CN101105389A - High accuracy non-contact tri-dimensional facial type measuring device - Google Patents
High accuracy non-contact tri-dimensional facial type measuring device Download PDFInfo
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Abstract
The invention relates to a high-precision non-contact 3D surface measurement device. The device comprises a laser measurement sensor, an X-direction moving unit, a Y-direction moving unit, and a Z-direction moving unit. The invention provides a high-precision non-contact measurement device and the measurement method. The invention can be used for high-precision and rapid measurement on the surface of hard material, soft material and mirror surface material without damage, so as to obtain surface type, size, surface state and other data.
Description
The technical field is as follows:
the invention relates to a high-precision non-contact three-dimensional surface type measuring device. In particular to a system for non-contact rapid high-precision dynamic measurement of fine structures on the surface of an object. The invention also relates to a surface three-dimensional surface type high-precision non-contact micro-observation method.
The background art comprises the following steps:
in production and scientific practice, it is often necessary to measure the surface topography of many objects, i.e., to measure the microstructure of the surface. In many cases, it is particularly difficult and important to know the three-dimensional structure of a surface, especially a fine three-dimensional structure. The following methods for measuring surface topography exist in the prior art:
1. image technology measurement
The most common surface shape measurement method is to photograph the surface of an object and acquire an image of the object from a direction perpendicular to the surface. However, it is obvious that the obtained image is only two-dimensional structural information of the surface of the object no matter how high the precision of the shooting instrument is, and the third-dimensional information can only be estimated by the brightness of the illumination. On a relatively smooth surface, i.e., a surface with inconspicuous irregularities, it is difficult to obtain correct surface profile data.
2. Contact measurement
In order to simultaneously obtain the measurement data of the third dimension, i.e. the height, of the surface, the prior art adopts a contact type measurement method, i.e. a probe is used for directly detecting the height of the surface, and the three-dimensional structure information is obtained by combining the two-dimensional measurement data. However, this method has some problems:
one is the inability to measure fine and complex surfaces. Because the measuring head is a mechanical device, the microscopic surface shape measurement cannot be carried out on a fine surface, and the surface shape information can be obtained only by fitting a characteristic surface after the measurement with larger distance, so that the obtained data has large errors, and the measuring result is meaningless;
secondly, only hard surfaces can be measured. Because the soft surface can deform after the measuring probe touches, incorrect surface information is obtained;
thirdly, it is difficult to measure substances that cannot be directly contacted. Many objects to be measured are toxic and harmful substances, such as radioactive substances, corrosive chemical substances, etc., which cannot be directly contacted, and the objects to be measured need to be separated from the measurer and the measuring instrument to ensure safety.
3. Non-contact laser measuring method
The laser measurement method overcomes the defects of the two measurement methods, and can obtain the structural information of the object through non-contact measurement.
However, the prior art measurement method is passive measurement, in which a grating measurement system is installed in a measurement device, and a measurement head (measurement sensor) triggers the grating measurement system to acquire measurement data. The device has the advantages of complex structure, high cost, troublesome instrument installation and easy secondary error of measurement in the measurement process.
Such as a Laser measuring instrument of the company FARO, germany, such as a scanning measuring Arm (FARO Scanner Arm), a tracking measuring Arm (FARO Track Arm), a Laser Tracker (Laser Tracker), etc., can perform non-contact measurement, three-dimensional surface shape comparison, 2D cross-sectional analysis, and contour detection. For detecting the dimensions of a part on a machine. (see www.faro.com). The measuring device is used for measuring distance, namely measuring the distance from the sensor to a measured object. The method is mainly used for measuring the geometric dimension, the position relation and the like of a larger structural member, but not used for measuring the three-dimensional surface type of a fine surface.
In addition, the measurement mode of the existing measurement device is a mode of indirectly obtaining the information of the measured object by measuring the movement of the sensor, so that a large abbe error is generated in the measurement process.
The invention content is as follows:
the invention aims to develop a high-precision non-contact three-dimensional surface type measuring device which can carry out non-contact active measurement on a fine structure on the surface of an object.
The invention provides a high-precision non-contact three-dimensional surface type measuring device which comprises a base, a working table surface, a gantry support, an X-direction moving unit, a Y-direction moving unit, a Z-direction mounting frame, a laser measuring sensor and a control computer, and is characterized in that: the X-direction moving unit is fixed on the base, the gantry support is fixed on the base, the Y-direction moving unit is arranged above the gantry support, the Z-direction moving unit is arranged on the Y-direction moving unit through a Z-direction mounting frame, the laser measuring sensor is fixed on the Z-direction moving unit, and the working table is arranged on the X-direction moving unit.
The preferable materials of the base and the gantry support are natural stone or artificial stone, such as marble or artificial stone after precision grinding, and the base and the gantry support need to have higher stability as the base is the foundation for ensuring the precision of the whole system;
to ensure the accuracy of the measurement, the preferred work table is a high precision table with a flatness of less than 2 microns. If steel materials are adopted to be subjected to heat treatment, and the surface is subjected to scraping treatment;
the motion unit is a part that controls the sensor or the object to be measured to reciprocate linearly, and may have various structures to accomplish the purpose. In one embodiment of the invention, the X-direction and Y-direction movement units comprise movement platforms, screw rods, driving motors and linear guide rails, the motors drive the screw rods to rotate to drive the movement platforms to move, and the linear guide rails can ensure the movement linearity. The structure of the Z-direction movement unit is the same as that of the X-direction movement unit and the Y-direction movement unit, but a laser measurement sensor is arranged on the movement platform.
The control computer is connected with the X-direction movement unit, the Y-direction movement unit, the Z-direction movement unit and the laser measurement sensor, controls the movement of the movement units in all directions, further controls the measurement distance between the laser measurement sensor and a measured object, simultaneously reads and processes scanning data acquired by the laser measurement sensor, and displays the scanning data in a graphic mode.
As a further improvement of the invention, a weight distribution block is arranged on one side of the Z-direction mounting frame, which is not provided with the Z-direction motion unit, so that the weight on two sides of the Z-direction mounting frame is balanced, and the measurement error caused by the disturbance caused by the unbalanced gravity of the sensor arranged on one side of the Z-direction motion unit is reduced. The material shape of balancing weight is unlimited, and preferred shape is the cuboid, and the material is metal or stone material, and size and weight are in order to satisfy Z to mounting bracket both sides weight balance as the limit.
The laser measuring sensors with different measuring accuracies can be selected according to different requirements of measuring requirements, and when high-accuracy measurement is required, a high-accuracy sensor is selected, for example, a laser triangulation sensor with measuring accuracy of 0.01 micrometer or higher is adopted, and non-contact measurement is carried out by adopting a laser triangulation method.
Principle of non-contact laser triangulation.
The axis of the laser, the optical axis of the imaging objective lens and the CCD linear array are positioned in the same plane. The laser light source is used as an indicating light source for measurement, and an ideal point light spot is projected on the measured surface. The spot will be displaced by the same distance along the axis of the laser as the depth coordinate of the position of its projected point changes. The spot light spot is imaged on the CCD linear array through the objective lens, and the imaging position and the depth position of the spot light spot have a unique corresponding relation. The central position of the real image formed on the CCD linear array is measured, the depth coordinate of the light spot at the moment can be obtained by a geometrical optics calculation method, and the depth parameter of the point on the measured surface is obtained. And measuring a plurality of sampling points to obtain a group of data of the surface appearance of the measured surface. Utilizing the characteristics of the micro objective lens on focal depth and sensitivity thereof to generate clear images on the object confocal layer and project the clear images on an image sensor; while the image of the remaining regions is blurred. This basic optical triangulation measurement is a point-by-point measurement. See figure 3.
The device adopts an active measurement mode, namely, a measurement sensor directly obtains a measurement value. During measurement, the measured object is placed on the working table surface and moves, and the measuring sensor does not move, so that the measurement precision is improved.
The measuring process is as follows: in the measurement preparation stage, a Z-direction movement unit fixed with a laser measurement sensor vertically moves up and down, different heights between the sensor and the working table surface are controlled, the sensor is adjusted to be at a reasonable height with the measured object, and the measurement range is ensured; in the measuring process, the Z-direction moving unit does not move, the X-direction moving unit drives the working table to control the object to be measured to reciprocate relative to the X direction within a set length range, and meanwhile, the Y-direction moving unit controls the sensor to reciprocate relative to the Y direction according to a set measuring interval (such as 10-20 microns).
The device can automatically carry out scanning measurement according to the sequence of rows and columns by setting to obtain the dot matrix with uniform intervals in the measured area. The spacing between each sampling point can be arbitrarily set as required, such as 10 microns or 20 microns.
The obtained scanning data is the height value of the coordinate position of each sampling point, data processing can be carried out after the scanning is finished, and a new data file of the scanning data can be generated after the data processing is finished.
The acquired data is a data matrix distributed according to the set scanning range and the scanning interval. And processing the mass data, namely displaying the mass data in a graphic mode, so that the mass data is convenient to observe and analyze. For example, the data is divided into 256-level images, i.e., the gray value of each point is described as a gray image by corresponding software. Imageware software can also be used to form the data into three-dimensional stereograms.
The microstructure of the surface of the measured object can be digitalized through the measurement calculation, and therefore the microscopic three-dimensional surface type of the surface of the measured object is obtained. Because the measured data is the height value of the coordinate position of each sampling point, three-dimensional reconstruction is carried out through a surface fitting algorithm, and then various parameters such as the shape and the depth of leather texture, the overall dimension of a hemispherical part, the sphericity and the shape of surface bubbles are obtained, and the volume of the air bubbles, the fitting degree of two mutually-fitted surfaces and the like can be analyzed.
The invention has the advantages that:
1. the non-contact measuring method can measure the microcosmic three-dimensional surface type, size, slit, surface state and the like of the soft surface and the surface of the toxic and harmful substances which cannot be directly contacted, thereby ensuring the safety of measuring operators;
2. for an active measurement system, the measured object moves, but not the measuring head; the Z-direction relative height is measured directly by the sensor. In the traditional measurement, after a contact type measuring head contacts a measured point, a measurement grating is triggered to acquire a relative position value. The device does not need to install a complex grating measuring system, and has low cost and simple system structure. Meanwhile, the active measurement cannot cause secondary errors of measurement, and the measurement precision is high.
3. The mode of one-dimensional movement of the measured object is adopted, the mode of three-dimensional movement of a measuring unit in the traditional measuring system is changed, and the Abbe error in the measuring process is reduced to the maximum extent.
4. The base is made of stone, so that the stability is good, and the measurement error can be reduced.
5. And by adopting a counterweight method, the measurement error caused by the deflection of the Z-direction motion unit around the bracket is reduced.
Description of the drawings:
FIG. 1 is a general schematic diagram of an embodiment of a high-precision non-contact three-dimensional surface type measuring device, in which 1 is a base, 2 is an X-direction moving unit, 3 is a worktable, 4 is a gantry support, 5 is a Z- direction mounting frame 5,6 is a Y-direction moving unit, 7 is a counterweight, 8 is a laser triangulation sensor, and 9 is a Z-direction moving unit;
fig. 2 is a schematic view of a Z-direction moving unit, in which 10 is a moving unit driving motor, 11 is a moving platform, 12 is a moving unit mounting base, 13 is a high-precision linear guide rail, and 14 is a screw rod;
fig. 3 is a schematic diagram of triangulation. In the figure, 15 is a laser light source, 16 is a focusing lens, 17 is an imaging objective lens, 18 is a CCD line, and 19 is a measured surface;
FIG. 4 is a control computer scan parameter setting dialog during a measurement process;
FIG. 5 is a three-dimensional view of a surface type measured from cow leather, which is a fine soft material;
FIG. 6 is a three-dimensional view of a microscopic surface type measured from a hard material coin;
the specific implementation mode is as follows:
As can be seen from fig. 1:
the gantry support 4 is fixed on the base 1 and is vertical to the base 1; the X-direction moving unit 2 is also arranged on the base 1; the working table 3 is mounted on the X-direction moving unit 2. The X-direction moving unit 2 drives the measured object to do X-direction reciprocating motion in the dynamic measurement process;
the Y-direction moving unit 6 is fixed above the gantry support 4;
the Z-direction mounting frame 5 is arranged on the Y-direction movement unit 6, the Z-direction movement unit 9 is arranged on the Z-direction mounting frame 5, and the laser triangulation measurement sensor 8 is fixed on the Z-direction movement unit 9;
the balancing weight 7 is made of steel materials, is in a cuboid shape, is installed on the Z-direction installation frame 5, is used for guaranteeing the weight of the Z-direction installation frame 5 on two sides, and reduces disturbance caused by unbalanced gravity when the laser triangulation method measuring sensor 8 and the Z-direction movement unit 9 are installed on single sides.
The control computer is connected with the X-direction movement unit, the Y-direction movement unit, the Z-direction movement unit and the laser measurement sensor, controls the movement of each movement unit, simultaneously controls the measurement distance between the laser measurement sensor and a measured object, reads and processes scanning data acquired by the laser measurement sensor, and displays the scanning data in a graphic mode.
The software interface of the control computer is provided with the following parts:
a motion control part button which can adjust the scanning head to a designated position;
scanning parameter setting for inputting corresponding scanning parameters:
fast positioning, fast sampling movement of zigzag shape of the system in the measured range
The storage device can store the scanning data in real time;
data processing, there are "load data" and "output image" buttons.
Example 2 implementation of a Z-motion Unit
Fig. 2 is a schematic view of a Z-direction motion unit. The motion platform 11 is provided with a sensor, and the motion platform 11 carries the sensor to move. The motion unit mounting base 12 is used for being fixed on other components, the motion platform 11 makes linear reciprocating motion on the support of the high-precision linear guide rail 13, and the high-precision linear guide rail 13 can ensure the motion linearity of the motion platform 11. The screw 14 can be driven by the motion unit driving motor 10 to rotate, and the screw 14 and the motion platform 11 form a worm gear part which can drive the motion platform 11 to move.
EXAMPLE 3 hard Material-coin surface type measurement
1. Preparation for measurement
1) The 1 yuan coin to be measured is placed on the operation platform of the measuring device in the embodiment 1, and the front side of the coin faces upwards.
2) Adjusting the scanning head to a designated position, setting the size of the scanned breadth, and setting corresponding parameters in control computer control software (X =20000 microns, breadth Y =20000 microns, and spacing =20 microns).
3) Starting the quick positioning function, namely, the system makes a zigzag quick sampling movement in the measured range, and analyzing the possible out-of-range position of the system.
4) The relative position of a measuring sensor and a measured object is adjusted to obtain the relative height data value of a zigzag scanning area, wherein the relative height data value is 0.011mm-0.013mm, if the relative height data value exceeds the measuring range of the sensor, the data of "" is generated in the obtained data, namely invisible data, through analyzing the distribution of the data, if the obtained minimum value is 0.005mm, the maximum value of the visible data is 0.101mm, the measurement is effective within plus or minus 2mm according to the measuring range of a measuring head, such as 4mm, the Z-item motion unit should move upwards, and the distribution of the minimum value and the maximum value at the middle position of plus or minus 2mm is ensured.
Aiming at the existing border crossing region, the relative position of the measuring head is automatically adjusted, and the measured object and the measuring head are ensured to be in an allowable range. I.e. to meet the measurement range.
2. Measuring
1) Scanning pattern
a. The scanning head is adjusted to a designated position through a 'motion control' part button;
b. as shown in fig. 4, the "start scanning" button is clicked to start scanning. The file name desired to be saved is input. The saving type of the scanning data file is DAT format, and after clicking save, scanning starts.
The system can automatically close the scanning processing after the scanning is finished without the intervention of a user.
c. And (3) scanning:
firstly, positioning a measuring starting point, starting from a set scanning starting position, firstly moving by an X-direction moving unit, driving a working table top and a measured object to move at a uniform speed, in the moving process, obtaining the relative height value of the corresponding position of the front surface of the coin by a measuring head according to uniform intervals, storing data in a storage device in real time, stopping when the X-direction moves to a set length (20000 micrometers) range, at the moment, reversely moving the X-direction moving unit to the original position, simultaneously moving a measuring distance by a Y-direction moving unit according to a set Y-direction measuring distance of 20 micrometers, and then forwardly moving the X-direction moving unit again to reciprocate.
During the measurement, the Z-direction moving unit does not move.
The measured height value of the coordinate position of each sampling point is a data matrix distributed according to the set scanning range and the scanning interval, and the distribution is as follows:
3. data processing
The processing method employed here is to describe the data as a gray scale image in gray scale. The gray image is obtained by dividing data into 256-level images, analyzing the maximum and minimum values in mass data, and recording as M max And M min . Corresponding to the gray value of each pointNamely:
the gray value of each point is described as a gray image by corresponding software.
And clicking a 'load data' button on a scanning control software interface, after the data is loaded, clicking a 'confirm' button to see the corresponding position of the gray scale, and storing the input value into a file. If a binary image is output, the maximum and minimum values are input to be the same, and the 'confirm' button is pressed.
4. Outputting an image
Click the "output image" button after the process of loading data is completed, see fig. 5.
Example 4 measurement of cow leather surface type as a Fine Soft Material
The measurement method and procedure were the same as in example 3, but the measurement pitch set by the Y-direction moving unit was 10 μm. The measurement result output image is shown in fig. 6.
Claims (9)
1. The utility model provides a high accuracy non-contact three-dimensional face type measuring device, includes base (1), table surface (3), gantry support (4), X to motion unit (2), Y to motion unit (6), Z to motion unit (9), Z to mounting bracket (5), laser measuring sensor (8) and control computer, characterized by: the X-direction moving unit (2) is fixed on the base (1), the gantry support (4) is fixed on the base (1), the Y-direction moving unit (6) is arranged above the gantry support (4), the Z-direction moving unit (9) is arranged on the Y-direction moving unit (6) through the Z-direction mounting frame (5), the laser measuring sensor (8) is fixed on the Z-direction moving unit (9), and the working table top (3) is arranged on the X-direction moving unit (2).
2. A high precision non-contact three dimensional surface type measuring device according to claim 1, the material of the base (1) and gantry support (4) is natural stone or artificial stone.
3. A high precision non-contact three dimensional surface based measuring device according to claim 1, said work table (3) having a flatness of less than 2 microns.
4. A high precision non-contact three-dimensional surface type measuring device according to claim 1, wherein the motion unit comprises a motion platform (11), a screw rod (14), a driving motor (10) and a linear guide rail (13).
5. The high-precision non-contact three-dimensional surface type measuring device according to claim 4, wherein the straightness of the moving unit is 2/10000 or more.
6. A high precision non-contact three dimensional surface type measuring device according to claim 1, said laser measuring sensor (8) being a laser triangulation sensor.
7. The high-precision non-contact three-dimensional surface type measuring device according to any one of claims 1 to 6, wherein a weight (7) is provided on a side of the Z-direction mounting frame (5) where the Z-direction moving unit (9) is not mounted.
8. A high precision non-contact three dimensional surface type measuring device according to claim 7, said weight block (7) is in the shape of a rectangular parallelepiped.
9. A method for non-contact measurement of fine structure on the surface of an object with the high precision non-contact three-dimensional surface type measuring device according to claim 1.
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2007
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