CN100448616C - Pneumatic loading equipment of accurate doublefaced polisher - Google Patents
Pneumatic loading equipment of accurate doublefaced polisher Download PDFInfo
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- CN100448616C CN100448616C CNB2007100682797A CN200710068279A CN100448616C CN 100448616 C CN100448616 C CN 100448616C CN B2007100682797 A CNB2007100682797 A CN B2007100682797A CN 200710068279 A CN200710068279 A CN 200710068279A CN 100448616 C CN100448616 C CN 100448616C
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- regulating valve
- polishing disk
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Abstract
A pneumatic loading mechanism for precise dual-surface polishing machine is composed of machine frame, cylinder with piston rod linked to upper polishing disc, loading pressure regulating valve linked with said cylinder and communicated to pneumatic air source, pressure sensor at the connection position between piston rod and upper polishing disc, and a pressure control module for upper polishing disc.
Description
(1) technical field
The present invention relates to the polishing machine field, especially a kind of Pneumatic loading of Twp-sided polishing machine.
(2) background technology
Former traditional lapping and buffing machine adopts single driven by motor, referring to Fig. 1, realize going up polishing disk 22, the rotation of polishing disk 23, ring gear 24, external toothing 25 down by gear train assembly, polishing disk and planetary gear have only two kinds of velocity ratios up and down, limited the variation of twin polishing working motion track, lacked accurate control speed.
For the drive mechanism of last polishing disk, adopt the cylinder pressurization, the pressure that is loaded into polishing disk can be pressed or weight for light, and pressure is unadjustable; Owing to can not accurately control the pressure of polishing disk to workpiece, the polishing precision of workpiece is lower.
(3) summary of the invention
For the upthrow optical disc loading apparatus that overcomes existing polishing machine can not be regulated operating pressure, the low deficiency of polishing precision, the invention provides and a kind ofly can accurately control the pressure of polishing disk, effectively promote the Pneumatic loading of the accurate doublefaced polisher of polishing precision workpiece.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of Pneumatic loading of accurate doublefaced polisher, comprise frame, rack-mounted cylinder, described cylinder has piston rod, described piston rod is connected with last polishing disk, described cylinder connects and is used to regulate the pressure-regulating valve of on-load pressure size, described pressure-regulating valve connects pneumatic source of the gas, at the junction setting pressure sensor of described piston rod with last polishing disk; Described Pneumatic loading also comprises the on-load pressure control curve controlled magnitude of load that is used for according to the processing conditions formulation of workpiece, and be used for each polishing stage, receive the signal of pressure sensor, and with the operating pressure in the force value of pressure sensor and default each polishing stage relatively, optionally send the last polishing disk pressure control module that increases or reduce pressure instruction to pressure-regulating valve; The described polishing disk pressure control module that goes up connects pressure-regulating valve, pressure sensor.
As preferred a kind of scheme: described Pneumatic loading also comprises the displacement transducer that is used to detect the upthrow CD position, described displacement transducer connects the upthrow CD position control module that is used for whether arriving according to polishing disk on the signal determining of displacement transducer the operating position, and described position sensor connects described upthrow CD position control module.
As preferred another kind of scheme: described cylinder comprises chamber, chamber and piston down, piston connects piston rod, the described chamber of going up is communicated with last tracheae, and described chamber down is communicated with following tracheae, and described upward tracheae, following tracheae are communicated with atmosphere respectively, are communicated with pressure-regulating valve simultaneously.
As preferred another scheme: the adjusting device of described pressure-regulating valve comprises stepper motor, eccentric stiffener, described stepper motor connects the control end of going up polishing disk pressure control module, the output shaft of described stepper motor connects eccentric stiffener, and the spool of described eccentric stiffener and pressure-regulating valve is in transmission connection.
Technical conceive of the present invention is: when polishing machine polishes in noncontact, float several microns with going up the relative workpiece of polishing disk (on following polishing disk); And when polishing contact will on polishing disk load, maximum load will reach kgf more than 100; When stopping to polish, then will go up polishing disk again and lift certain altitude.
For realizing this function, the control strategy of last polishing disk pressure is realized by atmospheric control, mainly realizes the accurate control of load by the change in location of cylinder piston rod.
Last polishing disk adopts cylinder to utilize the pressure of pressure-air to realize pressurization.Pressure-air enters the last chamber of cylinder by last tracheae, promotes piston rod and moves down, and last polishing disk floats and is connected on the cylinder piston rod, thus required pressure in the realization process.Pressure-air goes up tracheae simultaneously and connect atmosphere, thereby the promotion piston drives connecting rod and polishing disk moves up, and can unload or check workpiece by descending tracheae to enter the following chamber of cylinder.The operating pressure of cylinder is regulated by the pressure-regulating valve of regulating in the baric systerm and is realized, go up the pressure of polishing disk for accurately controlling to workpiece, a pressure sensor is adorned in cylinder and polishing disk junction, forming a closed-loop control, thereby realizes accurate control to cylinder.
Beneficial effect of the present invention mainly shows: 1, can accurately control the pressure of polishing disk to workpiece; 2, effectively promote the polishing precision.
(4) description of drawings
Fig. 1 is the structural representation of traditional double-faced grinding and polishing machine.
Fig. 2 is the structural representation of Twp-sided polishing machine of the present invention.
Fig. 3 is the structure chart of the upthrow disc drive mechanism of polishing machine.
Fig. 4 is the pneumatic control schematic diagram of Pneumatic loading.
Fig. 5 is the control principle figure of industrial computer.
(5) specific embodiment
Below in conjunction with accompanying drawing the present invention is further described.
With reference to Fig. 2～Fig. 5, a kind of Pneumatic loading of accurate doublefaced polisher, comprise frame 1, be installed in the cylinder 27 on the frame 1, described cylinder 27 has piston rod 28, described piston rod 28 is connected with last polishing disk 22, described cylinder 27 connects and is used to regulate the pressure-regulating valve 29 of on-load pressure size, and described pressure-regulating valve 29 connects pneumatic source of the gas, at the junction setting pressure sensor 30 of described piston rod 28 with last polishing disk 22; Described Pneumatic loading also comprises the on-load pressure control curve controlled magnitude of load that is used for according to the processing conditions formulation of workpiece, and be used for each polishing stage, receive the signal of pressure sensor, and with the operating pressure in the force value of pressure sensor and default each polishing stage relatively, optionally send the last polishing disk pressure control module 31 that increases or reduce pressure instruction to pressure-regulating valve; The described polishing disk pressure control module 31 that goes up connects pressure-regulating valve 29, pressure sensor 30.
Described Pneumatic loading also comprises the displacement transducer 36 that is used to detect the upthrow CD position, described displacement transducer 36 connects the upthrow CD position control module 37 that is used for whether arriving according to polishing disk on the signal determining of displacement transducer the operating position, and described position sensor 36 connects described upthrow CD position control module 37.
Described cylinder 27 comprises chamber, following chamber and piston, and piston connects piston rod, and the described chamber of going up is communicated with last tracheae, and described chamber down is communicated with following tracheae, and described upward tracheae, following tracheae are communicated with atmosphere respectively, are communicated with pressure-regulating valve simultaneously.The adjusting device of described pressure-regulating valve comprises stepper motor, eccentric stiffener, described stepper motor connects the control end of going up polishing disk pressure control module, the output shaft of described stepper motor connects eccentric stiffener, and the spool of described eccentric stiffener and pressure-regulating valve is in transmission connection.
The control strategy of the polishing disk pressure of present embodiment is realized by atmospheric control, mainly realizes the accurate control of load by the change in location of cylinder piston rod 28.Control pneumatic system with the software programming timer, realize the needed high-low pressure of polishing process pressing time, by the programme-control pressure-regulating valve 29 of microcomputer by finishing, pressure-regulating valve 29 is control cylinder again, simultaneously a pressure sensor 30 is housed at cylinder and polishing disk junction, change by A/D, the pressure signal of cylinder is fed back in the industrial computer, check the upthrow CD position by a displacement transducer 36, change by A/D equally, the position signalling of last polishing disk 22 is fed back in the industrial computer, form two closed-loop controls, thereby realize accurate control polishing disk pressure.Equipment atmospheric control schematic diagram can reflect cylinder control system principle.Cylinder is to control its action by pressure-regulating valve, is the key of whole pneumatic system control to the design of pressure-regulating valve and control.
The pneumatic system source of the gas is provided by small-sized air compressor, compressed air is through cylinder and filter feed system, system pressure is set up by pressure-regulating valve, by microcomputer the stepper motor that regulation voltage signal is given pressure-regulating valve is set, the rotation of stepper motor drives the rotation of eccentric stiffener, again moving by the rotating band movable valve plug of eccentric stiffener, the position of control spool in valve pocket, thereby the pressure requirement of control cylinder realizes the accurate motion of cylinder, the accurate control of polishing disk pressure.
When the processing beginning, because surface of the work out-of-flatness, if directly be added on the workpiece with operating pressure, then the local pressure between workpiece high spot and polishing pad is big especially, frictional resistance is big, cause workpiece in planetary gear, to be subjected to very big extruding, easily wafer crushing or wafer are got rid of to take off in the planetary gear and cause fragment.Therefore just begun to add man-hour at lathe, by microcomputer the flow of less regulation voltage signal controlled pressure control valve has been set, compressed air enters the cylinder rodless cavity through pressure-regulating valve with lower pressure, makes the pressure on the processing work less.After processing a period of time, workpiece is thrown more smoothly, and the voltage signal that the microcomputer setting is bigger is given pressure-regulating valve, increase flow, compressed air enters the cylinder rodless cavity through pressure-regulating valve with higher pressure, and the pressure on the processing work is increased, to improve the polishing working (machining) efficiency.When the fast end of polishing processing, supply with low-voltage signal again, workpiece is worked under lower tonnage, this helps reducing the roughness of surface of the work.
In process time of each stage high-low pressure of polishing machine of embodiment owing to adopted software calculating, so the operator can set according to specific circumstances.Adopt programme controlled automatic pressure to load strategy in the polishing machine automatic control system of this development simultaneously, can work out the pressure-loaded curve of process according to the operational characteristic of rapidoprint, avoided adopting in the conventional grinder time relay to set on-load pressure, the difficult problem of revising, Control System of Microcomputer can be by the operator by the polishing time under any pressure of keyboard to set up.
Claims (4)
1, a kind of Pneumatic loading of accurate doublefaced polisher, comprise frame, rack-mounted cylinder, described cylinder has piston rod, described piston rod is connected with last polishing disk, it is characterized in that: described cylinder connects and is used to regulate the pressure-regulating valve of on-load pressure size, described pressure-regulating valve connects pneumatic source of the gas, at the junction setting pressure sensor of described piston rod with last polishing disk; Described Pneumatic loading also comprises the on-load pressure control curve controlled magnitude of load that is used for according to the processing conditions formulation of workpiece, and be used for each polishing stage, receive the signal of pressure sensor, and with the operating pressure in the force value of pressure sensor and default each polishing stage relatively, optionally send the last polishing disk pressure control module that increases or reduce pressure instruction to pressure-regulating valve; The described polishing disk pressure control module that goes up connects pressure-regulating valve, pressure sensor.
2, the Pneumatic loading of accurate doublefaced polisher as claimed in claim 1, it is characterized in that: described Pneumatic loading also comprises the displacement transducer that is used to detect the upthrow CD position, and described displacement transducer connects the upthrow CD position control module that is used for whether arriving according to polishing disk on the signal determining of displacement transducer the operating position.
3, the Pneumatic loading of accurate doublefaced polisher as claimed in claim 1 or 2, it is characterized in that: described cylinder comprises chamber, following chamber and piston, piston connects described piston rod, the described chamber of going up is communicated with last tracheae, described chamber down is communicated with following tracheae, and described upward tracheae, following tracheae are communicated with atmosphere respectively, are communicated with pressure-regulating valve simultaneously.
4, the Pneumatic loading of accurate doublefaced polisher as claimed in claim 3, it is characterized in that: in: the adjusting device of described pressure-regulating valve comprises stepper motor, eccentric stiffener, described stepper motor connects the control end of going up polishing disk pressure control module, the output shaft of described stepper motor connects eccentric stiffener, and the spool of described eccentric stiffener and pressure-regulating valve is in transmission connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100682797A CN100448616C (en) | 2007-05-09 | 2007-05-09 | Pneumatic loading equipment of accurate doublefaced polisher |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100682797A CN100448616C (en) | 2007-05-09 | 2007-05-09 | Pneumatic loading equipment of accurate doublefaced polisher |
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| Publication Number | Publication Date |
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| CN101049680A CN101049680A (en) | 2007-10-10 |
| CN100448616C true CN100448616C (en) | 2009-01-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2007100682797A Expired - Fee Related CN100448616C (en) | 2007-05-09 | 2007-05-09 | Pneumatic loading equipment of accurate doublefaced polisher |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110142681A (en) * | 2019-05-29 | 2019-08-20 | 上海浩曦智能设备有限公司 | Thermal-insulation cup buffing machine fluid dynamic power control device |
| CN113910098B (en) * | 2021-10-19 | 2023-08-29 | 上海汉虹精密机械有限公司 | Accurate pressurization gas circuit control system for grinding polishing machine |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3903653A (en) * | 1973-04-11 | 1975-09-09 | Harold J Imhoff | Lapping machine |
| DE3703848A1 (en) * | 1987-02-07 | 1988-08-18 | Nagel Peter | Device for advancing a honing tool |
| US5355631A (en) * | 1992-11-19 | 1994-10-18 | Robotics And Automation Corporation | Regulated force and speed control of a surface treating wheel |
| JP2000246632A (en) * | 1999-02-24 | 2000-09-12 | Nissan Motor Co Ltd | Rotation driving device for hypoid pinion work of cylindrical grinder |
| CN2448518Y (en) * | 2000-11-24 | 2001-09-19 | 黄计高 | Angle-adjustable double-side lapping machine |
| KR100392414B1 (en) * | 2002-12-20 | 2003-07-22 | Fineacetechnology Co Ltd | Structure of tool head unit of polishing machine |
| CN2683315Y (en) * | 2003-06-04 | 2005-03-09 | 李清 | Thickness controlled ball type high-speed refiner polishing machine |
| CN201040356Y (en) * | 2007-05-09 | 2008-03-26 | 浙江工业大学 | Pneumatic loading device for accurate double-face polishing machine |
-
2007
- 2007-05-09 CN CNB2007100682797A patent/CN100448616C/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3903653A (en) * | 1973-04-11 | 1975-09-09 | Harold J Imhoff | Lapping machine |
| DE3703848A1 (en) * | 1987-02-07 | 1988-08-18 | Nagel Peter | Device for advancing a honing tool |
| US5355631A (en) * | 1992-11-19 | 1994-10-18 | Robotics And Automation Corporation | Regulated force and speed control of a surface treating wheel |
| JP2000246632A (en) * | 1999-02-24 | 2000-09-12 | Nissan Motor Co Ltd | Rotation driving device for hypoid pinion work of cylindrical grinder |
| CN2448518Y (en) * | 2000-11-24 | 2001-09-19 | 黄计高 | Angle-adjustable double-side lapping machine |
| KR100392414B1 (en) * | 2002-12-20 | 2003-07-22 | Fineacetechnology Co Ltd | Structure of tool head unit of polishing machine |
| CN2683315Y (en) * | 2003-06-04 | 2005-03-09 | 李清 | Thickness controlled ball type high-speed refiner polishing machine |
| CN201040356Y (en) * | 2007-05-09 | 2008-03-26 | 浙江工业大学 | Pneumatic loading device for accurate double-face polishing machine |
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| CN101049680A (en) | 2007-10-10 |
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Assignee: Jiaxing Haisheng Electronics Co., Ltd. Assignor: Zhejiang University of Technology Contract record no.: 2010330001999 Denomination of invention: Pneumatic loading equipment of accurate doublefaced polisher Granted publication date: 20090107 License type: Exclusive License Open date: 20071010 Record date: 20100929 |
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