CN110017792A - A kind of novel optical curved surface two-dimensional measurement method and its measuring system - Google Patents
A kind of novel optical curved surface two-dimensional measurement method and its measuring system Download PDFInfo
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- CN110017792A CN110017792A CN201910278894.3A CN201910278894A CN110017792A CN 110017792 A CN110017792 A CN 110017792A CN 201910278894 A CN201910278894 A CN 201910278894A CN 110017792 A CN110017792 A CN 110017792A
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- light source
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The present invention provides a kind of novel optical curved surface two-dimensional measurement system, and the system comprises light source detection end, detector, platform to be measured and computers；The light source detection end includes several laser light sources, and several laser light sources are hemispherical to be uniformly distributed to form light source detection end；The light source detection end is set to above platform to be measured, and putting on the platform to be measured has determinand；The detector is placed in right above platform to be measured, and the top being located in light source detection end, and is connect with computer；The laser light source emits incident ray to determinand, and the detector receives the reflection light reflected through determinand and generates facula information；The computer receives the facula information from detector, and the surface face shape information of corresponding measured object is generated through processor analysis.The measuring system can acquire entire surface information with one-shot measurement, avoid multiple spot multi collect data in measurement process；It is simple with structure, it is at low cost, and the advantages of accurate measurement result can be obtained.
Description
Technical field
The present invention relates to field of optical measurements, and in particular to a kind of novel optical curved surface two-dimensional measurement method and its measurement system
System.
Background technique
The surface shape measurement mode of optical surface is broadly divided into contact type measurement and two kinds of non-contact measurement mode.Contact
Measurement is mainly coordinate measuring machine method and contourgraph method, and main formula contacts tested optical surface acquisition data by mechanical probe and believes
It ceases, is easy to scratch optical surface in measurement process, and need point-to-point measurement, measuring speed is slow.Conventional contactless measurement is main
There are microlens array method, structural light three-dimensional method, coherence tomography, several measurement methods of interferometry, non-contact measurement is connected to each other
Touch measurement accuracy is high, and speed is fast, low to measurement environmental requirement, but optical path is complicated, and development is not yet mature, so more grind
Study carefully value.
In traditional several non-contact measurement modes, microlens array method be placed before tested curved surface one by etc.
Aperture, parfocal lens microlens array arranged according to certain rules, incident corrugated is divided into multiple by microlens array method
Measured zone before wavelet makes each wavelet forefoot area in detector detection range, by the measurement of all wavelet forefoot areas
As a result fusion can reconstruct entire wavefront measurements, and wavefront phase information is modulated by tested curved surface, is ultimately imaged
Onto ccd detector, the hot spot pattern an of proper alignment is formed, tested curved surface face shape is calculated according to wave front restoration method.
But this method will receive the limitation of lens array number in measurement process, influence its number of samples and precision, generate error very
To be wavefront reply mistake.
Structural light three-dimensional method by project structured light to measured surface, recycle camera chain acquisition different angle by being tested
The optical pattern of curved surface modulation is converted into the seat of each point on tested curved surface by the method processing modulation pattern of image procossing
Mark data information.Structural light three-dimensional method moves in measurement process without platform, reduces unnecessary error, but the measurement needs
System calibrating is carried out before measuring, the calibration of calibration and system geometric parameter including CCD camera, system calibrating and the measurement side
Several big difficult points that the position that method is related to mutually is reconciled, phase height conversion is related to together for the measurement method, also limit simultaneously
Development of the structural light three-dimensional method in free-float space robot field.
Coherence tomography is the face that tested optical surface is analyzed by reference to the interference pattern of light pulse and signal pulse
Shape information.Sweeping laser is a branch of to enter reference path after beam splitting, becomes reference beam, is equipped with grating in optical path to compensate
Light source dispersion, all the way enter light path, tested optical surface is scanned in conjunction with the movement of measured object, reference light pulse and
Some pulse of signal light reaches detector and interferes simultaneously by equal optical paths, when mobile reference mirror, reference light with not
Light with depth interferes, and records corresponding reference mirror position, so that it may reflect the different depth letter of tested optical surface
Breath, that is, the face shape information of tested optical surface.In the measurement process, needs to use xy shaft platform and constantly move measured object
To facilitate the depth information of acquisition measured surface each point, uncompensable errors are easily generated during platform is mobile, to lead
Shape reduction in measured surface face is caused to deviate original surface.
Interferometry is that laser light source is formed and its face shape at tested curved surface by debugging optical path (or and compensator)
Consistent wavefront is returned after tested camber reflection, is ultimately imaged in ccd detector, the difficult point of the measurement method is to compensate
Device element is related to processing and debugging.Wherein, in the nonzero digit measurement method for not having to compensator, light can generate one when reflecting
Fixed hysterisis error needs corresponding algorithm for error correction to eliminate hysterisis error.This method is for ever-changing free form surface
For, entire measurement process is more complicated, and the design production of compensator increases measurement cost, reduces measurement rate.
Summary of the invention
The purpose of the invention is to overcome existing optical surface measurement method measuring principle complicated, error is larger, or
Person provides a kind of new optical surface measuring technique to system, the higher deficiency of environmental requirement.
To achieve the goals above, the present invention provides a kind of novel optical curved surface two-dimensional measurement method, this method need to be answered
With light source test side, detector, platform to be measured and computer；Method includes the following steps:
S1: several laser light sources are hemispherical to be uniformly distributed to form light source detection end；
S2: several described laser light sources emit incident ray to determinand simultaneously；
S3: determinand receives incident ray, and goes out one group of reflection light by determinand surface reflection；
S4: detector receives reflection light, and corresponding facula information is formed in detector；
S5: computer receives the facula information from detector, and passes through data analysis algorithm point by computer processor
Facula information is analysed, corresponding measured object surface face shape information is generated.
In step s 5, the data analysis algorithm includes:
S5-1: the tested curved surface of measured object is converted to tested curve by computer processor, and hemisphere body case is converted to
Semicircle shell, that is, be converted to flat state；
S5-2: x-y coordinate axis is drawn by origin of the center of circle of semicircle shell；
S5-3: the position of measured point is set as (x0, y0), being tested slope of the curve at measured point is dy0, corresponding laser
The position of light source is (x2, y2), the left and right ends position of detector is respectively (a0, b0)、(a1, b1), and set the position of receiving point
On the semicircle shell that radius is R, wherein the position of receiving point is (X2, Y2)；
S5-4: according to the reflection law of light, incident light and reflected light are symmetrical about normal, then in the normal equation of measured point
Are as follows:On incident ray there are two o'clock A, B respectively with the (a in reflection light0, b0), (a1, b1) about
It was found that symmetrical, the range between two incident rays where point A, B is the laser light source range that measured point O can be detected.
Preferably, the laser light source is the laser light source of high polymeric.
Specifically, choosing the laser light source of high polymeric, avoid light source through ovennodulation, town and country hot spot mistake in detector
Greatly, its coordinate position can not be determined.
Specifically, the measured object is that determinand receives another address after the incident ray of laser light source, it is practical
On, measured object and determinand are same object.
Specifically, the light source detection end (i.e. laser light source), which is different from conventional contactless, measures only one light source,
But having several equally distributed laser light sources hemispherical above measuring table, this design, which avoids, to be measured
The movement of light source, measured object or receiver in journey, also it is avoided that generating unnecessary error in measurement process, meanwhile, often
It is demarcated before secondary measurement without to system, simplifies measurement process.
Preferably, if the tested curved surface of measured object is ideal spherical face, the rounded rule of hot spot that the detector generates
Arrangement；If ideal spherical face is deviateed in the somewhere of the tested curved surface of measured object, the hot spot that detector generates is in corresponding position meeting
Irregular arrangement is presented in deviation from origin, hot spot.
Specifically, the ideal spherical face, which refers to, does not have spherical surface defective, in ideal, curvature is equal everywhere, and light
It is sliding；
Specifically, the regularly arranged multiple hot spots for referring to that detector receives of the circle can just be arranged as it is regular
It is round.
Specifically, the measurement method can acquire entire surface information with one-shot measurement, it is more to avoid multiple spot in measurement process
Secondary acquisition data.All laser light sources are simultaneously emitted by laser, if tested optical surface is ideal spherical face, the light that detector obtains
Spot is according to round aligned transfer；If ideal spherical face is deviateed in the somewhere of tested optical surface, the hot spot that detector obtains is opposite
Irregular arrangement can be presented in the position meeting deviation from origin answered, the point cloud chart that hot spot is formed.The measurement method is just inclined by hot spot
The case where from origin, judges the face shape error of tested curved surface.
Specifically, in order to realize the measurement process, by data analysis algorithm analyze the hot spot shape that detector receives
At point cloud data and tested Optical Surface corresponding relationship.From the point of view of principle, detection light after tested camber reflection at
As forming hot spot in detector, and during this, the direction that detection light issues is fixed and invariable, so, influence hot spot
The factor of position is just only related with tested curved surface, such as the height of tested curved surface, is tested curved surface point in an x or y direction oblique
Rate.
The present invention also provides a kind of novel optical curved surface two-dimensional measurement systems using preceding method, including light source detection
End, detector, platform to be measured and computer；The light source detection end includes several laser light sources, and several laser light sources are in
It is hemispherical to be uniformly distributed to form light source detection end；
The light source detection end is set to above platform to be measured, and putting on the platform to be measured has determinand；The detector
The top for being placed in right above platform to be measured, and being located in light source detection end, and connect with computer.
The laser light source emits incident ray to determinand, and the detector receives the reflection light reflected through determinand
And generate facula information；The computer receives the facula information from detector, generates through processor analysis corresponding tested
The surface face shape information of object.
Preferably, the detector includes CCD receiver (Charge-coupled Device).
Beneficial effects of the present invention:
Technical solution of the present invention overcomes existing optical surface measurement method measuring principle complicated, and error is larger, or
To system, the higher deficiency of environmental requirement, the measurement method and system can acquire entire surface information with one-shot measurement, avoid
Multiple spot multi collect data in measurement process.Its structure is simple, at low cost, and can obtain accurate measurement result.
Detailed description of the invention
Fig. 1 is measuring system two dimensional cross-section structural schematic diagram of the present invention；
Fig. 2 is the two dimensional cross-section schematic diagram in measuring system measurement process of the present invention；
Fig. 3~4 are measuring system measuring principle schematic diagram of the present invention；
Fig. 5 is the data analysis algorithm schematic diagram of measuring system of the present invention；
Fig. 6 is that measuring system of the present invention runs resulting data drawing list after algorithm.
Description of symbols
1 light source detection end, 11 laser light sources, 2CCD receiver, 3 platforms to be measured, 4 determinands.
Specific embodiment
Specific embodiments of the present invention will be further explained with reference to the accompanying drawing.
As shown in figs. 1 to 6, a kind of novel optical curved surface two-dimensional measurement system, the system include that light source detection end 1, CCD connect
Receive device 2, platform to be measured 3 and computer；The light source detection end includes several laser light sources, and several laser light sources 11 are in half
It is spherical to be uniformly distributed to form light source detection end；
The light source detection end is set to above platform to be measured, and putting on the platform to be measured has determinand 4；The CCD connects
The top that device is placed in right above platform to be measured, and is located in light source detection end is received, and is connect with computer.
The laser light source emits incident ray to determinand, and the detector receives the reflection light reflected through determinand
And generate facula information；The computer receives the facula information from detector, generates through processor analysis corresponding tested
The surface face shape information of object.
The system is using a kind of novel optical curved surface two-dimensional measurement method progress optical measurement provided by the invention, this method
The following steps are included:
S1: several laser light sources are hemispherical to be uniformly distributed to form light source detection end；
S2: several described laser light sources emit incident ray to determinand simultaneously；
S3: determinand receives incident ray, and goes out one group of reflection light by determinand surface reflection；
S4: detector receives reflection light, and corresponding facula information is formed in detector；
S5: computer receives the facula information from detector, and passes through data analysis algorithm point by computer processor
Facula information is analysed, corresponding measured object surface face shape information is generated.
In step s 5, it is also necessary to arrangement and the measured object surface of hot spot are judged by special data analysis algorithm
Relationship, the data analysis algorithm include:
S5-1: the tested curved surface of measured object is converted to tested curve by computer processor, and hemisphere body case is converted to
Semicircle shell, that is, be converted to flat state；
S5-2: x-y coordinate axis is drawn by origin of the center of circle of semicircle shell；
S5-3: the position of measured point is set as (x0, y0), being tested slope of the curve at measured point is dy0, corresponding laser
The position of light source is (x2, y2), the left and right ends position of detector is respectively (a0, b0)、(a1, b1), and set the position of receiving point
On the semicircle shell that radius is R, wherein the position of receiving point is (X2, Y2)；
S5-4: according to the reflection law of light, incident light and reflected light are symmetrical about normal, then in the normal equation of measured point
Are as follows:On incident ray there are two o'clock A, B respectively with the (a in reflection light0, b0), (a1, b1)
Symmetrical about discovery, the range between two incident rays where point A, B is the laser light source model that measured point O can be detected
It encloses.
Specifically, in order to which its working principle is better described, it is assumed that a tested point, the data of the measuring system, which are analyzed, to be calculated
Algorithm of the method based on Matlab environment are as follows:
% one measuring point (x0, y0) to be checked of definition, slope dy0, algorithm are as follows:
X0=-4；
Y0=3；
Dy0=-0.1；
% receiver position (a0, b0) (a1, b1), algorithm is as follows:
A0=-0.5；B0=48；
A1=0.5；B1=48；
% (X0, Y0), (X1, Y1) determine that incidence point range, algorithm are as follows:
[X0, Y0]=duandian1 (a0, b0, x0, y0, dy0)；
[X1, Y1]=duandian1 (a1, b1, x0, y0, dy0)；
It is the central point of light emitting region that %, which takes (x2, y2), and algorithm is as follows:
X2=(X0+X1)/2；
Y2=(Y0+Y1)/2；
% is asked and (x2, y2) corresponding (X2, Y2), and for a cloud hot spot, algorithm is as follows:
[X2, Y2]=duandian2 (x2, y2, x0, y0, dy0)；
Wherein, function duandian1, duandian2 are respectively as follows: for seeking the function symmetrically put about normal
It is simulated by the algorithm above, obtained result is as shown in Figure 6；20 groups of data are shared in the figure, are respectively
Change the variation of facula position in time point cloud in measured point x=-3, y={ 1,2 ..., 20 }, slope dy0 from -0.5 to 0.5.From
In figure as can be seen that when slope becomes larger, the position for putting cloud hot spot can be mobile towards the direction far from origin, and when measured point
Y value is bigger, and the change in location of point cloud hot spot is just more obvious.
According to the disclosure and teachings of the above specification, those skilled in the art in the invention can also be to above-mentioned embodiment party
Formula is changed and is modified.Therefore, the invention is not limited to the specific embodiments disclosed and described above, to the one of invention
A little modifications and changes should also be as falling into the scope of the claims of the present invention.In addition, although being used in this specification
Some specific terms, these terms are merely for convenience of description, does not limit the present invention in any way.
Claims (6)
1. a kind of novel optical curved surface two-dimensional measurement method, which is characterized in that this method need to using light source detection end, detector,
Platform and computer to be measured；Method includes the following steps:
S1: several laser light sources are hemispherical to be uniformly distributed to form light source detection end；
S2: several described laser light sources emit incident ray to determinand simultaneously；
S3: determinand receives incident ray, and goes out one group of reflection light by determinand surface reflection；
S4: detector receives reflection light, and corresponding facula information is formed in detector；
S5: computer receives the facula information from detector, and analyzes light by data analysis algorithm by computer processor
Spot information generates corresponding measured object surface face shape information.
2. measurement method according to claim 1, which is characterized in that in the step S5, the data analysis algorithm
Include:
S5-1: the tested curved surface of measured object is converted to tested curve by computer processor, and hemisphere body case is converted to semicircle
Shape shell, that is, be converted to flat state；
S5-2: x-y coordinate axis is drawn by origin of the center of circle of semicircle shell；
S5-3: the position of measured point is set as (x0, y0), being tested slope of the curve at measured point is dy0, corresponding laser light source
Position be (x2, y2), the left and right ends position of detector is respectively (a0, b0)、(a1, b1), and the position of receiving point is set half
Diameter is on the semicircle shell of R, wherein the position of receiving point is (X2, Y2)；
S5-4: according to the reflection law of light, incident light and reflected light are symmetrical about normal, then in the normal equation of measured point are as follows:On incident ray there are two o'clock A, B respectively with the (a in reflection light0, b0), (a1, b1) about hair
Now symmetrical, the range between two incident rays where point A, B is the laser light source range that measured point O can be detected.
3. measurement method according to claim 1, which is characterized in that the laser light source is the laser light of high polymeric
Source.
4. measurement method according to claim 1, which is characterized in that if the tested curved surface of measured object is ideal spherical face,
The hot spot that the detector generates is rounded regularly arranged；If ideal spherical face is deviateed in the somewhere of the tested curved surface of measured object, visit
The hot spot of device generation is surveyed in corresponding position meeting deviation from origin, irregular arrangement is presented in hot spot.
5. a kind of novel optical curved surface two-dimensional measurement system of application such as described in any item measurement methods of preceding claims 1~4
System, which is characterized in that the system comprises light source detection end, detector, platform to be measured and computers；The light source detection end packet
Several laser light sources are included, several laser light sources are hemispherical to be uniformly distributed to form light source detection end；
The light source detection end is set to above platform to be measured, and putting on the platform to be measured has determinand；The detector is placed in
Right above platform to be measured, and the top being located in light source detection end, and connect with computer；
The laser light source emits incident ray to determinand, and the detector receives the reflection light reflected through determinand and life
At facula information；The computer receives the facula information from detector, generates corresponding measured object through processor analysis
Surface face shape information.
6. measurement method according to claim 5, which is characterized in that the detector includes CCD receiver.
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Application publication date: 20190716 |