CN104075667A - Measurement system and method for extracting aspheric surface shape based on annular scanning slope - Google Patents
Measurement system and method for extracting aspheric surface shape based on annular scanning slope Download PDFInfo
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Abstract
The invention relates to a measuring system and a method for extracting an aspheric surface shape based on annular scanning slope, belonging to the field of photoelectric technology detection, wherein the measuring system comprises a laser, a beam expanding system lens group, a planar lens for etching opaque points, an imaging CCD and a one-dimensional electric control mobile platform; the aspheric surface shape measurement based on the annular scanning slope extraction does not need a compensator, has a large dynamic range and high precision, and the research result can be used for the detection of the primary mirror primary polishing stage, so that the bottleneck of the related technology is solved, and the method has important engineering application value and practical significance.
Description
Technical field
The invention belongs to advanced optics manufacture and detection field, relate to a kind of optical detection apparatus, particularly a kind of aperture aspherical primary mirror detection system and method.
Background technology
Heavy caliber highly steep asphere has shortening system length, the weight of mitigation system, and the advantages such as the image quality of raising system, therefore it has a wide range of applications in the field such as heavy caliber astronomical telescope, Space Optical System.Particularly in the last thirty years, along with the polishing of computer control small abrasive nose, the polishing of energy movable grinding disc, appearance and the application of a collection of advanced processing and manufacturing technology such as ion beam polishing, promoted the application of this type systematic in fields such as space communication, beam direction, target observation identifications especially greatly.In view of the situation, many countries are considered as heavy caliber highly steep asphere manufacturing technology one of important unit supports technology of many big science projects one after another.The reliable detection of heavy caliber highly steep asphere primary mirror is precondition and the basis that ensures its processing.Due to the singularity of heavy caliber highly steep asphere itself, cause detection method and surveying instrument correspondingly still to have lot of challenges, main manifestations is:
(1) optical elements of large caliber stage face shape is detected and is easily existed precision to be connected space.The processing of optical element face shape is generally divided into moulding, grinding, polishing three phases, and research shows that each stage process precision is as shown in table 1.
The surface figure accuracy of table 1 Large aperture optical components different processing stages
| Process segment | Surface figure accuracy RMS value/μ m |
| Moulding | 8～20 |
| Grind | 0.3～1.5 |
| Polishing | 0.01～0.03 |
As shown in Table 1, from being molded into polishing, optical element face shape error reduces by two orders of magnitude, and for large like this span, very difficult application same detecting instrument or method guarantee can measure exactly in each stage of optical element processing the situation of face shape error.In optical element fine grinding and first polishing stage, face shape error value is relatively large, visible ray interferometer dynamic range deficiency, and this stage can be used consistency profiles to carry out the detection of face shape conventionally.Taking contourgraph, three coordinate measuring machine, laser tracker in the contact contour measurement of representative can effectively solve, the surface shape measurement of small-bore this one-phase of optical element, but along with the increase of optical element bore, the measuring accuracy of contour measurement will decline, and cannot accurate instruction optical element face shape revises within the dynamic detection range of optical measuring method.This problem, along with the increase of primary mirror bore is more and more outstanding, becomes the bottleneck problem in primary mirror processing.
(2) the optical element bore constantly increasing has exceeded the measurement range of traditional detection instrument.As requiring instrument range, traditional contour measurement must be greater than the bore of optical element, autocollimation method detects the reference planes catoptron that aspheric surface need to equate with tested optical element bore, Hartmann's mensuration need to be made diaphragm equating with optical element bore etc., and the measuring equipment of wide range and heavy caliber reference element development itself is just very complicated, precision should not be guaranteed, and with high costs.
(3) quality of Large aperture optical components often exceedance ton and bulky (as VLT telescope only primary mirror mirror base just weigh 23 tons, add that supporting total quality and size further increases), in adjustment or handling process, there is greater risk, therefore often can only adopt the mode of detection in place, just further having limited Large aperture optical components face shape detects available method for this.
(4) the tested region area of optical element and 2 powers of bore are directly proportional, and therefore for traditional contact contour measuring method, how by improving metering system, improving measurement efficiency is one of difficult problem that Large aperture optical components face shape detection faces is right.
In sum, for a difficult problem for heavy-caliber optical system development demand and the detection of current faced Large aperture optical components face shape, the research of carrying out surface testing method and gordian technique has very important realistic meaning and practical value.
Summary of the invention
The technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, provide a kind of and extract aspheric surface measurement system and method based on circular scanning slope, solve aperture aspherical at the first test problems in throwing stage, without compensator, have dynamic range large, precision is high, can be used for the primary mirror detection in first throwing stage, and there is the face shape of effectively instructing aperture aspherical to grind the polishing initial stage in later stage and detect, there is important engineering using value and realistic meaning.
The technology of the present invention solution: the present invention utilizes pointolite to carry out longitudinal scanning to aspheric surface, thereby by the processing of return projector being obtained to the slope of each point in aspheric surface, then obtain face shape profile errors by certain algorithm.Concrete principle is as follows:
As shown in Figure 1, A is any point in aspheric surface, and H is the glass plate that axle places that hangs down, and S is the aberrationless pointolite on it, and the position at S place is just normal direction that in aspheric surface, A is ordered and the intersection point of optical axis.The bright aspheric surface of illumination that this pointolite sends, orders for A like this, and SA is normal incident, and the light Jiang Yanyuan road of A point reflection is returned, and reflection ray is AS.In aspheric surface, the institute on same normal endless belt a little returns to friendship flat board and S point place in Dou Jianganyuan road with an A, if now S point is the light tight point of an etching, their reflection ray all will be blocked.For other points in aspheric surface, such as B point and C point, because SB and SC are not normal incident, so their reflection ray BB ', CC ' will hand over respectively dull and stereotyped in a D and some F as shown in the figure, in aspheric surface, illuminate dull and stereotyped DD ' scope with all naming a person for a particular job of a same normal endless belt in B place like this, illuminate dull and stereotyped FF ' scope with all naming a person for a particular job of a same normal endless belt in C place, that is to say that their reflection ray can see through dull and stereotyped.If at this moment place a CCD camera in dull and stereotyped left side, can collect plot of light intensity as shown in Figure 2.Can see, plot of light intensity has a circle Crape ring, if the pixel of CCD and aspheric surface are talked about one to one, can know that A point just drops on Crape ring, it is r from AA ' that Crape ring radius equals the vertical wheelbase of A point, be the size of d to the distance of A ' if can obtain like this S, the slope that A is ordered just can be by formula:
Solving of the distance d of ordering with respect to A is as follows:
If flat board is moved to right to c place, position, as shown in Figure 3.At this moment the bright aspheric surface of illumination of sending from Sc point, and the light of aspheric surface A point place reflection will be taking AS as normal direction, follow reflection law to dull and stereotyped D place, in aspheric surface with the same normal endless belt in A point place on name a person for a particular job and reflex to dull and stereotyped DD ' region, that is to say, the light of their reflections will be through dull and stereotyped.At this moment will in discovery plot of light intensity, still have a circle Crape ring with CCD record, but Crape ring radius diminishes (light returning for other endless belt that the light tight point of etching blocks), A point is to be in bright areas, as shown in Figure 4.With moving to left to a place, position by flat board, can find also to still have a circle Crape ring in aspheric surface, large but Crape ring radius becomes, A point is to be also in bright areas, as shown in Figure 5.Can know by analysis aspheric surface A point light intensity I
athe function of d, i.e. I
a=I
a(d) its Strength Changes schematic diagram is as Fig. 6. work as I
awhile reaching minimum value, the distance of establishing light source and A ' point is d
0, i.e. d
0meet:
Can obtain like this size of d, so just can calculate the slope at aspheric surface A point place:
Wherein d
0(r, θ) is the light intensity minor increment at A point place, and r is the radius that on minute surface, A is ordered.Each point on minute surface is carried out to integral algorithm, just can obtain the face shape of whole.
According to above-mentioned surface shape measurement principle, what the present invention designed extracts aspheric surface Systems for optical inspection as shown in Figure 7 based on circular scanning slope.Optical system is made up of the automatically controlled transfer table 5 of planar lens 3, imaging CCD4 and one dimension of laser instrument 1, beam-expanding system lens combination 2, etching opaque point.Measuring system is placed near the center of curvature of tested aspheric mirror, the light that laser instrument sends converges to the outside surface of planar lens 3 after expanding through lens combination 2, because planar lens can be introduced certain spherical aberration, therefore in the time of design lens combination 2, the spherical aberration that need to produce a certain amount of reverse spherical aberration and planar lens introducing offsets, so, light beam forms aberrationless point while converging to the outside surface of planar lens, in the side of convergent point etching a very little point, depart from a millimeter magnitude with light beam focus point, etching point micron size.The light that pointolite sends, being irradiated to tested aspheric mirror 6 can reflect, and can return along original optical path along the light of minute surface normal incident, makes the small optical axis that departs from of pointolite, and the light of minute surface normal endless belt can converge on the point being etched.Because the light of minute surface normal endless belt is blocked, and the light of other endless belt is not blocked, and on imaging CCD4, can see that on minute surface, normal place is a circle Crape ring.By the plot of light intensity of analyzing prism surface imaging, read corresponding endless belt one dimension electric controlled sliding moving platform and move 5 distance, calculate the slope of endless belt, then by slope integration being obtained to tested aspheric shape.Whole system has following feature: laser forms aberrationless pointolite through lens combination, and the convergent point forming is just in time on the front end face of planar lens; Distance between the aberrationless pointolite that on planar lens, the dim spot of etching and system form is in 8 millimeters; When circular scanning minute surface, one dimension electric controlled sliding moving platform moves along tested aspheric surface primary mirror optical axis; The pointolite that optical system produces, light intensity uniformity is good, can meet the Uniform Illumination of tested minute surface.
Concrete implementation step is as follows:
(1) measuring system is placed near tested aspheric mirror vertex curvature center, adjusts one dimension electric controlled sliding moving platform it is moved along optical axis.
(2) orient the distance between tested aspheric mirror and the initial position of measuring system with laser tracker, this distance is as the corresponding distance of initial loop Crape ring on minute surface.
(3) move one dimension electric controlled sliding moving platform according to a fixed step size along optical axis, record each mobile Crape ring corresponding position on minute surface by CCD, and record the one dimension electric controlled sliding moving platform displacement of correspondence with it.Scan whole minute surface along optical axis, record all Crape rings and corresponding displacement with it.
(4) the barycenter radius of extraction Crape ring, calculates the slope that each Crape ring is corresponding, and integration recovers to obtain the face shape of whole.
The present invention's advantage is compared with prior art:
(1) the aspheric surface measurement method of extracting based on circular scanning slope does not need to adopt compensator, thereby has avoided maximum error source and measuring uncertainty in aspheric surface compensation detection.
(2) experimental system proposed by the invention is simple in structure, easy operating, and cost is suitable.Reach preferably the requirement of measuring accuracy, can realize on-line measurement simultaneously.
(3) experimental system proposed by the invention is non-interference system, insensitive to vibration and air-flow in measurement.
In sum, new detection method proposed by the invention compared with existing just throwing phase measuring mode does not need compensator, and cost is lower, and is not subject to ambient vibration and airflow influence, can realize on-line measurement.Of the present invention succeeding in developing a kind of effective low cost detection means is provided for the development of aperture aspherical, has significant realistic meaning and application prospect.
Brief description of the drawings
Fig. 1 is the light schematic diagram that light source is ordered at the A of b place;
Fig. 2 is light source A point light intensity schematic diagram on CCD in the time of b place;
Fig. 3 is that light source is at a and c place light schematic diagram;
Fig. 4 is the light source light intensity schematic diagram that on CCD, A is ordered in the time of c place;
Fig. 5 is the light source light intensity schematic diagram that on CCD, A is ordered in the time of a place;
Fig. 6 is the schematic diagram that A point light intensity changes apart from d;
Fig. 7 is Systems for optical inspection schematic diagram of the present invention.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Be illustrated in figure 7 one and extract aspheric surface detection system schematic diagram based on circular scanning slope, described device comprises: laser instrument 1, beam-expanding system lens combination 2, planar lens 3, imaging CCD4, one dimension electric controlled sliding moving platform 5 and tested aspheric mirror 6 form.Concrete implementation step is as follows:
(1) measuring system is placed near tested aspheric mirror 6 vertex curvature centers, adjusts one dimension electric controlled sliding moving platform 5 it is moved along optical axis.
(2) orient the distance between tested aspheric mirror 6 and the initial position of measuring system with laser tracker, this distance is as the corresponding distance of initial loop Crape ring on minute surface.Concrete locator meams is as follows:
(a) on tested aspheric mirror 6, make three gauge points, orient three relative position relations between gauge point with laser tracker, set up the coordinate system taking aspheric surface summit as true origin.
(b) on planar lens 3, make three gauge points, orient three relative position relations between gauge point with laser tracker, set up a coordinate system.
(c), under the coordinate system that is true origin by the coordinate system unification of two foundation to tested aspheric mirror 6 summits, obtain the location matrix relation of two coordinate systems.Just can calculate the distance Z of tested aspheric mirror 6 to planar lens 3 by this location matrix relation.
(3) set step-length and move one-dimensional movement platform 5 along optical axis, recording each mobile Crape ring corresponding position on tested aspheric mirror 6 by CCD4, and recording the one-dimensional movement platform displacement Z of correspondence with it
i.Along the whole tested aspheric mirror 6 of optical axis scanning, record all Crape rings and corresponding displacement with it.
(4) image of the Crape ring collecting is imported to matlab and carry out the extraction of barycenter radius, obtain the pixel radius of each width figure.Coordinate A (the x of mark on minute surface
n, y
n) pixel coordinate on corresponding CCD is B (p
n, q
n) this can obtain the matrix relationship of minute surface coordinate system and CCD pixel coordinate system:
A＝TB (4)
Demarcate the coordinate corresponding relation of image planes and minute surface according to above formula (4), know that the pixel coordinate of any just can calculate the real radius r on minute surface.
(5) calculate the slope that each Crape ring is corresponding, integration recovers to obtain the face shape of whole.Computing formula is as follows:
Wherein δ θ is the deviation of tested aspheric mirror slope and theoretical face shape, and Δ Z is the Z recording
recordvalue and theoretical equation calculate Z
theoreticaldeviation, i.e. Δ Z=Z
record-Z
theoretical, the rise that sag is tested aspheric mirror, concerning parabola
then use the p-δ θ of Simpson's rule (r) to carry out integration just to obtain the face shape error of tested aspheric mirror.
Claims (4)
1. extract an aspheric surface measurement system based on circular scanning slope, it is characterized in that: described measuring system comprises that the automatically controlled transfer table of planar lens, imaging CCD and the one dimension of laser instrument, beam-expanding system lens combination, etching opaque point forms; Measuring system is placed near the center of curvature of tested aspheric mirror, the light that laser instrument sends converges to the outside surface of planar lens after expanding through lens combination, light beam forms aberrationless point while converging to the outside surface of planar lens, in the side of convergent point etching a very little point, depart from a millimeter magnitude with light beam focus point, etching point micron size; The light that pointolite sends, being irradiated to tested aspheric mirror can reflect, and can return along original optical path along the light of minute surface normal incident, makes the small optical axis that departs from of pointolite, and the light of minute surface normal endless belt can converge on the point being etched; The light of minute surface normal endless belt is blocked, and the light of other endless belt is not blocked, and on imaging CCD, can see that on minute surface, normal place is a circle Crape ring; By the plot of light intensity of analyzing prism surface imaging, read the distance that corresponding endless belt one dimension electric controlled sliding moving platform moves, calculate the slope of endless belt, then by slope integration being obtained to tested aspheric shape.
2. as claimed in claim 1ly extract aspheric surface measurement system based on circular scanning slope, it is characterized in that: in 8 millimeters of distances on the planar lens of described etching opaque point between the aberrationless pointolite of the dim spot of etching and system formation.
3. as claimed in claim 1 based on circular scanning slope extraction aspheric surface measurement system, it is characterized in that: the pointolite that described laser instrument produces, light intensity uniformity is good, can meet tested aspheric Uniform Illumination.
4. extract an aspheric surface measurement method based on circular scanning slope, implementation step is as follows:
(1) measuring system claimed in claim 1 is placed near tested aspheric mirror vertex curvature center, adjusts one dimension electric controlled sliding moving platform it is moved along optical axis;
(2) orient the distance between tested aspheric mirror and the initial position of measuring system with laser tracker, this distance is as the corresponding distance of initial loop Crape ring on minute surface, and concrete locator meams is as follows:
(a) on tested aspheric mirror, make three gauge points, orient three relative position relations between gauge point with laser tracker, set up the coordinate system taking aspheric surface summit as true origin;
(b) on planar lens, make three gauge points, orient three relative position relations between gauge point with laser tracker, set up a coordinate system;
(c) by under same the coordinate system of two foundation coordinate system that is true origin to tested aspheric mirror summit, obtain the location matrix relation of two coordinate systems, just can calculate the distance of tested minute surface to planar lens by this location matrix relation;
(3) move one-dimensional movement platform according to a fixed step size along optical axis, record each mobile Crape ring corresponding position on minute surface by CCD, and record the one-dimensional movement platform displacement of correspondence with it, along the whole tested aspheric mirror of optical axis scanning, record all Crape rings and corresponding displacement with it;
(4) the barycenter radius of extraction Crape ring, calculates the slope that each Crape ring is corresponding, and integration recovers to obtain whole tested aspheric mirror.
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| CN110017792A (en) * | 2019-04-10 | 2019-07-16 | 中山大学 | A kind of novel optical curved surface two-dimensional measurement method and its measuring system |
| CN112857221A (en) * | 2021-01-15 | 2021-05-28 | 海伯森技术（深圳）有限公司 | Scanning method and device for quickly positioning spherical extreme point |
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