CN201040356Y - Pneumatic loading device for accurate double-face polishing machine - Google Patents
Pneumatic loading device for accurate double-face polishing machine Download PDFInfo
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- CN201040356Y CN201040356Y CNU2007201089588U CN200720108958U CN201040356Y CN 201040356 Y CN201040356 Y CN 201040356Y CN U2007201089588 U CNU2007201089588 U CN U2007201089588U CN 200720108958 U CN200720108958 U CN 200720108958U CN 201040356 Y CN201040356 Y CN 201040356Y
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- regulating valve
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- 238000005498 polishing Methods 0.000 title claims abstract description 76
- 239000003351 stiffener Substances 0.000 claims description 11
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000009472 formulation Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000011217 control strategy Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
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Abstract
A pneumatic loading device for a precise double-sided polishing machine comprises a frame and a cylinder installed on the frame. The cylinder is provided with a piston rod, the piston rod is connected with an upper polishing plate, the cylinder is connected with a pressure control valve for adjusting the loaded pressure, the pressure control valve is connected with a pneumatic gas source, the connection of the piston rod and the upper polishing plate is installed with a pressure sensor. The pneumatic loading device also comprises a pressure control module for the upper polishing plate, and the pressure control module can control the load according to the loaded pressure control curve which is established according to the processing conditions of a work piece. The pressure control module can also be used in every polishing stage for receiving the signals from the pressure sensor and compares the pressure value from the pressure sensor with the presupposed working pressure in every polishing stage, and then the pressure control module selectively sends instructions of increasing or reducing the pressure to the pressure control valve. The pressure control module for the upper polishing plate is connected with the pressure control valve and the pressure sensor. The utility model can accurately control the pressure of the upper polishing plate on the work piece and effectively improve polishing precision.
Description
(1) technical field
The utility model relates to the polishing machine field, especially a kind of Pneumatic loading of Twp-sided polishing machine.
(2) background technology
Former traditional lapping and buffing machine adopts single driven by motor, referring to Fig. 1, realize going up polishing disk 22, the rotation of polishing disk 23, ring gear 24, external toothing 25 down by gear train assembly, polishing disk and planetary gear have only two kinds of velocity ratios up and down, limited the variation of twin polishing working motion track, lacked accurate control speed.
For the drive mechanism of last polishing disk, adopt the cylinder pressurization, the pressure that is loaded into polishing disk can be pressed or weight for light, and pressure is unadjustable; Owing to can not accurately control the pressure of polishing disk to workpiece, the polishing precision of workpiece is lower.
(3) utility model content
For the upthrow optical disc loading apparatus that overcomes existing polishing machine can not be regulated operating pressure, the low deficiency of polishing precision, the utility model provides a kind of can accurately control the pressure of polishing disk to workpiece, effectively promotes the Pneumatic loading of the accurate doublefaced polisher of polishing precision.
The technical scheme that its technical problem that solves the utility model adopts is:
A kind of Pneumatic loading of accurate doublefaced polisher, comprise frame, rack-mounted cylinder, described cylinder has piston rod, described piston rod is connected with last polishing disk, described cylinder connects and is used to regulate the pressure-regulating valve of on-load pressure size, described pressure-regulating valve connects pneumatic source of the gas, at the junction setting pressure sensor of described piston rod with last polishing disk; Described Pneumatic loading also comprises the on-load pressure control curve controlled magnitude of load that is used for according to the processing conditions formulation of workpiece, and be used for each polishing stage, receive the signal of pressure sensor, and with the operating pressure in the force value of pressure sensor and default each polishing stage relatively, optionally send the last polishing disk pressure control module that increases or reduce pressure instruction to pressure-regulating valve; The described polishing disk pressure control module that goes up connects pressure-regulating valve, pressure sensor.
As preferred a kind of scheme: described Pneumatic loading also comprises the displacement transducer that is used to detect the upthrow CD position, described displacement transducer connects the upthrow CD position control module that is used for whether arriving according to polishing disk on the signal determining of displacement transducer the operating position, and described position sensor connects described upthrow CD position control module.
As preferred another kind of scheme: described cylinder comprises chamber, chamber and piston down, piston connects piston rod, the described chamber of going up is communicated with last tracheae, and described chamber down is communicated with following tracheae, and described upward tracheae, following tracheae are communicated with atmosphere respectively, are communicated with pressure-regulating valve simultaneously.
As preferred another scheme: the adjusting device of described pressure-regulating valve comprises stepper motor, eccentric stiffener, described stepper motor connects the control end of going up polishing disk pressure control module, the output shaft of described stepper motor connects eccentric stiffener, and the spool of described eccentric stiffener and pressure-regulating valve is in transmission connection.
Technical conceive of the present utility model is: when polishing machine polishes in noncontact, float several microns with going up the relative workpiece of polishing disk (on following polishing disk); And when polishing contact will on polishing disk load, maximum load will reach kgf more than 100; When stopping to polish, then will go up polishing disk again and lift certain altitude.
For realizing this function, the control strategy of last polishing disk pressure is realized by atmospheric control, mainly realizes the accurate control of load by the change in location of cylinder piston rod.
Last polishing disk adopts cylinder to utilize the pressure of pressure-air to realize pressurization.Pressure-air enters the last chamber of cylinder by last tracheae, promotes piston rod and moves down, and last polishing disk floats and is connected on the cylinder piston rod, thus required pressure in the realization process.Pressure-air goes up tracheae simultaneously and connect atmosphere, thereby the promotion piston drives connecting rod and polishing disk moves up, and can unload or check workpiece by descending tracheae to enter the following chamber of cylinder.The operating pressure of cylinder is regulated by the pressure-regulating valve of regulating in the baric systerm and is realized, go up the pressure of polishing disk for accurately controlling to workpiece, a pressure sensor is adorned in cylinder and polishing disk junction, forming a closed-loop control, thereby realizes accurate control to cylinder.
The beneficial effects of the utility model mainly show: 1, can accurately control the pressure of polishing disk to workpiece; 2, effectively promote the polishing precision.
(4) description of drawings
Fig. 1 is the structural representation of traditional double-faced grinding and polishing machine.
Fig. 2 is the structural representation of Twp-sided polishing machine of the present utility model.
Fig. 3 is the structure chart of the upthrow disc drive mechanism of polishing machine.
Fig. 4 is the pneumatic control schematic diagram of Pneumatic loading.
Fig. 5 is the control principle figure of industrial computer.
(5) specific embodiment
Below in conjunction with accompanying drawing the utility model is further described.
With reference to Fig. 2～Fig. 5, a kind of Pneumatic loading of accurate doublefaced polisher, comprise frame 1, be installed in the cylinder 27 on the frame 1, described cylinder 27 has piston rod 28, described piston rod 28 is connected with last polishing disk 22, described cylinder 27 connects and is used to regulate the pressure-regulating valve 29 of on-load pressure size, and described pressure-regulating valve 29 connects pneumatic source of the gas, at the junction setting pressure sensor 30 of described piston rod 28 with last polishing disk 22; Described Pneumatic loading also comprises the on-load pressure control curve controlled magnitude of load that is used for according to the processing conditions formulation of workpiece, and be used for each polishing stage, receive the signal of pressure sensor, and with the operating pressure in the force value of pressure sensor and default each polishing stage relatively, optionally send the last polishing disk pressure control module 31 that increases or reduce pressure instruction to pressure-regulating valve; The described polishing disk pressure control module 31 that goes up connects pressure-regulating valve 29, pressure sensor 30.
Described Pneumatic loading also comprises the displacement transducer 36 that is used to detect the upthrow CD position, described displacement transducer 36 connects the upthrow CD position control module 37 that is used for whether arriving according to polishing disk on the signal determining of displacement transducer the operating position, and described position sensor 36 connects described upthrow CD position control module 37.
Described cylinder 27 comprises chamber, following chamber and piston, and piston connects piston rod, and the described chamber of going up is communicated with last tracheae, and described chamber down is communicated with following tracheae, and described upward tracheae, following tracheae are communicated with atmosphere respectively, are communicated with pressure-regulating valve simultaneously.The adjusting device of described pressure-regulating valve comprises stepper motor, eccentric stiffener, described stepper motor connects the control end of going up polishing disk pressure control module, the output shaft of described stepper motor connects eccentric stiffener, and the spool of described eccentric stiffener and pressure-regulating valve is in transmission connection.
The control strategy of the polishing disk pressure of present embodiment is realized by atmospheric control, mainly realizes the accurate control of load by the change in location of cylinder piston rod 28.Control pneumatic system with the software programming timer, realize the needed high-low pressure of polishing process pressing time, by the programme-control pressure-regulating valve 29 of microcomputer by finishing, pressure-regulating valve 29 is control cylinder again, simultaneously a pressure sensor 30 is housed at cylinder and polishing disk junction, change by A/D, the pressure signal of cylinder is fed back in the industrial computer, check the upthrow CD position by a displacement transducer 36, change by A/D equally, the position signalling of last polishing disk 22 is fed back in the industrial computer, form two closed-loop controls, thereby realize accurate control polishing disk pressure.Equipment atmospheric control schematic diagram can reflect cylinder control system principle.Cylinder is to control its action by pressure-regulating valve, is the key of whole pneumatic system control to the design of pressure-regulating valve and control.
The pneumatic system source of the gas is provided by small-sized air compressor, compressed air is through cylinder and filter feed system, system pressure is set up by pressure-regulating valve, by microcomputer the stepper motor that regulation voltage signal is given pressure-regulating valve is set, the rotation of stepper motor drives the rotation of eccentric stiffener, again moving by the rotating band movable valve plug of eccentric stiffener, the position of control spool in valve pocket, thereby the pressure requirement of control cylinder realizes the accurate motion of cylinder, the accurate control of polishing disk pressure.
When the processing beginning, because surface of the work out-of-flatness, if directly be added on the workpiece with operating pressure, then the local pressure between workpiece high spot and polishing pad is big especially, frictional resistance is big, cause workpiece in planetary gear, to be subjected to very big extruding, easily wafer crushing or wafer are got rid of to take off in the planetary gear and cause fragment.Therefore just begun to add man-hour at lathe, by microcomputer the flow of less regulation voltage signal controlled pressure control valve has been set, compressed air enters the cylinder rodless cavity through pressure-regulating valve with lower pressure, makes the pressure on the processing work less.After processing a period of time, workpiece is thrown more smoothly, and the voltage signal that the microcomputer setting is bigger is given pressure-regulating valve, increase flow, compressed air enters the cylinder rodless cavity through pressure-regulating valve with higher pressure, and the pressure on the processing work is increased, to improve the polishing working (machining) efficiency.When the fast end of polishing processing, supply with low-voltage signal again, workpiece is worked under lower tonnage, this helps reducing the roughness of surface of the work.
In process time of each stage high-low pressure of polishing machine of embodiment owing to adopted software calculating, so the operator can set according to specific circumstances.Adopt programme controlled automatic pressure to load strategy in the polishing machine automatic control system of this development simultaneously, can work out the pressure-loaded curve of process according to the operational characteristic of rapidoprint, avoided adopting in the conventional grinder time relay to set on-load pressure, the difficult problem of revising, Control System of Microcomputer can be by the operator by the polishing time under any pressure of keyboard to set up.
Claims (4)
1. the Pneumatic loading of an accurate doublefaced polisher, comprise frame, rack-mounted cylinder, described cylinder has piston rod, described piston rod is connected with last polishing disk, it is characterized in that: described cylinder connects and is used to regulate the pressure-regulating valve of on-load pressure size, described pressure-regulating valve connects pneumatic source of the gas, at the junction setting pressure sensor of described piston rod with last polishing disk; Described Pneumatic loading also comprises the on-load pressure control curve controlled magnitude of load that is used for according to the processing conditions formulation of workpiece, and be used for each polishing stage, receive the signal of pressure sensor, and with the operating pressure in the force value of pressure sensor and default each polishing stage relatively, optionally send the last polishing disk pressure control module that increases or reduce pressure instruction to pressure-regulating valve; The described polishing disk pressure control module that goes up connects pressure-regulating valve, pressure sensor.
Accurate doublefaced polisher as claimed in claim 1 Pneumatic loading, it is characterized in that: described Pneumatic loading also comprises the displacement transducer that is used to detect the upthrow CD position, described displacement transducer connects the upthrow CD position control module that is used for whether arriving according to polishing disk on the signal determining of displacement transducer the operating position, and described position sensor connects described upthrow CD position control module.
Accurate doublefaced polisher as claimed in claim 1 or 2 Pneumatic loading, it is characterized in that: described cylinder comprises chamber, following chamber and piston, piston connects piston rod, the described chamber of going up is communicated with last tracheae, described chamber down is communicated with following tracheae, and described upward tracheae, following tracheae are communicated with atmosphere respectively, are communicated with pressure-regulating valve simultaneously.
4. the upthrow disc drive mechanism of accurate doublefaced polisher as claimed in claim 3, it is characterized in that: the adjusting device of described pressure-regulating valve comprises stepper motor, eccentric stiffener, described stepper motor connects the control end of going up polishing disk pressure control module, the output shaft of described stepper motor connects eccentric stiffener, and the spool of described eccentric stiffener and pressure-regulating valve is in transmission connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201089588U CN201040356Y (en) | 2007-05-09 | 2007-05-09 | Pneumatic loading device for accurate double-face polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201089588U CN201040356Y (en) | 2007-05-09 | 2007-05-09 | Pneumatic loading device for accurate double-face polishing machine |
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| Publication Number | Publication Date |
|---|---|
| CN201040356Y true CN201040356Y (en) | 2008-03-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201089588U Expired - Lifetime CN201040356Y (en) | 2007-05-09 | 2007-05-09 | Pneumatic loading device for accurate double-face polishing machine |
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| Country | Link |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100448616C (en) * | 2007-05-09 | 2009-01-07 | 浙江工业大学 | Pneumatic loading equipment of accurate doublefaced polisher |
| CN104875101A (en) * | 2014-02-28 | 2015-09-02 | 中国科学院宁波材料技术与工程研究所 | Polishing method and polishing system |
-
2007
- 2007-05-09 CN CNU2007201089588U patent/CN201040356Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100448616C (en) * | 2007-05-09 | 2009-01-07 | 浙江工业大学 | Pneumatic loading equipment of accurate doublefaced polisher |
| CN104875101A (en) * | 2014-02-28 | 2015-09-02 | 中国科学院宁波材料技术与工程研究所 | Polishing method and polishing system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20070509 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |