CN202485647U - Topography measurement system for fault planes of rocks in earthquake fault zone - Google Patents
Topography measurement system for fault planes of rocks in earthquake fault zone Download PDFInfo
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- CN202485647U CN202485647U CN2012201407083U CN201220140708U CN202485647U CN 202485647 U CN202485647 U CN 202485647U CN 2012201407083 U CN2012201407083 U CN 2012201407083U CN 201220140708 U CN201220140708 U CN 201220140708U CN 202485647 U CN202485647 U CN 202485647U
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Abstract
The utility model discloses a topography measurement system for fault planes of rocks in an earthquake fault zone. The topography measurement system for the fault planes of the rocks in the earthquake fault zone comprises a motion scanning unit, a control unit and a data acquisition unit (DAU). The motion scanning unit is in coupling connection with the control unit, is used for receiving signals transmitted from the control unit, and transits coordinate information in a moving process to the DAU through the control unit; the control unit is in coupling connection with the motion scanning unit and the DAU, is used for transmitting control signals to the motion scanning unit and the DAU, and receives the coordinate information sent by the motion scanning unit and then transmits the coordinate information to the DAU; and the DAU is in coupling connection with the control unit and is used for receiving the coordinate information and collecting and storing the signals according to the control signals transmitted by the control unit. The topography measurement system for the fault planes of the rocks in the earthquake fault zone resolves the problem that the topography of an experimental sample fault plane cannot be finely and quantitatively described in a laboratory physical simulation experiment, and can guarantee high resolution and accuracy of data.
Description
Technical field
The utility model relates to fault surface topography measurement field, especially a kind of three-dimension disclocation face pattern scanning system of the earthquake fault band rock to field and laboratory physical simulation.
Background technology
Most of fault displcement occurs on the main slipping plane in the distributed fault during earthquake, and the tomography surface topography is the product of faulting and develops with faulting.Accurate description natural fault face pattern is significant to break character and fault mechanics research of tomography.The tomography surface topography affects the tomography sliding mechanism, is playing the part of important role aspect the control tomography sliding type, and this is for the physical simulation process no less important in the laboratory.
In sticking sliding Study on Theory, also notice the influence of fault surface roughness and tomography shape characteristic, this helps to deepen the heteropical understanding of rubbing surface stress distribution.Yet in physical simulation experiment in the past, few people carry out the systematic study of quantification to the laboratory sample surfaceness.Lack high-precision roughness or surface undulation measurement amount equipment, do not have suitable tomography surface topography to express the index reference.
Expects easily, in this fault surface pattern Quantitative study, need high-precision topography measurement equipment and measure, and this pattern equipment there are three key issues to need to solve:
At first, confirm the sample scanning area, and accurately location scanning is regional, laboratory sample and open-air this range of size of wrist-watch 100mm * 500mm.
Secondly, be in selected scanning area to the accurate description of fault surface pattern, and to confirm sweep spacing and realize scanning process the time become control;
Once more, guarantee that scanning resolution reaches micron dimension, to guarantee the precision of tomography morphology change.
And the normal 3D laser scanner that adopts scans open-air tomography in the existing field study, and sweep limit is big, but the resolution of best scanner is 2mm, can hold the grown form of the overall situation, is not enough to carry out details research.Also only can in little measurement range, scan on measuring accuracy 20 micron dimensions for laboratory study electron probe (only several millimeters of sweep limits) then commonly used or high-precision laser range-finding appearance.
The metering system of existing open-air laser scanner does not satisfy requirements such as the accuracy, complicacy of scientific research in accuracy, aspect stable.Existing ripe electron probe technology; Though can satisfy the accuracy requirement; But its structure and working method are inappropriate for long-time running and reach the entire scan based on the laboratory sample size, and need the complicated sample processing technology, have increased experiment credit requirement and power consumption cost greatly.So how to solve above-mentioned 3 key issues and realize corresponding effects, just become key content.
The utility model content
The utility model technical matters to be solved provides a kind of fault surface topography measurement system of earthquake fault band rock, can't become more meticulous to laboratory sample fault surface pattern to solve in the physical simulation experiment of laboratory, problem such as quantification description.
In order to address the above problem, the utility model provides a kind of fault surface topography measurement system of earthquake fault band rock, comprising: motion scanning element, control module and data acquisition unit; Wherein,
Said motion scanning element couples with said control module mutually, is used to receive the signal of said control module, and the coordinate information of motion process is passed to said data acquisition unit through said moving cell;
Said control module; Couple mutually with said motion scanning element and data acquisition unit; Be used to transmit control signal to said motion scanning element and data acquisition unit, and receive the said coordinate information that said motion scanning element sends and pass to said data acquisition unit;
Said data acquisition unit couples with said control module mutually, is used to receive the said coordinate information that this control module sends, and the control signal that combines to send is gathered and stored.
Further, wherein, said motion scanning element comprises: two-dimension translational platform, laser displacement sensor, vibration isolation optical table and adjustable support platform; Wherein,
Said two-dimension translational platform; Be connected with said laser displacement sensor, vibration isolation optical table and adjustable support platform, this two-dimension translational platform comprises: the slide rail that both direction is vertical and basic structure is consistent, show before displacement coordinate two grating chis and provide two servomotors of power to combine for said slide rail;
Said laser displacement sensor is arranged on said two-dimension translational platform below, and it is used to measure the surface undulation and the roughness variation of sample;
Said vibration isolation optical table, be arranged on said two-dimension translational platform under, be the platform adopt four posts to support;
Said adjustable support platform is connected with the vibration isolation optical table with said two-dimension translational platform.
Further, wherein, said laser displacement sensor comprises: laser probe and controller; Said laser probe is the laser probe of 0.5 micron of displacement resolution, range 10mm, SF 4KHz.
Further; Wherein, Said control module; Be further used for receiving the coordinate information of said motion scanning element transmission and combine to produce three-dimensional coordinate information, this three-dimensional coordinate information is sent to said data acquisition unit with the ranging data of the corresponding laser displacement sensor of this coordinate.
Further, said adjustable support platform comprises two parts, wherein,
First comprises: the vertical framework of fixing said two-dimension translational platform combines with the card extender that is connected this two-dimension translational platform;
Second portion comprises: the horizontal experiment table of adjustable-height and degree of tilt, four support the threaded pillar of these horizontal experiment tablees, four groups of fixing these horizontal experiment tablees and threaded pillar setting nut, combine for this horizontal experiment table provides centre support post and level and inclination measurement instrument.
Further, said control module further comprises: two-dimension translational platform controller, laser probe controller and computer module; Wherein,
Said two-dimension translational platform controller; Be connected with said computer module; Be used to receive the indication information of said computer module; According to this indication information control said motion scanning element carry out folk prescription to or two-way simultaneous motion, obtain the coordinate information that said motion scanning element is sent simultaneously, this coordinate information of recording and sending is given said computer module;
Said laser probe controller is connected with said computer module, is used to receive the displacement information that said motion scanning element is sent, and is transferred to said computer module;
Said computer module; Be connected with the laser probe controller with said two-dimension displacement platform controller; Be used for sending the indication control information and give said two-dimension displacement platform controller and laser probe controller; Test specimen is scanned, and receive, store the said coordinate information of said two-dimension displacement platform controller feedback and the said displacement information of said laser probe controller feedback, the three-dimensional coordinate information that combines then to form the motor point sends to said data acquisition unit.
Further, said coordinate information is X, the Y coordinate information that the displacement of two-way grating chi characterizes the motor point.
Further, said laser probe controller is further used for receiving the displacement information that said motion scanning element is sent, and is passed to said computer module through the R232 oral instructions.
Further, said data acquisition unit further comprises: collection plate, data transmission mouth and data recordin module; Wherein, said collection plate and data transmission mouth are connected with said computer module, and through data recordin module the data of gathering are stored.
Further, said data transmission mouth is a R232 type data transmission mouth.
Compared with prior art, the fault surface topography measurement system of the said earthquake fault band of the utility model rock has following characteristics:
1, the utility model can make things convenient for laboratory sample yardstick rock surface pattern quantification to measure; And realize the microcosmic refinement of open-air fault surface rock sample; The low on a large scale precision shape characteristic in its result and field compares, for the fault surface morphology analysis provides more detailed data.For research fault surface pattern evolution deformation process provides a kind of convenience powerful recording geometry.
2, the utility model has adopted three-dimensional coordinate format record experimental data, and two different system coordinates (coordinates of motion of two-dimension translational platform and the displacement coordinate of laser probe) are unified acquisition and recording, has realized accuracy, summary and the synchronization of coordinate.
3, the utility model develops into a kind of pattern scanning system to multiple spot on certain face with the laser displacement sensor of spot measurement; Picking rate based on laser sensor; The two-dimension translational platform that cooperates variable-ratio can realize that tomography pattern to open-air small sample and the experiment indoor physical simulation quantification that becomes more meticulous describes.
4, the sweep spacing of the utility model can need change with subjectivity; And the two-way of two-dimension translational platform all can change sweep spacing through changing movement velocity, promptly for the sample of 100mm * 100mm, can also come to confirm sweep spacing as required; If coarse scan; Can set and be spaced apart 0.1mm, if need detailed topographic data, then can set sweep spacing is 0.001mm.
5, the combination of the utility model motion scanning element and control module; Press the laser displacement data of motion process record Z direction (as shown in Figure 2) and the mode of dynamically recording data; Data memory format more easily is provided, has described for the pattern quantification and improved the efficient of analytical calculation greatly.
6, the utility model can for the field on a large scale the fault surface pattern describe, carry out the refinement analysis through acquisition characteristics, so as to set up on a large scale, multiple dimensioned open-air fault surface shape characteristic figure.
Description of drawings
Fig. 1 is the structured flowchart of the fault surface topography measurement system of the said earthquake fault band of the utility model embodiment rock;
Fig. 2 is the motion scanning element concrete structure figure in the described system of the utility model embodiment;
Fig. 3 is the concrete structure figure of two-dimension translational platform in the motion scanning element described in the utility model embodiment;
Fig. 4 is the concrete structure figure of the adjustable support platform in the said motion scanning element of the utility model embodiment.
Fig. 5 is the maximum boundary rectangle district synoptic diagram in the described system of the utility model embodiment.
Embodiment
Below in conjunction with accompanying drawing the utility model is done further explain, but not as the qualification to the utility model.
Shown in Fig. 1 to 4, be the fault surface topography measurement system of the described earthquake fault band of the utility model embodiment rock, this system is made up of three unit, is respectively motion scanning element 1, control module 2 and data acquisition unit 3.Wherein,
Motion scanning element 1 couples with control module 2 mutually, and concrete structure comprises four parts: two-dimension translational platform 11, laser displacement sensor 12, vibration isolation optical table 13 and adjustable support platform 14.Motion scanning element 1 is used to receive the signal of said control module 2, and the coordinate information of motion process is passed to data acquisition unit 3 through said control module 2.
Particularly, motion scanning element 1 is passed through mobile acquisition laser displacement sensor 12 data of control two-dimension translational platform 11, and is used for the surface coordinate of sample (rock material) is carried out controlled accurate location.
As shown in Figure 2, said motion scanning element 1 comprises:
Two-dimension translational platform 11 (as shown in Figure 3); Be connected with said laser displacement sensor, vibration isolation optical table and adjustable support platform, comprise: the slide track component that both direction vertical (X and Y both direction) and basic structure are consistent (two slide track component between only the displacement range is different) is specially by two slide rails that structure is identical and direction is vertical 111, shows two grating chis 112 of preceding displacement coordinate and provide two servomotors 113 of power to combine for said slide rail 111.Wherein.Said each servomotor 113 all connects a track provides power for it, and each grating chi 112 and the vertical slide rail 111 parallel connections respectively of both direction, and the position of displacement rails is provided.For example: directions X track displacement range 500mm, Y direction track displacement range 100mm.
For example: when 0.5 micron of the directions X displacement resolution of said two-dimension displacement platform 11, range 500mm, movement velocity 0～40mm/s variable-ratio.When 0.4 micron of the Y of said two-dimension displacement platform 11 direction displacement resolution, range 100mm, movement velocity 0～40mm/s variable-ratio.Laser probe in the said laser displacement sensor 12 is the laser probe of 0.5 micron of Z direction displacement resolution, range 10mm, SF 4KHz.
Vibration isolation optical table 13, be arranged at said two-dimension translational platform 11 under, be the platform adopt four posts to support.These vibration isolation optical table 13 structure secure, amplitude is out of shape little and surfacing less than 5 microns, for the scanning system framework provides firm support.
Adjustable support platform 14 (as shown in Figure 4), it comprises two parts, wherein,
First comprises: the vertical framework 14 1 of fixing said two-dimension translational platform combines with the card extender that is connected this two-dimension translational platform 142;
Second portion comprises: the horizontal experiment table of adjustable-height and degree of tilt 143, four support the threaded pillar 144 of this horizontal experiment table 143, four groups of fixing these horizontal experiment tablees 143 and threaded pillar 144 setting nut 145, for this horizontal experiment table 143 provide in the middle of support post 146 and level and inclination measurement instrument (this level and inclination measurement instrument are existing device in the prior art) combine.
Wherein, Described vertical framework 14 1 is two-dimension translational platform 11 and be connected in described vibration isolation optical table 13 fixedly; And guarantee two-dimension translational platform 11 abswolute levels on the structure; Simultaneously horizontal experiment table 143 can carry out level and slant correction, and four threaded pillars 144 through level and the horizontal experiment table 143 of inclination measurement instrument adjusting make horizontal experiment table 143 be horizontal, and purpose is that adjustable-height can guarantee suitable observed altitude.Adjustable support platform 14 is mainly used in slings said two-dimension translational platform 11.
Wherein, Said two-dimension translational platform controller; Be connected with said computer module; Be used to receive the indication information of said computer module, control the servomotor motion in the two-dimension translational platform 11 in the said motion scanning element 1 according to this indication information, carry out folk prescription to or the two-way simultaneous motion; Grating chi in the two-dimension translational platform 11 feeds back to this two-dimension translational platform controller in the said control module 2 with the coordinate information of motion simultaneously; This two-dimension translational platform controller carries out servocontrol according to this coordinate information to the movable information of said two-dimension translational platform 11, and then, the displacement of the grating chi that recording and sending is two-way characterizes X, the Y coordinate information in motor point and gives said computer module;
Said laser probe controller is connected with said computer module, is used for receiving the displacement information (or displacement data) on said motion scanning element 1 laser displacement sensor, is passed to said computer module through the R232 oral instructions;
Said computer module; Be connected with the laser probe controller with said two-dimension displacement platform controller; Be used for sending the indication control information and give said two-dimension displacement platform controller and laser probe controller, test specimen is scanned, and receive, the displacement information of X, Y coordinate information and the said laser probe controller in the displacement sign motor point of the two-way grating chi of the said two-dimension displacement platform controller feedback of storage; Three-dimensional coordinate (the X that above-mentioned X, Y coordinate information and displacement information is combined to form the motor point; Y, Z) information sends to said data acquisition unit 3 then.
Wherein, said data acquisition unit 3 comprises: collection plate, R232 type data transmission mouth and data recordin module; Wherein, said collection plate and R232 type data transmission mouth are connected with said computer module, and through data recordin module the data storage of gathering are arrived in the appointment hard disk district.
The utility model the foregoing description can be realized biaxial movement, the time become the scanning of any scheme, it is stable that the displacement acquisition speed of laser probe keeps, and can guarantee the high resolving power and the accuracy of data.
According to Fig. 2 and shown in Figure 4, the concrete workflow of the fault surface topography measurement system of the said earthquake fault band of the utility model rock is:
(1),, makes horizontal experiment table 143 maintenance levels and highly meet the laboratory sample measurement range through the height of setting nut 145 accommodation zone thread pillars 144 and middle support post 146 according to the height of the horizontal experiment table 143 of laboratory sample thickness adjusted.
(2) confirm the scanning survey scope of laboratory sample, promptly four points of mark are included required measurement range on this laboratory sample, are positioned over then on the horizontal experiment table 143.
(3) the bidirectional displacement slide rail 111 of two-dimension displacement platform 11 returns actual zero point, guarantees that each the measurement is the absolute coordinate data with respect to actual zero point.
(4) confirm the range of movement of slide rail 111, slide rail 111 moves to four monumented point positions of required sweep limit, and writes down four monumented point coordinates, and slide rail 111 will be implemented line according to the maximum circumscribed rectangular region that four monumented points are established and scan then.
Maximum boundary rectangle described here district, as shown in Figure 5,, shown in black surround polygon among Fig. 5, confirm in the zone of planning scanning on the sample by four points; Corresponding have four coordinates be respectively (x1, y1), (x2, y2), (x3, y3), (x4; Y4), therefrom choose minimum value x1 and the maximal value x2 of x, the minimum value y1 of y and maximal value y3; According to (x1, y1) with (x2, y3) two points can be confirmed a maximum boundary rectangle; Shown in frame of broken lines among Fig. 5, this rectangular area is exactly the actual area that scanning system will scan.
(5) concrete scanning pattern can be: from minimum XY coordinate (X
Min, Y
Min) locate, along Y=Y
MinValue is carried out line sweep according to predetermined sweep spacing Δ d, arrives X=X
MaxThe place; Then, motion Y axial translation slide rail is to Y=Y
MinBehind+Δ the d, the X axle is along X=X
MaxTo X=X
MinUniformly-spaced scan.So to-and-fro movement, until covering whole scanning area, scanning process finishes.
(6) according to the recorded recovery of carrying out the fault surface shape characteristic.
Compared with prior art, the fault surface topography measurement system of the said earthquake fault band of the utility model rock has following characteristics:
Compared with prior art, the fault surface topography measurement system of the said earthquake fault band of the utility model rock has following characteristics:
1, the utility model can make things convenient for laboratory sample yardstick rock surface pattern quantification to measure; And realize the microcosmic refinement of open-air fault surface rock sample; The low on a large scale precision shape characteristic in its result and field compares, for the fault surface morphology analysis provides more detailed data.For research fault surface pattern evolution deformation process provides a kind of convenience powerful recording geometry.
2, the utility model has adopted three-dimensional coordinate format record experimental data, and two different system coordinates (coordinates of motion of two-dimension translational platform and the displacement coordinate of laser probe) are unified acquisition and recording, has realized accuracy, summary and the synchronization of coordinate.
3, the utility model develops into a kind of pattern scanning system to multiple spot on certain face with the laser displacement sensor of spot measurement; Picking rate based on laser sensor; The two-dimension translational platform that cooperates variable-ratio can realize that tomography pattern to open-air small sample and the experiment indoor physical simulation quantification that becomes more meticulous describes.
4, the sweep spacing of the utility model can need change with subjectivity; And the two of two-dimension translational platform all can change sweep spacing through changing movement velocity, promptly for the sample of 100mm * 100mm, can also come to confirm sweep spacing as required; If coarse scan; Can set and be spaced apart 0.1mm, if need detailed topographic data, then can set sweep spacing is 0.001mm.
5, the combination of the utility model motion scanning element and control module; Press the laser displacement data of motion process record Z direction (as shown in Figure 2) and the mode of dynamically recording data; Data memory format more easily is provided, has described for the pattern quantification and improved the efficient of analytical calculation greatly.
6, the utility model can for the field on a large scale the fault surface pattern describe, carry out the refinement analysis through acquisition characteristics, so as to set up on a large scale, multiple dimensioned open-air fault surface shape characteristic figure.
Certainly; The utility model also can have other various embodiments; Under the situation that does not deviate from the utility model spirit and essence thereof; Those of ordinary skill in the art can make various corresponding changes and distortion according to the utility model, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the utility model.
Claims (10)
1. the fault surface topography measurement system of an earthquake fault band rock is characterized in that, comprising: motion scanning element, control module and data acquisition unit; Wherein,
Said motion scanning element couples with said control module mutually, is used to receive the signal of said control module, and the coordinate information of motion process is passed to said data acquisition unit through said moving cell;
Said control module; Couple mutually with said motion scanning element and data acquisition unit; Be used to transmit control signal to said motion scanning element and data acquisition unit, and receive the said coordinate information that said motion scanning element sends and pass to said data acquisition unit;
Said data acquisition unit couples with said control module mutually, is used to receive the said coordinate information that this control module sends, and the control signal that combines to send is gathered and stored.
2. the fault surface topography measurement system of earthquake fault band rock as claimed in claim 1 is characterized in that, said motion scanning element comprises: two-dimension translational platform, laser displacement sensor, vibration isolation optical table and adjustable support platform; Wherein,
Said two-dimension translational platform; Be connected with said laser displacement sensor, vibration isolation optical table and adjustable support platform, this two-dimension translational platform comprises: the slide rail that both direction is vertical and basic structure is consistent, show before displacement coordinate two grating chis and provide two servomotors of power to combine for said slide rail;
Said laser displacement sensor is arranged on said two-dimension translational platform below, and it is used to measure the surface undulation and the roughness variation of sample;
Said vibration isolation optical table, be arranged on said two-dimension translational platform under, be the platform adopt four posts to support;
Said adjustable support platform is connected with the vibration isolation optical table with said two-dimension translational platform.
3. the fault surface topography measurement system of earthquake fault band rock as claimed in claim 2 is characterized in that said laser displacement sensor comprises: laser probe and controller; Said laser probe is the laser probe of 0.5 micron of displacement resolution, range 10mm, SF 4KHz.
4. the fault surface topography measurement system of earthquake fault band rock as claimed in claim 1; It is characterized in that; Said control module; Be further used for receiving the coordinate information of said motion scanning element transmission and combine to produce three-dimensional coordinate information, this three-dimensional coordinate information is sent to said data acquisition unit with the ranging data of the corresponding laser displacement sensor of this coordinate.
5. the fault surface topography measurement system of earthquake fault band rock as claimed in claim 2 is characterized in that said adjustable support platform comprises two parts, wherein,
First comprises: the vertical framework of fixing said two-dimension translational platform combines with the card extender that is connected this two-dimension translational platform;
Second portion comprises: the horizontal experiment table of adjustable-height and degree of tilt, four support the threaded pillar of these horizontal experiment tablees, four groups of fixing these horizontal experiment tablees and threaded pillar setting nut, combine for this horizontal experiment table provides centre support post and level and inclination measurement instrument.
6. the fault surface topography measurement system of earthquake fault band rock as claimed in claim 1 is characterized in that said control module further comprises: two-dimension translational platform controller, laser probe controller and computer module; Wherein,
Said two-dimension translational platform controller; Be connected with said computer module; Be used to receive the indication information of said computer module; According to this indication information control said motion scanning element carry out folk prescription to or two-way simultaneous motion, obtain the coordinate information that said motion scanning element is sent simultaneously, this coordinate information of recording and sending is given said computer module;
Said laser probe controller is connected with said computer module, is used to receive the displacement information that said motion scanning element is sent, and is transferred to said computer module;
Said computer module; Be connected with the laser probe controller with said two-dimension displacement platform controller; Be used for sending the indication control information and give said two-dimension displacement platform controller and laser probe controller; Test specimen is scanned, and receive, store the said coordinate information of said two-dimension displacement platform controller feedback and the said displacement information of said laser probe controller feedback, the three-dimensional coordinate information that combines then to form the motor point sends to said data acquisition unit.
7. the fault surface topography measurement system of earthquake fault band rock as claimed in claim 6 is characterized in that, said coordinate information is X, the Y coordinate information that the displacement of two-way grating chi characterizes the motor point.
8. the fault surface topography measurement system of earthquake fault band rock as claimed in claim 6; It is characterized in that; Said laser probe controller is further used for receiving the displacement information that said motion scanning element is sent, and is passed to said computer module through the R232 oral instructions.
9. the fault surface topography measurement system of earthquake fault band rock as claimed in claim 6 is characterized in that said data acquisition unit further comprises: collection plate, data transmission mouth and data recordin module; Wherein, said collection plate and data transmission mouth are connected with said computer module, and through data recordin module the data of gathering are stored.
10. the fault surface topography measurement system of earthquake fault band rock as claimed in claim 9 is characterized in that, said data transmission mouth is a R232 type data transmission mouth.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102620691A (en) * | 2012-04-05 | 2012-08-01 | 中国地震局地质研究所 | Measurement system for fault surface morphology of earthquake fault zone rock |
| CN103267477A (en) * | 2013-06-18 | 2013-08-28 | 成都理工大学 | Adjustable variable-resistance structural surface three-dimensional shape measuring device |
| CN104501762A (en) * | 2014-12-18 | 2015-04-08 | 太原理工大学 | Intelligent feature measuring instrument for structural surface of rock mass |
| CN115774027A (en) * | 2023-01-09 | 2023-03-10 | 苏州矽视科技有限公司 | Continuous scanning control system and detection method for semiconductor detection equipment |
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2012
- 2012-04-05 CN CN2012201407083U patent/CN202485647U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102620691A (en) * | 2012-04-05 | 2012-08-01 | 中国地震局地质研究所 | Measurement system for fault surface morphology of earthquake fault zone rock |
| CN102620691B (en) * | 2012-04-05 | 2015-04-08 | 中国地震局地质研究所 | Measurement system for fault surface morphology of earthquake fault zone rock |
| CN103267477A (en) * | 2013-06-18 | 2013-08-28 | 成都理工大学 | Adjustable variable-resistance structural surface three-dimensional shape measuring device |
| CN103267477B (en) * | 2013-06-18 | 2015-08-05 | 成都理工大学 | Adjustable rheostat structural plane apparatus for measuring three-dimensional profile |
| CN104501762A (en) * | 2014-12-18 | 2015-04-08 | 太原理工大学 | Intelligent feature measuring instrument for structural surface of rock mass |
| CN104501762B (en) * | 2014-12-18 | 2016-06-29 | 太原理工大学 | A kind of intelligent rock mass discontinuity topography measurement instrument |
| CN115774027A (en) * | 2023-01-09 | 2023-03-10 | 苏州矽视科技有限公司 | Continuous scanning control system and detection method for semiconductor detection equipment |
| CN115774027B (en) * | 2023-01-09 | 2023-09-08 | 苏州矽视科技有限公司 | Continuous scanning detection method for semiconductor detection equipment |
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Granted publication date: 20121010 Termination date: 20130405 |