CN104290004A - Robotic planetary polishing unit for polishing of large-diameter aspheric surfaces - Google Patents

Robotic planetary polishing unit for polishing of large-diameter aspheric surfaces Download PDF

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Publication number
CN104290004A
CN104290004A CN201410554563.5A CN201410554563A CN104290004A CN 104290004 A CN104290004 A CN 104290004A CN 201410554563 A CN201410554563 A CN 201410554563A CN 104290004 A CN104290004 A CN 104290004A
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China
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polishing
revolution
fixed
housing
thread section
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Granted
Application number
CN201410554563.5A
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Chinese (zh)
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CN104290004B (en
Inventor
洪鹰
贾云凤
刘猛猛
李政
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Tianjin University
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Tianjin University
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor

Abstract

The invention discloses a robotic planetary polishing unit for polishing of large-diameter aspheric surfaces. The robotic planetary polishing unit comprises a revolution drive mechanism, an autorotation drive mechanism, a polishing shaft component and a counterweight eccentric regulator. Two servo motors drive the robotic planetary polishing unit to autorotate and revolve respectively. The revolution drive mechanism allows horizontal revolution of planetary motion. The counterweight eccentric regulator is an eccentric regulation and synchronous center-of-mass balancing mechanism, allowing a counterweight to reversely synchronously change with an eccentric distance. The autorotation drive mechanism employs two-stage belt drive, allows an auto-rotating motor to be fixed and allows transmission of autorotation motion at the premise of not performing horizontal rotation. The polishing shaft component is in a hollow combination of a low-friction cylinder and a female rotary ball-and-spline shaft, allowing the cylinder and a piston not to perform autorotation motion. The hollow structure allows a dynamic and static polishing process. The pressure of a polishing disc is precisely controlled by a proportional valve through reduction in the friction.

Description

Aperture aspherical robot planetary polishing device
Technical field
The invention belongs to optical manufacturing and manufacture field, be a kind of end equipment being applied to robot polishing, this device is applicable to the precise polished of aperture aspherical element.
Background technology
In the practical application of contemporary optics system, need a large amount of aspherical optical element, particularly possess the element of heavy caliber and high accuracy feature, and optics manufacturing industry also does not possess enough production capacities to satisfy the demands.Computer controlled optical surfacing technology, compared with traditional optical process technology, can improve working (machining) efficiency greatly, is the important method addressed this problem, and thus becomes the major technique support of aspherical optical element manufacture processing.Small abrasive nose polishing technology is most widely used CCOS (computer controlled optical surfacing is shaping) technology, and its polishing precision is high, but shortcoming to be polishing efficiency low.Therefore improving polishing tool, is vital key link for polishing technology.Burnishing device needs the function realized to comprise following three usually: planetary motion, eccentric adjusting, the constant compression of controllable pressure.Wherein planetary motion is citation form, transferred by the high-speed rotary between polishing disk and optical element and realize polishing, remove the removal amount maximization of function center then to need to realize revolution motion, possess the ability regulating revolution and rotation rotating ratio, to tackle different process requirements simultaneously; Constant compression is precondition, according to the condition removing function Mathematical Models, needs to maintain and is applied to the constant of pressure on polishing disk, ensure to remove the accurate of function, and then obtain deterministic material removal amount; Eccentric adjusting is necessary complement, and when the workpiece processed or technique need to change, the size of polishing disk likely changes, and eccentric throw also needs to adjust thereupon.Planet device, eccentric balance adjusting device and pneumatic fitting is had for aperture aspherical robot its main composition of planetary polishing device.Mainly there is the impact that rotating speed is lower, eccentric throw is subject to centrifugal force because self structure causes and the problem such as limited adjustment range, pressure controling precision are not enough, working (machining) efficiency is low in existing burnishing device.
Summary of the invention
The present invention provides a kind of aperture aspherical robot planetary polishing device for solving in known technology the technical problem that exists, and this device can significantly improve polishing efficiency and quality of finish.
The technical scheme that the present invention takes for the technical problem existed in solution known technology is: a kind of aperture aspherical robot planetary polishing device, comprise revolution transmission mechanism, rotation transmission mechanism, buff spindle assembly, this planetary polishing device also comprises counterweight eccentric adjuster;
Described buff spindle assembly comprises low rubbing cylinder and the rotary ball spline of mother, the spline mother that the rotary ball spline of described mother is provided with splined shaft and is slidably connected with it, the piston rod of described low rubbing cylinder is connected with described splined shaft with a swivel joint by a transit joint, described splined shaft uses as buff spindle, described transit joint is fixed in the piston-rod lower end of described low rubbing cylinder, described swivel joint is rotatably connected on the lower end of described transit joint, described splined shaft is connected with belt wheel, and described spline mother is fixing on the supporting plate;
Described revolution transmission mechanism comprises housing, be fixed with revolution decelerator on the housing, described revolution decelerator is fixed with revoluting motor, described revoluting motor drives described revolution decelerator, the output shaft of described revolution decelerator is provided with driving flange, described driving flange is fixed on dovetail groove, the dovetails be slidably connected with it is provided with below described dovetail groove, the lower surface of described dovetails is fixed with lower flange, described lower flange drives described gripper shoe to move by bearing, and described gripper shoe is fixed on two dimension and intersects on rolling guide; Described two dimension is intersected rolling guide and is comprised the longitudinal rail affixed with described gripper shoe and slide block thereof and affixed cross slide way and slide block thereof with described housing;
Described two dimension intersection rolling guide comprises the longitudinal rail affixed with described gripper shoe, longitudinal sliding block, the transverse slider affixed with described longitudinal sliding block and the cross slide way affixed with described housing;
Described rotation transmission mechanism comprises fixing spinning motor on the housing, and described spinning motor is connected with described belt wheel by secondary tape handler;
Described counterweight eccentric adjuster comprises adjusting screw, described adjusting screw is provided with left-hand thread section and right-hand thread section, described dovetail groove is connected in described left-hand thread section by adjusting nut, described adjusting nut is fixed on described dovetail groove, described balancing weight is threaded connection in described right-hand thread section, and the pitch in described right-hand thread section is the twice of pitch in described left-hand thread section; Described adjusting screw and described dovetails axial restraint circumference are rotationally connected, and described balancing weight and described lower flange divide the axis both sides being located at described revoluting motor; Described adjusting screw is connected by tooth slot structure with swing handle, and described swing handle is connected on housing, is provided with knob in the outer end of described swing handle, between described knob and described housing, be clamped with back-moving spring.
The piston rod of described low rubbing cylinder, described transit joint, described swivel joint and described splined shaft are equipped with mutually through hollow structure, and mutually through described hollow structure forms polishing fluid injection channel.
The advantage that the present invention has and good effect are: maximum single component-spinning motor of being improved quality by burnishing device is fixed on housing, no longer participate in revolution motion, therefore the counterweight for offsetting autobiography motor quality can be reduced, thus reduce weight and the size of single unit system, make it to be more suitable for robot polishing mode; By structure innovations such as adjustable pouring weight and employing rolling guides, improve its balance quality, greatly reduce the impact that buff spindle centrifugal force brings to burnishing device, realize the function reducing horizontal exciting, the accurate control to polishing disk can be realized on the one hand, substantially increase the parameter area of spendable rotating speed and eccentric throw on the other hand: rotation rotating speed reaches 3 times of original parameter, and eccentric throw reaches 2 times of original parameter, to reach the object improving working (machining) efficiency; Hollow type buff spindle assembly makes polishing fluid can be injected by polishing disk center, and therefore burnishing device not only can realize static pressure polishing, and can realize dynamic pressure polishing, greatly improves polishing efficiency.Buff spindle assembly employing low rubbing cylinder (also known as " without friction " cylinder) and the rotary ball spline of mother also can improve the control accuracy to polishing disk pressure.In sum, invention increases the performance indications such as rotating speed, pressure and eccentric throw, make overall performance apparently higher than existing burnishing device.
Accompanying drawing explanation
Fig. 1 is outside drawing of the present invention;
Fig. 2 is the sectional view of the present invention at revolution transmission mechanism place;
Fig. 3 is top view of the present invention;
Fig. 4 is counterweight eccentric adjuster structural representation of the present invention;
Fig. 5 is buff spindle modular construction schematic diagram of the present invention;
Fig. 6 is oat tail groove structure schematic diagram of the present invention;
Fig. 7 is dovetails structural representation of the present invention.
In figure: 1, revoluting motor; 2, revolve round the sun decelerator; 3, housing; 4, spinning motor; 5, belt wheel; 6, low rubbing cylinder; 7, secondary tape handler; 8, gripper shoe; 9, splined shaft; 10, flange is driven; 11, dovetail groove; 12, dovetails; 13, lower flange; 14, balancing weight; 15, knob; 16, two dimension intersection rolling guide; 17, spline is female; 18, adjusting screw; 19, adjusting nut; 20, transit joint; 21, swivel joint.
Detailed description of the invention
For summary of the invention of the present invention, Characteristic can be understood further, hereby exemplify following examples, and coordinate accompanying drawing to be described in detail as follows:
Refer to Fig. 1 ~ Fig. 7, a kind of aperture aspherical robot planetary polishing device, comprise revolution transmission mechanism, rotation transmission mechanism, buff spindle assembly and counterweight eccentric adjuster.
Described buff spindle assembly comprises low rubbing cylinder 6 and the rotary ball spline of mother, the spline mother 17 that the rotary ball spline of described mother is provided with splined shaft 9 and is slidably connected with it, the piston rod of described low rubbing cylinder 6 is connected with described splined shaft 9 with a swivel joint 21 by a transit joint 20, described splined shaft 9 uses as buff spindle, described transit joint 20 is fixed in the piston-rod lower end of described low rubbing cylinder 6, described swivel joint 21 is rotatably connected on the lower end of described transit joint 20, described splined shaft 9 is connected with belt wheel 5, described spline mother 17 is fixed in gripper shoe 8, in the lower end of splined shaft 9, polishing tool is installed.The output pressure of control low rubbing cylinder 6 can realize the accurate control to polishing disk pressure.
The piston rod of the described low rubbing cylinder 6 connected successively from top to bottom, transit joint 20, swivel joint 21 and splined shaft 9 are equipped with mutually through hollow structure, all described hollow structures form polishing fluid injection channel, therefore polishing fluid injects polishing disk, to realize dynamic pressure polishing by this polishing fluid injection channel.
In said structure, low rubbing cylinder 6 and piston thereof all do not participate in spinning motion; Hollow structure can be utilized to realize dynamic pressure glossing.
Described revolution transmission mechanism comprises housing 3, revolution decelerator 2 is packed on described housing 3, revoluting motor 1 is packed on revolution decelerator 2, revoluting motor 1 drives revolution decelerator 2, the output shaft of revolution decelerator 2 is provided with and drives flange 10, flange 10 is driven to be fixed on dovetail groove 11, the dovetails 12 be slidably connected with it is provided with in dovetail groove 11, the lower surface of dovetails 12 is fixed with lower flange 13, lower flange 13 drives gripper shoe 8 to move by bearing, and gripper shoe 8 is fixed on two dimension and intersects on rolling guide 16; Refer to Fig. 2, described two dimension is intersected rolling guide 16 and is comprised the longitudinal rail affixed with described gripper shoe 8 and slide block thereof and affixed cross slide way and slide block thereof with described housing 3.
Drive the revolution motion of planetary motion with revoluting motor 1, intersect rolling guide 16 to the part pose formation constraint doing revolution rotation with mutually perpendicular two dimension, rotation is converted into flat turn and moves.
Rotation transmission mechanism comprises the spinning motor 4 be fixed on described housing 3, and described spinning motor 4 is connected with described belt wheel 5 by secondary tape handler 7.Make spinning motor 4 in the transmission not participating in realizing under the prerequisite revolved round the sun spinning motion.
When driving flange 10 and lower flange 13 is coaxial, owing to not having bias, now buff spindle only does rotation movement.In order to adapt to different process requirements, realizing eccentric throw can regulate, and needs to arrange counterweight eccentric adjuster.
Described counterweight eccentric adjuster: comprise adjusting screw 18, described adjusting screw 18 is provided with left-hand thread section and right-hand thread section, described dovetail groove 11 is connected in left-hand thread section by adjusting nut 19, adjusting nut 19 is fixed on dovetail groove 11, described balancing weight 14 is threaded connection in right-hand thread section, and the pitch in described right-hand thread section is the twice of pitch in described left-hand thread section; Described adjusting screw 19 is rotationally connected with dovetails 12 axial restraint circumference, and described balancing weight 14 and described lower flange 13 points are located at the axis both sides of revoluting motor 1.Adjusting screw 19 is connected by tooth slot structure with swing handle, and swing handle is connected on housing, is provided with knob 15 in the outer end of described swing handle, between described knob 15 and described housing, be clamped with back-moving spring.
This counterweight eccentric adjuster is eccentric adjusting and synchronous barycenter balanced controls.During use, rotate swing handle, adjusting screw 19 drives dovetails 12 and balancing weight 14 reverse sync to move, and can realize changing the adjustment of eccentric throw and the balancing weight reverse sync with eccentric throw.
Above-mentioned planetary polishing device feature is: spinning motor 4 is fixed on housing 3, by secondary tape handler 7, rotation is passed to buff spindle 9, realizes the rotation of buff spindle planetary motion; Revoluting motor 1 realizes the revolution motion in planetary motion by counterweight eccentric adjuster and two dimension intersection rolling guide 16, counterweight eccentric adjuster is of value to balance free-wheeling system and realizes due to the centrifugal force that bias produces when flat turn is moved, and reduces the centrifugal forces affect that when buff spindle does planetary motion, barycenter offset distance brings.Buff spindle assembly adopts low rubbing cylinder and the rotary ball spline shaft of mother, adopts female rotary ball spline shaft to make buff spindle have rotation and vertical direction two frees degree; Select low rubbing cylinder and rolling spline axle can reduce friction on the impact of pressure conduction on polishing disk, the accurate pressure of high accuracy proportioning valve is made to control to be achieved, the hollow design of buff spindle assembly also makes this burnishing device can realize static pressure and dynamic pressure two kinds of polishing mode, thus significantly improves polishing efficiency.The present invention passes through tape handler, achieve rational space layout, the maximum spinning motor of monomer mass in device is made not do revolution motion with buff spindle, therefore the weight of counterweight eccentric adjuster can effectively be reduced, reduce the centrifugal forces affect that spinning motor brings simultaneously widely, reduce horizontal exciting.
Operation principle of the present invention:
Revoluting motor 1 and spinning motor 4 adopt servomotor, and rotating speed can do any adjustment under 5000rpm, to adapt to remove the different requirements to rotating ratio in function, realize difform removal function.Revoluting motor 1 is after decelerator 2 slows down, drive dovetail groove 11, dovetails 12 are rotated, dovetails 12 is after the adjustment of eccentric distance, the circular motion of the eccentric throw that fixes together with lower flange 13 fixed thereon, now balancing weight 14 does subtend circular motion with identical eccentric throw equally at the axis offside of revoluting motor 1, to reduce buff spindle assembly and correlated parts produces the impact of centrifugal force on burnishing device in motion process, reduce the vibratory impulse that robot is formed, improve burnishing device control accuracy and control performance, thus realize the raising of quality of finish; Two dimension intersection rolling guide 16 is equipped with in the below of gripper shoe 8, and it does flat turn and moves under the driving of lower flange 13, drives the buff spindle assembly be installed on it to do flat turn and moves; When spinning motor and revoluting motor move simultaneously, buff spindle just defines planetary motion.When needing adjustment eccentric throw, revoluting motor 1 can being controlled and get back to dead-center position, now the position of one end alignment knob 15 of leading screw, by being arranged on the outside adjusting knob of housing 3, realizing the manual adjustment of eccentric throw according to graduation apparatus.
Spinning motion, through the transmission of secondary tape handler 7, is passed to the buff spindle being fixed on gripper shoe 8 end by spinning motor 4, and design upper cylinder piston not along with ball spline rotates, thus reduces cylinder seal wearing and tearing, improves service life; Kinematic constraint in buff spindle assembly is rolling friction, and cylinder also adopts has gap sealed " without friction " cylinder, reduces friction factor applies normal pressure control accuracy impact on buff spindle; Simultaneously in the supply gas pressure of cylinder controls, use high-precision electric Proportion valve, by above measure, thus pressure is effectively controlled, and then obtain the material basically identical with removing function theory and remove, obtain efficient, high-precision polishing effect.
Although be described the preferred embodiments of the present invention by reference to the accompanying drawings above; but the present invention is not limited to above-mentioned detailed description of the invention; above-mentioned detailed description of the invention is only schematic; be not restrictive; those of ordinary skill in the art is under enlightenment of the present invention; do not departing under the ambit that present inventive concept and claim protect, can also make a lot of form, these all belong within protection scope of the present invention.

Claims (2)

1. an aperture aspherical robot planetary polishing device, comprise revolution transmission mechanism, rotation transmission mechanism, buff spindle assembly, it is characterized in that, this planetary polishing device also comprises counterweight eccentric adjuster;
Described buff spindle assembly comprises low rubbing cylinder and the rotary ball spline of mother, the spline mother that the rotary ball spline of described mother is provided with splined shaft and is slidably connected with it, the piston rod of described low rubbing cylinder is connected with described splined shaft with a swivel joint by a transit joint, described splined shaft uses as buff spindle, described transit joint is fixed in the piston-rod lower end of described low rubbing cylinder, described swivel joint is rotatably connected on the lower end of described transit joint, described splined shaft is connected with belt wheel, and described spline mother is fixing on the supporting plate;
Described revolution transmission mechanism comprises housing, be fixed with revolution decelerator on the housing, described revolution decelerator is fixed with revoluting motor, described revoluting motor drives described revolution decelerator, the output shaft of described revolution decelerator is provided with driving flange, described driving flange is fixed on dovetail groove, the dovetails be slidably connected with it is provided with below described dovetail groove, the lower surface of described dovetails is fixed with lower flange, described lower flange drives described gripper shoe to move by bearing, and described gripper shoe is fixed on two dimension and intersects on rolling guide; Described two dimension is intersected rolling guide and is comprised the longitudinal rail affixed with described gripper shoe and slide block thereof and affixed cross slide way and slide block thereof with described housing;
Described rotation transmission mechanism comprises fixing spinning motor on the housing, and described spinning motor is connected with described belt wheel by secondary tape handler;
Described counterweight eccentric adjuster comprises adjusting screw, described adjusting screw is provided with left-hand thread section and right-hand thread section, described dovetail groove is connected in described left-hand thread section by adjusting nut, described adjusting nut is fixed on described dovetail groove, described balancing weight is threaded connection in described right-hand thread section, and the pitch in described right-hand thread section is the twice of pitch in described left-hand thread section; Described adjusting screw and described dovetails axial restraint circumference are rotationally connected, and described balancing weight and described lower flange divide the axis both sides being located at described revoluting motor; Described adjusting screw is connected by tooth slot structure with swing handle, and described swing handle is connected on housing, is provided with knob in the outer end of described swing handle, between described knob and described housing, be clamped with back-moving spring.
2. according to claim 1, it is characterized in that, the piston rod of described low rubbing cylinder, described transit joint, described swivel joint and described splined shaft are equipped with mutually through hollow structure, and mutually through described hollow structure forms polishing fluid injection channel.
CN201410554563.5A 2014-10-17 2014-10-17 Robotic planetary polishing unit for polishing of large-diameter aspheric surfaces Expired - Fee Related CN104290004B (en)

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Cited By (13)

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Publication number Priority date Publication date Assignee Title
CN106863109A (en) * 2017-03-17 2017-06-20 衢州学院 The plane lapping polishing machine and its method of a kind of work piece holder linear reciprocating motion
CN107309773A (en) * 2017-07-06 2017-11-03 天津大学 A kind of planetary polishing device of the quadrangular mechanism containing double parallel
CN107685267A (en) * 2017-10-09 2018-02-13 中国科学院国家天文台南京天文光学技术研究所 A kind of lapping using star lapping machine instrument
CN108481168A (en) * 2018-06-29 2018-09-04 成都睿坤科技有限公司 Polishing mechanism and burnishing device
CN108818217A (en) * 2018-09-29 2018-11-16 浙江昀丰新材料科技股份有限公司 A kind of polishing structure and polissoir
CN109702625A (en) * 2018-12-28 2019-05-03 天津洙诺科技有限公司 A kind of silicon wafer single-sided polishing devices and methods therefor
CN110000682A (en) * 2019-04-03 2019-07-12 中国科学院西安光学精密机械研究所 A kind of single-drive planetary polishing device
CN110561223A (en) * 2019-09-27 2019-12-13 常州市奥普泰克光电科技有限公司 Device and method for processing optical spherical lens
CN111421423A (en) * 2020-03-30 2020-07-17 中国科学院西安光学精密机械研究所 Self-rotating wheel type end polishing device
CN113263419A (en) * 2021-06-10 2021-08-17 湖南宇环精密制造有限公司 Eccentric polishing mechanism
CN114770316A (en) * 2022-03-15 2022-07-22 胜利油田鸿胜石油工程有限责任公司 Polishing mechanism for production and processing of oil field camping house
CN115008343A (en) * 2022-06-08 2022-09-06 中国科学院上海光学精密机械研究所 Flexible polishing shaft for optical processing
WO2023098342A1 (en) * 2021-11-30 2023-06-08 广东博智林机器人有限公司 Grinding mechanism and grinding robot

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CN204195436U (en) * 2014-10-17 2015-03-11 天津大学 Aperture aspherical robot planetary polishing device

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JP2001079743A (en) * 1999-09-10 2001-03-27 Asahi Glass Co Ltd Device for polishing glass
CN1490125A (en) * 2003-08-22 2004-04-21 中国人民解放军国防科学技术大学 Non-spherical optical component composite machining and testing machine tools
CN101088705A (en) * 2007-02-14 2007-12-19 长春设备工艺研究所 Efficient numerically controlled polishing process and apparatus for great aperture aspherical optical elements
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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106863109A (en) * 2017-03-17 2017-06-20 衢州学院 The plane lapping polishing machine and its method of a kind of work piece holder linear reciprocating motion
CN107309773A (en) * 2017-07-06 2017-11-03 天津大学 A kind of planetary polishing device of the quadrangular mechanism containing double parallel
CN107309773B (en) * 2017-07-06 2019-04-05 天津大学 A kind of planetary polishing device of the quadrangular mechanism containing double parallel
CN107685267A (en) * 2017-10-09 2018-02-13 中国科学院国家天文台南京天文光学技术研究所 A kind of lapping using star lapping machine instrument
CN107685267B (en) * 2017-10-09 2019-02-19 中国科学院国家天文台南京天文光学技术研究所 A kind of lapping using star lapping machine tool
CN108481168A (en) * 2018-06-29 2018-09-04 成都睿坤科技有限公司 Polishing mechanism and burnishing device
CN108818217A (en) * 2018-09-29 2018-11-16 浙江昀丰新材料科技股份有限公司 A kind of polishing structure and polissoir
CN109702625A (en) * 2018-12-28 2019-05-03 天津洙诺科技有限公司 A kind of silicon wafer single-sided polishing devices and methods therefor
CN110000682A (en) * 2019-04-03 2019-07-12 中国科学院西安光学精密机械研究所 A kind of single-drive planetary polishing device
CN110000682B (en) * 2019-04-03 2024-04-05 中国科学院西安光学精密机械研究所 Single-transmission planetary polishing device
CN110561223A (en) * 2019-09-27 2019-12-13 常州市奥普泰克光电科技有限公司 Device and method for processing optical spherical lens
CN111421423A (en) * 2020-03-30 2020-07-17 中国科学院西安光学精密机械研究所 Self-rotating wheel type end polishing device
CN113263419A (en) * 2021-06-10 2021-08-17 湖南宇环精密制造有限公司 Eccentric polishing mechanism
WO2023098342A1 (en) * 2021-11-30 2023-06-08 广东博智林机器人有限公司 Grinding mechanism and grinding robot
CN114770316A (en) * 2022-03-15 2022-07-22 胜利油田鸿胜石油工程有限责任公司 Polishing mechanism for production and processing of oil field camping house
CN114770316B (en) * 2022-03-15 2023-08-18 胜利油田鸿胜石油工程有限责任公司 Polishing mechanism for production and processing of oilfield camping house
CN115008343A (en) * 2022-06-08 2022-09-06 中国科学院上海光学精密机械研究所 Flexible polishing shaft for optical processing
CN115008343B (en) * 2022-06-08 2023-11-03 中国科学院上海光学精密机械研究所 Flexible polishing shaft for optical processing

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