CN104457564B - A kind of high-precision target measuring system and method - Google Patents
A kind of high-precision target measuring system and method Download PDFInfo
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- CN104457564B CN104457564B CN201310747805.8A CN201310747805A CN104457564B CN 104457564 B CN104457564 B CN 104457564B CN 201310747805 A CN201310747805 A CN 201310747805A CN 104457564 B CN104457564 B CN 104457564B
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Abstract
A kind of high-precision target measuring system and method, including：Detection platform, optical detection unit, data collection process unit and control unit, cavity in being provided with one in the middle of the detection platform, dismountable portable plate is provided with the middle cavity, the middle cavity can be completely covered for the portable plate, the middle cavity inside sets at least one set of limit assembly, the limit assembly fixes target and the target can be driven to rotate, and the limit assembly connection drive rotating device is simultaneously driven by it；The optical detection unit includes camera lens and optical grating projection device, because detection platform and optical detection unit are all movable, by the direction and the distance that control its motion, the high-precision three-dimensional detection of the optional position to different size and shape target can be realized, and the limit assembly can drive target to rotate, make that target need not be overturn in detection process, improve detection efficiency.
Description
Technical field
The present invention relates to a kind of radiographic measurement instrument, specifically a kind of high-precision target measuring system and method.
Background technology
Field, solar film battery production field and semiconductor devices production field are manufactured in panel, is required for using
To metal coating equipment, due to its important raw material target, price is high, and practical efficiency is low, all the time as production
The important research point of cost reduction.Change target shape, improve Distribution of Magnetic Field environment, optimize carrying for equipment design etc. technology
Go out, the problem of utilization rate of target is improved to a certain extent.But actual use feelings that are how accurate, efficiently learning target
The information such as condition and utilization rate, never compares easily method.
In actual industrial production, increase over time, target material surface, which can be eclipsed, carves deep mixed groove, and
Present situation is different.Because the thickness of target is certain, its life-span is also defined, to ensure production safety, it is necessary to irregularly to target
The depth of groove and form on material surface are measured and analyzed, and have reached the maximization of target utilization.To the depth of its groove
And show that form is measured by artificial mode mostly, partly measured using mechanical system, its measurement error is larger, workload
Greatly, and measure be usually sampled measurements, without typicalness and representativeness, and for special requirement and shape target survey
Amount difficulty is big or can not measure.
There are some image measurers in the prior art, it is such as Chinese patent CN102620651A, entitled《Image measurer》
Middle to announce a kind of image measurer, it includes board computer, connects the control device of computer, is installed in the carrying work of board
The supporting part of part, the first travel mechanism, be installed in first travel mechanism and can along board XYZ three-dimensional coordinate planar movements
The first measurement camera lens, the second travel mechanism, be installed in second travel mechanism and can be moved along board coordinate plane the
Two measure camera lens, the 3rd travel mechanisms and are installed in the 3rd travel mechanism and the 3rd measurement that can be moved along board coordinate plane
Camera lens, in measurement process, by the computer regulating control device, to manipulate the first measurement alignment lenses workpiece for measurement
One surface, control second measure camera lens and the 3rd measurement camera lens movement and can be respectively aligned to two different azimuths of workpiece for measurement
Surface.
Supporting part is rotatable in the patent is installed on the platform, can drive rotary sample, reaches reduction repeatedly upset
The purpose of sample, but the patent is when measuring target, such as cylindrical target, when target length is long, it is impossible to be disposed vertically,
Can only be by its traverse on the platform, then be arranged so that when detected, the contact below cylindrical target with platform
No matter face is also to measure leveling off in the case that how platform rotates, still it must be overturn and from new settings one
Secondary measurement, time of measurement will longer and waste of manpower, and the detection of the patent uses the detection technique of two dimension, only
The feature of some of sample plane can be obtained, it is impossible to obtain the three-dimensional data of sample, the need for can not meet detection now.
The content of the invention
Therefore, the invention solves the problems that prior art must carry out upset in detection process mends and survey, and two can only be gathered
The problem of dimension data, so as to propose that a kind of target that is applied to can realize that one-shot measurement is complete after target placement using detection field
Into, without upset, and realize 3D measurement high-precision target measuring system and method.
In order to solve the above technical problems, the present invention uses following scheme：
A kind of high-precision target measuring system, including：
Detection platform, for placing target；
Optical detection unit, is arranged on above the detection platform, can be in three-dimensional range of motion, for gathering the inspection
Survey the target image placed on platform;
Data collection process unit, is connected respectively with the optical detection unit, detection platform, collection sample detection ginseng
Number, and it is calculated, handled and sent accordingly；
Control unit, is connected respectively with Data Collection processing unit respectively with optical detection unit, detection platform, receives institute
State the information after data collection process cell processing and other units are controlled；
Dismountable portable plate is provided with cavity in being provided with one in the middle of the detection platform, the middle cavity, it is described
The middle cavity can be completely covered for portable plate, and the middle cavity inside sets at least one set of limit assembly, the limit assembly
Fixed target simultaneously can drive the target to rotate, and the limit assembly connection drive rotating device is simultaneously driven by it；
The optical detection unit includes camera lens and optical grating projection device, and the optical grating projection device is projected to target
Scanning, the camera lens gathers the optical grating projection information of the optical grating projection device projection, and is sent to the data collection process
Unit.
Limit assembly described in one group includes the first locating part and the second locating part, and first locating part turns dress with described
Linkage is put, the drive rotating device sets at least one, the drive rotating device is connected with rotating shaft, the rotating shaft is flat through the detection
Platform stretches into the downside of first locating part；Gear, the rotating shaft are respectively arranged with the rotating shaft and first locating part
On gear and gear on first locating part it is mutually ratcheting, the drive rotating device passes through the rotating shaft and the described first limit
Position part linkage.
Limit assembly described in one group includes the first locating part and the second locating part, and first locating part turns dress with described
Linkage is put, the drive device sets one, and the drive rotating device is connected with rotating shaft, and the rotating shaft is stretched through the detection platform
Enter and be respectively arranged with gear, the rotating shaft on the horizontal side of first locating part, the rotating shaft and first locating part
Linked by transmission belt with multiple first locating parts.
First locating part and the second locating part include setting on two gag lever posts be arrangeding in parallel, the gag lever post respectively
The packing ring of increase friction is equipped with, distance is less than target width between two gag lever posts of first locating part, described the
Distance is less than target width between two gag lever posts of two locating parts.
Base is provided with the bottom of the detection platform, the detection platform is removably to be connected with the base；
Be respectively arranged with Y-axis guide rail in the both sides of the base, two Y-axis guide rails respectively with a portal frame
The connection of two bottoms, the portal frame can move along Y-axis on the Y-axis guide rail, also be set on the crossbeam of the portal frame
It is equipped with X axis guide rail.
The optical detection unit is connected with X-axis travel mechanism, and the X-axis travel mechanism is connected with X axis guide rail, can edge
X-axis is moved；The side of the X-axis travel mechanism is additionally provided with Z axis direction guiding rail.
The camera lens is arranged on rotatable parts, the rotatable parts at least provided with two, described rotatable parts one end with
The installing component rotates connection, and the camera lens is arranged on the other end of the rotatable parts；
It is connected with and shakes in the middle of on the upside of the connection optical grating projection device in the middle of on the downside of the installing component, the installing component
Part is put, the side of the teeter member is connected with the side of Z axis travel mechanism by couple axle, and the teeter member can be along axle
Wave；
The Z axis travel mechanism is arranged on Z axis direction guiding rail, miscellaneous part can be driven to be moved along Z axis.
The Z axis travel mechanism is moved by driven screw along Z axis, and the driven screw stretches into Z axis moving machine from upper end
External screw thread on structure, the driven screw coincide with the internal thread in the Z axis travel mechanism, and the driven screw upper end passes through
Gear is ratcheting with driving screw rod, and the driving screw rod is connected with the screw drive being arranged in X-axis travel mechanism.
The installing component is connected with the teeter member by vertical rotation axis, and the vertical rotation axis is also associated with the first drive
Dynamic device, the rotatable parts are connected by rotary shaft with installing component, and the rotary shaft is connected with the second drive device, described
Couple axle is connected with the 3rd drive device.
Multiple conflict mechanisms are provided with below the detection platform, the conflict mechanism includes cylinder, magnetic valve and sensing
Device, the conflict mechanism is used for the level for keeping detection platform.
The X axis guide rail and the Y-axis guide rail are magnetic track, and the Z axis direction guiding rail is double trapezoid slide rail.
Grating scale is provided with the optical detection unit and the portal frame, the X, Y, Z axis direction guiding rail two ends are all set
Limited level sensor.
A kind of measuring method using described measuring system, comprises the following steps：
（1）Column target is placed in the detection platform, the portable plate is pulled down, column target is placed on
On the limit assembly；
（2）The scope for needing to scan is selected in described control unit, it is flat that described control unit sends a command to detection
Drive rotating device in platform and optical detection unit, the detection platform drives target to rotate by the limit assembly, the light
Detection unit adjusting position in three dimensions is learned, target is sampled, then the data is given by sampling data transmitting and receives
Collect processing unit；
（3）The data collection process unit obtains the threedimensional model of target after handling the image of collection, pass through
The threedimensional model that three-dimensional data to original target is set up is contrasted, and is calculated the volume of consumption, is drawn the usage amount of target.
The step（1）Also include：Described control unit according to actual needs, controls multiple electromagnetism for contradicting mechanism
Valve, setting position is risen to by the detection platform, it is ensured that the levelness of the detection platform.
The step（2）Described in optical detection unit be specially the step of correct position is adjusted in three dimensions：
Described control unit controls the portal frame, X-axis travel mechanism and Z axis travel mechanism along X, Y, Z according to the scanning range of setting
Direction of principal axis is moved, and the data fed back in moving process according to grating scale and limit sensors carry out dynamic regulation.
Described control unit can also control the first driving means, the second drive device and the 3rd drive device, make
The installing component, rotatable parts and teeter member, which are turned to, needs position, and the camera lens progress for making to be arranged on rotatable parts is more
The collection in orientation.
The step（3）Specially：Composition point in the threedimensional model of the target obtained to detection carries out the meter of point data
Calculate, contrasted with the point data of former target threedimensional model, draw the volume of target consumption.
The above-mentioned technical proposal of the present invention has advantages below compared with prior art,
（1）A kind of high-precision target measuring system of the present invention, including：Detection platform, for placing target；Optics
Detection unit, is arranged on above the detection platform, can be placed in three-dimensional range of motion for gathering in the detection platform
Target image;Data collection process unit, is connected respectively with the optical detection unit, detection platform, gathers sample detection
Parameter, and it is calculated and handled accordingly, send；Control unit, with optical detection unit, detection platform difference sum
Connect, according to the information after the data collection process cell processing other units are controlled respectively according to processing unit is collected
System；Dismountable portable plate, the portable plate are provided with cavity in being provided with one in the middle of the detection platform, the middle cavity
The middle cavity can be completely covered, the middle cavity inside sets at least one set of limit assembly, the limit assembly fixes target
Material simultaneously can drive the target to rotate, and the limit assembly connection drive rotating device is simultaneously driven by it；The optical detection unit bag
Camera lens and optical grating projection device are included, the optical grating projection device carries out projection scanning to target, and the camera lens gathers the grating
The optical grating projection of projection arrangement projection, and it is sent to the data collection process unit；The present invention is middle in detection platform to be set
Middle cavity, target is when running into special nature target, held with the limit assembly and drive it to rotate, make measurement process
In target need not be carried out manual overturning and resetting sample command, and by setting the optical grating projection device and mirror
Head realizes 3D samplings, comprehensively collects the three-dimensional data of target, improves the accuracy of measurement.
（2）The pad of increase friction is provided with a kind of high-precision target measuring system of the present invention, the gag lever post
Circle, setting the packing ring of increase friction can make gag lever post more stable in the process for driving sample to rotate, it is to avoid the feelings skidded occur
Condition.
（3）A kind of high-precision target measuring system of the present invention, base is provided with the bottom of the detection platform,
The detection platform is removably to be connected with the base；Y-axis guide rail, two are respectively arranged with the both sides of the base
The Y-axis guide rail is connected with two bottoms of a portal frame respectively, and the portal frame can be on the Y-axis guide rail along Y
Axle is moved, and is additionally provided with X axis guide rail on the crossbeam of the portal frame, the side of the X-axis travel mechanism be additionally provided with Z axis to
Guide rail, the Y-axis guide rail, X axis guide rail and Z axis direction guiding rail provide three-dimensional in X, Y, Z axis to the optical detection unit
The movement in direction provides concrete implementation method, and can be expanded and reduced according to the size of material, according to reality
Using being set.
（4）A kind of high-precision target measuring system of the present invention, the camera lens is arranged on rotatable parts, described turn
Dynamic component is at least provided with two, and the rotatable parts are hinged with installing component, and the rotatable parts can be rotated along rotary shaft；It is described
Teeter member is connected with the middle of on the upside of the connection optical grating projection device in the middle of on the downside of installing component, the installing component, it is described
The side of teeter member is connected with the side of Z axis travel mechanism by couple axle, and the teeter member can be waved along axle；The Z
Axle travel mechanism is arranged on Z axis direction guiding rail, miscellaneous part can be driven to be moved along Z axis, regulation optical detection unit and target it
Between distance, the rotation of the tilting member, rotatable parts and installing component can make camera adjusting to more angles, make this be
System can collect the more more fully view data of target.
（5）On a kind of high-precision target measuring system of the present invention, the optical detection unit and the portal frame
Grating scale is provided with, the X, Y, Z axis direction guiding rail two ends are designed with limit sensors, and the grating scale and limit sensors of setting make
The optical detection unit and portal frame control more accurate, the stability of raising system in moving process.
（6）A kind of high-precision target measuring method, comprises the following steps：Column target is placed on the detection platform
On, the portable plate is pulled down, column target is placed on the limit assembly；Needs are selected in described control unit to sweep
The scope retouched, described control unit sends a command to turning in detection platform and optical detection unit, the detection platform
Device drives target to rotate by the limit assembly, optical detection unit adjusting position in three dimensions, to target
Sampled, then give the data collection process unit by sampling data transmitting；The data collection process unit is to collection
Image handled after obtain the threedimensional model of target, pass through and the threedimensional model that the three-dimensional data of original target is set up carried out
Contrast, calculates the volume of consumption, draws the usage amount of target, this method realizes one-shot measurement by rotating target, and adopts
Grating 3 Dimension Image Technique is used, the three-dimensional data of target is gathered, and accurate data model is obtained by data processing, by meter
Calculation draws the accurate consumption of target, and whole detection process can be realized and automatically controlled, and improves efficiency and saves manpower, it is to avoid
Measured in the prior art by manually or mechanically mode, its measurement error is big, the problem of workload is big.
（7）A kind of high-precision target measuring method, described control unit according to actual needs, controls multiple conflict machines
The magnetic valve of structure, setting position is risen to by the detection platform, it is ensured that the detection in the levelness of the detection platform, this method
Platform can realize dynamic equilibrium by the real-time control of described control unit, be fixation compared to detection platform in the prior art
Connection, this method can meet more industrial requirements.
Brief description of the drawings
In order that present disclosure is more likely to be clearly understood, specific embodiment and combination below according to the present invention
Accompanying drawing, the present invention is further detailed explanation, wherein
Fig. 1 is a kind of structural representation of high-precision target measuring system of the present invention；
Fig. 2 is a kind of structural representation of one embodiment of high-precision target measuring system of the present invention；
Fig. 3 is the front view of detection platform of the present invention；
Fig. 4 is the front view of optical detection unit of the present invention；
Fig. 5 is the side view of optical detection unit of the present invention.
Reference is expressed as in figure：1- detection platforms, 2- optical detection units, 3- portal frames, 4-Y axial guidances, 5-
Base, 11- contradicts cavity, the locating parts of 14- first, the locating parts of 15- second, 16- rotating shafts, 17- in mechanism, 12- portable plates, 13-
Drive rotating device, 20- first driving means, 21- optical grating projection devices, 22- camera lenses, 23- installing components, 24- rotatable parts, 25-Z
Axle travel mechanism, 26- teeter members, the drive devices of 27- the 3rd, 28- couple axles, 29- vertical rotation axis, 211-X axles travel mechanism,
212- driven screws, 213- driving screw rods, 214- screw drives, 215-Z axial guidances, 31-X axial guidances, 32- gratings
Chi.
Embodiment
The embodiment of a kind of high-precision target measuring system and method for the present invention is provided below.
Embodiment 1
A kind of high-precision target measuring system described in the present embodiment, its structured flowchart as topic 1 shown in, including：Detection is flat
Platform 1, for placing target, the detection platform 1 can be arranged as required in some existing detection platforms 1；Optics is examined
Unit 2 is surveyed, the top of detection platform 1 is arranged on, can be in three-dimensional range of motion, the optical detection unit 2 is using controllable
The travel mechanism of system carries out the movement in three dimensions, for gathering the target image placed in the detection platform 1;Data are received
Collect processing unit, using Data Collection and the mechanism of processing, be connected, adopt respectively with the optical detection unit 2, detection platform 1
Collect sample detection parameter, and it is calculated and handled accordingly, send；Control unit, can be using automatic controllers such as PLC
Part, is connected, at the Data Collection respectively with Data Collection processing unit respectively with optical detection unit 2, detection platform 1
Information after reason cell processing is controlled to other units.
Cavity 13 in being provided with one in the middle of the detection platform 1, the middle cavity 13 big I follow-up is actually needed progress
Dismountable portable plate 12 is provided with adjustment, the middle cavity 13, the portable plate 12 can cover the middle cavity 13 completely
Lid, when portable plate 12 is covered on the middle cavity 13, the present invention can be detected as other detection platforms 1, work as activity
After plate 12 is pulled down, special shape can be directed to, such as column target is detected, the middle inside of cavity 13 sets at least one set of limit
Hyte part, such as sets one group of limit assembly to meet the demand of detection limit, then can set multigroup limit assembly simultaneously, realizes
The detection of batch is there is provided efficiency, and the limit assembly fixes target and the target can be driven to rotate, the limit assembly connection
Drive rotating device 17 is simultaneously driven by it, and the drive rotating device 17 drives limit assembly rotation, and the limit assembly drives and is placed on it
On target rotation, realize automatic turning, it is to avoid manually overturn the problem of detection time brought is long.
The optical detection unit 2 includes camera lens 22 and optical grating projection device 21, and the optical grating projection device 21 is to target
Projection scanning is carried out, the camera lens 22 gathers the optical grating projection information that the optical grating projection device 21 is projected, and is sent to described
Data collection process unit, is exactly to be projected raster pattern by optical grating projection device 21 using optical grating projection 3 d objects reconstruction
In sample surface, the camera lens 22 photographs the raster pattern deformed on body surface, then the object table to absorbing
The raster pattern deformed on face is matched and calculated to determine depth information, so as to reconstruct three-dimensional body by depth information
Surface.
In the present invention, because detection platform 1 and optical detection unit 2 are all movable, by controlling it, just may be used
To control direction and the distance of its motion, it is possible to achieve different size and the high-precision three-dimensional of the optional position of shape target are examined
Survey.
Embodiment 2
On the basis of a kind of high-precision target measuring system described in embodiment 1, limit assembly described in one group is preferred
Including the first locating part 14 and the second locating part 15, first locating part 14 is preferably two gag lever posts be arrangeding in parallel,
Distance is less than target width between two gag lever posts, for target to be held, as shown in Figure 3；On the gag lever post preferably
Be provided with increase friction packing ring, the packing ring is preferably rubber ring, and second locating part 15 be arranged in parallel including two
Gag lever post, distance is less than target width between two gag lever posts；Second locating part 15 is rotatable for independence, its
It is fixed on for roller mode on its support column.When cylinder target is placed on it portion, the first locating part 14 drives rotation, now
The second passively rotation of locating part 15.
First locating part 14 and the second locating part 15 are separately positioned on the relative two ends in the inside of middle cavity 13, wherein one
Individual locating part links with the drive rotating device 17 or two locating parts link with the drive rotating device 17 respectively, according to reality
The weight of such as target is needed to be configured.
The drive rotating device 17 sets at least one, and the drive rotating device 17 is connected with rotating shaft 16, and the rotating shaft 16 is penetrated
The detection platform 1, is stretched into middle cavity 13, in order to not influence target to be placed on the limit assembly, the rotating shaft 16
In the downside of first locating part 14；It is preferred in the rotating shaft 16 and first locating part 14 to be respectively arranged with gear,
Gear in the rotating shaft 16 and gear on first locating part 14 are mutually ratcheting, as shown in figure 3, the drive rotating device 17
The rotating shaft 16 is driven to rotate, the rotating shaft 16 drives first locating part 14 to rotate by gear, and then first limit
Position part 14 drives the target rotation that is placed on it so that target in detection process without manually being overturn again, it is once complete
Into detection, the drive rotating device 17, which is set, meets slow rotate.
As the embodiment that other can be converted, can may be used also on the gag lever post with the packing ring of other increase frictions
To increase friction by being threaded, the transmission side that other can drive the first locating part 14 to rotate can be set in the rotating shaft 16
Formula, as described rotating shaft 16 is stretched into middle cavity 13 and positioned at the horizontal side of first locating part 14, the rotating shaft 16 and institute
State and drive is respectively arranged with the first locating part 14, the rotating shaft 16 passes through transmission belt and multiple first locating parts 14
Dynamic, the drive rotating device 17 drives conveyer belt by the rotating shaft 16, and the transmission belt can drive one or more first limits
Position part 14, first locating part 14 drives sample to rotate.
Embodiment 3
On the basis of a kind of high-precision target measuring system described in above example, as shown in Fig. 2 in the detection
The bottom of platform 1 is provided with base 5, and the detection platform 1 is with the base 5 to be removably connected, and the base 5 is detection
Platform 1 provides a stable working environment, and provides the effect of buffering.
Be respectively arranged with Y-axis guide rail 4 in the both sides of the base 5, two Y-axis guide rails 4 respectively with a dragon
Two bottoms connection of door frame 3, the portal frame 3 can be moved on the Y-axis guide rail 4 along Y-axis, the horizontal stroke of the portal frame 3
X axis guide rail 31 is additionally provided with beam；The preferred use magnetic track of the X axis guide rail 31 and Y-axis guide rail 4, the magnetic
Property track operation it is accurate, it is ensured that the accuracy of measurement, the optical detection unit 2 is connected with X-axis travel mechanism 211, the X
Axle travel mechanism 211 is connected with X axis guide rail 31, can be moved along X-axis；The side of the X-axis travel mechanism 211 is additionally provided with Z
Axial guidance 215, the preferred use double trapezoid slide rail of the Z axis direction guiding rail 215.
The camera lens 22 is arranged on the downside front end of rotatable parts 24, as shown in figure 4, the rotatable parts 24 are preferably
Planar shaped, and at least provided with two, described one end of rotatable parts 24 is rotated with the installing component 23 and is connected, and the camera lens 22 is set
The other end in the rotatable parts 24 is put, the installing component 23 is preferably plane, and its side number can be according to rotatable parts 24
Quantity enter line translation, set two rotatable parts 24 to meet normal detection and require there is special requirement to be further added by
Set.
Connect in the middle of the connection optical grating projection device 21 in the middle of the downside of installing component 23, the upside of installing component 23
Teeter member 26 is connected to, the side of the teeter member 26 is connected with the side of Z axis travel mechanism 25 by couple axle 28, described
Installing component 23 is connected with the teeter member 26 by vertical rotation axis 29, and the vertical rotation axis 29 is also associated with the first driving dress
20 are put, the rotatable parts 24 are connected by rotary shaft with installing component 23, the rotary shaft is connected with the second drive device, institute
State couple axle 28 and be connected with the 3rd drive device 27, the first driving means 20, the second drive device and the 3rd drive device
27 preferred use motors, described control unit and the first driving means 20, the second drive device and the 3rd drive device
27 connections, the rotation of these drive devices is controlled according to the order of input, so as to drive teeter member 26, installing component 23 and turn
The rotation of dynamic component 24, realizes that Multi-orientation multi-angle adjusts the angle of camera lens 22.
The Z axis travel mechanism 25 is arranged on Z axis direction guiding rail 215, as shown in figure 5, miscellaneous part can be driven to be transported along Z axis
It is dynamic；The Z axis travel mechanism 25 is moved by driven screw 212 along Z axis, and the driven screw 212 stretches into Z axis movement from upper end
External screw thread on mechanism 25, the driven screw 212 coincide with the internal thread in the Z axis travel mechanism, the driven screw
212 upper ends are ratcheting by gear and driving screw rod 213, the driving screw rod 213 and the spiral shell being arranged in X-axis travel mechanism 211
Bar drive mechanism 214 is connected, the preferred use motor of the screw drive 214, and it drives driving screw rod 213 to rotate, institute
State driving screw rod 213 drives driven screw 212 to rotate by ratcheting gear, and driven screw 212 drives Z axis movement after rotating
Mechanism 25 is moved in Z-direction, drives the miscellaneous part that be connected with the Z axis travel mechanism 25, adjust camera lens 22 and target it
Between distance on Z axis.
The lower section of detection platform 1 is preferably provided with multiple conflict mechanisms 11, and the conflict mechanism 11 includes cylinder, electricity
Magnet valve and sensor, the conflict mechanism 11 are used for the level for keeping detection platform 1, the magnetic valve and sensor and the control
Unit processed connection, after inputting and ordering in control unit, the control unit output order control magnetic valve is by 1 liter of detection platform
Rise, and the level for the Real-time Feedback holding platform for passing through sensor.
It is preferably provided with grating scale 32 on the optical detection unit 2 and the portal frame 3, the grating scale 32 can be with
The location of optical detection unit 2 described in accurate feedback and the portal frame 3, so that described control unit is controlled, institute
State X, Y, Z axis direction guiding rail two ends and be all preferable provided with limit sensors, the grating scale 32 and limit sensors of setting make the light
Learn detection unit 2 and portal frame 3 controls more accurate, the stability of raising system in moving process.
Embodiment 4
A kind of measuring method of high-precision target measuring system described in use above example, comprises the following steps：
（1）Column target is placed in the detection platform 1, the portable plate 12 is pulled down, column target is placed
On the limit assembly, when detecting common target such as planar targets, it is not necessary to remove portable plate 12, directly by flat target
Material is placed in the detection platform 1；
（2）The scope for needing to scan is selected in described control unit, this scope should be slightly bigger than the model of detected target
Enclose, described control unit can automatically identify that point nearest apart from HOME points, and thus start scanning work, the control
Unit sends a command to drive rotating device 17 in detection platform 1 and optical detection unit 2, the detection platform 1 by described
Limit assembly drives target rotation, and the adjusting position in three dimensions of optical detection unit 2 is sampled to target, light
Grid projection arrangement 21 can project structure light that several have coding information to testing sample, meanwhile, the camera lens 22 is synchronous to be adopted
Collect image information, decoding computing is carried out to acquired image, and collect corresponding two camera lenses using matching technique
Image in characteristic point corresponded to, the public field of vision picture of collection is calculated using matching algorithm and triangulation principle
The three dimensional point cloud of vegetarian refreshments, and these data storages are got up.（Matching technique refers to that camera lens during scanning is in kind, is needed
When relevant information in kind is converted into electronic data by machine, the matching skill between virtual coordinate system and world coordinate system
Art.Triangulation principle refer to measurement when, due between sample to camera lens and camera lens and optical grating projection device away from
From fixation, then because measurement height of specimen is different, so the grating fringe projected can also change, according to similar three
Angular principle can try to achieve its height difference.）For larger tested target, after the scanning of side is completed, the optics
Detection unit 2 automatically returns to next area starting point for needing to detect and starts to continue to scan on, until completing to sweep target
Work is retouched, then the data collection process unit is given by sampling data transmitting；
（3）The data collection process unit obtains the threedimensional model of target after handling the image of collection, in light
Learn detection head scanning during, constantly the point data detected is transported into data collection process unit, by it to collect
The data arrived are carried out after the processing such as denoising, binaryzation, refinement and amendment, the end of scan, and data collection process unit is completed to institute
There is the processing work for the data being collected into, now component gets up in three dimensions by these data, finally show to be checked
Survey the three-dimensional stereo effect figure of target.It can quickly know that target material surface very trickle pattern is special by the figure of 3 D stereo
Point, the threedimensional model set up by the three-dimensional data to original target is contrasted, the threedimensional model of the target obtained to detection
In composition point carry out point data calculating, contrasted with the point data of former target threedimensional model, draw target consume body
Product, draws the usage amount of target.
Embodiment 5
On the basis of the measuring method described in embodiment 4, the step（1）Also include：Described control unit is according to reality
Border needs, and controls multiple magnetic valves for contradicting mechanism 11, the detection platform 1 is risen into setting position, it is ensured that the inspection
Survey the levelness of platform 1.
The step（2）Described in optical detection unit 2 be specially the step of correct position is adjusted in three dimensions：
Described control unit controls the portal frame 3, X-axis travel mechanism 211 and Z axis travel mechanism 25 according to the scanning range of setting
Moved along X, Y, Z axis direction, the data fed back in moving process according to grating scale 32 and limit sensors carry out dynamic regulation,
X, Y magnetic orbit are moved under the driving of electric current by HOME points along Y direction, and the movement length of magnetic orbit passes through grating scale 32
To control, its step-length precision is up to 1/100mm.
Described control unit can also control the first driving means 20, the second drive device and the 3rd drive device
27, turning to the installing component 23, rotatable parts 24 and teeter member 26 needs position, makes to be arranged on rotatable parts 24
Camera lens 22 carry out multi-faceted collection.
Obviously, above-described embodiment is only intended to clearly illustrate example, and the not restriction to embodiment.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of change or
Change.There is no necessity and possibility to exhaust all the enbodiments.And the obvious change thus extended out or
Among changing still in the protection domain of the invention.
Claims (16)
1. a kind of high-precision target measuring system, including：
Detection platform, for placing target；
Optical detection unit, is arranged on above the detection platform, can be put down in three-dimensional range of motion for gathering the detection
The target image placed on platform；
Data collection process unit, is connected respectively with the optical detection unit, detection platform, gathers sample detection parameter, and
It is calculated, handled and sent accordingly；
Control unit, is connected respectively with the optical detection unit, detection platform and Data Collection processing unit, receives the number
According to the information collected after processing unit processes and other units are controlled；
It is characterized in that：
Dismountable portable plate, the activity are provided with cavity in being provided with one in the middle of the detection platform, the middle cavity
The middle cavity can be completely covered for plate, and the middle cavity inside sets at least one set of limit assembly, and the limit assembly is fixed
Target simultaneously can drive the target to rotate, and the limit assembly connection drive rotating device is simultaneously driven by it；
The optical detection unit includes camera lens and optical grating projection device, and the optical grating projection device carries out projection to target and swept
Retouch, the camera lens gathers the optical grating projection information of the optical grating projection device projection, and is sent to the data collection process list
Member；
Limit assembly described in one group includes the first locating part and the second locating part, the first locating part and the second locating part difference
Including two gag lever posts be arrangeding in parallel, the packing ring of increase friction, the two of first locating part are provided with the gag lever post
Distance is less than distance between target width, two gag lever posts of second locating part and is less than target between the individual gag lever post
Material width.
2. according to the high-precision target detection platform described in claim 1, it is characterised in that first locating part is turned with described
Device links, and the drive rotating device sets at least one, and the drive rotating device is connected with rotating shaft, and the rotating shaft passes through the detection
Platform stretches into the downside of first locating part；Gear, described turn are respectively arranged with the rotating shaft and first locating part
Gear on axle is mutually ratcheting with gear on first locating part, and the drive rotating device passes through the rotating shaft and described first
Locating part links.
3. according to the high-precision target detection platform described in claim 1, it is characterised in that first locating part is turned with described
Device links, and the drive rotating device sets one, and the drive rotating device is connected with rotating shaft, and the rotating shaft passes through the detection platform
Stretch on the horizontal side of first locating part, the rotating shaft and first locating part and be respectively arranged with gear, described turn
Axle is linked by transmission belt with multiple first locating parts.
4. high-precision target measuring system according to claim 1, it is characterised in that set in the bottom of the detection platform
Base is equipped with, the detection platform is removably to be connected with the base；Y-axis is respectively arranged with the both sides of the base
Guide rail, two Y-axis guide rails are connected with two bottoms of a portal frame respectively, and the portal frame can be in the Y-axis
Moved on guide rail along Y-axis, X axis guide rail is additionally provided with the crossbeam of the portal frame.
5. high-precision target measuring system according to claim 4, it is characterised in that the optical detection unit is connected with
X-axis travel mechanism, the X-axis travel mechanism is connected with the X axis guide rail, can be moved along X-axis；The X-axis travel mechanism
Side is additionally provided with Z axis direction guiding rail.
6. high-precision target measuring system according to claim 5, it is characterised in that
The camera lens is arranged on rotatable parts, and the rotatable parts are at least provided with two, and described rotatable parts one end is with installing
Part rotates connection, and the camera lens is arranged on the other end of the rotatable parts；
Wag is connected with the middle of on the upside of the connection optical grating projection device in the middle of on the downside of the installing component, the installing component
Part, the side of the teeter member is connected with the side of Z axis travel mechanism by couple axle, and the teeter member can shake along axle
Pendulum；The Z axis travel mechanism is arranged on the Z axis direction guiding rail, miscellaneous part can be driven to be moved along Z axis.
7. high-precision target measuring system according to claim 6, it is characterised in that the Z axis travel mechanism by from
Dynamic screw rod is moved along Z axis, the external screw thread that the driven screw is stretched on the Z axis travel mechanism, the driven screw from upper end
It is coincide with the internal thread in the Z axis travel mechanism, the driven screw upper end is ratcheting with driving screw rod by gear, the master
Dynamic screw rod is connected with the screw drive being arranged in the X-axis travel mechanism.
8. high-precision target measuring system according to claim 6, it is characterised in that the installing component is waved with described
Part is connected by vertical rotation axis, and the vertical rotation axis is also associated with first driving means, and the rotatable parts pass through rotary shaft
It is connected with the installing component, the rotary shaft is connected with the second drive device, the couple axle is connected with the 3rd drive device.
9. high-precision target measuring system according to claim 8, it is characterised in that be provided with below the detection platform
Multiple conflict mechanisms, the conflict mechanism includes cylinder, magnetic valve and sensor, and the conflict mechanism is used to keep detection platform
Level.
10. high-precision target measuring system according to claim 5, it is characterised in that the X axis guide rail and the Y
Axial guidance is magnetic track, and the Z axis direction guiding rail is double trapezoid slide rail.
11. high-precision target measuring system according to claim 5, it is characterised in that the optical detection unit and institute
State and grating scale is provided with portal frame, the X, Y, Z axis direction guiding rail two ends are designed with limit sensors.
12. a kind of measuring method of the high-precision target measuring system any one of use claim 1-11, its feature
It is, comprises the following steps：
(1) column target is placed in the detection platform, the portable plate is pulled down, column target is placed on the limit
On hyte part；
(2) scope for needing to scan is selected in described control unit, it is flat that described control unit sends a command to the detection
Drive rotating device in platform and the optical detection unit, the detection platform drives target to rotate by the limit assembly, institute
Optical detection unit adjusting position in three dimensions is stated, target is sampled, then the number is given by sampling data transmitting
According to collection processing unit；
(3) the data collection process unit obtains the threedimensional model of target after handling the image of collection, by original
The threedimensional model that the three-dimensional data of beginning target is set up is contrasted, and is calculated the volume of consumption, is drawn the usage amount of target.
13. a kind of measuring method of the high-precision target measuring system described in use claim 9, it is characterised in that including with
Lower step：
(1) column target is placed in the detection platform, the portable plate is pulled down, column target is placed on the limit
On hyte part；
(2) scope for needing to scan is selected in described control unit, it is flat that described control unit sends a command to the detection
Drive rotating device in platform and the optical detection unit, the detection platform drives target to rotate by the limit assembly, institute
Optical detection unit adjusting position in three dimensions is stated, target is sampled, then the number is given by sampling data transmitting
According to collection processing unit；
(3) the data collection process unit obtains the threedimensional model of target after handling the image of collection, by original
The threedimensional model that the three-dimensional data of beginning target is set up is contrasted, and is calculated the volume of consumption, is drawn the usage amount of target；
The step (1) also includes：Described control unit according to actual needs, controls multiple magnetic valves for contradicting mechanism,
The detection platform is risen into setting position, it is ensured that the levelness of the detection platform.
14. measuring method according to claim 13, it is characterised in that optical detection unit described in the step (2)
The step of correct position is adjusted in three dimensions be specially：Described control unit controls institute according to the scanning range of setting
State portal frame, X-axis travel mechanism and Z axis travel mechanism to move along X, Y, Z axis direction, according to grating scale and limit in moving process
The data of level sensor feedback carry out dynamic regulation.
15. measuring method according to claim 13, it is characterised in that described control unit can also control described first
Drive device, the second drive device and the 3rd drive device, turning to the installing component, rotatable parts and teeter member needs
Position is wanted, makes to be arranged on the camera lens on rotatable parts and carries out multi-faceted collection.
16. the measuring method according to claim 12 or 13, it is characterised in that the step (3) is specially：To detecting
To target threedimensional model in composition point carry out the calculating of point data, carried out pair with the point data of former target threedimensional model
Than drawing the volume of target consumption.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105758863B (en) * | 2016-03-31 | 2018-08-14 | 浙江工业大学 | Utilize the whether qualified device of bar shaped photoelectric sensor detection guard frame rail |
| CN106247986B (en) * | 2016-09-07 | 2019-01-29 | 东北林业大学 | Material surface three-dimensional scanner based on intelligent sensing |
| CN106197319B (en) * | 2016-09-07 | 2018-09-14 | 东北林业大学 | A kind of material surface three-dimensional scanner operating method based on intelligent sensing |
| CN106908224A (en) * | 2017-03-31 | 2017-06-30 | 广州计量检测技术研究院 | Projector equipment optical property measurement apparatus and measuring method based on motion control |
| CN107507178B (en) * | 2017-08-31 | 2020-06-05 | 宁波视睿迪光电有限公司 | Grating film detection method and device |
| CN107966275B (en) * | 2017-11-24 | 2020-01-07 | 中山依瓦塔光学有限公司 | Lens detection equipment capable of simulating multi-posture detection |
| CN108287222A (en) * | 2018-04-28 | 2018-07-17 | 高志浩 | A kind of wallboard turn check-out console |
| CN109275975B (en) * | 2018-11-20 | 2023-11-03 | 中国标准化研究院 | Device and method for measuring human body size under special posture |
| CN109855571A (en) * | 2018-12-08 | 2019-06-07 | 东曹(上海)电子材料有限公司 | A kind of detection method and its device of FPD sputtering target material flatness |
| CN110420888A (en) * | 2019-08-09 | 2019-11-08 | 福建（泉州）哈工大工程技术研究院 | A kind of the cooperation robot materials-sorting system and its application method of view-based access control model |
| CN113579544A (en) * | 2021-08-11 | 2021-11-02 | 宁波江丰电子材料股份有限公司 | Method for detecting welding bonding rate of silicon carbide carbon target material assembly |
| CN114812399A (en) * | 2022-04-11 | 2022-07-29 | 合肥江丰电子材料有限公司 | Automatic device for measuring length of planar target assembly and using method thereof |
| CN117433468B (en) * | 2023-12-21 | 2024-03-05 | 睿泽(天津)管业科技有限公司 | Hot dip galvanized pipe galvanization thickness detection device and detection method thereof |
Family Cites Families (5)
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| US6411387B1 (en) * | 1996-12-16 | 2002-06-25 | Nikon Corporation | Stage apparatus, projection optical apparatus and exposure method |
| JP2001012922A (en) * | 1999-06-29 | 2001-01-19 | Minolta Co Ltd | Three-dimensional data-processing device |
| CN102620651B (en) * | 2011-01-28 | 2015-11-25 | 鸿富锦精密工业（深圳）有限公司 | Image measurer |
| CN102565190A (en) * | 2011-12-26 | 2012-07-11 | 昆山全亚冠环保科技有限公司 | Detection mechanism for sputtering target |
| CN102628671A (en) * | 2012-03-29 | 2012-08-08 | 中国人民解放军第二炮兵工程学院 | Three-dimensional coordinate measuring method based on single-camera two-color linear structured light |
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2013
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