CN102183213A - Aspherical mirror detection method based on phase measurement deflectometry - Google Patents
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Abstract
The invention provides an aspheric mirror detection method based on phase measurement deflectometry. The detection system is composed of a display screen, a camera, an electronic control translation stage, a half transparent and half reflecting mirror and an electronic computer, wherein the optical centre of the camera is arranged on the optical axis of the mirror to be detected; a sine (cosine) fringe pattern is generated by the computer and is displayed on the display screen; then the fringe pattern on the display screen can be projected on the mirror to be detected and the camera can shoot the reflected image; during the process of measurement, the mirror to be detected is fixed on the electronic control translation stage and can precisely move along the optical axis under the control of the computer; the fringe pattern shot during the moving process of the mirror to be detected can be analyzed and processed to obtain a phase distribution, then the relationship between the normal line distance and the normal angle of the aspherical surface can be obtained by calculation, namely the surface shape can be described by the normal line congruence of the aspherical surface; and meanwhile, the normal line congruence can be converted to the rectangular coordinate system through geometry calculation for evaluation. The invention has a large dynamic measurement range and provides detection means for the accurate grinding and primary polishing processes of a non-spherical reflector with a larger wavefront variation range during processing.
Description
Technical field
The present invention relates to a kind of optical detective technology, especially a kind of detection method at aspheric mirror belongs to the advanced optical length of schooling and makes and the detection technique field.
Background technology
So-called aspherical optical element, be meant face shape by the multinomial equation of higher degree determine, the radius optical element all inequality of each point on the face shape.Aspheric surface optical accessory can aberration correction, improve picture element, enlarge the visual field, and makes that optical system structure is simplified, weight saving.Along with optical precision processing and optoelectronic development, aspheric surface is applied in the various optical systems more and more widely.Therefore, along with aspheric surface application more and more widely, the aspheric high-acruracy survey of the dark type of aspheric measurement especially heavy caliber is become a present hot issue.Aspheric for a long time manufacturing and detection technique are that the detection of two hang-ups, especially aperture aspherical of its widespread use of restriction is all the more so always.As everyone knows, aperture aspherical is the key point of the whole aspherical mirror machining efficient of influence in the detection in correct grinding stage.The common at present interferometry technology that adopts, its precision is very high, can reach 1/tens wavelength.But it is very little that it measures dynamic range, when measuring aspheric surface, generally all needs to make auxiliary element, also very responsive to the disturbance of the vibration of machinery and air simultaneously, like this environment that uses had very high requirement.Simultaneously, in the fine grinding process, because its surface is more coarse, face shape error is bigger, also is not suitable for detecting with conventional methods such as interferometries.Three-coordinates measuring machine is with gauge head tested surface to be carried out contact type measurement, and is therefore very bothersome, time-consuming, and precision influenced by gauge head, motion big especially, the bore of measurement also is restricted, and just can't use the minute surface greater than usable range.
Summary of the invention
Technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, a kind of aspheric mirror detection method based on phase measurement deviation art is provided, this method has bigger range of dynamic measurement, for non-spherical reflector correct grinding and the first polishing stage that the wavefront variation range is bigger in the process provides measuring means.
Technical solution of the present invention: a kind of aspheric mirror detection method based on phase measurement deviation art, its characteristics are: the detection system of employing is made up of display screen, the video camera of having demarcated, electronic control translation stage, semi-transparent semi-reflecting lens and robot calculator; The photocentre of video camera places on the optical axis of mirror to be measured, the display screen plane is perpendicular to the measured lens optical axis, and show by computing machine generation sine or cosine bar graph, after measured lens and semi-transparent semi-reflecting mirror reflection, received by video camera, be that video camera is observed display screen by mirror to be measured, photographing the image that shows on the display screen is stripe, the stripe pattern taken of the video camera face shape information of just having carried measured lens like this, can deform and be different from the shown standing striation figure of display screen, deflection depends on the face shape of measured lens; In measuring process, measured lens is fixed on the electronic control translation stage, and accurately moves, and the position of video camera, semi-transparent semi-reflecting lens and display screen all remains unchanged at the control lower edge of computing machine optical axis.Because in the measured lens moving process, camera position remains unchanged, so variation has taken place both relative positions, the imaging rate of video camera can change, and the zone on the observed display screen also can change; In different positions, the pixel cell of video camera can arrive the diverse location on the display screen, and note different stripe patterns from the reflection of the difference on the mirror to be measured; Use phase-shifting technique and phase unwrapping technology that the stripe pattern of record is handled the PHASE DISTRIBUTION that obtains each position, calculate the relation of aspheric surface normal distance and normal angle again, promptly aspheric normal is remitted and is described aspheric shape; Simultaneously can also cross geometrical calculation and be transformed into rectangular coordinate system, tested minute surface shape is estimated by the normal Correspondent.
Described sine or cosine bar graph can be the standard sine or the cosine bar graphs of two vertical direction (as level, vertical direction), also can be annular standard sine or cosine bar graph.
Described stripe pattern carries out analyzing and processing, and to obtain PHASE DISTRIBUTION be by repeatedly (more than or equal to 3 times) phase shift, adopts phase-shifting technique to obtain blocking PHASE DISTRIBUTION, obtains continuous PHASE DISTRIBUTION by the phase unwrapping technology again.
The described relation that calculates aspheric surface normal distance and normal angle is according to reflection law, the position that distributes and to find original light, deviation light to overlap by continuous phase with tested minute surface normal, thus obtain normal distance and normal angle.
Described normal Correspondent is crossed geometrical calculation, and to be transformed into rectangular coordinate system be very near adjacent 2 points of distance on the aspheric surface, can be similar to regard as and be on the same section circular arc, according to normal apart from and the relation of the method congruence find the center and the diameter of this circular arc, the rectangular coordinate that can calculate tested surface shape in conjunction with geometric relationship distributes.
The present invention's advantage compared with prior art is:
(1) the present invention has bigger measurement dynamic range, can be used for the correct grinding and the detection in polishing stage that the dark type aspheric surface of heavy caliber is made, compares with three-dimensional coordinate measuring instrument, can once finish measurement of full field, and more convenient and quicker saves time.
(2) the present invention does not have specific (special) requirements to environment, can detect in workshop condition.
(3) the present invention is simple in structure, dirigibility is high, need not the special optical element, and cost is very cheap.
(4) detection method of the present invention can be with the aspheric method congruence, be normal apart from the relation of normal angle, aspheric shape described, clearer principle and the measuring process of explaining institute's extracting method, also make computing formula and computation process more succinct, also can be transformed into rectangular coordinate system evaluation simultaneously.
(5) structure pattern that is adopted among the present invention and phase-shifting technique have quite high precision, and can suppress the influence to testing result of noise and surrounding environment effectively.
Description of drawings
Fig. 1 is aspheric normal remittance synoptic diagram;
Fig. 2 is a realization synoptic diagram of the present invention;
Light when Fig. 3 measures for the present invention changes synoptic diagram, and wherein Fig. 3 (a), Fig. 3 (b), Fig. 3 (c), Fig. 3 (d), Fig. 3 (e) represent respectively in the moving process of measured lens away from detection system, the light synoptic diagram during diverse location;
The striped of camera record changed synoptic diagram when Fig. 4 the present invention measured, wherein Fig. 4 (a), Fig. 4 (b), Fig. 4 (c), Fig. 4 (d), Fig. 4 (e) represent respectively in the moving process of measured lens away from detection system, the striped synoptic diagram of the camera record during diverse location;
Fig. 5 measuring principle synoptic diagram of the present invention; Wherein: OM is the distance of video camera photocentre and display screen;
Fig. 6 recovers face shape schematic diagram by the aspheric surface normal.
Embodiment
As shown in Figure 1, in fact, any aspheric surface all has the method congruence, and its normal and optical axis meet at difference and constitute different angles, as shown in Figure 1.Aspheric surface not only can characterize with its rectangular coordinate system equation, also can characterize with the angle of vertical normal aberration and normal and optical axis.For convenience of description, the present invention is called the normal distance with distance between the intersection point of aspheric surface summit and aspheric surface normal and optical axis, represents with p; The aspheric surface normal is called normal angle for the inclination angle of optical axis, represents with u.Obviously, aspheric surface except can characterizing with rectangular coordinate system, character that can also the usage congruence, promptly normal characterizes apart from the continuous function g:p=g (u) that concerns of p and normal angle u.
As shown in Figure 2, the detection system among the present invention is made up of display screen, video camera, electronic control translation stage, semi-transparent semi-reflecting lens and robot calculator.To show on the display screen that annular sine streak feature pattern is that example describes, have similar measuring process when showing other form bar graphs below, this example does not comprise all the elements of this patent.
The first step, the building of detection system.At first video camera is demarcated and obtained its intrinsic parameter and outer parameter, i.e. the relation of two-dimensional image information and world's three dimensional space coordinate conversion.Camera marking method is a lot, as the two-step approach of Tsai and Roger proposition, the plane reference method that Zhang Zhengyou proposes etc.Photocentre O with video camera places on the optical axis of measured lens then, its optical axis and measured lens optical axis coincidence.Measured lens is fixed on the electronic control translation stage, can accurately moves at the control lower edge of computing machine optical axis.Produce just (surplus) string bar graph of annular by computing machine, and be presented on the display screen.Bar graph on the display screen is projected on the measured lens, reflects the back and take by video camera.
Second step, stripe pattern collection and analysis.Keep the position of video camera, semi-transparent semi-reflecting lens and display screen all motionless, the computer control electronic control translation stage accurately moves measured lens on optical axis direction.In moving process, variation has taken place in the relative position of measured lens and video camera, so change has taken place the imaging rate of video camera, change has also taken place the zone on the observed display screen.In different positions, the pixel cell of video camera can arrive the diverse location on the display screen from the reflection of the difference on the mirror to be measured, as Fig. 3, and notes different stripe patterns, as Fig. 4.Using phase-shifting technique and phase unwrapping technology that the stripe pattern of record is handled the corresponding phase that obtains the diverse location place distributes.
The 3rd step, the computing method congruence.In the measuring process, the position of measured lens is respectively p
0p
1P
nHere light is regarded as from the video camera outgoing, through the measured lens reflection deviation is taken place and arrive display screen,, claim that reflection ray is a deviation light so claim that the video camera emergent ray is original light.From p
0To p
nMoving process in, light can be by the difference S on the mirror to be measured
0S
1S
nReflect, and intersect at difference with display screen.Because in the moving process, the cycle of ring-shaped stripe is constant, and the joining of deviation light and display screen is gradually away from optical axis, so the phase value that obtains at diverse location is different, its absolute value trend is dull increase.At each p place, position, use the striped phase-shifting technique respectively and block phase developing method, can obtain pairing out of phase value
When mirror to be measured is in a specific position p
kThe time, p=p just
k, the original light of pixel k correspondence is at mirror S to be measured
kPlace's reflection becoming deviation light and former road are returned.According to reflection law, this moment, mirror to be measured was at S
kThe normal of point overlaps with original light, deviation light, i.e. S
kO is exactly minute surface shape S to be measured
kThe normal at some place.
Geometric relationship from Fig. 5 can obtain, at position p
kThe place, the phase values phi that pixel k measures
kCan be expressed as:
Ф
k＝2п(tanu
k＊OM)/T (1)
In the formula, OM is the distance of video camera photocentre and display screen; T is the cycle that display screen shows annular sine streak; Ф
kBe called the canonical reference phase value.In the fringe phase information of diverse location pixel cell k record and the parameter of measuring system, just can calculate position p according to mirror to be measured
kLike this, just obtained minute surface face shape to be measured at S
kThe normal at some place is apart from p
kWith normal angle u
kRelation, determined the method congruence of minute surface face shape to be measured, the face shape of minute surface to be measured has also just been described.S
kIt is normal angle u that point is called
kMatch point.
Computing method are discussed below, and the position of mirror to be measured can be expressed as vectorial P:
P＝[p
0p
1……p
n] (2)
The phase value that pixel cell k obtains when mirror to be measured is in diverse location P can be expressed as vector
By fitting of a polynomial, P and
Relation can represent with function F:
Obtain angle u by 1 formula
kCorresponding canonical reference phase values phi
kAnd the substitution following formula, just can obtain p
kThis represents that minute surface face shape to be measured is at S
kThe normal at some place is apart from p
k, normal angle is u
kHere normal is represented with discrete data apart from the relation of p and normal angle u, the relation fitting of a polynomial of normal angle and normal distance can be expressed as continuous function G:
p＝G(u) (5)
Function G has been represented the method congruence of minute surface to be measured, has also described the face shape of mirror to be measured.
In the 3rd step, obtain tested minute surface shape rectangular coordinate by the aspheric surface normal and distribute.As shown in Figure 6, establishing S is minute surface shape to be measured, vectorial S ([S
0S
K-1S
kS
K]) be expressed as normal angle u ([u
0U
K-1u
kU
K]) match point, corresponding normal is apart from being p ([p
0P
K-1p
kP
K]).When angle u becomes in 0 the time value L of function G
0Be exactly the apex sphere radius-of-curvature of minute surface to be measured, that is:
Be without loss of generality, establish Q
kBe the adjacent normal S of minute surface shape to be measured
K-1Q
kAnd S
kQ
kIntersection point.Because p
kWith p
K-1Difference very little, normal S
K-1Q
kAnd S
kQ
kVery approaching, so some S
K-1And S
kCan regard as and be on the same circular arc, center of this circle is Q
kPoint, so equate to have following approximation relation according to radius:
Q
kS
k≈Q
kS
k-1 (7)
S sets up an office
kTo intersection point p
kDistance be L
k, i.e. S
kP
k=L
k, then following formula can be expressed as:
L
k+p
kQ
k≈L
k-1+p
k-1Q
k (8)
At Δ p
kP
K-1Q
kIn, can get according to the triangle sine:
Simultaneous 8 formulas, 9 formulas, L
kExpression can for:
The face figurate number strong point S that represents with the rectangular coordinate system form
k(y
k, x
k) be expressed as:
The rectangular coordinate that has so just obtained tested minute surface shape distributes.
The non-elaborated part of the present invention belongs to techniques well known.
Claims (5)
1. aspheric mirror detection method based on phase measurement deviation art, it is characterized in that: the detection system of employing is made up of display screen, the video camera of having demarcated, electronic control translation stage, semi-transparent semi-reflecting lens and robot calculator; The photocentre of video camera places on the optical axis of mirror to be measured, the display screen plane is perpendicular to the measured lens optical axis, and show by computing machine generation sine or cosine bar graph, after measured lens and semi-transparent semi-reflecting mirror reflection, received by video camera, be that video camera is observed display screen by mirror to be measured, photographing the image that shows on the display screen is stripe, the stripe pattern taken of the video camera face shape information of just having carried measured lens like this, can deform and be different from the shown standing striation figure of display screen, deflection depends on the face shape of measured lens; In measuring process, measured lens is fixed on the electronic control translation stage, and accurately moves, and the position of video camera, semi-transparent semi-reflecting lens and display screen all remains unchanged at the control lower edge of computing machine optical axis; Because in the measured lens moving process, camera position remains unchanged, so variation has taken place both relative positions, the imaging rate of video camera can change, and the zone on the observed display screen also can change; In different positions, the pixel cell of video camera can arrive the diverse location on the display screen, and note different stripe patterns from the reflection of the difference on the mirror to be measured; Use phase-shifting technique and phase unwrapping technology that the stripe pattern of record is handled the PHASE DISTRIBUTION that obtains each position, calculate the relation of aspheric surface normal distance and normal angle again, promptly aspheric normal is remitted and is described aspheric shape; Simultaneously can also cross geometrical calculation and be transformed into rectangular coordinate system, tested minute surface shape is estimated by the normal Correspondent.
2. the aspheric mirror detection method based on phase measurement deviation art according to claim 1, it is characterized in that: described sine or cosine bar graph can be the standard sine or the cosine bar graphs of two vertical direction (as level, vertical direction), also can be annular standard sine or cosine bar graph.
3. the aspheric mirror detection method based on phase measurement deviation art according to claim 1, it is characterized in that: described stripe pattern carries out analyzing and processing, and to obtain PHASE DISTRIBUTION be by repeatedly (more than or equal to 3 times) phase shift, adopt phase-shifting technique to obtain blocking PHASE DISTRIBUTION, obtain continuous PHASE DISTRIBUTION by the phase unwrapping technology again.
4. the aspheric mirror detection method based on phase measurement deviation art according to claim 1, it is characterized in that: the described relation that calculates aspheric surface normal distance and normal angle is according to reflection law, the position that distributes and to find original light, deviation light to overlap by continuous phase with tested minute surface normal, thus normal distance and normal angle obtained.
5. the aspheric mirror detection method based on phase measurement deviation art according to claim 1, it is characterized in that: describedly cross geometrical calculation by the normal Correspondent and be transformed into rectangular coordinate system, adjacent two points very near on the aspheric surface apart from F, can be similar to regard as and be on the same section circular arc, according to normal apart from and the relation of the method congruence find the center and the diameter of this circular arc, the rectangular coordinate that can calculate tested surface shape in conjunction with geometric relationship distributes.
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| CN102494634A (en) * | 2011-11-18 | 2012-06-13 | 中国科学院光电技术研究所 | Off-axis aspheric lens detection method based on fringe reflection |
| CN102539123A (en) * | 2012-01-16 | 2012-07-04 | 中国科学院西安光学精密机械研究所 | Method for determining optical axis of large-caliber non-spherical reflecting mirror based on centering processing |
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