CN101049678A - Accurate doublefaced polisher - Google Patents
Accurate doublefaced polisher Download PDFInfo
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- CN101049678A CN101049678A CN 200710068277 CN200710068277A CN101049678A CN 101049678 A CN101049678 A CN 101049678A CN 200710068277 CN200710068277 CN 200710068277 CN 200710068277 A CN200710068277 A CN 200710068277A CN 101049678 A CN101049678 A CN 101049678A
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Abstract
A precise dual-surface polishing machine is composed of machine frame, mainshaft and its drive mechanism, upper polishing disc and its drive unit, lower polishing disc, internal and external toothed rings, planetary gear for holding workpiece, 4 coaxial frequency-conversion motors fro respectively driving coaxial upper and lower polishing discs and external and internal toothed rings, pressure regulating sensors, and pressure regulating valves.
Description
(1) technical field
The present invention relates to the polishing machine field, especially a kind of accurate doublefaced polisher.
(2) background technology
Former traditional lapping and buffing machine adopts single driven by motor, referring to Fig. 1, realize going up polishing disk 22, the rotation of polishing disk 23, ring gear 24, external toothing 25 down by gear train assembly, polishing disk and planetary gear have only two kinds of velocity ratios up and down, limited the variation of twin polishing working motion track, lacked accurate control speed.
In order to improve polishing efficiency, someone improves the planetary plate of polishing machine, as the patent No. is 02292538.4, patent name is the Chinese utility model patent of Twp-sided polishing machine planetary plate, a kind of twin polishing dish is disclosed, 3 eccentric orfices are arranged on its planetary plate, place 3 separators in 3 eccentric orfices respectively, the aperture of each separator is 103 millimeters.Can partly improve the yield rate of polishing, and improve polishing efficiency.But it still adopts two of traditional lapping and buffing machines or three through-drive modes.
The shortcoming that exists is: (1), complex structure; (2), can not realize stepless speed regulation; (3), Jia Gong stationarity is poor; (4), polishing efficiency is lower.
(3) summary of the invention
For the complex structure that overcomes existing Twp-sided polishing machine, the deficiency that stationarity is poor, polishing efficiency is low that can not realize stepless speed regulation, processing, the invention provides a kind of compact conformation, can realize stepless speed regulation, the process stationarity is good, can effectively promote the accurate doublefaced polisher of polishing efficiency.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of accurate doublefaced polisher, comprise frame, spindle drive, the upthrow disc drive mechanism, described spindle drive connects polishing disk down, ring gear, external toothing and the connector that cooperates with last polishing disk, engagement is used for the planetary gear of place work piece between described ring gear and the external toothing, described upthrow disc drive mechanism is positioned at the top of mainframe shaft transmission, described upthrow disc drive mechanism comprises rack-mounted drive unit, described drive unit has piston rod, described piston rod is connected with last polishing disk, described spindle drive also comprises four variable-frequency motors, the major axis that polishing disk rotates in the driving, drive the little axle that ring gear rotates, drive the axis of polishing disk rotation down and drive the macro-axis that external toothing rotates, the output shaft of described first variable-frequency motor is connected to come transmission long axis with first driving-belt, described major axis bottom connects the major axis bearing, and described major axis bearing is installed on the frame; The output shaft of described second variable-frequency motor is connected to come the little axle of transmission with second driving-belt, and described little axle bottom connects little axle bearing, and described little axle bearing is sleeved on the outside of major axis; The output shaft of described the 3rd variable-frequency motor is connected to come the transmission axis with the 3rd driving-belt, and described axis bottom connects bottom bracket bearing, and described bottom bracket bearing is sleeved on the outside of little axle; The output shaft of described the 4th variable-frequency motor is connected with the 4th gear drive, and described the 4th gear connects macro-axis by key, and described macro-axis bottom connects big axle bearing, and described macro-axis bearing holder (housing, cover) is contained in the outside of axis; On the described macro-axis bearing holder (housing, cover) lifting drive is installed, described lifting drive has expansion link, and the other end of described expansion link is fixedlyed connected with major axis, but described macro-axis is provided with the keyway that donating bond slides up and down.
As preferred a kind of scheme: described first driving-belt is first band synchronously; Described second driving-belt be second synchronously the band; Described the 3rd driving-belt be the 3rd synchronously the band; Idler gear is sleeved on the output shaft of the 4th variable-frequency motor, described idler gear and the 4th gears engaged.
Further, the upper end of described major axis dress D level single-row radial ball bearing and single-row thrust ball bearing, square seat jackscrew roller bearing units is installed in the bottom, and described square seat jackscrew roller bearing units is installed in the major axis rear bearing block; The upper end dress single-row radial ball bearing and the single-row thrust ball bearing of described little axle, needle bearing is installed in the bottom, and described needle bearing is installed in the little axle bearing seat; The axis front end is installed a pair of reverse taper roll bearing, and needle bearing is installed in the rear end, and described needle bearing is installed in the bottom bracket bearing seat; Matched in clearance is adopted in macro-axis and bottom bracket bearing seat slip socket; The macro-axis bearing block is fixed on the workbench, adopts roller bearing between macro-axis and macro-axis bearing block, and big shaft rear end is placed a thrust bearing.
Further, described lifting drive is hydraulic cylinder or cylinder.
As preferred another kind of scheme: described drive unit connects and is used to regulate the pressure-regulating valve of on-load pressure size, at the junction setting pressure sensor of described piston rod with last polishing disk; Described upthrow disc drive mechanism also comprises the signal that is used to receive pressure sensor, and with the force value of pressure sensor and preset working pressure ratio, optionally send the last polishing disk pressure controller that increases or reduce pressure instruction to pressure-regulating valve, described pressure-regulating valve, pressure sensor connect goes up the polishing disk pressure controller.
Further, described drive unit is a cylinder, and described cylinder comprises chamber, following chamber and piston, piston connects piston rod, the described chamber of going up is communicated with last tracheae, and described chamber down is communicated with following tracheae, and described upward tracheae, following tracheae are communicated with atmosphere respectively, are communicated with pressure-regulating valve simultaneously.
Further again, last polishing disk floats with cylinder piston rod and is connected.
Described cylinder piston rod is connected with last polishing disk by floating junction, and described floating junction is the ball bearing of spherical cambered surface.
Described cylinder piston rod is connected with connecting rod, and described connecting rod is connected with pressure sensor, described pressure sensor turning cylinder, and described turning cylinder is connected the ball bearing of spherical cambered surface, and described ball bearing is connected with the upthrow disk holder.
Beneficial effect of the present invention mainly shows: 1, compact conformation; 2, can realize the soft start and soft the stopping of stepless speed regulation, process; 3, little to the shock effect of workpiece, the stationarity of process is good; 4, can effectively promote polishing efficiency; 5, can bear the gravity of operating pressure and workbench, the machining accuracy height; 6, can accurately control the pressure of polishing disk, effectively promote the polishing precision workpiece; 7, floating junction does not require that load is consistent with the cylinder axle center, adopts ball bearing, can guarantee that cylinder piston rod and last polishing disk fit mutually.
(4) description of drawings
Fig. 1 is the structural representation of traditional double-faced grinding and polishing machine.
Fig. 2 is the structural representation of Twp-sided polishing machine of the present invention.
Fig. 3 is the structure chart of the spindle drive of polishing machine.
Fig. 4 is the structure chart of the upthrow disc drive mechanism of polishing machine.
Fig. 5 is the pneumatic control schematic diagram of Pneumatic loading.
Fig. 6 is the control principle figure of industrial computer.
(5) specific embodiment
Below in conjunction with accompanying drawing the present invention is further described.
With reference to Fig. 2～Fig. 6, a kind of accurate doublefaced polisher, comprise frame 1, spindle drive, the upthrow disc drive mechanism, described spindle drive connects polishing disk 23 down, ring gear 24, external toothing 25 and the connector that cooperates with last polishing disk 22, engagement is used for the planetary gear 38 of place work piece between described ring gear 24 and the external toothing 25, described upthrow disc drive mechanism is positioned at the top of spindle drive, described upthrow disc drive mechanism comprises rack-mounted drive unit 27, described drive unit 27 has piston rod 28, described piston rod 28 is connected with last polishing disk 22, described spindle drive comprises four variable-frequency motors, the major axis 6 that polishing disk rotates in the driving, drive the little axle 7 that ring gear rotates, drive the axis 8 of polishing disk rotation down and drive the macro-axis 9 that external toothing rotates, the output shaft of first variable-frequency motor 2 is connected to come transmission long axis 6 with first driving-belt 10, described major axis 6 bottoms connect major axis bearing 11, and described major axis bearing 11 is installed on the frame 1; The output shaft of second variable-frequency motor 3 is connected to come the little axle 7 of transmission with second driving-belt 12, and described little axle 7 bottoms connect little axle bearing 13, and described little axle bearing 13 is sleeved on the outside of major axis 6; The output shaft of the 3rd variable-frequency motor 4 is connected to come transmission axis 8 with the 3rd driving-belt 14, and described axis 8 bottoms connect bottom bracket bearing 15, and described bottom bracket bearing 15 is sleeved on the outside of little axle 7; The output shaft of the 4th variable-frequency motor 5 and the 4th gear 16 are in transmission connection, and described the 4th gear 16 connects macro-axis 6 by key, and described macro-axis 6 bottoms connect big axle bearing 17, and described big axle bearing 17 is sleeved on the outside of axis 8; On the described macro-axis bearing holder (housing, cover) lifting drive is installed, described lifting drive has expansion link 18, and the other end of described expansion link 18 is fixedlyed connected with major axis 6, but described macro-axis 9 is provided with the keyway that donating bond slides up and down.
Described first driving-belt 10 be first synchronously the band; Described second driving-belt 12 be second synchronously the band; Described the 3rd driving-belt 14 be the 3rd synchronously the band; Idler gear 19 is sleeved on the output shaft of the 4th variable-frequency motor 5, described idler gear 19 and 5 engagements of the 4th gear.
The upper end dress D level single-row radial ball bearing and the single-row thrust ball bearing of described major axis 6, bottom are installed square seat jackscrew roller bearing units, and described square seat jackscrew roller bearing units is installed in the major axis bearing block; The upper end dress single-row radial ball bearing and the single-row thrust ball bearing of described little axle 7, needle bearing is installed in the bottom, and described needle bearing is installed in the little axle bearing seat; Axis 8 front ends are installed a pair of reverse taper roll bearing, and needle bearing is installed in the rear end, and described needle bearing is installed in the bottom bracket bearing seat; Macro-axis 9 and bottom bracket bearing seat slip socket adopt matched in clearance; The macro-axis bearing block is fixed on the workbench 20, adopts roller bearing between macro-axis 9 and macro-axis bearing block, and a thrust bearing is placed in macro-axis 9 rear ends.Described lifting drive is hydraulic cylinder or cylinder.
Described Pneumatic loading also comprises the displacement transducer 36 that is used to detect the upthrow CD position, described displacement transducer 36 connects the upthrow CD position control module 37 that is used for whether arriving according to polishing disk on the signal determining of displacement transducer the operating position, and described position sensor 36 connects described upthrow CD position control module 37.
Described drive unit is a cylinder 27, cylinder comprises chamber, following chamber and piston, and piston connects piston rod, and the described chamber of going up is communicated with last tracheae, described chamber down is communicated with following tracheae, and described upward tracheae, following tracheae are communicated with atmosphere respectively, are communicated with pressure-regulating valve simultaneously.The adjusting device of described pressure-regulating valve comprises stepper motor, eccentric stiffener, described stepper motor connects the control end of going up polishing disk pressure control module, the output shaft of described stepper motor connects eccentric stiffener, and the spool of described eccentric stiffener and pressure-regulating valve is in transmission connection.
The four moving polishing principles that present embodiment adopts four variable-frequency motors to drag polishing disk 22, following polishing disk 23, ring gear 24, external toothing 25 respectively carry out design of Transmission System, and adopt axle sleeve structure to make four with one heart, compact conformation, can realize the soft start and soft the stopping of stepless speed regulation, process, shock effect to workpiece is little, and the stationarity of process is good.
First variable-frequency motor 2 is with synchronously by first and belt wheel will rotatablely move reaches major axis 6, goes up polishing disk 22 during work and descends, and major axis 6 links to each other with last polishing disk 22 by connector, makes polishing disk 22 rotations; Second variable-frequency motor 3 by second synchronously band and belt wheel will rotatablely move and reach little axle 7, little axle 7 links to each other with ring gear 24, and ring gear 24 is rotated; The 3rd variable-frequency motor 4 is with synchronously by the 3rd and belt wheel will rotatablely move reaches axis 8, and axis 8 links to each other with following polishing disk 23, makes down polishing disk 23 rotations; The 4th variable-frequency motor 5 is delivered to macro-axis 9 to motion by a pair of gear, and macro-axis 9 links to each other with external toothing 25, makes external toothing 25 motions; The motion of lifting drive (hydraulic cylinder) 26 pistons simultaneously makes expansion link 18 promote to move up and down, and external toothing 25 positions can be adjusted up and down.
For the Twp-sided polishing machine structure, its core is the mainshaft mechanism that drives upper and lower polishing disk and ring gear and external toothing rotation.Below with reference to Fig. 3, respectively this structure is done detailed design:
Because spindle assemblies will guarantee certain machining accuracy and bear operating pressure and the gravity of workbench that therefore requiring has good precision, rigidity and bearing capacity.
------------key---drives round nut---and goes up polishing disk 22 major axis 6 key first belt pulley last polishing disk 22 motion transmittance process: first variable-frequency motor 2.For running accuracy and the positional precision that guarantees polishing disk 22, the running accuracy of major axis 6 and rigidity are crucial.Therefore at the front end dress precision height of major axis, the D level single-row radial ball bearing and the single-row thrust ball bearing of good rigidly, rear axle has taken up square seat jackscrew roller bearing units.The axial force of both direction and radial load can both be born like this, guarantee to have certain running accuracy and rigidity;
The transmittance process of ring gear 24 motions: second variable-frequency motor 3---second belt pulley---key---little axle 7---key---internal tooth ring support---ring gears 24.For running accuracy and the positional precision that guarantees ring gear 24, the running accuracy of little axle 7 and rigidity are crucial.Therefore little axle front end single-row radial ball bearing and single-row thrust ball bearing, adopt needle bearing between rear end major axis and the little axle, its radial structure compactness and bearing capacity are big, guarantee the depth of parallelism of major axis and little axle simultaneously, place a thrust bearing between little axle and supporting mass, bear axial force.
The transmittance process of following polishing disk 23 motions: the 3rd variable-frequency motor 4---the 3rd belt pulley---key---the following polishing disk 23 of axis 8---following polishing disk seat---.In order to guarantee down the running accuracy and the positional precision of polishing disk 23 motions, the running accuracy of axis 8 and rigidity are crucial.Following polishing disk is fixed on down on the polishing disk seat by screw, and locating surface is the end face of polishing disk seat down and the outer round surface of following polishing disk alignment pin thereof.The axis front end adopts a pair of reverse taper roll bearing to be installed on the bottom bracket bearing seat, and rear end axis and little between centers also adopt needle bearing, makes its radial structure compactness, bearing capacity is big, guarantee the depth of parallelism of axis and little between centers, place a thrust bearing between axis and supporting mass, bear axial force.
The working method of the polishing machine of present embodiment has: during the noncontact polishing, float several microns with going up polishing disk 22 relative workpiece (on following polishing disk); And when polishing contact will on polishing disk load, maximum load will reach kgf more than 100; When stopping to polish, then will go up polishing disk again and lift certain altitude.
In order to realize above-mentioned functions, the last polishing disk of present embodiment adopts cylinder 27 to utilize the pressure of pressure-air to realize pressurization.Pressure-air enters the last chamber of cylinder by last tracheae, promotes piston rod 28 and moves down, and last polishing disk floats and is connected on the cylinder piston rod, thus required pressure in the realization process.Pressure-air goes up tracheae simultaneously and connect atmosphere, thereby the promotion piston drives connecting rod and polishing disk moves up, and can unload or check workpiece by descending tracheae to enter the following chamber of cylinder.The operating pressure of cylinder is regulated by the pressure-regulating valve of regulating in the baric systerm 29 and is realized, go up the pressure of polishing disk for accurately controlling to workpiece, a pressure sensor 30 is adorned in cylinder and polishing disk junction, forming a closed-loop control, thereby realizes accurate control to cylinder.Pressure during for the assurance polishing is adjusted requirement, adopts the static pressure piston.
Axially precision is guaranteed by the precision of cylinder lower surface, and debugging makes polishing disk reach very high radial location precision and axial location precision later.
Consider the applying of polishing disk up and down in addition, improve the machining accuracy of workpiece, adopt unsteady the connection that cylinder is linked to each other with last polishing disk.When load is connected in the cylinder piston boom end, use the connection of floating to absorb the eccentric or not parallel eccentric load and the lateral load that piston rod is produced of piston rod and load.Not only to add load but also need high speed rotating when considering simultaneously to go up polishing disk work, so different with general floating junction structure.Floating junction adopts the ball bearing of spherical cambered surface to connect, so allow to go up polishing disk shaking in x, y, three directions of z, allow to shake the angle in ± 5 °, following polishing disk axial line can be done micro-eccentric slippage in the vertical direction of joint axis, simultaneously because floating junction does not require that load is consistent with the cylinder axle center.
The control strategy of the polishing disk pressure of present embodiment is realized by atmospheric control, mainly realizes the accurate control of load by the change in location of cylinder piston rod 28.Control pneumatic system with the software programming timer, realize the needed high-low pressure of polishing process pressing time, by the programme-control pressure-regulating valve 29 of microcomputer by finishing, pressure-regulating valve 29 is control cylinder again, simultaneously a pressure sensor 30 is housed at cylinder and polishing disk junction, change by A/D, the pressure signal of cylinder is fed back in the industrial computer, check the upthrow CD position by a displacement transducer 36, change by A/D equally, the position signalling of last polishing disk 22 is fed back in the industrial computer, form two closed-loop controls, thereby realize accurate control polishing disk pressure.Equipment atmospheric control schematic diagram can reflect cylinder control system principle.Cylinder is to control its action by pressure-regulating valve, is the key of whole pneumatic system control to the design of pressure-regulating valve and control.
The pneumatic system source of the gas is provided by small-sized air compressor, compressed air is through cylinder and filter feed system, system pressure is set up by pressure-regulating valve, by microcomputer the stepper motor that regulation voltage signal is given pressure-regulating valve is set, the rotation of stepper motor drives the rotation of eccentric stiffener, again moving by the rotating band movable valve plug of eccentric stiffener, the position of control spool in valve pocket, thereby the pressure requirement of control cylinder realizes the accurate motion of cylinder, the accurate control of polishing disk pressure.
When the processing beginning, because surface of the work out-of-flatness, if directly be added on the workpiece with operating pressure, then the local pressure between workpiece high spot and polishing pad is big especially, frictional resistance is big, cause workpiece in planetary gear, to be subjected to very big extruding, easily wafer crushing or wafer are got rid of to take off in the planetary gear and cause fragment.Therefore just begun to add man-hour at lathe, by microcomputer the flow of less regulation voltage signal controlled pressure control valve has been set, compressed air enters the cylinder rodless cavity through pressure-regulating valve with lower pressure, makes the pressure on the processing work less.After processing a period of time, workpiece is thrown more smoothly, and the voltage signal that the microcomputer setting is bigger is given pressure-regulating valve, increase flow, compressed air enters the cylinder rodless cavity through pressure-regulating valve with higher pressure, and the pressure on the processing work is increased, to improve the polishing working (machining) efficiency.When the fast end of polishing processing, supply with low-voltage signal again, workpiece is worked under lower tonnage, this helps reducing the roughness of surface of the work.
In process time of each stage high-low pressure of polishing machine of embodiment owing to adopted software calculating, so the operator can set according to specific circumstances.Adopt programme controlled automatic pressure to load strategy in the polishing machine automatic control system of this development simultaneously, can work out the pressure-loaded curve of process according to the operational characteristic of rapidoprint, avoided adopting in the conventional grinder time relay to set on-load pressure, the difficult problem of revising, Control System of Microcomputer can be by the operator by the polishing time under any pressure of keyboard to set up.
Claims (9)
1, a kind of accurate doublefaced polisher, comprise frame, spindle drive, the upthrow disc drive mechanism, described spindle drive connects polishing disk down, ring gear, external toothing and the connector that cooperates with last polishing disk, engagement is used for the planetary gear of place work piece between described ring gear and the external toothing, described upthrow disc drive mechanism is positioned at the top of spindle drive, described upthrow disc drive mechanism comprises rack-mounted drive unit, described drive unit has piston rod, described piston rod is connected with last polishing disk, it is characterized in that: described spindle drive also comprises four variable-frequency motors, the major axis that polishing disk rotates in the driving, drive the little axle that ring gear rotates, drive the axis of polishing disk rotation down and drive the macro-axis that external toothing rotates, the output shaft of described first variable-frequency motor is connected to come transmission long axis with first driving-belt, described major axis bottom connects the major axis bearing, and described major axis bearing is installed on the frame; The output shaft of described second variable-frequency motor is connected to come the little axle of transmission with second driving-belt, and described little axle bottom connects little axle bearing, and described little axle bearing is sleeved on the outside of major axis; The output shaft of described the 3rd variable-frequency motor is connected to come the transmission axis with the 3rd driving-belt, and described axis bottom connects bottom bracket bearing, and described bottom bracket bearing is sleeved on the outside of little axle; The output shaft of described the 4th variable-frequency motor is connected with the 4th gear drive, and described the 4th gear connects macro-axis by key, and described macro-axis bottom connects big axle bearing, and described macro-axis bearing holder (housing, cover) is contained in the outside of axis; On the described macro-axis bearing holder (housing, cover) lifting drive is installed, described lifting drive has expansion link, and the other end of described expansion link is fixedlyed connected with major axis, but described macro-axis is provided with the keyway that donating bond slides up and down.
2, accurate doublefaced polisher as claimed in claim 1 is characterized in that: described first driving-belt be first synchronously the band; Described second driving-belt be second synchronously the band; Described the 3rd driving-belt be the 3rd synchronously the band; Idler gear is sleeved on the output shaft of the 4th variable-frequency motor, described idler gear and the 4th gears engaged.
3, accurate doublefaced polisher as claimed in claim 2, it is characterized in that: the upper end dress D level single-row radial ball bearing and the single-row thrust ball bearing of described major axis, square seat jackscrew roller bearing units is installed in the bottom, and described square seat jackscrew roller bearing units is installed in the major axis rear bearing block; The upper end dress single-row radial ball bearing and the single-row thrust ball bearing of described little axle, needle bearing is installed in the bottom, and described needle bearing is installed in the little axle bearing seat; The axis front end is installed a pair of reverse taper roll bearing, and needle bearing is installed in the rear end, and described needle bearing is installed in the bottom bracket bearing seat; Matched in clearance is adopted in macro-axis and bottom bracket bearing seat slip socket; The macro-axis bearing block is fixed on the workbench, adopts roller bearing between macro-axis and macro-axis bearing block, and big shaft rear end is placed a thrust bearing.
4, accurate doublefaced polisher as claimed in claim 3 is characterized in that: described lifting drive is hydraulic cylinder or cylinder.
5, as the described accurate doublefaced polisher of one of claim 1-4, it is characterized in that: described drive unit connects and is used to regulate the pressure-regulating valve of on-load pressure size, at the junction setting pressure sensor of described piston rod with last polishing disk; Described upthrow disc drive mechanism also comprises the signal that is used to receive pressure sensor, and with the force value of pressure sensor and preset working pressure ratio, optionally send the last polishing disk pressure controller that increases or reduce pressure instruction to pressure-regulating valve, described pressure-regulating valve, pressure sensor connect goes up the polishing disk pressure controller.
6, the upthrow disc drive mechanism of accurate doublefaced polisher as claimed in claim 5, it is characterized in that: described drive unit is a cylinder, described cylinder comprises chamber, following chamber and piston, piston connects piston rod, the described chamber of going up is communicated with last tracheae, described chamber down is communicated with following tracheae, and described upward tracheae, following tracheae are communicated with atmosphere respectively, are communicated with pressure-regulating valve simultaneously.
7, the upthrow disc drive mechanism of described accurate doublefaced polisher as claimed in claim 6 is characterized in that: go up polishing disk and be connected with cylinder piston rod is unsteady.
8, the upthrow disc drive mechanism of accurate doublefaced polisher as claimed in claim 7 is characterized in that: described cylinder piston rod is connected with last polishing disk by floating junction, and described floating junction is the ball bearing of spherical cambered surface.
9, the upthrow disc drive mechanism of accurate doublefaced polisher as claimed in claim 8, it is characterized in that: described cylinder piston rod is connected with connecting rod, described connecting rod is connected with pressure sensor, described pressure sensor connects turning cylinder, described turning cylinder is connected the ball bearing of spherical cambered surface, and described ball bearing is connected with the upthrow disk holder.
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| CNB2007100682778A CN100448615C (en) | 2007-05-09 | 2007-05-09 | Accurate doublefaced polisher |
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| CN101596697B (en) * | 2009-07-10 | 2012-07-04 | 兰州瑞德实业集团有限公司 | Mainshaft transmission system of numerically-controlled precise grinding polisher |
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| JP2001293656A (en) * | 2000-04-17 | 2001-10-23 | Asahi Glass Co Ltd | Continuous-type polishing device of plate-like body, and its method |
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| CN201040355Y (en) * | 2007-05-09 | 2008-03-26 | 浙江工业大学 | Accurate double-face polishing machine |
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