as to accurately obtain the height position f of the measured point N (x, y); when I is23Corresponding axial position greater than I24At the corresponding axial position, the subtraction is divided by the addition data I as shown in FIG. 625＝(I24-I23)/(I24+I23) Substitution into zL(I)＝a3I3+a2I2+a1I + S/2, and h is calculated to be zL(I25) By use of I23And the corresponding axial position is reduced by h so as to accurately obtain the height position f of the measured point N (x, y).
Example 3
Under the scanning of a sample workbench, a sensing characteristic equation z obtained by right shifting of left side data of the method is adoptedL(I) The measurement procedure for performing point-by-point scanning imaging is described below in conjunction with fig. 9:
step one, moving a workbench 8, and recording a horizontal position coordinate N (x, y) of a measured point of a sample 7;
secondly, axially feeding the objective lens 6 relative to the sample 7 at axial intervals S along the optical axis direction, and simultaneously measuring a confocal axial intensity response value of each axial feeding position by using the photoelectric detector 11;
step three, extracting the maximum value point I of the light intensity in the axial scanning data of the confocal axial intensity response value measured in the step two by using the computer measurement and control system 1223And the light intensity second maximum value point I in the axial scanning data24；
Step four, comparing the maximum light intensity point I in the axial scanning data23And the light intensity second maximum value point I in the axial scanning data24The axial position of each is as I24Corresponding axial position greater than I23At the corresponding axial position, the subtraction is divided by the addition data I as shown in FIG. 525＝(I23-I24)/(I23+I24) Substitution into zL(I)＝a3I3+a2I2+a1I + S/2, and h is calculated to be zL(I25) By use of I24The corresponding axial position is reduced by h so as to accurately obtain the height position f of the measured point N (x, y); when I is23Corresponding axial position greater than I24At the corresponding axial position, the subtraction is divided by the addition data I as shown in FIG. 625＝(I24-I23)/(I24+I23) Substitution into zL(I)＝a3I3+a2I2+a1I + S/2, and h is calculated to be zL(I25) By use of I23The corresponding axial position is reduced by h so as to accurately obtain the height position f of the measured point N (x, y);
moving the workbench along the horizontal direction to enable the sample 7 to be located at the position of the point to be measured at the next known position, and repeating the second step, the second step and the fourth step until the height positions of all the points to be measured are measured;
and step six, constructing a three-dimensional geometric structure of the sample 7 to be detected by utilizing height position information corresponding to all horizontal position points of the sample 7.
Example 4
Under the scanning of a sample workbench, a sensing characteristic equation z obtained by right shifting of left side data of the method is adoptedL(I) The measurement steps for performing layer-by-layer scan imaging are described below with reference to fig. 9:
step one, focusing an objective lens 6 on a layer of defocusing interface slightly higher (lower) than a sample 7 to be measured, moving a workbench 8, measuring photoelectric signal values of all points to be measured by a photoelectric detector 11 in the interface, and simultaneously recording horizontal position coordinates N (x, y) of the points to be measured of all the samples 7;
secondly, axially feeding the objective lens 6 relative to the sample 7 at axial intervals S along the optical axis direction, then accurately moving the worktable 8 according to the horizontal position point coordinates recorded in the first step, respectively aligning the focusing light spot of the objective lens to each horizontal position point, and simultaneously detecting the photoelectric signal values of the series of position points by using the photoelectric detector 11;
step three, repeating the step two to enable the tested sample to be completely covered in the axial depth direction;
extracting a photoelectric signal value measured by the photoelectric detector 11 corresponding to each feeding position point in the axial depth direction of the sample corresponding to each measuring point, so as to obtain a confocal axial intensity response value of each measuring point;
step five, extracting the maximum light intensity point I in the axial scanning data of the confocal axial intensity response value of the measuring point by using the computer measurement and control system 1223And the light intensity second maximum value point I in the axial scanning data24；
Step six, comparing the maximum value I of the intensity response23And the second largest value of intensity response I24The axial position of each is as I24Corresponding axial position greater than I23At the corresponding axial position, the subtraction is divided by the addition data I as shown in FIG. 525＝(I23-I24)/(I23+I24) Substitution into zL(I)＝a3I3+a2I2+a1I + S/2, and h is calculated to be zL(I25) By use of I24The corresponding axial position is reduced by h so as to accurately obtain the height position f of the measured point N (x, y); when I is23Corresponding axial position greater than I24At the corresponding axial position, the subtraction is divided by the addition data I as shown in FIG. 625＝(I24-I23)/(I24+I23) Substitution into zL(I)＝a3I3+a2I2+a1I + S/2, calculationTo yield h ═ zL(I25) By use of I23The corresponding axial position is reduced by h so as to accurately obtain the height position f of the measured point N (x, y);
step seven, repeating the step five to the step six until all the points to be measured are processed;
and step eight, constructing a three-dimensional geometric structure of the sample 7 to be detected by utilizing the height position information corresponding to all the horizontal position points of the sample 7.
Example 5
Under confocal beam scanning, a sensing characteristic equation z is obtained by left shifting right side data of the methodR(I) The measurement steps for performing layer-by-layer scan imaging are described below with reference to fig. 10:
step one, focusing an objective lens 6 on a layer of defocusing interface slightly higher (lower) than a sample 7 to be measured, two-dimensionally scanning the sample in a horizontal plane through a two-dimensional light beam scanner 26, measuring photoelectric signal values of all points to be measured by a photoelectric detector 11 in the interface, and simultaneously recording horizontal position coordinates N (x, y) of all the points to be measured;
step two, axially feeding the objective lens 6 relative to the sample 7 at axial intervals S along the optical axis direction, then two-dimensionally scanning the sample by the two-dimensional light beam scanner 26 in the horizontal plane at the horizontal position point coordinates recorded in the step one, and simultaneously measuring the photoelectric signal values of the series of position points by the photoelectric detector 11;
step three, repeating the step two to enable the tested sample to be completely covered in the axial depth direction;
extracting a photoelectric signal value measured by the photoelectric detector 11 corresponding to each feeding position point in the axial depth direction of the sample corresponding to each measuring point, so as to obtain a confocal axial intensity response value of each measuring point;
step five, extracting the maximum light intensity point I in the axial scanning data of the confocal axial intensity response value of the measuring point by using the computer measurement and control system 1223And the light intensity second maximum value point I in the axial scanning data24；
Step six, comparing the maximum value I of the intensity response23And the second largest value of intensity response I24Each corresponding axial directionSize of position, when I24Corresponding axial position greater than I23At the corresponding axial position, the subtraction is divided by the addition data I as shown in FIG. 725＝(I23-I24)/(I23+I24) Substitution into zR(I)＝a3I3+a2I2+a1I-S/2, calculated to h ═ zR(I25) By use of I23The corresponding axial position is reduced by h so as to accurately obtain the height position f of the measured point N (x, y); when I is23Corresponding axial position greater than I24At the corresponding axial position, the subtraction is divided by the addition data I as shown in FIG. 825＝(I24-I23)/(I24+I23) Substitution into zR(I)＝a3I3+a2I2+a1I-S/2, calculated to h ═ zR(I25) By use of I24The corresponding axial position is reduced by h so as to accurately obtain the height position f of the measured point N (x, y);
step seven, repeating the step five to the step six until all the points to be measured are processed;
and step eight, constructing a three-dimensional geometric structure of the sample 7 to be detected by utilizing the height position information corresponding to all the horizontal position points of the sample 7.
While the invention has been described in connection with specific embodiments thereof, it will be understood that it is not intended to limit the scope of the invention, which is defined by the appended claims, any modifications that may be made based on the claims.
Claims (6)
1. The high-speed sensing confocal microscopic measurement method is characterized by comprising the following steps: the method comprises the following steps:
step one, determining the maximum value M of the confocal axial intensity response value (14), and dividing the confocal axial intensity response value (14) into a left side data group (15) and a right side data group (16) by taking M as a boundary;
step two, keeping the right side data set (16) still, enabling the left side data set (15) to translate along the transverse coordinate S to obtain a left side right movement data set (17), and enabling the left side right movement data set (17) and the right side data set (16) to be intersected;
step three, respectively carrying out interpolation processing on the same abscissa point on the right side data group (16) and the left side right shift data group (17), subtracting two data points with the same abscissa in the two groups of data after interpolation processing, and then dividing the two data points by the added value of the data points so as to obtain a left side right phase shift subtraction and addition data group (18);
fourthly, the left side right phase shift is subtracted and divided by the data section which is near a zero value in the addition data group (18) and sensitive to the axial displacement change, and polynomial fitting is carried out to obtain a left side right shift sensing characteristic curve (19) and a left side right shift sensing characteristic equation zL(I)＝amIm+am-1Im-1+…+a2I2+a1I+a0Will be equation zL(I) Constant term of (a)0Is replaced by S/2 to finally obtain zL(I)＝amIm+am-1Im-1+…+a2I2+a1I+S/2；
Step five, axially scanning the tested sample by taking the translation amount S as an axial scanning interval to obtain a light intensity maximum value point I in axial scanning data23(23) And the light intensity second maximum value point I in the axial scanning data24(24)；
Sixthly, comparing the maximum light intensity point I in the axial scanning data23(23) And the light intensity second maximum value point I in the axial scanning data24(24) Respective corresponding axial position when I24Corresponding axial position greater than I23At the corresponding axial position, will I25＝(I23-I24)/(I23+I24) Substituting the left side edge right shift sensing characteristic equation, and calculating to obtain h as zL(I25) (ii) a When I is23Corresponding axial position greater than I24At the corresponding axial position, will I25＝(I24-I23)/(I24+I23) Substituting the left side edge right shift sensing characteristic equation, and calculating to obtain h as zL(I25)；
Step seven, comparing the maximum value point I of the light intensity in the axial scanning data23(23) And axial scan numberAccording to the maximum light intensity point I24(24) And (4) subtracting h obtained in the sixth step from the larger position in the two axial positions to obtain the accurate position f of the focal point of the confocal measuring system at the corresponding axial positions.
2. The high-speed sensing confocal microscopic measurement method is characterized by comprising the following steps: the method comprises the following steps:
step one, determining the maximum value M of the confocal axial intensity response value (14), and dividing the confocal axial intensity response value (14) into a left side data group (15) and a right side data group (16) by taking M as a boundary;
step two, keeping the left side data set (15) still, enabling the right side data set (16) to translate along the transverse coordinate-S to obtain a right side left-shift data set (20), and enabling the right side left-shift data set (20) and the left side data set (15) to be intersected;
thirdly, respectively carrying out interpolation processing on the same abscissa point on the left side data group (15) and the right side left shift data group (20), subtracting two data points with the same abscissa in the two groups of data after interpolation processing, and then dividing the two data points by the added value of the data points so as to obtain a right side left shift subtraction-addition data group (21);
fourthly, the right side left shift is subtracted to be divided by the data section which is near a zero value in the addition data group (21) and sensitive to the axial shift change, and polynomial fitting is carried out to obtain a right side left shift sensing characteristic curve (22) and a right side left shift sensing characteristic equation zR(I)＝amIm+am-1Im-1+…+a2I2+a1I+a0Will be equation zR(I) Constant term of (a)0Replacing the left side of the right side of the left side of the right side of the left side ofR(I)＝amIm+am-1Im-1+…+a2I2+a1I-S/2；
Step five, axially scanning the tested sample by taking the translation amount S as an axial scanning interval to obtain a light intensity maximum value point I in axial scanning data23(23) And the light intensity second maximum value point I in the axial scanning data24(24)；
Step six, comparingComparing the maximum value point I of light intensity in axial scanning data23(23) And the light intensity second maximum value point I in the axial scanning data24(24) Respective corresponding axial position when I24Corresponding axial position greater than I23At the corresponding axial position, will I25＝(I23-I24)/(I23+I24) Substituting the right side left shift sensing characteristic equation, and calculating to obtain h as zR(I25) (ii) a When I is23Corresponding axial position greater than I24At the corresponding axial position, will I25＝(I24-I23)/(I24+I23) Substituting the right side left shift sensing characteristic equation, and calculating to obtain h as zR(I25)；
Step seven, comparing the maximum value point I of the light intensity in the axial scanning data23(23) And the light intensity second maximum value point I in the axial scanning data24(24) And (4) subtracting h obtained in the sixth step from the smaller position in the two axial positions to obtain the accurate position f of the focal point of the confocal measuring system at the corresponding axial positions.
3. The high-speed sensing confocal microscopy method of claim 1 or 2, wherein: and in the second step, the translation amount S of the data set along the transverse coordinate is determined by the requirements of measurement precision and measurement efficiency.
4. The high-speed sensing confocal microscopy method of claim 1 or 2, wherein: in the fourth step, the processing process is accelerated by directly performing straight line fitting on the data segment.
5. An apparatus for performing a high-speed sensing confocal microscopy method as defined in claim 1 or 2, wherein: the method comprises the following steps: the device comprises a laser (1), a lens (2), a spatial filtering pinhole (3), a collimating mirror (4), a spectroscope (5), an objective lens (6), a sample (7), a workbench (8), a condenser lens (9), a pinhole (10), a photoelectric detector (11) and a computer measurement and control system (12); laser emitted by a laser (1) sequentially passes through a lens (2), a spatial filtering pinhole (3), a collimating mirror (4) and a spectroscope (5), then is focused on the surface of a sample (7) by an objective lens (6), reflected light reflected by the surface of the sample (7) passes through the objective lens (6) again and then is reflected to a condenser lens (9) by the spectroscope (5), the condenser lens (9) focuses the reflected light to a pinhole (10) positioned at the focal position of the pinhole, a photoelectric detector (11) arranged behind the pinhole (10) is used for detecting intensity information of a corresponding confocal axial position of the transmission pinhole (10), and when the sample (7) slightly moves near the focal plane of the objective lens along the direction of a confocal optical axis, the photoelectric detector (11) can detect an axial intensity response value (14); the workbench drives the sample to move in x-y-z three-dimensional mode, and the computer measurement and control system (12) processes signals of the photoelectric detector.
6. The apparatus of claim 5, wherein: further comprising a two-dimensional beam scanner (26); the two-dimensional light beam scanner (26) is arranged between the spectroscope (5) and the objective lens (6).
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6300618B1 (en) * | 1997-12-12 | 2001-10-09 | Yokogawa Electric Corporation | High speed 3-dimensional confocal microscopic equipment |
| CN103471524A (en) * | 2013-09-27 | 2013-12-25 | 北京理工大学 | Vertex curvature radius measurement method for confocal paraboloid |
| CN104568390A (en) * | 2015-01-12 | 2015-04-29 | 北京理工大学 | Bilateral dislocation differential confocal measuring method |
| CN104568389A (en) * | 2015-01-12 | 2015-04-29 | 北京理工大学 | Bilateral dislocation differential confocal element parameter measuring method |
| CN104567676B (en) * | 2014-12-29 | 2017-08-29 | 北京理工大学 | Bilateral fitting differential confocal measurement method |
-
2018
- 2018-11-13 CN CN201811343690.5A patent/CN109307481B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6300618B1 (en) * | 1997-12-12 | 2001-10-09 | Yokogawa Electric Corporation | High speed 3-dimensional confocal microscopic equipment |
| CN103471524A (en) * | 2013-09-27 | 2013-12-25 | 北京理工大学 | Vertex curvature radius measurement method for confocal paraboloid |
| CN104567676B (en) * | 2014-12-29 | 2017-08-29 | 北京理工大学 | Bilateral fitting differential confocal measurement method |
| CN104568390A (en) * | 2015-01-12 | 2015-04-29 | 北京理工大学 | Bilateral dislocation differential confocal measuring method |
| CN104568389A (en) * | 2015-01-12 | 2015-04-29 | 北京理工大学 | Bilateral dislocation differential confocal element parameter measuring method |
Non-Patent Citations (1)
| Title |
|---|
| "高速传感共焦成像方法";孙迎宾等;《第十七届全国光学测试学术交流会摘要集》;20180820;第248页 * |
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