CN108818217A - A kind of polishing structure and polissoir - Google Patents
A kind of polishing structure and polissoir Download PDFInfo
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- CN108818217A CN108818217A CN201811146617.9A CN201811146617A CN108818217A CN 108818217 A CN108818217 A CN 108818217A CN 201811146617 A CN201811146617 A CN 201811146617A CN 108818217 A CN108818217 A CN 108818217A
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- ball bearing
- polishing
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- 238000005498 polishing Methods 0.000 title claims abstract description 140
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 37
- 239000000919 ceramic Substances 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 13
- 238000003786 synthesis reaction Methods 0.000 claims description 13
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 230000033001 locomotion Effects 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 6
- 239000007787 solid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 description 15
- 238000010586 diagram Methods 0.000 description 12
- 229910052594 sapphire Inorganic materials 0.000 description 12
- 239000010980 sapphire Substances 0.000 description 12
- 238000012545 processing Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- WWUVLNPEWUTCEI-KRWDZBQOSA-N Flowerone Chemical compound C1=C(O)C(CC=C(C)C)=CC([C@H]2OC3=C(O)C(O)=CC(O)=C3C(=O)C2)=C1 WWUVLNPEWUTCEI-KRWDZBQOSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- YVBUWVMMORNHHZ-UHFFFAOYSA-N flowerone Natural products CC(=C)CCc1cc(ccc1O)C1CC(=O)c2c(O)cc(O)c(O)c2O1 YVBUWVMMORNHHZ-UHFFFAOYSA-N 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
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- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
This application discloses a kind of polishing structures, including polishing disk component, spline bearing component, self-aligning ball bearing connector and active connection；One end of spline bearing component is connect by self-aligning ball bearing connector with polishing disk component, and the other end of spline bearing component is connect with active connection；Self-aligning ball bearing connector is for driving polishing disk component to move radially and axially；Active connection one end connects cylinder, and one end connects spline bearing component, drives spline bearing component to move radially and axially by cylinder.The application uses spline bearing component for the guide frame that slides axially, and self-aligning ball bearing connector is arranged between spline bearing component and polishing disk component, and the constitutional detail is few, and assembling is simple, reduces manufacture and assembly difficulty.And polishing structure directing performance described herein is good, it can be achieved that steady compress while transmitting torsion and being nearly free from additional force, and structure is simpler, at low cost.
Description
Technical field
This application involves grinding, polishing field more particularly to a kind of polishing structure and polissoirs.
Background technique
Chip is that five faces shine, it usually needs chip is placed in bracket, the opening area of reflector is much larger than chip
Light-emitting area causes unit area luminous flux low, and chip surface color homogeneity is excessively poor, partially blue right above chip, and outer ring
It is partially yellow.
The chip structure of blue white light LED based on gallium nitride is strongly depend on substrate material used, at present major part factory
Quotient is using sapphire as substrate slice.It before sapphire substrate sheet application, needs to be processed by shot blasting it, to remove surface damage
Hurt layer, eliminates residual stress.As the size of sapphire substrate sheet is gradually developed to 4 cun and 6 cun from 2 cun, process equipment
Develop to enlarged direction, produces efficient demand to meet.In recent years the polishing machine for processing sapphire substrate sheet mostly uses 50
Inch polishing disk specification, using the rotary shaft of right-angled intersection universal structure, rotary shaft slides axially using optical axis and dive key
Guide frame, but above structure it is equipped part it is more, processing assembling is cumbersome, and maintenance difficulty increases.And with size
Increase, it is desirable that the thickness difference of all sapphire substrate sheets of polissoir time processing is within 3 μm, therefore to the steady of polissoir
The requirement of qualitative and accuracy is also higher, further, uniformity and repeatability to the thermal deformation of upper and lower polishing disk, upper polishing disk
Pressure uniformity and stability also have very high requirement, but above-mentioned requirements are also not achieved in current polissoir, cause it
The sapphire substrate sheet of processing or other such as sapphire epitaxial wafers, optical glass, silicon wafer, light guide plate, acrylic are nonmetallic
The yield rate of the substrate slice of superhard material fluctuates larger, unstable quality.
Summary of the invention
This application provides a kind of polishing dish structure and polissoirs, complicated to solve polisher structure in the prior art,
Assemble cumbersome problem.
In a first aspect, to achieve the above object, this application provides a kind of polishing structures, including polishing disk component, spline
Bearing assembly, self-aligning ball bearing connector and active connection；
One end of the spline shaft assembly is connect by the self-aligning ball bearing connector with the polishing disk component, described
The other end of spline bearing component is connect with active connection；
The self-aligning ball bearing connector is for driving the polishing disk component to move radially and axially；
The active connection is for driving the spline bearing component to move radially and axially.
With reference to first aspect, in a first possible implementation of that first aspect, the spline bearing component includes flower
Key bearing, splined shaft bearing sleeve, spline bearing spacer, spline bearing seat and angular contact ball bearing are set in the middle part of the spline bearing
It is placed in the splined shaft bearing sleeve, the spline bearing set is set in the spline bearing spacer, the spline bearing spacer
Both ends the angular contact ball bearing is set, the angular contact ball bearing is set in the spline bearing seat；
The self-aligning ball bearing connector, the second end of the spline bearing are socketed outside the first end of the spline bearing
It is connect with the active connection；
It is equipped with cavity in the spline bearing, is equipped with water inlet pipe, outlet pipe and tracheae in the cavity.
The possible implementation of with reference to first aspect the first, in a second possible implementation of that first aspect,
The self-aligning ball bearing connector includes self-aligning ball bearing, self-aligning ball bearing set, self-aligning ball bearing fixing sleeve, the spherical ball axis
It holds and is socketed in outside the spline bearing first end, the external socket self-aligning ball bearing set of the self-aligning ball bearing is described
The outside of self-aligning ball bearing set also sets up the self-aligning ball bearing fixing sleeve, the self-aligning ball bearing fixing sleeve and the spherical ball
There are axial-rotation gap, self-aligning ball bearing fixing sleeve one end to be socketed in outside spline bearing for bearing inner room, the other end with
The self-aligning ball bearing fixing sleeve passes through screw thread bulb pin connection.
With reference to first aspect, in first aspect in the third possible implementation, the polishing disk component includes coaxial
The upper polishing disk and lower polishing disk being arranged, the one side of the upper polishing disk and self-aligning ball bearing set connect, another side and it is described under
Polishing disk connection；Threeway seat is equipped at the axle center of the upper polishing disk and the lower polishing disk, the threeway seat is equipped with water inlet
Pipe fitting and titting water outlet, the admitting pipe joint are connect with water inlet pipe, and the titting water outlet is connect with outlet pipe；
Water channel, the admitting pipe joint and the titting water outlet are equipped between the upper polishing disk and the lower polishing disk
It is connect with the water channel；
Exhaust outlet is equipped at the axle center of the lower polishing disk, the exhaust outlet is matched with the exhaust end of the threeway seat,
One end of tracheae is set in exhaust end；
Pressing sleeve is also socketed with outside the threeway seat, the pressing sleeve is fixed in spline bearing；
Ceramic ring is also connected with outside the lower polishing disk, the lower polishing disk and the ceramic interannular are provided with positioning
Circle.
With reference to first aspect, in the 4th kind of possible implementation of first aspect, the active connection includes circular cone
Roller bearing, thrust ball bearing, bearing block and bearing block flange, the bearing block are fixed on spline by the bearing block flange
In the second end of bearing, the tapered roller bearing is socketed on outside the bearing block, and the thrust ball bearing is socketed on described
Outside tapered roller bearing；
The bearing block flange is equipped with pipe fitting, is additionally provided with three-way rotary joint on the bearing block.The pipe connects
Head is used for fixed water inlet pipe, outlet pipe and tracheae with the three-way rotary joint.
The 4th kind of possible implementation with reference to first aspect, in the 5th kind of possible implementation of first aspect,
The outside of the active connection is also arranged with cylinder headstock, and the cylinder headstock passes through the second of headstock flange and spline bearing
End connection；
The cylinder headstock is equipped with water inlet, water outlet and air inlet.
The 5th kind of possible implementation with reference to first aspect, in the 6th kind of possible implementation of first aspect,
Load cell is arranged in the top of the cylinder headstock, and the activity being provided on the load cell for connecting cylinder connects
Head.
The 6th kind of possible implementation with reference to first aspect, in the 7th kind of possible implementation of first aspect,
The active joint includes spherical bearing, adapter, movable sleeve and spherical bearing pressing sleeve, and the spherical bearing is fixed on described turn
On connector, the adapter is fixed at the center of the load cell；
The movable sleeve is equipped in the spherical bearing, the external of the spherical bearing is socketed the spherical bearing pressing sleeve.
The possible implementation of with reference to first aspect the first, in the 8th kind of possible implementation of first aspect,
The outside of the splined shaft bearing sleeve is also socketed with belt wheel；The spline bearing seat and self-aligning ball bearing inner room are equipped with shield.
Second aspect, present invention also provides a kind of polissoir, including cylinder, rack, synthesis disk, ceramic disk, motor,
It further include at least one above-mentioned polishing structure；
The polishing structure setting connects in the upper layer of the rack, the active joint of the polishing mechanism and the cylinder
It connects, the cylinder is fixed on bracket, and the bracket is fixed on the upper layer of rack；
The motor passes through polishing mechanism radial motion described in band wheel drive；
The synthesis disk is set to the lower layer of rack, and the ceramic disk is arranged on the synthesis disk；
It further include operator control panel, the operator control panel is connect with the cylinder and the motor.
From the above technical scheme, herein described polishing structure uses spline bearing component as the guiding that slides axially
Self-aligning ball bearing component is arranged in structure between spline bearing component and polishing disk component, and the constitutional detail is few, and assembling is simple,
Reduce manufacture and assembly difficulty.And polishing structure directing performance described herein is good, it can be achieved that steady compress while passing
It passs torsion and is nearly free from additional force, structure is simpler, at low cost.Angle can be adjusted flexibly under polish pressure effect when work
Degree makes substrate slice uniform force, and uniformly, processing quality is high and stablizes for material removal.
And the rotation angle of upper polishing disk is no more than 1 degree mostly when polishing, and the aligning angle of self-aligning ball bearing component is big
In this angle, thus the upper polishing disk of the application turns to, guiding flexibly, and has better centering effect.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not
The application can be limited.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, for those of ordinary skills, do not paying creation
Under the premise of property is laborious, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the schematic perspective view of polishing structure provided by the embodiments of the present application；
Fig. 2 is the schematic diagram of the section structure of polishing structure provided by the embodiments of the present application；
Fig. 3 is the schematic diagram of the section structure of self-aligning ball bearing connector provided by the embodiments of the present application；
Fig. 4 is the schematic diagram of the section structure of polishing disk component provided by the embodiments of the present application；；
Fig. 5 is the schematic diagram of the section structure of active connection provided by the embodiments of the present application；；
Fig. 6 is the schematic diagram of the section structure of active joint provided by the embodiments of the present application；
Fig. 7 is the structural schematic diagram of polissoir provided by the embodiments of the present application；
Fig. 8 is the local structure top view of polissoir provided by the embodiments of the present application.
Description of symbols：
Polishing disk component 100：Upper polishing disk 110；Water channel 111；Lower polishing disk 120；Exhaust outlet 121；Threeway seat 130；Into
Water pipe head 131；Titting water outlet 132；Pressing sleeve 140；Ceramic ring 150；Locating ring 160；
Spline bearing component 200：Spline bearing 210；First end 211；Second end 212；Cavity 213；Splined shaft bearing sleeve
220；Spline bearing spacer 230；Angular contact ball bearing 240；Spline bearing seat 250；Water inlet pipe 260；Outlet pipe 270；Tracheae
280；Belt wheel 290；
Self-aligning ball bearing connector 300：Self-aligning ball bearing 310；Self-aligning ball bearing set 320；Self-aligning ball bearing fixing sleeve
330；Axial-rotation gap 340；Screw thread ball stud 350；Shield 360；
Active connection 400：Tapered roller bearing 410；Thrust ball bearing 420；Bearing block 430；Bearing block flange 440；
Pipe fitting 450；Three-way rotary joint 460；
Cylinder headstock 500：Headstock flange 510；Water inlet 520；Water outlet 530；Air inlet 540；
Load cell 600；
Active joint 700；Spherical bearing 710；Adapter 720；Movable sleeve 730；Spherical bearing pressing sleeve 740；
Cylinder 1；Bracket 2；Polish structure 3；Motor 4；Rack 5；Operator control panel 6；Ceramic disk 7；Synthesize disk 8；It is polished product 9.
Specific embodiment
It is described in detail below by the application, will become more with these explanations the characteristics of the application with advantage
It is clear, clear.
Dedicated word " exemplary " means " being used as example, embodiment or illustrative " herein.Here as " exemplary "
Illustrated any embodiment should not necessarily be construed as preferred or advantageous over other embodiments.Although each of embodiment is shown in the attached drawings
In terms of kind, but unless otherwise indicated, it is not necessary to attached drawing drawn to scale.
In the description of the present application, it should be noted that term " on ", "lower", "inner", "outside", "front", "rear", " left side "
The orientation or positional relationship of instructions such as " right sides " is based on the orientation or positional relationship under the application working condition, merely to just
In description the application and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with
Specific orientation construction and operation, therefore should not be understood as the limitation to the application.In addition, term " first ", " second ", "
Three " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance with " the 4th ".
With reference to the accompanying drawing, the specific embodiment of the application is discussed in detail.
Fig. 1 is the schematic perspective view that the polishing structure exemplified is preferably implemented according to one.As shown in Figure 1, polishing knot
Structure includes polishing disk component 100, spline bearing component 200, self-aligning ball bearing connector 300 and active connection 400；The flower
One end of key bearing assembly 200 is connect by the self-aligning ball bearing connector 300 with the polishing disk component 100, the flower
The other end of key bearing assembly is connect with active connection 400；The self-aligning ball bearing connector 300 is for driving the polishing
Disk component 100 moves radially and axially；Described 400 one end of active connection connects cylinder, and one end connects the spline bearing
Component 200 drives the spline bearing component 200 to move radially and axially by cylinder.
The application uses spline bearing component 200 for the guide frame that slides axially, in spline bearing component 200 and polishing disk
Self-aligning ball bearing connector 300 is set between component 100, and the constitutional detail is few, and assembling is simple, reduces manufacture and assembly is difficult
Degree.And polishing structure directing performance described herein is good, it can be achieved that steady compress while transmitting torsion and being nearly free from
Additional force, structure are simpler, at low cost.When work polish pressure effect under can flexible angle adjustment, keep substrate slice stress equal
Even, uniformly, processing quality is high and stablizes for material removal.And the rotation angle of upper polishing disk is no more than 1 degree mostly when polishing, and
The aligning angle of self-aligning ball bearing is greater than this angle, thus the upper polishing disk of the application turns to, guiding is flexible, and with preferably fixed
Heart effect.
Can use the product that are polished that polishing structure described herein is polished has：Sapphire substrate sheet, sapphire
Epitaxial wafer, optical glass, silicon wafer, light guide plate, the nonmetallic superhard material such as acrylic are related to mobile phone and plate, electronics, LED and
The fields such as ceramics, the application are without limitation.
Fig. 2 is the schematic diagram of the section structure that the application one implements the polishing structure exemplified.As shown in Fig. 2, the spline
Bearing assembly 200 includes spline bearing 210, splined shaft bearing sleeve 220, spline bearing spacer 230, spline bearing seat 250 and corner connection
Ball bearing 240 is touched, the middle part of the spline bearing 210 is set in the splined shaft bearing sleeve 220, the splined shaft bearing sleeve 220
It is set in the spline bearing spacer 230, the outside of the splined shaft bearing sleeve 220 is also socketed with belt wheel 290, the splined shaft
The upper/lower terminal for holding spacer 230 is provided with the angular contact ball bearing 240, and the angular contact ball bearing 240 is set to described
In spline bearing seat 250, the angular contact ball bearing 240 is equipped with pump nozzle, for 240 note of angular contact ball bearing
Enter lubricating oil and guarantees that its operating is stablized.The self-aligning ball bearing connector is socketed outside the first end 211 of the spline bearing
300, the second end 212 of the spline bearing is connect with the active connection 400, the active connection 400 and cylinder 1
Connection.
When concrete application, the spline bearing 210 vertical sliding motion in the splined shaft bearing sleeve 220 after cylinder 1 supplies is real
Now it is axially moved.The splined shaft bearing sleeve 220 is mounted on two angular contact ball bearings separated by the spline bearing spacer 230
On 240 inner ring, the angular contact ball bearing 240 is mounted in the spline bearing seat 250, passes through spline shaft flange and circle
Nut compresses positioning.The spline bearing seat 250 is fixed, and transmission belt is arranged on belt wheel 290 and connect with driving mechanism, example
It is such as connect with motor 4, the spline bearing component 200 is driven to realize radial motion.
It is additionally provided with cavity 213 in the spline bearing 210, is equipped with water inlet pipe 260,270 and of outlet pipe in the cavity 213
Tracheae 280.Described 260 one end of water inlet pipe is connect with water inlet 520, and one end is connect with the water inlet end of water channel 111；The outlet pipe
270 one end are connect with water outlet 530, and one end is connect with the water outlet of water channel 111, are realized cooling water circulation path, are thrown with stablizing
The temperature of CD prevents temperature unevenness when polishing from causing product quality bad.
Described 280 one end of tracheae is connected to air inlet 540, the exhaust outlet 121 of the straight-through lower polishing disk 120 of the other end.It is thrown
After the completion of the polishing of light product, liquid can be polished and paste on the burnishing surface of lower polishing disk 120 and be not readily separated.Compressed air passes through gas
Pipe 280 enters, and blows out from exhaust outlet 121, and product ejection can will be polished with relatively uniform pressure, avoids getting stuck.
Fig. 3 is the structural schematic diagram for the self-aligning ball bearing connector 300 that the application one implements the polishing structure exemplified.Such as
Shown in Fig. 3, the self-aligning ball bearing connector 300 includes self-aligning ball bearing 310, self-aligning ball bearing set 320, self-aligning ball bearing
Fixing sleeve 330, the self-aligning ball bearing set 320 connect outside the first end 211 of the spline bearing, the self-aligning ball bearing
Outside is socketed the self-aligning ball bearing set 320, and the outside of the self-aligning ball bearing set 320 also sets up the self-aligning ball bearing and fixes
Set 330, it is described there are axial-rotation gap 340 between the self-aligning ball bearing fixing sleeve 330 and self-aligning ball bearing set 320
330 one end of self-aligning ball bearing fixing sleeve is socketed in outside spline bearing 210, the other end and the self-aligning ball bearing fixing sleeve 330
It is connected by screw thread ball stud 350.
Specifically, the self-aligning ball bearing fixing sleeve 330 is by being threadably mounted in the spline bearing 210, the tune
Heart ball bearing fixing sleeve 330 is equipped with screw thread ball stud 350, and the screw thread ball stud 350 is for transmitting torque.The spherical ball
The installation self-aligning ball bearing 310 in bearing holder (housing, cover) 320, the self-aligning ball bearing 310 components associated therewith are also mounted at described
In spline bearing 210.There are axial-rotation gap between the self-aligning ball bearing fixing sleeve 330 and self-aligning ball bearing set 320,
It is constrained when radial motion by the screw thread ball stud 350.The bulb of the screw thread ball stud 350 is set to the self-aligning ball bearing
In the reserved elongated holes of set 320, guarantee can to constrain when radial motion, not rotation and low friction.
Preferably, shield 360, the shield are additionally provided between the self-aligning ball bearing set 320 and the spline bearing seat 250
360 cover 320 with the 250 inside correlated parts of spline bearing seat not by greasy dirt in the self-aligning ball bearing for protection setting
Dust is corroded.When the spline bearing 210 sliding when, the shield 360 can elongate and shorten, due to spline bearing flange
It is connected, therefore will not rotates.
When polishing, the rotation angle of upper polishing disk 110 is no more than 1 degree mostly, and the aligning of self-aligning ball bearing connector 300
Angle is greater than this angle, therefore can guarantee that the upper polishing disk 110 connecting with self-aligning ball bearing connector 300 is turned to, is oriented to flexibly, and
With better centering effect.
Fig. 4 is the structural schematic diagram for the polishing disk component 100 that the application one implements the polishing structure exemplified.Such as Fig. 4 institute
Show, the polishing disk component 100 includes the upper polishing disk 110 and lower polishing disk 120 of coaxial arrangement, the upper polishing disk 110
It is connect on one side with self-aligning ball bearing set 320, another side is connect with the lower polishing disk 120；The upper polishing disk 110 and it is described under
Threeway seat 130 is equipped at the axle center of polishing disk 120, the threeway seat 130 is equipped with admitting pipe joint 131 and titting water outlet
132, the admitting pipe joint 131 is connect with water inlet pipe 260, and the titting water outlet 132 is connect with outlet pipe 270.
Water channel 111, the admitting pipe joint 131 and institute are equipped between the upper polishing disk 110 and the lower polishing disk 120
Titting water outlet 132 is stated to connect with the water channel 111.When polishing, the burnishing surface for being polished product and the lower polishing disk 120 is connect
Heat can be generated when touching wiping, lower polishing disk 120 is made to heat up, and temperature reaches the upper polishing disk 110, will lead to polishing disk
110 generate thermal deformation, further will lead to the uniformity for the product of being polished.Cooling water circulation path is realized by water channel 111, with steady
The temperature for determining polishing disk prevents temperature unevenness when polishing from causing product quality bad.
Exhaust outlet 121, the row of the exhaust outlet 121 and the threeway seat 130 are equipped at the axle center of the lower polishing disk 120
Gas end matches, and one end of tracheae 280 is set in exhaust end；Compressed air is entered by tracheae 280, is blown from exhaust outlet 121
Out, it can will be polished product ejection with relatively uniform pressure, avoid getting stuck.
Pressing sleeve 140 is also socketed with outside the threeway seat 130, the pressing sleeve 140 is fixed in spline bearing 210, is used for
Compressing 210 inner ring of spline bearing fixes it.
Ceramic ring 150 is also connected with outside the lower polishing disk 120, between the lower polishing disk 120 and the ceramic ring 150
It is provided with locating ring 160, the locating ring 160 is nylon ring.When polishing, polishing fluid has when being injected in the surface of synthesis disk 8
Non-uniform phenomenon occurs, and the ceramic ring 150 can play the role of dispersion, and polishing fluid uniformly dissipates when rotating after scraping
It is distributed in synthesis 8 surface of disk.The locating ring 160 is used for the coarse localization when 100 downlink of polishing disk component and ceramic disk 7 contact,
Make to be fixed on the product that are polished on ceramic disk 7 and is in suitable polishing position always.
Fig. 5 is the structural schematic diagram for the active connection 400 that the application one implements the polishing structure exemplified.Such as Fig. 5 institute
Show, the active connection 400 includes tapered roller bearing 410, thrust ball bearing 420, bearing block 430 and bearing block flange
440, the bearing block 430 is fixed in the second end 212 of spline bearing by the bearing block flange 440, the circular cone rolling
Sub- bearing 410 is socketed on outside the bearing block 430, and the thrust ball bearing 420 is socketed on outside the tapered roller bearing 410
Portion；It is set on the bearing block flange 440 there are three pipe fitting 450, is additionally provided with three-way rotary joint on the bearing block 430
720.The pipe fitting 450 is used for fixed water inlet pipe 260, outlet pipe 270 and tracheae 280 with the three-way rotary joint 720.
Specifically, when motor 4 drives 200 radial motion of spline bearing component by belt wheel 290, spline bearing
Second end 212 passes through the tapered roller bearing 410 and the thrust ball with the component of lower component and 400 or more active connection
Bearing 420 realizes radial and axial movement.
Further, the outside of the active connection 400 is also arranged with cylinder headstock 500, and the cylinder headstock 500 is logical
Headstock flange 510 is crossed to connect with the second end 212 of spline bearing；The cylinder headstock 500 is equipped with water inlet 520, water outlet
530 and air inlet 540, it is adapted to respectively with water inlet pipe 260, outlet pipe 270 and tracheae 280.
Load cell 600 is arranged in the top of the cylinder headstock 500, is provided with and is used on the load cell 600
Connect the active joint 700 of cylinder 1.210 top of spline bearing is provided with load cell 600, can real-time monitoring polishing disk group
Part 100 acts on the pressure on the product of being polished, and adjusts and control in time the pressure value of operation stage by pneumatic proportional valve,
It effectively improves and is polished the consistency of the indexs such as surface smoothness, thickness and precision and the TTV of product between different processing batches.
Fig. 6 is the structural schematic diagram for the active joint 700 that the application one implements the polishing structure exemplified.As shown in fig. 6,
The active joint 700 includes spherical bearing 710,710 pressing sleeve of adapter 720, movable sleeve 730 and spherical bearing, the spherical surface
Bearing 710 is fixed on the adapter 720, and the adapter 720 is fixed at the center of the load cell 600；Institute
The setting movable sleeve 730 in spherical bearing 710 is stated, the external of the spherical bearing 710 is socketed the pressure of spherical bearing 710
Set.The active joint 700 is used to mitigate by the eccentric, in parallel and rigging error of driving cylinder, passes through the spherical bearing
710 axially and radially movement, solves the problems, such as the centering of cylinder 1 and active connection 400.The piston rod when cylinder 1 is released
When misaligning with polishing disk component, the movable sleeve 730 can be automatically corrected by the spherical bearing 710.
Herein described polishing structure, uses spline bearing component 200 for the guide frame that slides axially, in spline bearing group
Self-aligning ball bearing connector 300 is set between part 200 and polishing disk component 100, and the constitutional detail is few, and assembling is simple, reduces
Manufacture and assembly difficulty.And polishing structure directing performance described herein is good, it can be achieved that steady compress while transmitting torsion
And it is nearly free from additional force, structure is simpler, at low cost.When work polish pressure effect under can flexible angle adjustment, make
Substrate slice uniform force, uniformly, processing quality is high and stablizes for material removal.
Present invention also provides a kind of polissoir, Fig. 7 is the structure that the polissoir exemplified is preferably implemented according to one
Schematic diagram, Fig. 8 are the local structure top view of polissoir.As shown in Figure 7, Figure 8, the polissoir includes cylinder 1, machine
Frame 5, synthesis disk 8, ceramic disk 7, motor 4, further include at least one above-mentioned polishing structure 3；
The polishing structure 3 is set to the upper layer of the rack 5, the active joint 700 and the gas of the polishing mechanism
Cylinder 1 connects, and the cylinder 1 is fixed on bracket 2, and the bracket 2 is fixed on the upper layer of rack 5；
The motor 4 drives the polishing mechanism radial motion by belt wheel 290；
The synthesis disk 8 is set to the lower layer of rack 5, and the ceramic disk 7 is arranged on the synthesis disk 8；
It further include operator control panel 6, the operator control panel 6 is connect with the cylinder 1 and the motor 4.
By taking sapphire substrate sheet as an example, specifically when polishing, sapphire substrate sheet is affixed on circular ceramic disk 7, then
It is integrally placed on the suitable position of synthesis disk 8, the cylinder 1 is controlled by the operator control panel 6 and is released, the cylinder 1 pushes away
It pushes 100 downlink of polishing disk component by spline bearing component 200 when out and contacts and give default with the ceramic disk 7
Pressure after stop.The rotation counterclockwise of polishing disk component 100,100 diameter of polishing disk component are controlled by the operator control panel 6 again
It is then driven to rotation by the motor 4.After keeping polishing preset time, the synthesis disk 8 is stalled, the polishing disk component
100 also stall and stop after rising to suitable position automatically, complete the stock removal polishing processing of sapphire substrate sheet.
Polissoir described herein runs smoothly, low noise, convenient for safeguarding and at low cost, the product surface after polishing
Quality is high, and volume production quality is steady in a long-term.It can be widely applied to electronics, the fields such as LED and ceramics.
It is described the invention in detail above in conjunction with detailed description and exemplary example, but these explanations are simultaneously
It is not considered as limiting the invention.It will be appreciated by those skilled in the art that without departing from the spirit and scope of the invention,
Can be with various equivalent substitutions, modifications or improvements are made to the technical scheme of the invention and its embodiments, these each fall within the present invention
In the range of.Scope of protection of the present invention is subject to the appended claims.
Claims (10)
1. a kind of polishing structure, which is characterized in that including polishing disk component (100), spline bearing component (200), spherical ball axis
Hold connector (300) and active connection (400)；
One end of the spline shaft assembly is connected by the self-aligning ball bearing connector (300) and the polishing disk component (100)
It connects, the other end of the spline shaft assembly is connect with active connection (400)；
The self-aligning ball bearing connector (300) is for driving the polishing disk component (100) to move radially and axially；
The active connection (400) is for driving the spline bearing component (200) to move radially and axially.
2. polishing structure according to claim 1, which is characterized in that the spline bearing component (200) includes splined shaft
(210), splined shaft bearing sleeve (220), spline bearing spacer (230), spline bearing seat (250) and angular contact ball bearing (240) are held,
It is set in the middle part of the spline bearing (210) in the splined shaft bearing sleeve (220), the splined shaft bearing sleeve (220) is set to
In the spline bearing spacer (230), the angular contact ball bearing (240) is arranged in the both ends of the spline bearing spacer (230),
The angular contact ball bearing (240) is set in the spline bearing seat (250)；
The self-aligning ball bearing connector (300) is socketed outside the first end (211) of the spline bearing, the spline bearing
Second end (212) is connect with the active connection (400)；
Cavity (213) are equipped in the spline bearing (210), water inlet pipe (260), outlet pipe are equipped in the cavity (213)
(270) and tracheae (280).
3. polishing structure according to claim 2, which is characterized in that the self-aligning ball bearing connector (300) includes adjusting
Heart ball bearing (310), self-aligning ball bearing set (320), self-aligning ball bearing fixing sleeve (330), the self-aligning ball bearing set (320) connect
External in the first end (211) of the spline bearing, the external of the self-aligning ball bearing (310) is socketed the self-aligning ball bearing set
(320), the outside of the self-aligning ball bearing set (320) also sets up the self-aligning ball bearing fixing sleeve (330), the spherical ball axis
It holds there are axial-rotation gap (340) between fixing sleeve (330) and the self-aligning ball bearing set (320), the self-aligning ball bearing is solid
Fixed set (330) one end is socketed in spline bearing (210) outside, and the other end and the self-aligning ball bearing fixing sleeve (330) pass through spiral shell
Line ball stud (350) connection.
4. polishing structure according to claim 1, which is characterized in that the polishing disk component (100) includes coaxial arrangement
Upper polishing disk (110) and lower polishing disk (120), the one side of the upper polishing disk (110) and self-aligning ball bearing set (320) are even
It connects, another side is connect with the lower polishing disk (120)；At the axle center of the upper polishing disk (110) and the lower polishing disk (120)
Equipped with threeway seat (130), the threeway seat (130) be equipped with admitting pipe joint (131) and titting water outlet (132), it is described into
Water pipe head (131) is connect with water inlet pipe (260), and the titting water outlet (132) connect with outlet pipe (270)；
Water channel (111) are equipped between the upper polishing disk (110) and the lower polishing disk (120), the admitting pipe joint (131)
It is connect with the water channel (111) with the titting water outlet (132)；
Exhaust outlet (121) are equipped at the axle center of the lower polishing disk (120), the exhaust outlet (121) and the threeway seat (130)
Exhaust end match, one end of tracheae (280) is set in exhaust end；
It is also socketed with pressing sleeve (140) outside the threeway seat (130), the pressing sleeve (140) is fixed on spline bearing (210)；
It is also connected with ceramic ring (150) outside the lower polishing disk (120), the lower polishing disk (120) and the ceramic ring
(150) locating ring (160) are provided between.
5. polishing structure according to claim 1, which is characterized in that the active connection (400) includes taper roller
Bearing (410), thrust ball bearing (420), bearing block (430) and bearing block flange (440), the bearing block (430) pass through institute
It states bearing block flange (440) to be fixed in the second end (212) of spline bearing, the tapered roller bearing (410) is socketed on institute
It is external to state bearing block (430), it is external that the thrust ball bearing (420) is socketed on the tapered roller bearing (410)；
The bearing block flange (440) is equipped with pipe fitting (450), and three-way rotation is additionally provided on the bearing block (430) and is connect
Head (720)；The pipe fitting (450) and the three-way rotary joint (720) are used for fixed water inlet pipe (260), outlet pipe
(270) and tracheae (280).
6. polishing structure according to claim 5, which is characterized in that the outside of the active connection (400) is also arranged
Have cylinder headstock (500), the cylinder headstock (500) is connected by the second end (212) of headstock flange (510) and spline bearing
It connects；
The cylinder headstock (500) is equipped with water inlet (520), water outlet (530) and air inlet (540).
7. polishing structure according to claim 6, which is characterized in that dynamometry is arranged in the top of the cylinder headstock (500)
Sensor (600) is additionally provided with the active joint (700) for connecting cylinder (1) on the load cell (600).
8. polishing structure according to claim 7, which is characterized in that the active joint (700) includes spherical bearing
(710), adapter (720), movable sleeve (730) and spherical bearing pressing sleeve (740), the spherical bearing (710) are fixed on described
On adapter (720), the adapter (720) is fixed at the center of the load cell (600)；
The movable sleeve (730) are equipped in the spherical bearing (710), the external of the spherical bearing (710) is socketed the ball
Spherical bearing pressing sleeve (740).
9. polishing structure according to claim 2, which is characterized in that the outside of the splined shaft bearing sleeve (220) is also socketed
There are belt wheel (290)；Shield (360) are equipped between the spline bearing seat (250) and self-aligning ball bearing set (320).
10. a kind of polissoir, which is characterized in that including cylinder (1), rack (5), synthesis disk (8), ceramic disk (7), motor
It (4), further include any polishing structure (3) of at least one claim 1-9；
The polishing structure setting in the upper layer of the rack (5), the active joint (700) of polishing structure (3) with it is described
Cylinder (1) connection, the cylinder (1) are fixed on bracket gas cylinder (2), and the bracket is fixed on the upper layer of rack (5)；
The motor (4) drives polishing mechanism (3) radial motion by belt wheel (290)；
Synthesis disk (8) is set to the lower layer of rack (5), and the ceramic disk (7) are arranged on the synthesis disk (8)；
It further include operator control panel (6), the operator control panel (6) connect with the cylinder (1) and the motor (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811146617.9A CN108818217A (en) | 2018-09-29 | 2018-09-29 | A kind of polishing structure and polissoir |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811146617.9A CN108818217A (en) | 2018-09-29 | 2018-09-29 | A kind of polishing structure and polissoir |
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| CN108818217A true CN108818217A (en) | 2018-11-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811146617.9A Pending CN108818217A (en) | 2018-09-29 | 2018-09-29 | A kind of polishing structure and polissoir |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116372781A (en) * | 2023-04-20 | 2023-07-04 | 山东欣立得光电科技有限公司 | Automatic cleaning and polishing system for LED screen substrate |
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