CN104457564B - A kind of high-precision target measuring system and method - Google Patents

Abstract

A high-precision target measurement system and method, including: a detection platform, an optical detection unit, a data collection and processing unit, and a control unit, a hollow cavity is arranged in the middle of the detection platform, and a detachable movable plate is arranged on the hollow cavity , the movable plate can completely cover the hollow cavity, at least one set of limit components are arranged inside the hollow cavity, the limit components fix the target and can drive the target to rotate, the limit components are connected The rotating device is driven by it; the optical detection unit includes a lens and a grating projection device. Since both the detection platform and the optical detection unit are movable, by controlling the direction and distance of their movement, it is possible to realize the detection of targets of different specifications and shapes. High-precision three-dimensional detection of any position, and the limit component can drive the target to rotate, so that the target does not need to be turned over during the detection process, which improves the detection efficiency.

Description

A high-precision target measurement system and method

technical field

The invention relates to an image measuring instrument, in particular to a high-precision target measuring system and method.

Background technique

In the field of panel manufacturing, solar thin film battery production and semiconductor device production, metal coating equipment is required. Due to the high price and low actual utilization rate of its important raw material targets, it has always been an important research point for reducing production costs. . The proposal of technologies such as changing the shape of the target, improving the magnetic field distribution environment, optimizing equipment design, etc., has improved the utilization rate of the target to a certain extent. However, there has never been a more convenient method for how to accurately and quickly know the actual usage and utilization rate of the target.

In actual industrial production, with the increase of time, the surface of the target will be etched with grooves of different depths, and the status quo is different. Due to the certain thickness of the target, its life is also limited. In order to ensure the safety of production, it is necessary to measure and analyze the depth and shape of the groove on the surface of the target from time to time, so as to maximize the utilization of the target. The depth and shape of the grooves are mostly measured manually, and some are measured mechanically. The measurement error is large, the workload is heavy, and the measurement is usually a sampling measurement, which is not typical and representative, and for special It is difficult or impossible to measure the size and shape of the target.

There are some image measuring instruments in the prior art, such as the Chinese patent CN102620651A, which is named "Image Measuring Instrument", which discloses an image measuring instrument, which includes a machine computer, a control device connected to the computer, and a load-bearing workpiece installed on the machine platform. The carrying part, the first moving mechanism, the first measuring lens installed on the first moving mechanism and movable along the XYZ three-dimensional coordinate plane of the machine table, the second moving mechanism, installed on the second moving mechanism and The second measuring lens that can move along the machine coordinate plane, the third moving mechanism, and the third measuring lens installed on the third moving mechanism and that can move along the machine coordinate plane, during the measurement process, the control is controlled by computer The device is used to control the first measuring lens to align with one surface of the workpiece to be measured, control the movement of the second measuring lens and the third measuring lens, and can respectively align the surfaces of the workpiece with two different orientations.

In this patent, the bearing part is rotatably installed on the platform, which can drive the sample to rotate, so as to reduce the number of times of flipping the sample. However, when the target is measured in this patent, such as a cylindrical target, when the target length is long, It cannot be placed vertically, but it can only be placed horizontally on the platform. Then when it is placed for detection, the contact surface between the cylindrical target and the platform cannot be measured no matter how the platform is rotated. It is still necessary to turn over and reset a measurement, the measurement time will be longer and waste manpower, and the detection of the patent uses a two-dimensional detection technology, which can only obtain some characteristics of the sample plane, and cannot obtain the three-dimensional of the sample The data cannot meet the needs of the current detection.

Contents of the invention

For this reason, the present invention aims to solve the problem that the existing technology must carry out flipping supplementary measurement during the detection process, and can only collect two-dimensional data, thus proposing a method suitable for the field of target use detection that can realize a measurement after the target is placed. A high-precision target measurement system and method that realizes 3D measurement without flipping.

In order to solve the problems of the technologies described above, the present invention adopts the following solutions:

A high-precision target measurement system, including:

A detection platform for placing targets;

An optical detection unit, arranged above the detection platform, can move within a three-dimensional range, and is used to collect images of targets placed on the detection platform;

The data collection and processing unit is respectively connected with the optical detection unit and the detection platform, collects the sample detection parameters, and performs corresponding calculation, processing and transmission;

The control unit is connected to the optical detection unit, the detection platform and the data collection and processing unit respectively, receives the information processed by the data collection and processing unit and controls other units;

A hollow cavity is arranged in the middle of the detection platform, and a detachable movable plate is arranged on the hollow cavity, and the movable plate can completely cover the hollow cavity, and at least one set of limiting components is arranged inside the hollow cavity, so that The limiting component fixes the target and can drive the target to rotate, and the limiting component is connected to and driven by the driving device;

The optical detection unit includes a lens and a grating projection device. The grating projection device projects and scans the target material. The lens collects the grating projection information projected by the grating projection device and sends it to the data collection and processing unit.

A set of limiting components includes a first limiting member and a second limiting member, the first limiting member is linked with the driving and rotating device, at least one of the driving and rotating devices is provided, and the driving and rotating device is connected to There is a rotating shaft, and the rotating shaft passes through the detection platform and extends into the underside of the first limiting member; the rotating shaft and the first limiting member are respectively provided with gears, and the gears on the rotating shaft and the The gears on the first limiting member mesh with each other, and the driving device is linked with the first limiting member through the rotating shaft.

A set of the limiting components includes a first limiting member and a second limiting member, the first limiting member is linked with the driving device, one driving device is provided, and the driving device is connected to a rotating shaft , the rotating shaft passes through the detection platform and extends into the horizontal side of the first limiting member, the rotating shaft and the first limiting member are respectively provided with gears, and the rotating shaft communicates with a plurality of Describe the linkage of the first limiter.

The first limiting member and the second limiting member respectively include two limiting rods arranged in parallel, and washers for increasing friction are arranged on the limiting rods, and the two limiting members of the first limiting member The distance between the position rods is smaller than the width of the target material, and the distance between the two limit rods of the second position limiting member is smaller than the width of the target material.

A base is provided at the bottom of the detection platform, and the detection platform is detachably connected to the base;

Y-axis guide rails are respectively arranged on both sides of the base, and the two Y-axis guide rails are respectively connected with the two bottom ends of a gantry frame, and the gantry frame can move along the Y axis on the Y-axis guide rails. axis movement, and X-axis guide rails are also arranged on the beam of the gantry.

The optical detection unit is connected with an X-axis moving mechanism, and the X-axis moving mechanism is connected with the X-axis guide rail and can move along the X-axis; one side of the X-axis moving mechanism is also provided with a Z-axis guide rail.

The lens is arranged on a rotating part, and there are at least two rotating parts, one end of the rotating part is rotatably connected to the installation part, and the lens is arranged on the other end of the rotating part;

The lower side of the installation part is connected to the grating projection device in the middle, and the upper side of the installation part is connected to a swing part in the middle. One side of the swing part is connected to one side of the Z-axis moving mechanism through a linkage shaft. The swing Parts can rock along the axis;

The Z-axis moving mechanism is arranged on the Z-axis guide rail and can drive other components to move along the Z-axis.

The Z-axis moving mechanism moves along the Z-axis through a driven screw, and the driven screw extends into the Z-axis moving mechanism from the upper end, and the external thread on the driven screw coincides with the internal thread in the Z-axis moving mechanism , the upper end of the driven screw is meshed with the driving screw through a gear, and the driving screw is connected with the screw driving mechanism arranged on the X-axis moving mechanism.

The mounting part is connected to the swinging part through a vertical shaft, and the vertical shaft is also connected to a first driving device, and the rotating part is connected to the mounting part through a rotating shaft, and the rotating shaft is connected to a second driving device. The linkage shaft is connected with a third driving device.

A plurality of conflicting mechanisms are arranged below the detection platform, the conflicting mechanisms include cylinders, solenoid valves and sensors, and the conflicting mechanisms are used to maintain the level of the detection platform.

The X-axis guide rail and the Y-axis guide rail are magnetic guide rails, and the Z-axis guide rails are double trapezoidal slide rails.

The optical detection unit and the gantry are provided with grating rulers, and limit sensors are provided at both ends of the X, Y and Z axis guide rails.

A measurement method using the measurement system, comprising the following steps:

(1) Place the columnar target on the detection platform, remove the movable plate, and place the columnar target on the limit assembly;

(2) Select the range to be scanned in the control unit, and the control unit sends commands to the detection platform and the optical detection unit, and the driving device in the detection platform drives the target to rotate through the limit assembly , the optical detection unit adjusts the position in the three-dimensional space, samples the target material, and then sends the sampled data to the data collection and processing unit;

(3) The data collection and processing unit processes the collected images to obtain a 3D model of the target, and compares the 3D model established by the 3D data of the original target to calculate the consumed volume and obtain the usage of the target quantity.

The step (1) further includes: the control unit controls a plurality of electromagnetic valves of the interference mechanism according to actual needs, and raises the detection platform to a set position to ensure the levelness of the detection platform.

The step of adjusting the optical detection unit to a suitable position in the three-dimensional space in the step (2) is specifically: the control unit controls the gantry, the X-axis moving mechanism and the Z-axis movement according to the set scanning range The mechanism moves along the X, Y, and Z axes, and dynamically adjusts according to the data fed back by the grating ruler and the limit sensor during the movement.

The control unit can also control the first driving device, the second driving device and the third driving device, so that the mounting part, the rotating part and the swinging part can be rotated to the desired position, so that the lens mounted on the rotating part can be multi-rotated. Orientation collection.

The step (3) specifically includes: calculating the point data of the constituent points in the detected three-dimensional model of the target, and comparing it with the point data of the original three-dimensional model of the target to obtain the consumed volume of the target.

The above technical solution of the present invention has the following advantages compared with the prior art,

(1) A high-precision target measurement system according to the present invention, including: a detection platform for placing targets; an optical detection unit, which is arranged above the detection platform and can move within a three-dimensional range for collecting The image of the target placed on the detection platform; the data collection and processing unit is connected with the optical detection unit and the detection platform respectively, collects the sample detection parameters, and performs corresponding calculation and processing on them, and sends them; the control unit, connected with the optical detection The detection unit and the detection platform are respectively connected to the data collection and processing unit, and other units are controlled according to the information processed by the data collection and processing unit; a hollow cavity is arranged in the middle of the detection platform, and a detachable movable plate, the movable plate can completely cover the hollow cavity, and at least one set of limiting components are arranged inside the hollow cavity, the limiting components fix the target and can drive the target to rotate, and the limiting component The bit assembly is connected to and driven by the driving device; the optical detection unit includes a lens and a grating projection device, and the grating projection device performs projection scanning on the target material, and the lens collects the grating projection projected by the grating projection device, and Send it to the data collection and processing unit; the present invention sets a hollow cavity on the detection platform, and when encountering a target with special properties, the target is held by the limit assembly and driven to rotate, so that the measurement process The target material does not need to be turned over manually and the sampling order is reset, and 3D sampling is realized by setting the grating projection device and the lens, and the three-dimensional data of the target material is comprehensively collected, thereby improving measurement accuracy.

(2) In the high-precision target measurement system described in the present invention, the washer that increases friction is provided on the limit rod, and the washer that increases friction can make the limit rod more stable in the process of driving the sample to rotate, avoiding Slippage occurs.

(3) A high-precision target measurement system according to the present invention, a base is provided at the bottom of the detection platform, and the detection platform is detachably connected to the base; on both sides of the base, respectively Y-axis guide rails are provided, and the two Y-axis guide rails are connected to the two bottom ends of a gantry respectively, and the gantry can move along the Y-axis on the Y-axis guide rails, and the gantry An X-axis guide rail is also provided on the beam, and a Z-axis guide rail is also provided on one side of the X-axis moving mechanism, and the Y-axis guide rail, X-axis guide rail and Z-axis guide rail provide the optical detection unit with Provides a specific implementation method for the movement in the three-dimensional directions of the X, Y, and Z axes, and can expand and shrink it according to the size of the material, and set it according to the actual application.

(4) A high-precision target measurement system according to the present invention, the lens is set on the rotating part, at least two of the rotating parts are arranged, the rotating part is hinged with the mounting part, and the rotating part can be moved along the The rotation axis rotates; the lower side of the installation part is connected to the grating projection device, and the upper side of the installation part is connected to a swing part in the middle, and one side of the swing part is connected to one side of the Z-axis moving mechanism through a linkage shaft , the swinging part can swing along the axis; the Z-axis moving mechanism is arranged on the Z-axis guide rail, which can drive other parts to move along the Z-axis, and adjust the distance between the optical detection unit and the target. The swinging part, the rotating The rotation of components and mounting parts can adjust the lens to more angles, so that the system can collect more and more comprehensive image data of the target.

(5) A high-precision target measurement system according to the present invention, the optical detection unit and the gantry are provided with grating scales, and limit sensors are provided at both ends of the X, Y, and Z axis guide rails , the set grating ruler and limit sensor make the control of the optical detection unit and the gantry more precise during the moving process, and improve the stability of the system.

(6) A method for measuring a high-precision target, comprising the following steps: placing a columnar target on the detection platform, removing the movable plate, and placing the columnar target on the limit assembly; The range to be scanned is selected in the control unit, the control unit sends commands to the detection platform and the optical detection unit, the driving device in the detection platform drives the target to rotate through the limit assembly, and the optical The detection unit adjusts the position in the three-dimensional space, samples the target material, and then sends the sampled data to the data collection and processing unit; the data collection and processing unit processes the collected images to obtain a three-dimensional model of the target material. The 3D model established by the 3D data of the original target is compared, the consumed volume is calculated, and the usage of the target is obtained. This method realizes a measurement by rotating the target, and uses grating 3D imaging technology to collect the 3D data of the target , and obtain an accurate data model through data processing, and calculate the precise consumption of the target. The entire detection process can be automatically controlled, improving efficiency and saving manpower, and avoiding manual or mechanical measurement in the prior art. The problem of large measurement error and heavy workload.

(7) A high-precision target measurement method, the control unit controls a plurality of electromagnetic valves of the interference mechanism according to actual needs, and raises the detection platform to a set position to ensure the levelness of the detection platform The detection platform in this method can realize dynamic balance through the real-time control of the control unit. Compared with the fixed connection of the detection platform in the prior art, this method can meet more industrial needs.

Description of drawings

In order to make the content of the present invention more easily understood, the present invention will be described in further detail below according to specific embodiments of the present invention in conjunction with the accompanying drawings, wherein

Fig. 1 is a schematic structural view of a high-precision target measurement system according to the present invention;

Fig. 2 is a schematic structural view of an embodiment of a high-precision target measurement system according to the present invention;

Fig. 3 is the front view of detection platform of the present invention;

Fig. 4 is the front view of the optical detection unit of the present invention;

Fig. 5 is a side view of the optical detection unit of the present invention.

The reference signs in the figure are represented as: 1-detection platform, 2-optical detection unit, 3-gantry frame, 4-Y-axis guide rail, 5-base, 11-interference mechanism, 12-movable plate, 13-hollow cavity, 14-first limiting member, 15-second limiting member, 16-rotating shaft, 17-driving device, 20-first driving device, 21-grating projection device, 22-lens, 23-installation parts, 24- Rotating part, 25-Z-axis moving mechanism, 26-swinging part, 27-third driving device, 28-interlocking shaft, 29-vertical rotating shaft, 211-X-axis moving mechanism, 212-driven screw, 213-driving screw , 214-screw drive mechanism, 215-Z-axis guide rail, 31-X-axis guide rail, 32-grating ruler.

detailed description

The following provides specific implementations of the high-precision target measurement system and method of the present invention.

Example 1

A high-precision target measurement system described in this embodiment has a structural block diagram as shown in Question 1, including: a detection platform 1 for placing targets, and the detection platform 1 can be installed on some existing detection platforms as required. On the platform 1; the optical detection unit 2 is arranged above the detection platform 1 and can move in a three-dimensional range, and the optical detection unit 2 uses a controllable moving mechanism to move in a three-dimensional space for collecting the detection The image of the target placed on the platform 1; the data collection and processing unit, which adopts the data collection and processing mechanism, is connected with the optical detection unit 2 and the detection platform 1 respectively, collects the sample detection parameters, and performs corresponding calculation and processing on them , sending; the control unit can adopt automatic control devices such as PLC, and is connected with the optical detection unit 2, the detection platform 1 and the data collection and processing unit respectively, and controls other units according to the information processed by the data collection and processing unit.

A hollow cavity 13 is arranged in the middle of the detection platform 1, and the size of the hollow cavity 13 can be adjusted according to actual needs. The hollow cavity 13 is provided with a detachable movable plate 12, and the movable plate 12 can move the The hollow cavity 13 is completely covered. When the movable plate 12 covers the hollow cavity 13, the present invention can detect like other detection platforms 1. When the movable plate 12 is removed, it can detect special shapes, such as cylindrical targets. , the hollow cavity 13 is provided with at least one set of limit components, if setting one set of limit components cannot meet the requirements of the detection amount, then multiple sets of limit components can be set at the same time to achieve batch detection and improve efficiency. The positioning component fixes the target and can drive the target to rotate. The limiting component is connected to and driven by the driving and rotating device 17. The driving and rotating device 17 drives the limiting component to rotate, and the limiting component drives the The upper target rotates to realize automatic flipping, avoiding the problem of long detection time caused by manual flipping.

The optical detection unit 2 includes a lens 22 and a grating projection device 21, the grating projection device 21 projects and scans the target, the lens 22 collects the grating projection information projected by the grating projection device 21, and sends it to the The data collection and processing unit uses the grating projection to reconstruct the three-dimensional object, which is to project the grating pattern on the surface of the measured sample through the grating projection device 21, and the lens 22 photographs the deformed grating pattern on the surface of the object, and then the captured image on the surface of the object The deformed grating pattern is matched and calculated to determine the depth information, so that the surface of the three-dimensional object is reconstructed from the depth information.

In the present invention, since both the detection platform 1 and the optical detection unit 2 are movable, by controlling them, the direction and distance of their movement can be controlled, and high-precision three-dimensional measurement of any position of targets with different specifications and shapes can be realized. detection.

Example 2

On the basis of the high-precision target measurement system described in Embodiment 1, a set of the limiting components preferably includes a first limiting member 14 and a second limiting member 15, and the first limiting member 14 is preferably two limit rods arranged in parallel, the distance between the two limit rods is smaller than the width of the target, and is used to support the target, as shown in Figure 3; A gasket that increases friction is provided, the gasket is preferably a rubber ring, and the second limiting member 15 includes two limiting rods arranged in parallel, and the distance between the two limiting rods is smaller than the target width; The limiter 15 is independently rotatable, and it is fixed on its supporting column in the form of rollers. When the cylindrical target is placed on its upper part, the first limiting member 14 is driven to rotate, and at this time the second limiting member 15 is passively rotated.

The first limiting member 14 and the second limiting member 15 are respectively arranged at opposite ends of the hollow cavity 13, one of the limiting members is linked with the driving device 17 or the two limiting members are respectively connected to the two limiting members. The driving and rotating device 17 is linked and configured according to actual needs such as the weight of the target.

There is at least one driving and rotating device 17, and the driving and rotating device 17 is connected with a rotating shaft 16. The rotating shaft 16 penetrates the detection platform 1 and extends into the hollow cavity 13. In order not to affect the target material placed on the limit On the bit assembly, the rotating shaft 16 is located on the lower side of the first limiting member 14; the rotating shaft 16 and the first limiting member 14 are preferably provided with gears respectively, and the gears on the rotating shaft 16 are connected with the The gears on the first limiting member 14 mesh with each other, as shown in FIG. 3 , the driving device 17 drives the rotating shaft 16 to rotate, and the rotating shaft 16 drives the first limiting member 14 to rotate through the gears. , and then the first limiting member 14 drives the target placed on it to rotate, so that the target does not need to be manually turned over during the detection process, and the detection can be completed at one time, and the driving and rotating device 17 can be set to meet the slow rotation.

As other convertible embodiments, other friction-increasing washers can also be provided on the limiting rod, and friction can also be increased by setting threads, and the rotating shaft 16 can be provided with other transmission modes that can drive the first limiting member 14 to rotate. , if the rotating shaft 16 extends into the hollow cavity 13 and is located on the horizontal side of the first limiting member 14, the rotating shaft 16 and the first limiting member 14 are respectively provided with transmission wheels, and the rotating shaft 16 is linked with a plurality of first limiting members 14 through a transmission belt, and the driving device 17 drives a conveyor belt through the rotating shaft 16, and the driving belt can drive one or more first limiting members 14, and the first The limiting member 14 drives the sample to rotate.

Example 3

On the basis of a high-precision target measurement system described in the above embodiments, as shown in Figure 2, a base 5 is provided at the bottom of the detection platform 1, and the detection platform 1 and the base 5 are interchangeable. The disassembled connection, the base 5 provides a stable working environment for the detection platform 1 and provides a buffering effect.

Y-axis guide rails 4 are respectively arranged on both sides of the base 5, and the two Y-axis guide rails 4 are respectively connected to the two bottom ends of a gantry 3, and the gantry 3 can be positioned on the Y-axis. Move along the Y axis on the guide rail 4, and the crossbeam of the gantry 3 is also provided with an X-axis guide rail 31; the X-axis guide rail 31 and the Y-axis guide rail 4 preferably adopt magnetic guide rails, and the magnetic rails run Accurate, to ensure the accuracy of the measurement, the optical detection unit 2 is connected with an X-axis moving mechanism 211, the X-axis moving mechanism 211 is connected with the X-axis guide rail 31, and can move along the X-axis; the X-axis moving mechanism One side of the 211 is also provided with a Z-axis guide rail 215, and the Z-axis guide rail 215 preferably adopts double trapezoidal slide rails.

The lens 22 is arranged on the lower front end of the rotating part 24. As shown in FIG. connected, the lens 22 is arranged at the other end of the rotating part 24, the mounting part 23 is preferably a plane, and the number of sides can be changed according to the number of rotating parts 24, and setting two rotating parts 24 can satisfy the normal Detection requirements, if there are special needs, you can add more settings.

The lower side of the installation part 23 is connected with the grating projection device 21 in the middle, and the upper side of the installation part 23 is connected with a swing part 26 in the middle, and one side of the swing part 26 is linked with one side of the Z-axis moving mechanism 25. The shaft 28 is connected, the mounting part 23 is connected with the swinging part 26 through a vertical shaft 29, and the vertical shaft 29 is also connected with the first driving device 20, and the rotating part 24 is connected with the mounting part 23 through a rotating shaft, so The rotating shaft is connected with a second driving device, the linkage shaft 28 is connected with a third driving device 27, the first driving device 20, the second driving device and the third driving device 27 are preferably motors, and the control The unit is connected with the first driving device 20, the second driving device and the third driving device 27, and controls the rotation of these driving devices according to the input command, thereby driving the rotation of the swinging part 26, the mounting part 23 and the rotating part 24 to realize Multi-directional and multi-angle adjustment lens 22 angles.

The Z-axis moving mechanism 25 is arranged on the Z-axis guide rail 215, and as shown in FIG. 5 , it can drive other parts to move along the Z-axis; The driven screw 212 extends into the Z-axis moving mechanism 25 from the upper end, and the external thread on the driven screw 212 coincides with the internal thread in the Z-axis moving mechanism, and the upper end of the driven screw 212 is connected to the driving screw 213 through a gear. Teething, the active screw 213 is connected with the screw driving mechanism 214 arranged on the X-axis moving mechanism 211, the screw driving mechanism 214 preferably adopts a motor, which drives the active screw 213 to rotate, and the active screw 213 is through gearing The gear of the driven screw 212 drives the rotation of the driven screw 212, and the driven screw 212 drives the Z-axis moving mechanism 25 to move in the Z-axis direction, drives other components connected with the Z-axis moving mechanism 25, and adjusts the distance between the lens 22 and the target. The distance on the Z axis.

The bottom of the detection platform 1 is preferably provided with a plurality of interference mechanisms 11, the interference mechanisms 11 include cylinders, electromagnetic valves and sensors, the interference mechanisms 11 are used to maintain the level of the detection platform 1, the electromagnetic valves and sensors and The control unit is connected. When the control unit inputs a command, the control unit outputs a command to control the electromagnetic valve to detect the rise of the platform 1, and maintain the level of the platform through the real-time feedback of the sensor.

The optical detection unit 2 and the gantry 3 are preferably provided with a grating ruler 32, and the grating ruler 32 can accurately feed back the positions of the optical detection unit 2 and the gantry 3, so that the control The two ends of the X, Y, and Z-axis guide rails are preferably provided with limit sensors, and the grating ruler 32 and limit sensors are set so that the optical detection unit 2 and the gantry 3 can be controlled more accurately during the movement process. Accurate, improve the stability of the system.

Example 4

A measurement method using the high-precision target measurement system described in the above embodiments, comprising the following steps:

(1) Place the columnar target on the detection platform 1, remove the movable plate 12, and place the columnar target on the limit assembly. When detecting ordinary targets such as planar targets, no The movable plate 12 needs to be removed, and the planar target is directly placed on the detection platform 1;

(2) Select the range to be scanned in the control unit, which should be slightly larger than the range of the target to be detected, and the control unit will automatically identify the point closest to the HOME point, and start scanning from there , the control unit sends commands to the detection platform 1 and the optical detection unit 2, the driving and rotating device 17 in the detection platform 1 drives the target to rotate through the limit assembly, and the optical detection unit 2 in the three-dimensional space Adjust the position, sample the target material, the grating projection device 21 will project a plurality of pieces of structured light with coded information onto the sample to be tested, and at the same time, the lens 22 collects image information synchronously, performs decoding operations on the collected images, and Matching technology is used to match the feature points in the images collected by the corresponding two lenses, and the matching algorithm and triangulation measurement principle are used to calculate the 3D point cloud data of the collected common field of view pixels, and store these data. (Matching technology refers to the matching technology between the virtual coordinate system and the world coordinate system when the lens needs to convert the relevant information of the real object into electronic data through the machine during the process of scanning the real object. The triangular measurement principle means that when measuring, due to the measured sample If the distance between the lens and the lens and the grating projection device is fixed, the grating stripes projected will also change due to the different heights of the measured samples, and the height difference can be obtained according to the principle of similar triangles.) For larger The target to be tested, when the scanning of one side is completed, the optical detection unit 2 automatically returns to the starting point of the next area to be detected and continues scanning until the scanning of the target is completed, and then the sampling data is sent to The data collection and processing unit;

(3) The data collection and processing unit processes the collected images to obtain a three-dimensional model of the target, and transmits the detected point data to the data collection and processing unit from time to time during the scanning process of the optical detection head. The collected data is processed by denoising, binarization, thinning and correction. After scanning, the data collection and processing unit completes the processing of all the collected data. At this time, these data are assembled in three-dimensional space. Finally, a three-dimensional rendering of the target to be detected is presented. Through the three-dimensional graphics, we can quickly know the very fine topographic characteristics of the target surface. By comparing the three-dimensional model established by the three-dimensional data of the original target, we can perform point data on the component points in the three-dimensional model of the target obtained by detection. The calculation of the target is compared with the point data of the original target 3D model to obtain the volume consumed by the target and the usage of the target.

Example 5

On the basis of the measurement method described in Embodiment 4, the step (1) further includes: the control unit controls a plurality of electromagnetic valves of the interference mechanism 11 according to actual needs, and raises the detection platform 1 to Set the position to ensure the levelness of the detection platform 1 .

The step of adjusting the optical detection unit 2 to a proper position in the three-dimensional space in the step (2) is specifically: the control unit controls the gantry 3, the X-axis moving mechanism 211 and the The Z-axis moving mechanism 25 moves along the X, Y, and Z axes. During the movement, it is dynamically adjusted according to the data fed back by the grating ruler 32 and the limit sensor. The X, Y magnetic tracks are driven by the current along the Y axis from the HOME point. direction movement, the movement length of the magnetic track is controlled by the grating ruler 32, and the step accuracy can reach 1/100mm.

The control unit can also control the first driving device 20, the second driving device and the third driving device 27, so that the mounting part 23, the rotating part 24 and the swinging part 26 can be rotated to the desired position, so that the The camera lens 22 on 24 carries out multi-directional collection.

Apparently, the above-mentioned embodiments are only examples for clear description, rather than limiting the implementation. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. And the obvious changes or changes derived therefrom are still within the scope of protection of the present invention.

Claims (16)

1. a kind of high-precision target measuring system, including：

Detection platform, for placing target；

Optical detection unit, is arranged on above the detection platform, can be put down in three-dimensional range of motion for gathering the detection The target image placed on platform；

Data collection process unit, is connected respectively with the optical detection unit, detection platform, gathers sample detection parameter, and It is calculated, handled and sent accordingly；

Control unit, is connected respectively with the optical detection unit, detection platform and Data Collection processing unit, receives the number According to the information collected after processing unit processes and other units are controlled；

It is characterized in that：

Dismountable portable plate, the activity are provided with cavity in being provided with one in the middle of the detection platform, the middle cavity The middle cavity can be completely covered for plate, and the middle cavity inside sets at least one set of limit assembly, and the limit assembly is fixed Target simultaneously can drive the target to rotate, and the limit assembly connection drive rotating device is simultaneously driven by it；

The optical detection unit includes camera lens and optical grating projection device, and the optical grating projection device carries out projection to target and swept Retouch, the camera lens gathers the optical grating projection information of the optical grating projection device projection, and is sent to the data collection process list Member；

Limit assembly described in one group includes the first locating part and the second locating part, the first locating part and the second locating part difference Including two gag lever posts be arrangeding in parallel, the packing ring of increase friction, the two of first locating part are provided with the gag lever post Distance is less than distance between target width, two gag lever posts of second locating part and is less than target between the individual gag lever post Material width.

2. according to the high-precision target detection platform described in claim 1, it is characterised in that first locating part is turned with described Device links, and the drive rotating device sets at least one, and the drive rotating device is connected with rotating shaft, and the rotating shaft passes through the detection Platform stretches into the downside of first locating part；Gear, described turn are respectively arranged with the rotating shaft and first locating part Gear on axle is mutually ratcheting with gear on first locating part, and the drive rotating device passes through the rotating shaft and described first Locating part links.

3. according to the high-precision target detection platform described in claim 1, it is characterised in that first locating part is turned with described Device links, and the drive rotating device sets one, and the drive rotating device is connected with rotating shaft, and the rotating shaft passes through the detection platform Stretch on the horizontal side of first locating part, the rotating shaft and first locating part and be respectively arranged with gear, described turn Axle is linked by transmission belt with multiple first locating parts.

4. high-precision target measuring system according to claim 1, it is characterised in that set in the bottom of the detection platform Base is equipped with, the detection platform is removably to be connected with the base；Y-axis is respectively arranged with the both sides of the base Guide rail, two Y-axis guide rails are connected with two bottoms of a portal frame respectively, and the portal frame can be in the Y-axis Moved on guide rail along Y-axis, X axis guide rail is additionally provided with the crossbeam of the portal frame.

5. high-precision target measuring system according to claim 4, it is characterised in that the optical detection unit is connected with X-axis travel mechanism, the X-axis travel mechanism is connected with the X axis guide rail, can be moved along X-axis；The X-axis travel mechanism Side is additionally provided with Z axis direction guiding rail.

6. high-precision target measuring system according to claim 5, it is characterised in that

The camera lens is arranged on rotatable parts, and the rotatable parts are at least provided with two, and described rotatable parts one end is with installing Part rotates connection, and the camera lens is arranged on the other end of the rotatable parts；

Wag is connected with the middle of on the upside of the connection optical grating projection device in the middle of on the downside of the installing component, the installing component Part, the side of the teeter member is connected with the side of Z axis travel mechanism by couple axle, and the teeter member can shake along axle Pendulum；The Z axis travel mechanism is arranged on the Z axis direction guiding rail, miscellaneous part can be driven to be moved along Z axis.

7. high-precision target measuring system according to claim 6, it is characterised in that the Z axis travel mechanism by from Dynamic screw rod is moved along Z axis, the external screw thread that the driven screw is stretched on the Z axis travel mechanism, the driven screw from upper end It is coincide with the internal thread in the Z axis travel mechanism, the driven screw upper end is ratcheting with driving screw rod by gear, the master Dynamic screw rod is connected with the screw drive being arranged in the X-axis travel mechanism.

8. high-precision target measuring system according to claim 6, it is characterised in that the installing component is waved with described Part is connected by vertical rotation axis, and the vertical rotation axis is also associated with first driving means, and the rotatable parts pass through rotary shaft It is connected with the installing component, the rotary shaft is connected with the second drive device, the couple axle is connected with the 3rd drive device.

9. high-precision target measuring system according to claim 8, it is characterised in that be provided with below the detection platform Multiple conflict mechanisms, the conflict mechanism includes cylinder, magnetic valve and sensor, and the conflict mechanism is used to keep detection platform Level.

10. high-precision target measuring system according to claim 5, it is characterised in that the X axis guide rail and the Y Axial guidance is magnetic track, and the Z axis direction guiding rail is double trapezoid slide rail.

11. high-precision target measuring system according to claim 5, it is characterised in that the optical detection unit and institute State and grating scale is provided with portal frame, the X, Y, Z axis direction guiding rail two ends are designed with limit sensors.

12. a kind of measuring method of the high-precision target measuring system any one of use claim 1-11, its feature It is, comprises the following steps：

(1) column target is placed in the detection platform, the portable plate is pulled down, column target is placed on the limit On hyte part；

(2) scope for needing to scan is selected in described control unit, it is flat that described control unit sends a command to the detection Drive rotating device in platform and the optical detection unit, the detection platform drives target to rotate by the limit assembly, institute Optical detection unit adjusting position in three dimensions is stated, target is sampled, then the number is given by sampling data transmitting According to collection processing unit；

(3) the data collection process unit obtains the threedimensional model of target after handling the image of collection, by original The threedimensional model that the three-dimensional data of beginning target is set up is contrasted, and is calculated the volume of consumption, is drawn the usage amount of target.

13. a kind of measuring method of the high-precision target measuring system described in use claim 9, it is characterised in that including with Lower step：

(1) column target is placed in the detection platform, the portable plate is pulled down, column target is placed on the limit On hyte part；

(2) scope for needing to scan is selected in described control unit, it is flat that described control unit sends a command to the detection Drive rotating device in platform and the optical detection unit, the detection platform drives target to rotate by the limit assembly, institute Optical detection unit adjusting position in three dimensions is stated, target is sampled, then the number is given by sampling data transmitting According to collection processing unit；

(3) the data collection process unit obtains the threedimensional model of target after handling the image of collection, by original The threedimensional model that the three-dimensional data of beginning target is set up is contrasted, and is calculated the volume of consumption, is drawn the usage amount of target；

The step (1) also includes：Described control unit according to actual needs, controls multiple magnetic valves for contradicting mechanism, The detection platform is risen into setting position, it is ensured that the levelness of the detection platform.

14. measuring method according to claim 13, it is characterised in that optical detection unit described in the step (2) The step of correct position is adjusted in three dimensions be specially：Described control unit controls institute according to the scanning range of setting State portal frame, X-axis travel mechanism and Z axis travel mechanism to move along X, Y, Z axis direction, according to grating scale and limit in moving process The data of level sensor feedback carry out dynamic regulation.

15. measuring method according to claim 13, it is characterised in that described control unit can also control described first Drive device, the second drive device and the 3rd drive device, turning to the installing component, rotatable parts and teeter member needs Position is wanted, makes to be arranged on the camera lens on rotatable parts and carries out multi-faceted collection.

16. the measuring method according to claim 12 or 13, it is characterised in that the step (3) is specially：To detecting To target threedimensional model in composition point carry out the calculating of point data, carried out pair with the point data of former target threedimensional model Than drawing the volume of target consumption.