CN103075975A - Surface shape detection method for high-reflectivity concave-surface conical reflecting mirror - Google Patents

Surface shape detection method for high-reflectivity concave-surface conical reflecting mirror Download PDF

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Publication number
CN103075975A
CN103075975A CN201210573251XA CN201210573251A CN103075975A CN 103075975 A CN103075975 A CN 103075975A CN 201210573251X A CN201210573251X A CN 201210573251XA CN 201210573251 A CN201210573251 A CN 201210573251A CN 103075975 A CN103075975 A CN 103075975A
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China
Prior art keywords
described
stereotyped
printing opacity
concave surface
high reflectance
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CN201210573251XA
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Chinese (zh)
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CN103075975B (en
Inventor
袁乔
曾爱军
张善华
黄惠杰
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中国科学院上海光学精密机械研究所
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Priority to CN201210573251.XA priority Critical patent/CN103075975B/en
Publication of CN103075975A publication Critical patent/CN103075975A/en
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Publication of CN103075975B publication Critical patent/CN103075975B/en

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Abstract

The invention relates to a surface shape detection method for a high-reflectivity concave-surface conical reflecting mirror, and the method comprises the following steps of producing a partially-transmitting flat panel; sequentially arranging the partially-transmitting flat panel and the high-reflectivity concave-surface conical reflecting mirror to be detected in the direction of parallel beam outputted by a phase-shifting interferometer, wherein a conical surface of the high-reflectivity concave-surface conical reflecting mirror faces towards the light emitting direction of the phase-shifting interferometer; adjusting a light path; and utilizing the phase-shifting interferometer to detect interferometric fringes and obtain the surface shape information of the high-reflectivity concave-surface conical reflecting mirror. The surface shape detection method has the advantages of simplicity in operation, easiness in measurement and no damage on measuring elements.

Description

The surface testing method of high reflectance concave surface taper reflection

Technical field

The present invention relates to the optical detection field, particularly a kind of phase-shifting interferometer that utilizes is to the surface testing method of high reflectance concave surface taper reflection.

Technical background

Laser drilling is widely used in aerospace field, be used for realizing the boring procedure in cooling hole, small-bore, and annular laser beams provides a new approach for laser drilling.Simultaneously, annular laser beams also is applied to optical acquisition and induces, the aspects such as Laser Processing.This has just proposed requirement for the realization of annular laser beams, and high reflectance concave surface taper reflection often is used to produce the ring illumination light beam, this concave surface taper reflection provides very large convenience for the annular beam of realizing different radial width, is necessary so accurately measure the face shape of this high reflectance concave surface taper reflection.

Known technology [1] utilizes contact Taylor Hobson synthesis measuring profilometer to measure the surfaceness of concave surface taper reflection.It is a kind of measuring method of contact, can be to the measuring piece injury, thus affect measurement result.

Known technology [2] utilizes zero-bit optical element-CGH realization to the measurement of concave surface taper reflection.Secondly the method at first needs to make a compensating part CGH,, needs that in measurement CGH and measured piece are carried out strict aligning and could realize more accurately measurement.

Summary of the invention

The object of the present invention is to provide a kind of surface testing method of high reflectance concave surface taper reflection.The method has simple to operate, is easy to measure, to advantages such as measuring piece not damageds.

Technical solution of the present invention is as follows:

A kind of surface testing method of high reflectance concave surface taper reflection, characteristics are that the method may further comprise the steps:

1. it is dull and stereotyped to make part printing opacity: coat in the latter half of the dull and stereotyped front surface of part printing opacity pitch-dark so that the light beam that incides on it is absorbed; The latter half plating reflectance coating in the dull and stereotyped rear surface of part printing opacity;

2. the parallel beam direction in phase-shifting interferometer output sets gradually the dull and stereotyped and high reflectance concave surface taper reflection to be measured of described part printing opacity, and the conical surface of described high reflectance concave surface taper reflection to be measured is towards the light direction of phase-shifting interferometer;

3. adjust light path: the frontal plane of adjusting described part printing opacity flat board is vertical with described parallel beam, and guarantees that the axis of described part printing opacity flat board overlaps with the axis of described phase-shifting interferometer outgoing beam; Adjust described high reflectance concave surface taper reflection, the axis of described high reflectance concave surface taper reflection is overlapped with the axis of described phase-shifting interferometer outgoing beam, and the distance between described part printing opacity flat board and the high reflectance concave surface taper reflection to be measured should satisfy following relation:

L ≥ d 1 + d 2

= Φ 2 c tan ( 2 θ ) + Φ 2 tan θ

= Φ ( 1 + tan 2 θ ) 4 tan θ

Wherein, Φ is the beam size that incides on the high reflectance concave surface taper reflection to be measured, and θ is the cone angle of described high reflectance concave surface taper reflection to be measured;

4. the light beam of described phase-shifting interferometer outgoing is through dull and stereotyped parallel measuring beam, the light beam formation reference beam that returns through the dull and stereotyped rear surface of described part printing opacity of forming of described part printing opacity; Described measuring beam is reflected back in the phase-shifting interferometer through the dull and stereotyped former road of described part printing opacity after described high reflectance concave surface taper reflection reflection again, and this measuring beam that returns produces at described phase-shifting interferometer with the reference beam that returns from part printing opacity flat board interferes;

5. the distance of adjusting between described part printing opacity flat board and the high reflectance concave surface taper reflection to be measured obtains complete clearly interference fringe, utilize described phase-shifting interferometer to detect interference fringe, obtain the face shape information of described high reflectance concave surface taper reflection.

Compare with known technology, technique effect of the present invention is as follows:

1. utilize contactless method to realize the measurement of concave surface taper reflection, can not bring scuffing to measuring piece;

2. have simple to operately, be easy to measure, to advantages such as measuring piece not damageds.

Description of drawings

Fig. 1 is the schematic diagram of high reflectance concave surface taper reflection surface shape detection apparatus embodiment of the present invention

Fig. 2 is the structural representation of the embodiment of the invention.

Embodiment

The invention will be further described below in conjunction with drawings and Examples, but should not limit protection scope of the present invention with this.

See also first Fig. 1, Fig. 1 is the schematic diagram of high reflectance concave surface taper reflection surface testing method of the present invention.The structure of the embodiment of the invention as shown in Figure 2, its concrete structure is as follows:

1. make a part printing opacity flat board 2: coat in the latter half of dull and stereotyped 2 front surfaces of part printing opacity pitch-dark so that the light beam that incides on it is absorbed; The latter half plating reflectance coating in dull and stereotyped 2 rear surfaces of part printing opacity;

2. insert successively described part printing opacity dull and stereotyped 2 and high reflectance concave surface taper reflection 3 to be measured in the parallel beam direction of phase-shifting interferometer 1 output, the conical surface of described high reflectance concave surface taper reflection 3 to be measured is towards the light direction of phase-shifting interferometer 1;

3. adjust light path: the parallel plane of adjusting described part printing opacity flat board 2 is vertical with described parallel beam, and guarantees that the axis of described part printing opacity flat board 2 overlaps with the axis of phase-shifting interferometer 1 outgoing beam; Adjust described high reflectance concave surface taper reflection 3, the axis of described high reflectance concave surface taper reflection 3 is overlapped with the axis of phase-shifting interferometer 1 outgoing beam;

4. the light beam of described phase-shifting interferometer 1 outgoing forms parallel measuring beam through described part printing opacity dull and stereotyped 2, and the light beam that returns through described part printing opacity flat board 2 forms reference beam; Described measuring beam is reflected back in the phase-shifting interferometer 1 through the dull and stereotyped 2 former roads of described part printing opacity after described high reflectance concave surface taper reflection 3 reflections again, and this measuring beam that returns produces with the reference beam that returns from part printing opacity flat board 2 interferes;

5. the distance of adjusting between described part printing opacity dull and stereotyped (2) and the high reflectance concave surface taper reflection 3 to be measured obtains complete clearly interference fringe, utilize described phase-shifting interferometer 1 to detect interference fringe, obtain the face shape information of described high reflectance concave surface taper reflection 3.

When the distance between described part printing opacity dull and stereotyped 2 and the high reflectance concave surface taper reflection 3 to be measured satisfies following relational expression, could realize the surface shape measurement to described high reflectance concave surface taper reflection 3,

L ≥ d 1 + d 2

= Φ 2 c tan ( 2 θ ) + Φ 2 tan θ

= Φ ( 1 + tan 2 θ ) 4 tan θ

Wherein, Φ is the beam size that incides on the high reflectance concave surface taper reflection 3 to be measured, and θ is the cone angle of described high reflectance concave surface taper reflection 3 to be measured.

Claims (1)

1. the surface testing method of a high reflectance concave surface taper reflection is characterised in that the method may further comprise the steps:
1. make part printing opacity dull and stereotyped (2): coat in the latter half of dull and stereotyped (2) front surface of part printing opacity pitch-dark so that the light beam that incides on it is absorbed; The latter half plating reflectance coating in dull and stereotyped (2) rear surface of part printing opacity;
2. the parallel beam direction in phase-shifting interferometer (1) output sets gradually described part printing opacity dull and stereotyped (2) and high reflectance concave surface taper reflection to be measured (3), and the conical surface of described high reflectance concave surface taper reflection to be measured (3) is towards the light direction of phase-shifting interferometer (1);
3. adjust light path: the frontal plane of adjusting described part printing opacity dull and stereotyped (2) is vertical with described parallel beam, and guarantees that the axis of described part printing opacity dull and stereotyped (2) overlaps with the axis of described phase-shifting interferometer (1) outgoing beam; Adjust described high reflectance concave surface taper reflection (3), the axis of described high reflectance concave surface taper reflection (3) is overlapped with the axis of described phase-shifting interferometer (1) outgoing beam, and the distance between described part printing opacity dull and stereotyped (2) and the high reflectance concave surface taper reflection to be measured (3) should satisfy following relation:
L ≥ d 1 + d 2
= Φ 2 c tan ( 2 θ ) + Φ 2 tan θ
= Φ ( 1 + tan 2 θ ) 4 tan θ
Wherein, Φ is for inciding the beam size on the high reflectance concave surface taper reflection to be measured (3), and θ is the cone angle of described high reflectance concave surface taper reflection to be measured (3);
4. the light beam of described phase-shifting interferometer (1) outgoing forms parallel measuring beam through described part printing opacity dull and stereotyped (2), and the light beam that returns through dull and stereotyped (2) rear surface of described part printing opacity forms reference beam; Described measuring beam is reflected back in the phase-shifting interferometer (1) through dull and stereotyped (2) the former road of described part printing opacity after described high reflectance concave surface taper reflection (3) reflection again, and this measuring beam that returns produces at described phase-shifting interferometer (1) with the reference beam that returns from part printing opacity dull and stereotyped (2) interferes;
5. the distance of adjusting between described part printing opacity dull and stereotyped (2) and the high reflectance concave surface taper reflection to be measured (3) obtains complete clearly interference fringe, utilize described phase-shifting interferometer (1) to detect interference fringe, obtain the face shape information of described high reflectance concave surface taper reflection (3).
CN201210573251.XA 2012-12-26 2012-12-26 The surface testing method of high reflectance concave surface taper reflection CN103075975B (en)

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Publication number Priority date Publication date Assignee Title
JP2006017485A (en) * 2004-06-30 2006-01-19 Nikon Corp Device and method for measuring surface shape, manufacturing method of projection optical system, projection optical system, and projection exposing device
CN101261183A (en) * 2008-04-15 2008-09-10 中国科学院光电技术研究所 Heavy caliber aspherical mirror checking system
CN102183213A (en) * 2011-03-02 2011-09-14 中国科学院光电技术研究所 Aspherical mirror detection method based on phase measurement deflectometry
CN102506750A (en) * 2011-10-28 2012-06-20 中国科学院长春光学精密机械与物理研究所 Partial-compensation aspherical reflector surface shape detection method
CN102798353A (en) * 2012-08-20 2012-11-28 中国科学院上海光学精密机械研究所 Measuring method of axicon transmission wave surface

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006017485A (en) * 2004-06-30 2006-01-19 Nikon Corp Device and method for measuring surface shape, manufacturing method of projection optical system, projection optical system, and projection exposing device
CN101261183A (en) * 2008-04-15 2008-09-10 中国科学院光电技术研究所 Heavy caliber aspherical mirror checking system
CN102183213A (en) * 2011-03-02 2011-09-14 中国科学院光电技术研究所 Aspherical mirror detection method based on phase measurement deflectometry
CN102506750A (en) * 2011-10-28 2012-06-20 中国科学院长春光学精密机械与物理研究所 Partial-compensation aspherical reflector surface shape detection method
CN102798353A (en) * 2012-08-20 2012-11-28 中国科学院上海光学精密机械研究所 Measuring method of axicon transmission wave surface

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Title
陈念年等: "大口径光学组件面形检测系统研究", 《测控技术》 *

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Patentee before: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences

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