CN207007736U - A kind of workpiece microscopic defect detecting system control device - Google Patents

A kind of workpiece microscopic defect detecting system control device Download PDF

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Publication number
CN207007736U
CN207007736U CN201720927119.2U CN201720927119U CN207007736U CN 207007736 U CN207007736 U CN 207007736U CN 201720927119 U CN201720927119 U CN 201720927119U CN 207007736 U CN207007736 U CN 207007736U
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motor
microscope
control device
focusing
detecting system
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张仁奇
袁冬
侯立兵
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Electric Power Research Institute of Guizhou Power Grid Co Ltd
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Electric Power Research Institute of Guizhou Power Grid Co Ltd
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Abstract

The utility model discloses a kind of workpiece microscopic defect detecting system control device, including field controller and monitor terminal, monitor terminal is connected to field controller by wireless module, microscope is also connected to by wireless module, field controller is connected with the three-dimensional motor of microscope three-dimensional position adjustment platform and the motor of focusing of microscope fine setting;The utility model adjusts microscopical X to, Y-direction and Z-direction amount of movement by three-dimensional motor, and using the motor fine setting object lens position of focusing, pass through remote monitoring terminal, realize the long-range operation of microscope and the collection of the metallographic of monitoring and Surface Flaw, without artificial disturbance, greatly improve accuracy of detection and detection efficiency, image data acquiring is clear, it is easy to post-processing, wireless connection, scene caused by reducing cable connection is big by ectocine, and data transfer is reliable and stable, and the utility model, which also has, controls the characteristics of simple.

Description

A kind of workpiece microscopic defect detecting system control device
Technical field
A kind of workpiece microscopic defect detecting system control device is the utility model is related to, belongs to metallography technical field.
Background technology
In existing large-scale workpiece scene metallography microscope mirror device, microscope stand moves by two magnetic pillars and manually Dynamic platform composition, two magnetic are the same as in a plane.When metal lographic examination is made at scene, for planar shaped large-scale workpiece, metallographic shows Micro mirror is easy for can be vertical with workpiece surface;But for pipeline, channel bend and complex surface large-scale workpiece, due to can not Workpiece surface can be processed into sufficiently large plane, therefore be difficult metallography microscope endoscope objective lenses is mutually hung down with workpiece metal lographic examination point plane Directly, it is difficult to obtain clearly metallographic visual field, metallographic structure observation and evaluation are had a strong impact on.Therefore, on-plane surface large-scale workpiece shows Field metal lographic examination turns into the work that metal material physical and chemical inspection engineer has most feared.
When making metal lographic examination at the scene simultaneously, existing adjustment, focusing to mobile station is all manual progress, due to manual behaviour As external force is applied to metallographic microscope system, certain hang down can occur in the presence of external force for metallographic microscope and mounting system Straight skew and shake, have a strong impact on the image quality of metallographic microscope;Because focusing stepping is not easy to grasp by hand, Jiao is easily caused Away from deficiency or excessive, metallograph is not clear enough as matter, and manual operations is coarse, it is impossible to which metallographic crystal grain and details are surveyed Amount, live metallographic structure are not easy the requirement for meeting trickle observation and finely measuring.
The content of the invention
The utility model solve technical problem be:A kind of workpiece microscopic defect detecting system control device is provided, improved Band large-scale metal part metal lographic examination efficiency, image quality, quality inspection, mitigate staff labor intensity, reduce it is artificial because The vertical Numerical control bracket of large-scale workpiece scene metallographic microscope arbitrary surface of the interference of element, to solve to ask present in prior art Topic.
The technical scheme that the utility model is taken is:A kind of workpiece microscopic defect detecting system control device, including scene Controller and monitor terminal, monitor terminal are connected to field controller by wireless module, are also connected to by wireless module aobvious Micro mirror, field controller are connected with the three-dimensional motor of microscope three-dimensional position adjustment platform and the electricity of focusing of microscope fine setting Machine.
Preferably, above-mentioned wireless module uses WiFi module.
Preferably, the wireless ccd video cameras of WiFi to eyepiece collection video are provided with above-mentioned microscope, WiFi is wireless Ccd video camera is connected to monitor terminal by WiFi wireless modules.
Preferably, above-mentioned three-dimensional motor includes X to motor, Y-direction motor and Z-direction motor, adopts Use stepper motor.
Preferably, above-mentioned field controller is also associated with X to travel switch, Y-direction travel switch and Z-direction travel switch, X to Travel switch, Y-direction travel switch and Z-direction travel switch use touching switch.
Preferably, above-mentioned field controller tests microscope X to, Y-direction and Z-direction be mobile and the rotary coding of object lens focusing Device.
Field controller is connected to the motor that three-dimensional motor and focusing of microscope are finely tuned, motor by motor driver Driver is arranged in platform base, the groove of connection motor driver control panel is provided with platform base, groove side is set The interface of connection control panel is equipped with, interface includes connection field controller interface, three-dimensional motor interface and the motor of fine setting Interface.
The beneficial effects of the utility model:Compared with prior art, the utility model is adjusted aobvious by three-dimensional motor The X of micro mirror, by remote monitoring terminal, is realized aobvious to, Y-direction and Z-direction amount of movement, and using the motor fine setting object lens position of focusing The long-range operation of micro mirror and the collection of the metallographic of monitoring and Surface Flaw, without artificial disturbance, greatly improve accuracy of detection And detection efficiency, image data acquiring is clear, is easy to post-processing, wireless connection, scene is by outer caused by reducing cable connection Boundary influences greatly, and data transfer is reliable and stable, realizes the raising of metal parts metal lographic examination efficiency, image quality is more preferable, examines matter Amount is higher, mitigates the labor intensity of staff, the large-scale workpiece scene metallographic microscope for reducing the interference of human factor is any Curved vertical Numerical control bracket, the utility model, which also has, controls the characteristics of simple.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model;
Fig. 2 is microscope junction of the present utility model cross-sectional view;
Fig. 3 is that the right side of the present utility model regards cross-sectional view;
Fig. 4 is three-dimensional position adjustment platform structure schematic diagram of the present utility model;
Fig. 5 is the microscopical connection sleeve plate structural representation of connection of the present utility model;
Fig. 6 is universal lift support dimensional structure diagram of the present utility model;
Fig. 7 is universal lift support forward sight structural representation of the present utility model;
Fig. 8 is universal lift support left view structural representation of the present utility model;
Fig. 9 is universal lift support backsight structural representation of the present utility model;
Figure 10 is universal lift support right side structural representation of the present utility model;
Figure 11 is universal lift support overlooking the structure diagram of the present utility model;
Figure 12 is universal lift support fastener structural representation of the present utility model;
Figure 13 is control principle schematic diagram of the present utility model.
Embodiment
Below, the utility model is described further with reference to accompanying drawing and specific embodiment.
Embodiment 1:As shown in Fig. 1-Figure 13, a kind of workpiece microscopic defect detecting system control device, including field control Device and monitor terminal, monitor terminal are connected to field controller by wireless module, are also connected to microscope by wireless module, Field controller is connected with the three-dimensional motor of microscope three-dimensional position adjustment platform and the motor of focusing of microscope fine setting.
Preferably, above-mentioned wireless module uses WiFi module.
Preferably, the wireless ccd video cameras of WiFi to eyepiece collection video are provided with above-mentioned microscope, WiFi is wireless Ccd video camera is connected to monitor terminal by WiFi wireless modules.
Preferably, above-mentioned three-dimensional motor includes X to motor, Y-direction motor and Z-direction motor, adopts Use stepper motor.
Preferably, above-mentioned field controller is also associated with X to travel switch, Y-direction travel switch and Z-direction travel switch, X to Travel switch, Y-direction travel switch and Z-direction travel switch use touching switch.
Preferably, above-mentioned field controller tests microscope X to, Y-direction and Z-direction be mobile and the rotary coding of object lens focusing Device.
Field controller is connected to the motor that three-dimensional motor and focusing of microscope are finely tuned, motor by motor driver Driver is arranged in platform base, the groove of connection motor driver control panel is provided with platform base, groove side is set The interface of connection control panel is equipped with, interface includes connection field controller interface, three-dimensional motor interface and the motor of fine setting Interface, convenient to connect each motor in platform base, more compact structure is easy to loading and unloading.
Motor driver forms:The driving plate of motor driver drives master controller chip, driving stepper motor by motor Chip, DC motor Driver chip and communication interface circuit composition, stepper motor driver chip, DC motor Driver chip with And communication interface circuit is connected on motor driving master controller chip;Its function of motor driver:Master controller chip passes through Communication interface circuit receives the instruction that the control panel of field controller is sent, to drive 3 stepper motors and 1 direct current generator to turn Dynamic, wherein stepper motor is used for the three-dimensional movement of drive control camera lens top to bottom, left and right, front and rear, and direct current generator is used for drive control Focusing in camera lens, camera lens is mobile and the speed of focusing is adjusted by field controller control panel.
Field controller part:The control panel of field controller is mainly by live Master control chip, WIFI communication mould Block, keystroke interface circuit, power circuit and communication interface circuit composition, WIFI communication module, keystroke interface circuit, power supply electricity Road and communication interface circuit electrically connect with live Master control chip;Field controller function:Live Master control chip is adopted in real time Collect the state of button on keystroke interface circuit, and order, motor driving plate are sent to motor driving plate by communication interface circuit According to the order received come Driving Stepping Motor and direct current generator, meanwhile, Master control chip can be also gathered from WIFI moulds The instruction of block, and order is sent to motor driving plate by communication interface circuit, motor driving plate according to the order received come Driving Stepping Motor and direct current generator, WiFi module receives the order that the client such as PC or mobile phone issues, for driving The rotation of motor.
Embodiment 2:As shown in Fig. 1-Figure 13, above-mentioned control device is used for a kind of workpiece microscopic defect detecting system, and this is System includes microscope 1, microscope three-dimensional position adjustment platform 2 and universal lift support 3, microscope 1 and is fixedly connected on microscope On three-dimensional position adjustment platform 2, the lower end of three-dimensional position adjustment platform 2 is fixedly connected in universal lift support 3.
Preferably, above-mentioned microscope 1 includes object lens 4, and object lens 4 are arranged on objective holder 5, and the upper end of objective holder 5 is connected to mirror Cylinder 6, object lens micromatic setting is provided with objective holder 5.
Preferably, the above-mentioned upper end of objective holder 5 can be embedded into the lower end of lens barrel 6 up and downly, and object lens micromatic setting includes Limition orientation screw 7, the one end of limition orientation screw 7 are fixedly connected on objective holder 5, and the other end passes through the vertical bar on lens barrel 6 Shape groove 8 carries out guide and limit, and the outer end of limition orientation screw 7 is mounted in the inner spiral groove of focusing nut 9, and focusing nut 9 can The lower end of lens barrel 6 is actively socketed in, the focusing outer cylinder of nut 9 is arranged to tooth-shape structure, the master being meshed with the focusing flank of tooth of nut 9 Moving gear 10 is connected to the output shaft of motor 11, and motor 11 is fixedly connected on lens barrel 6 by motor cabinet 12, and focusing nut 9 rotates Limition orientation screw 7 can be driven to move up and down, motor 11 uses direct current generator.
Preferably, above-mentioned 5 times installation limited location focusing nuts 13 of focusing nut, spacing focusing nut 13 are connected to focusing spiral shell On the screw thread of female 9 junctions, the stroke that nut 9 moves up and down of focusing can be promoted.
Preferably, above-mentioned objective holder 5 is provided with protective cover 14, and the upper end of protective cover 14 is by being internally threaded to nut of focusing On the screw thread of 5 junctions;
Objective holder 5 is cylinder, and the external diameter of objective holder 5 is equal to the internal diameter of lens barrel 6, and lower end inner wall is machined with the interior spiral shell of M20 × 0.75 Line, for installing object lens, internal thread length 7mm, the female ends of the inwall of objective holder 1 are machined with the high steps of 2mm, step thickness 2 Mm, the outer wall of objective holder 5 middle part is machined with 2 × M 2 positioning screw hole, for installing limition orientation screw 7;The lower end of lens barrel 6 processes There is 0.75 external screw thread, external thread section length is 10mm, and the internal diameter of lens barrel 6 is equal to the external diameter of objective holder 1, and the outer wall of lens barrel 6 is machined with The vertical bar-shaped trough of limition orientation screw 7, trough width are the spacing end diameter of guider screw 7;The inner of limition orientation screw 7 is Cylinder single ended bolt, bolt thread M2, the long 2mm of bolt thread, outer end is bolt head, and its body diameter is Φ 3mm, bolt head Body length 2mm;The tooth-shape structure of focusing nut 9, the modulus of its toothed region is 0.5 mould, and the focusing endoporus of nut 9 is inside spin line, The diameter of bore of nut 9 of focusing is the external diameter of lens barrel 6, and focus the endoporus wide 3mm of inside spin line of nut 9, the endoporus inside spin line of nut 9 of focusing Deep 2mm;Spacing focusing nut 13 is cylindrical smooth, and outside diameter is the focusing outside diameter of nut 9, and the spacing focusing endoporus of nut 13 is 0.75 internal thread, spacing focusing nut 13 are used for the position of nut 9 positioning of focusing.
A kind of focus adjustment method of the coaxial light microscope electric micro-inching focus control of monotubular, by controlling stepper motor to rotate, Stepper motor drives the two gears rotation being meshed, and driving focusing nut 9 rotates, and drives limition orientation screw 7 in focusing nut 9 Moved up and down in inner spiral groove, the bar-shaped trough that limition orientation screw 7 can be held along lens barrel 6 moves up and down, so as to realize object lens Focusing up and down.
Preferably, above-mentioned motor cabinet 12 is provided with the mounting hole of lens barrel 6 and motor installing hole, and the mounting hole of lens barrel 6 is circular, mirror The cylinder a diameter of external diameter of lens barrel 6 of 6 mounting holes, focusing stepping motor mounting holes are rectangle, and size is more bigger than focusing stepper motor, convenient Embedded motor, and fixed by the ring flange of motor.
Above-mentioned three-dimensional microscope three-dimensional position adjustment platform 2 is fixed including Z-direction, 18, Z-direction portable plate 17, Y-direction portable plate 20 and X is to portable plate 21, and the side of Z-direction portable plate 17 is fixedly connected with the connection registering 16 of connection microscope lens barrel, and opposite side leads to Cross slide block guide rail pair and be connected to Z-direction fixed plate 18, and the Z-direction driving that driving Z-direction portable plate 17 moves up and down is installed in side Motor 19, Z-direction motor 19 are driven by the ball-screw screw pair of connection, and Z-direction fixed plate 18 is the T-shaped plate stood upside down Structure, its lower end are fixedly attached to Y-direction portable plate 20, and the lower end of Y-direction portable plate 20 may be movably coupled to X by slide block guide rail pair To portable plate 21, and the Y-direction motor 22 for driving the movement of Y-direction portable plate is provided with to the side of portable plate 21 in X, Y-direction driving Motor 22 is connected to Y-direction portable plate 20 by ball-screw screw pair, and X is movable by slide block guide rail pair to the lower end of portable plate 21 Ground is connected on platform base 23, and the side of platform base 23 is provided with driving X to the X that portable plate 21 moves to motor 24, X To motor 24 by the secondary connection X of ball-screw screw to portable plate 21, motor driver is provided with platform base 23, its Side is provided with interface, and the connection between side is connected using sliding block and guide rail, and three-dimensional motor uses stepper motor, Stepper motor is moved by ball screw for movable slider, and this connection movement relation has the advantages that simple in construction, reliable; Stepper motor driver is connected on miniature stepper motor, stepper motor driver is connected with field controller, scene Controller is connected with monitor terminal computer, can thus utilize the digital control acquisition system meter of live metallographic in computer Calculation machine control software, differential movement driving, differential measurement are carried out to live metallographic microscope Numerical control bracket and metallographic microscope CCD Control and the calculating such as driving, differential focusing driving, photo acquisition, length-measuring meter calculation.
Preferably, above-mentioned universal lift support 3 includes base 301, main binodal Universal arm 302, the secondary and of binodal Universal arm 303 The lower end of instrument support base 304, main binodal Universal arm 302 and secondary binodal Universal arm 303 is fixedly connected with base 301, on End is fixedly connected with instrument support base 304, and main binodal Universal arm 302 is identical with the secondary structure of binodal Universal arm 303 and can lock Tightening position.
Preferably, above-mentioned main binodal Universal arm 302 includes pole 305, and the upper end of pole 305 is connected to by ball pivot 1 First support bar 307, the upper end of first support bar 307 are hinged to second support bar 309, second support bar 309 by hinge 1 Upper end is connected to the 3rd support bar 311 by double end ball pivot 310, and the upper end of the 3rd support bar 311 is hinged to by hinge 2 312 Four support bars 313, the upper end of the 4th support bar 313 are connected to the support being connected with the bottom of instrument support base 304 by ball pivot 2 314 On platform 315, fastener is provided with ball pivot 1 and ball pivot 2 312 and double end ball pivot 310.
Preferably, above-mentioned fastener includes tie down screw 316 and locking push rod 317, and tie down screw 316 is screwed into hinge one 308 or hinge 2 312 and it is locked, locking push rod 317 is built into first support bar 307, second support bar 309th, in the 3rd support bar 311 or the 4th support bar 313, one end is resisted against in the ball surface in ball pivot, and the other end is resisted against lock On the eccentric wheel 318 being fixedly connected on tight screw rod 316.
Preferably, above-mentioned base 301 is an empty van structure, and side is provided with retrousse case lid 319, and case lid 319 passes through The rotary shaft 320 of rear side is connected on base 301.
Preferably, above-mentioned also to include field controller and monitor terminal, monitor terminal is connected to scene by wireless module Controller, is also connected to microscope by wireless module, and field controller is connected with the three of microscope three-dimensional position adjustment platform The motor finely tuned to motor and microscope.
Above-mentioned microscope 1 include object lens, eyepiece, partial mirror, light source tube, LED flashlight, video camera attaching nut, WiFi is wireless ccd video camera, motor is fitted into motor cabinet, then by driving gear assembling on motor output shaft;Will dress The motor cabinet prepared is sleeved on lens barrel;Object lens are fixed on objective holder, then objective holder is fitted into lens barrel, pass through guiding Stop screw is fixed, and focussing distance is carried out by moving up and down guide and limit screw;Focusing nut sleeve is attached on lens barrel, and protected Demonstrate,prove guide and limit screw to screw in the inner spiral groove of focusing nut, sliding motor seat, make driving gear and focusing nut external gear Engagement;Spacing focusing nut is attached on lens barrel, is loaded on object lens protective cover, adjusts focusing nut, the position of motor cabinet, really Protect focusing nut can lighter turn, lock object lens protective cover and motor cabinet with clamping screw.Driven and focused by controlled motor Nut rotation, guide and limit screw is allowed to be moved in focusing nut inside spin line, guide and limit screw can be held perpendicular along lens barrel Moved up and down in vertical bar shaped groove, so as to realize the focusing up and down of object lens;Eyepiece is installed on imaging end in lens barrel, partial mirror peace At lens barrel inner light source interface tube, light source tube is installed on the outside of lens barrel, and vertical with lens barrel, LED flashlight passes through screw thread and light source Pipe is connected, and LED flashlight light is projected in object lens by light source tube, partial mirror;Video camera attaching nut be arranged on lens barrel into As end, WiFi is wireless, and ccd video camera is connected by video camera attaching nut's screw thread with lens barrel.Due to being adjusted using driving stepper motor It is burnt, it is possible to achieve microscope long-distance micro-moving is focused, and the enlarged drawing signal of microscope ocular can be wirelessly transmitted to monitoring with WiFi Terminal.
A kind of workpiece microscopic defect detecting system control device, including microscope 1, microscope three-dimensional position adjustment platform 2 With universal lift support 3, microscope 1 is fixedly connected on microscope three-dimensional position adjustment platform 2, three-dimensional position adjustment platform 2 Lower end is fixedly connected in universal lift support 3.
Use principle:Three-dimensional position adjustment platform is installed in universal lift support, microscope is adjusted installed in three-dimensional position Flatten on platform, X, Y, Z three-dimensional Driving Stepping Motor power supply and control line the motor driver connection of three-dimensional position adjustment platform, electricity The power supply and control line of machine driver are connected with field controller, and field controller passes through WiFi module and remote control computer (Monitor terminal)Connection, microscope is by WiFi module to remote control computer transmission video signal, remote control computer X, Y, Z three-dimensional Driving Stepping Motor of three-dimensional position adjustment platform are controlled by two sets of WiFi signals, controls microscopical fine motion The motor of focusing, vision signal is received, is realized to the movement of microscope X-direction, Y-direction movement, Z-direction rough focusing, microscope thing The remote control of mirror fine motion focusing, real-time reception, observation microscopic defect image, and realize measurement and the digitlization pipe of microscopic defect Reason.
Drawbacks described above detecting system has the following advantages that:
(1)The utility model is used in the metal lographic examination of workpiece scene, by universal lift support, can quickly realize object lens Perpendicular to metallographic point surface, metal parts metal lographic examination efficiency can be significantly improved, is greatly enhanced metal lographic examination quality, is mitigated The labor intensity of staff;And universal support height of lifting is adjustable, the metallographic inspection of workpiece scene is being carried out using this structure When testing, it is ensured that for micro objective in object lens protective cover and from being 1~2mm with a distance from protective cover thing end, it is universal that adjustment length is adjustable The length of lift support ensures that microscope is effectively fixed, and overall fixation can preferably meet the requirement of inspection technology;
(2)Because the device can make micro objective and workpiece metallographic point automatic vertical, and keep vertical fixed, make metallographic Observing and taking pictures becomes very simple, avoids the levelling difficult, micro objective of current workpiece metallurgical systems and workpiece metallographic point from hanging down The defects of straight difficult, workpiece metal lographic examination is set to be changed into high efficiency, high quality, simply and readily implement;Simultaneously because the present apparatus can hang down Straight positioning, so the polishing amount to workpiece can be reduced, it is ensured that workpiece configurations by big damage, it is artificial not save polishing processing;
(3)Three-dimensional position adjustment platform can be realized on the support of top to bottom, left and right, front and rear motion, the X of the support to, Y-direction, Z Controlled to the stepper motor in three directions by computer and realize motion, so when doing metallographic test, the adjustment of metallographic microscope Can manipulates adjustment by computer, and because stepper motor is controlled by computer, moment of torsion caused by stepper motor is system Internal force, vertical shift and shake will not be caused to system, because stepper motor can carry out differential control, with reference to fine thread silk Bar, system can implement 0.01mm stepping movement, so as to realize the close-up of metallographic structure and measurement;
(4)The utility model coordinates more accurate live metallographic microscope simultaneously(Such as Xuzhou, person of outstanding talent founds live metallography microscope Mirror), it is possible to achieve large-scale workpiece scene direct measurement metallographic grain size, micro-crack size, and realize high-accuracy laboratory platform The high-resolution metallographic image shooting function of formula metallographic microscope, and can significantly improve metal lographic examination matter using the utility model Amount, the reliable and intuitive of metal lographic examination analysis are improved, reduces the interference of human factor, improves operating efficiency.
(5)The utility model driving focusing nut, after focusing nut rotation, drives limition orientation spiral shell by controlled motor Nail is moved up and down, so that object lens move up and down adjustment, the helicoid of helicla flute is smoothly finely tuned, avoid it is microscopical shake and Displacement, easy to adjust quick, Adjustment precision is high, can so significantly improve band large-scale metal part metal lographic examination efficiency, greatly Metal lographic examination quality is improved, mitigates the labor intensity of staff;
(6)The utility model connects instrument support base by Universal arm, can realize the universal adjustment of instrument support base, from And microscope and test point vertical adjusting are realized, and ensure vertically to fix, instrument detection is become very simple, avoid at present greatly The defects of levelling difficult, instrument of type workpiece sensing instrument rocks, large-scale workpiece microscopic defect is set to verify as high efficiency, high-quality Amount, simply and readily implement;Simultaneously because of present apparatus energy perpendicular positioning, so the polishing amount to workpiece can be reduced, it is ensured that outside workpiece Shape by big damage, does not save polishing processing manually, in addition, the supporting way of major-minor Universal arm, bearing capacity is bigger, and support is more Reliable and stable, measurement is more accurate.
It is described above, only specific embodiment of the present utility model example, the scope of protection of the utility model not office It is limited to this.Be familiar with the those skilled in the art in the technical scope that the utility model discloses, can easily find change or Substitute mode, these should all cover within the scope of protection of the utility model.Therefore, the scope of protection of the utility model should be with The scope of the claims is defined.

Claims (7)

  1. A kind of 1. workpiece microscopic defect detecting system control device, it is characterised in that:Including field controller and monitor terminal, prison Control terminal is connected to field controller by wireless module, is also connected to microscope, field controller connection by wireless module There are the three-dimensional motor of microscope three-dimensional position adjustment platform and the motor of focusing of microscope fine setting.
  2. A kind of 2. workpiece microscopic defect detecting system control device according to claim 1, it is characterised in that:Wireless module Using WiFi module.
  3. A kind of 3. workpiece microscopic defect detecting system control device according to claim 1, it is characterised in that:In microscope The wireless ccd video cameras of WiFi to eyepiece collection video are provided with, WiFi is wireless, and ccd video camera is connected by WiFi wireless modules To monitor terminal.
  4. A kind of 4. workpiece microscopic defect detecting system control device according to claim 1, it is characterised in that:Three-dimensional drives Motor includes X to motor, Y-direction motor and Z-direction motor, using stepper motor.
  5. A kind of 5. workpiece microscopic defect detecting system control device according to claim 1, it is characterised in that:Field control Device is also associated with X to travel switch, Y-direction travel switch and Z-direction travel switch, and X is to travel switch, Y-direction travel switch and Z-direction row Cheng Kaiguan uses touching switch.
  6. A kind of 6. workpiece microscopic defect detecting system control device according to claim 1, it is characterised in that:Field control Device tests microscope X to, Y-direction and Z-direction be mobile and the rotary encoder of object lens focusing.
  7. A kind of 7. workpiece microscopic defect detecting system control device according to claim 1, it is characterised in that:Field control Device is connected to the motor that three-dimensional motor and focusing of microscope are finely tuned by motor driver, and motor driver is arranged on platform The groove of connection motor driver control panel is provided with base, in platform base, groove side is provided with connection control panel Interface, interface include connection field controller interface, three-dimensional motor interface and the motor interface of fine setting.
CN201720927119.2U 2017-07-28 2017-07-28 A kind of workpiece microscopic defect detecting system control device Active CN207007736U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109570950A (en) * 2019-01-14 2019-04-05 青岛理工大学 Micro-nano assembly platform device based on machine vision
CN113037966A (en) * 2021-02-27 2021-06-25 重庆市天实精工科技有限公司 Micro-camera module and mobile terminal
CN114910497A (en) * 2022-05-27 2022-08-16 无锡英诺赛思科技有限公司 Sample processing device for failure analysis

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109570950A (en) * 2019-01-14 2019-04-05 青岛理工大学 Micro-nano assembly platform device based on machine vision
CN113037966A (en) * 2021-02-27 2021-06-25 重庆市天实精工科技有限公司 Micro-camera module and mobile terminal
CN113037966B (en) * 2021-02-27 2022-11-04 重庆市天实精工科技有限公司 Micro-camera module and mobile terminal
CN114910497A (en) * 2022-05-27 2022-08-16 无锡英诺赛思科技有限公司 Sample processing device for failure analysis

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GR01 Patent grant