CN1792553B - Finishing Apparatus of polishing pat and finishing method - Google Patents
Finishing Apparatus of polishing pat and finishing method Download PDFInfo
- Publication number
- CN1792553B CN1792553B CN200510121363A CN200510121363A CN1792553B CN 1792553 B CN1792553 B CN 1792553B CN 200510121363 A CN200510121363 A CN 200510121363A CN 200510121363 A CN200510121363 A CN 200510121363A CN 1792553 B CN1792553 B CN 1792553B
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- slide block
- drive motors
- trimmer
- trimming device
- polishing
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Abstract
An apparatus and its method for repairing the polishing pad are disclosed. Said apparatus fixed to a polisher is composed of supporting frame, motor, horizontal and vertical tracks, leading screw installed in horizontal track and driven by motor via coupling, slide block on vertical track and driven by said leading screw, repairing unit fixed to lower end of slide block, and pressure regulator. It has rotation movement, straight-line movement, and adjustable speed and pressure.
Description
Technical field
The present invention relates to the semiconductor wafer chemico-mechanical polishing, relate more specifically to trimming device for polishing cushion and method for trimming.
Background technology
Along with the IC development of technology, integrated circuit (IC) chip constantly develops to highly integrated, densification and high performance direction.For the high-performance of electron gain element, require semiconductor wafer overall situation planarization and surperficial not damaged.Chemico-mechanical polishing (CMP) technology is one of key technology of semiconductor wafer surface processing, is widely used in each stage surface leveling of ic manufacturing process.Polishing pad as one of CMP system core parts has material impact to polishing efficiency and crudy.In the CMP process, polishing pad has following function: (1) can store polishing fluid, and it is transported to the whole machining area of workpiece, makes polishing evenly; (2) remove the residuals (as polishing chip, polishing pad fragment etc.) that polishing process produces from the workpiece polished surface; (3) transmit material and remove required mechanical load; (4) keep required machinery of polishing process and chemical environment.At present, Chang Yong pad material has polymer such as poly-inferior peace fat.
In traditional CMP system, the pad interface that retaining ring is rotated with respect to equidirectional keeps wafer and wafer is rotated.In polishing process, under polish pressure and heat effect, the polishing pad annular region that contacts with wafer is worn, and the pad interface profile changes.Simultaneously, the pad interface material is owing to being worn and pushing, and surface pores will be closed and become smooth glaze, and the ability of polishing pad storage, transmission abrasive material reduces, and material removing rate and workpiece polished surface quality descend.In addition, abrasive particle particle and the reaction product particle inlayed in the pad interface pore also make its polishing ability further reduce.
Therefore, the necessary suitable finishing of polishing pad to recover the flatness of pad interface, is removed cold gluing face or the smooth glaze and the insert on surface, recovers the pad interface roughness.Effectively solution route is: employing can be rotated simultaneously with the trimming device of straight reciprocating motion and be removed pad interface distortion and metamorphic layer, and, obtain desired polishing pad flatness and roughness according to finishing parameters such as movement locus, movement velocity and the finishing pressure of the adjustable whole trimmer of different pad material.
Summary of the invention
The invention provides the method and the trimming device of the finishing of a kind of pad interface overall situation, with the flatness and the surface roughness of real-time recovery polishing pad.Described method can realize the online finishing finishing and the off-line finishing of polishing pad easily, and can adjust the finishing parameters such as movement locus, movement velocity and finishing pressure of trimmer as required.
A kind of trimming device for polishing cushion provided by the invention, utilize double end polishing machine upper pillar stand installing hole to be fixed on the polishing machine, the supportive body of trimming device adopts frame structure, level is installed drive motors 4, guide rail 9 on the crossbeam 6 of supportive body, and the ball-screw 8 that is installed in the guide rail 9 is connected with drive motors 4 by shaft coupling 5; Slide block 14 is installed on the vertical direction guide rail 13, ball-screw 8 drives vertical direction guide rail 13 and slide block 14 move left and right, drive motors 15 is fixed on slide block 14 bottoms, be connected with trimmer 16 by shaft coupling, pressure adjusting screw 12 is installed on the slide block 14 and with vertical direction guide rail 13 and is connected by playing self-locking nut 10, last self-locking nut 11.
Above-mentioned supportive body is by lower support 1, pedestal column 2, back-up block 3, crossbeam 6 and upper plate 7 are formed, pedestal column 2 is installed on the lower support 1, upper plate 7 is installed above it, back-up block 3 is arranged on the upper plate 7, the above-mentioned supportive bodies of crossbeam 6. are installed above the back-up block 3 adopt aluminum alloy materials. on above-mentioned crossbeam 6 two ends and the position suitable travel switch is housed respectively with guide rail 9 length. above-mentioned trimmer 16 can be disk wheel or hairbrush. above-mentioned slide block 14 and vertical direction guide rail 13 interconnect by oat tail groove structure. above-mentioned drive motors 4, drive motors 15 can break-in, speed governing. above-mentioned pressure adjusting screw 12 adopts the fine pitch screw rod. above-mentioned drive motors 4, drive motors 15, the travel switch at crossbeam 6 both ends and contactor are formed control circuit, wherein travel switch is controlled the stroke of straight reciprocating motion, the starting of contactor control motor, stop and the motion that commutates, realize that trimmer is at predetermined stroke section automatic linear back and forth movement.
The invention provides the method for trimming of trimming device for polishing cushion, following steps are arranged: (1) presses lower stroke switch ST1, contactor KM1 coil electricity, and KM1 normally opened contact 1,2 is all closed, drive motors 4 is just changeing starting, and slide block drives trimmer and is moved to the left by predetermined speed; (2) when slide block moves to certain position, slide block impact stroke switch S T2 causes the ST1 break contact to disconnect, contactor KM1 coil blackout, and drive motors 4 stops operating; Meanwhile, the make contact closure of travel switch ST2, contactor KM2 coil electricity, KM2 normally opened contact 1,2 is all closed, drive motors 4 counter-rotating startings, slide block drives trimmer and moves right by predetermined speed; (3) when slide block moves right certain position, slide block impact stroke switch S T1, the break contact of ST1 disconnects, contactor KM2 coil blackout, drive motors 4 stops operating, the make contact closure of while ST1, and contactor KM1 coil is switched on again, drive motors 4 just changes again, and slide block drives trimmer and is moved to the left by predetermined speed; (4) above-mentioned trimmer is done automatic linear back and forth movement while drive motors 15 in predetermined stroke section and is also driven the trimmer rotation, change the velocity of rotation of trimmer and the combination of straight reciprocating motion speed, size in conjunction with adjusting finishing pressure satisfies the finishing requirement of different pad material.
The technology and the characteristics thereof of trimming device for polishing cushion provided by the invention comprise: trimming device for polishing cushion adopts the frame structure form, and utilizes double end polishing machine upper pillar stand installing hole to be fixed on the polishing machine, installs simple and easy; The trimming device supportive body adopts aluminum alloy materials, under the condition of proof strength, reduces total weight, is easy to dismounting.Trimmer 16 is driven by ball-screw 8 by drive motors 4 in the device, does straight reciprocating motion along guide rail on diametric(al), the trimming polished pad of overall situation surface; Trimmer 16 is adjusted finishing pressure by screw rod 12; Trimmer 16 is driven by drive motors 15 and rotates; By changing the rotating speed of drive motors 4, drive motors 15, change the velocity of rotation of trimmer 16 and the combination of straight reciprocating motion speed, to change the finishing movement locus of trimmer, the size in conjunction with adjusting finishing pressure satisfies the finishing requirement of different pad material.
Polishing pad finishing method and apparatus provided by the invention has and rotatablely moves and two kinds of straight reciprocating motions finishing motion, can realize the finishing of the pad interface overall situation.Rotatablely move and the speed of straight reciprocating motion and finishing pressure adjustable size, can satisfy the finishing requirement of different pad material.Can select online finishing or the trimming polished pad of off-line as required.Pressure adjusting screw 12 adopts the fine pitch screw rod, to improve the pressure degree of regulation;
Description of drawings
The scheme that the present invention adopts as shown in drawings.
Fig. 1 is the front view of trimming device for polishing cushion.Wherein 1 is lower support, the 2nd, and pedestal column, the 3rd, back-up block, the 4th, drive motors (adjustable speed and rotating), the 5th, shaft coupling, the 6th, crossbeam, the 7th, upper plate, the 8th, ball-screw, the 9th, guide rail;
Fig. 2 is the end view of trimming device for polishing cushion.The polish pressure adjusting mechanism of trimming device for polishing cushion has been described.Wherein 10 is following self-locking nuts, the 11st, and last self-locking nut, the 12nd, pressure adjusting screw, the 13rd, vertical direction guide rail, the 14th, slide block, the 15th, the drive motors that trimmer rotatablely moves, the 16th, trimmer.
Fig. 3 is the vertical view schematic diagram of trimming device for polishing cushion Fig. 2.Illustrated that polishing pad 17 rotatablely moves, the rotatablely moving and straight reciprocating motion of trimmer 16.
Fig. 4 is the straight reciprocating motion control circuit figure of trimmer in the trimming device for polishing cushion. wherein travel switch ST1, ST2 control the stroke of straight reciprocating motion, the starting of contactor KM1, KM2 control motor, stop and the motion that commutate the stroke section automatic linear back and forth movement that the realization trimmer is being scheduled to.
Embodiment
Polishing pad finishing method and apparatus provided by the invention has and rotatablely moves and straight reciprocating motion, realizes the finishing of the pad interface overall situation.Rotatablely move and the velocity magnitude of straight reciprocating motion and finishing pressure adjustable size.
A kind of trimming device for polishing cushion provided by the invention, utilize double end polishing machine upper pillar stand installing hole to be fixed on the polishing machine, the supportive body of trimming device adopts frame structure, level is installed drive motors 4, guide rail 9 on the crossbeam 6 of supportive body, and the ball-screw 8 that is installed in the guide rail 9 is connected with drive motors 4 by shaft coupling 5; Slide block 14 is installed on the vertical direction guide rail 13, ball-screw 8 drives vertical direction guide rail 13 and slide block 14 move left and right, drive motors 15 is fixed on slide block 14 bottoms, be connected with trimmer 16 by shaft coupling, pressure adjusting screw 12 is installed on the slide block 14 and with vertical direction guide rail 13 and is connected by playing self-locking nut 10, last self-locking nut 11.
Above-mentioned supportive body is made up of lower support 1, pedestal column 2, back-up block 3, crossbeam 6 and upper plate 7, and pedestal column 2 is installed on the lower support 1, and upper plate 7 is installed above it, and back-up block 3 is arranged on the upper plate 7, and crossbeam 6 is installed above the back-up block 3.Above-mentioned supportive body adopts aluminum alloy materials.On above-mentioned crossbeam 6 two ends and the position suitable travel switch is housed respectively with guide rail 9 length.Above-mentioned trimmer 16 can be disk wheel or hairbrush.Above-mentioned slide block 14 and vertical direction guide rail 13 interconnect by oat tail groove structure.Above-mentioned drive motors 4, drive motors 15 can break-ins, speed governing.Above-mentioned pressure adjusting screw 12 adopts the fine pitch screw rod.The travel switch at above-mentioned drive motors 4, drive motors 15, crossbeam 6 both ends and contactor are formed control circuit, wherein travel switch is controlled the stroke of straight reciprocating motion, the starting of contactor control motor, stop and the motion that commutate the stroke section automatic linear back and forth movement that the realization trimmer is being scheduled to.
The invention provides the method for trimming of trimming device for polishing cushion, following steps are arranged: (1) presses lower stroke switch ST1, contactor KM1 coil electricity, and KM1 normally opened contact 1,2 is all closed, drive motors 4 is just changeing starting, and slide block drives trimmer and is moved to the left by predetermined speed; (2) when slide block moves to certain position, slide block impact stroke switch S T2 causes the ST1 break contact to disconnect, contactor KM1 coil blackout, and drive motors 4 stops operating; Meanwhile, the make contact closure of travel switch ST2, contactor KM2 coil electricity, KM2 normally opened contact 1,2 is all closed, drive motors 4 counter-rotating startings, slide block drives trimmer and moves right by predetermined speed; (3) when slide block moves right certain position, slide block impact stroke switch S T1, the break contact of ST1 disconnects, contactor KM2 coil blackout, drive motors 4 stops operating, the make contact closure of while ST1, and contactor KM1 coil is switched on again, drive motors 4 just changes again, and slide block drives trimmer and is moved to the left by predetermined speed; (4) above-mentioned trimmer is done automatic linear back and forth movement while drive motors 15 in predetermined stroke section and is also driven the trimmer rotation, change the velocity of rotation of trimmer and the combination of straight reciprocating motion speed, size in conjunction with adjusting finishing pressure satisfies the finishing requirement of different pad material.
Claims (10)
1. trimming device for polishing cushion, utilize double end polishing machine upper pillar stand installing hole to be fixed on the polishing machine, it is characterized in that: the supportive body of trimming device adopts frame structure, the crossbeam of supportive body (6) is gone up level first drive motors (4), guide rail (9) is installed, and the ball-screw (8) that is installed in the guide rail (9) is connected with first drive motors (4) by shaft coupling (5); Slide block (14) is installed on the vertical direction guide rail (13), ball-screw (8) drives vertical direction guide rail (13) and slide block (14) move left and right, second drive motors (15) is fixed on slide block (14) bottom, be connected with trimmer (16) by shaft coupling, pressure adjusting screw (12) is installed in slide block (14) by following self-locking nut (10), last self-locking nut (111) and upward and with vertical direction guide rail (13) is connected.
2. a kind of trimming device for polishing cushion according to claim 1 is characterized in that: above-mentioned supportive body is made up of lower support (1), pedestal column (2), back-up block (3), crossbeam (6) and upper plate (7); Pedestal column (2) is installed on the lower support (1), and upper plate (7) is installed above it, and back-up block (3) is arranged on the upper plate (7), and crossbeam (6) is installed above the back-up block (3).
3. according to claim 1 or 2 described a kind of trimming device for polishing cushion, it is characterized in that: above-mentioned supportive body adopts aluminum alloy materials.
4. a kind of trimming device for polishing cushion according to claim 1 is characterized in that: on above-mentioned crossbeam (6) two ends and the position suitable with guide rail (9) length travel switch is housed respectively.
5. a kind of trimming device for polishing cushion according to claim 1 is characterized in that: above-mentioned trimmer (16) is disk wheel or hairbrush.
6. a kind of trimming device for polishing cushion according to claim 1 is characterized in that: above-mentioned slide block (14) interconnects by oat tail groove structure with vertical direction guide rail (13).
7. a kind of trimming device for polishing cushion according to claim 1 is characterized in that: above-mentioned first drive motors (4), second drive motors (15) can break-in and speed governing.
8. a kind of trimming device for polishing cushion according to claim 1 is characterized in that: above-mentioned pressure adjusting screw (12) adopts the fine pitch screw rod.
9. a kind of trimming device for polishing cushion according to claim 4, it is characterized in that: the travel switch at above-mentioned first drive motors (4), crossbeam (6) both ends and contactor are formed control circuit, wherein travel switch is controlled the stroke of straight reciprocating motion, the starting of contactor control motor, stop and the motion that commutate the stroke section automatic linear back and forth movement that the realization trimmer is being scheduled to.
10. one kind is used the method for trimming of trimming device for polishing cushion according to claim 1, it is characterized in that following steps are arranged: 1) press lower stroke switch ST1, contactor KM1 coil electricity, KM1 normally opened contact 1,2 is all closed, first drive motors (4) is just changeing starting, and slide block drives trimmer and is moved to the left by predetermined speed; 2) when slide block moves to certain position, slide block impact stroke switch S T2 causes the ST1 break contact to disconnect, contactor KM1 coil blackout, and first drive motors (4) stops operating; Meanwhile, the make contact closure of travel switch ST2, contactor KM2 coil electricity, KM2 normally opened contact 1,2 is all closed, first drive motors (4) counter-rotating starting, slide block drives trimmer and moves right by predetermined speed; 3) when slide block moves right certain position, slide block impact stroke switch S T1, the break contact of ST1 disconnects, contactor KM2 coil blackout, first drive motors (4) stops operating, the make contact closure of while ST1, and contactor KM1 coil is switched on again, first drive motors (4) just changes again, and slide block drives trimmer and is moved to the left by predetermined speed; 4) above-mentioned trimmer is done automatic linear back and forth movement while second drive motors (15) in predetermined stroke section and is also driven the trimmer rotation, change the velocity of rotation of trimmer and the combination of straight reciprocating motion speed, size in conjunction with adjusting finishing pressure satisfies the finishing requirement of different pad material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200510121363A CN1792553B (en) | 2005-12-30 | 2005-12-30 | Finishing Apparatus of polishing pat and finishing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200510121363A CN1792553B (en) | 2005-12-30 | 2005-12-30 | Finishing Apparatus of polishing pat and finishing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1792553A CN1792553A (en) | 2006-06-28 |
| CN1792553B true CN1792553B (en) | 2010-05-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200510121363A Expired - Fee Related CN1792553B (en) | 2005-12-30 | 2005-12-30 | Finishing Apparatus of polishing pat and finishing method |
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| CN (1) | CN1792553B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101367200B (en) * | 2007-08-14 | 2010-05-19 | 中芯国际集成电路制造(上海)有限公司 | Polishing pad finishing head |
| CN100546770C (en) * | 2007-11-20 | 2009-10-07 | 浙江工业大学 | Trimming device for polishing cushion |
| CN103084978A (en) * | 2011-11-04 | 2013-05-08 | 易通实业(宁波)有限公司 | Method for processing shape of outer ring of guide rail roller |
| CN103212991A (en) * | 2013-04-25 | 2013-07-24 | 中国科学院上海光学精密机械研究所 | Slotting and disk-repairing device for large-scale polishing lacquer disk |
| CN103372812A (en) * | 2013-07-12 | 2013-10-30 | 中国科学院上海光学精密机械研究所 | Slotting device for polishing plastic disc of large ring polishing machine |
| CN106182106B (en) * | 2016-07-10 | 2017-12-19 | 广州市南头科技有限公司 | A kind of floating side clipping device of elevator handrail |
| CN108581843A (en) * | 2018-04-28 | 2018-09-28 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Color-buffing finish device and polishing grinding equipment |
| CN112405215B (en) * | 2020-11-11 | 2022-04-15 | 中国工程物理研究院激光聚变研究中心 | Off-line dressing device and method for polishing disk |
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|---|---|---|---|---|
| US5840202A (en) * | 1996-04-26 | 1998-11-24 | Memc Electronic Materials, Inc. | Apparatus and method for shaping polishing pads |
| CN2387733Y (en) * | 1999-09-27 | 2000-07-19 | 张文 | Noodle-shaving machine |
| CN2721295Y (en) * | 2004-07-09 | 2005-08-31 | 王隆太 | Digital controlled screw grinding machine |
| CN2868553Y (en) * | 2005-12-30 | 2007-02-14 | 广东工业大学 | Polishing cushion dressing device |
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2005
- 2005-12-30 CN CN200510121363A patent/CN1792553B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5840202A (en) * | 1996-04-26 | 1998-11-24 | Memc Electronic Materials, Inc. | Apparatus and method for shaping polishing pads |
| CN2387733Y (en) * | 1999-09-27 | 2000-07-19 | 张文 | Noodle-shaving machine |
| CN2721295Y (en) * | 2004-07-09 | 2005-08-31 | 王隆太 | Digital controlled screw grinding machine |
| CN2868553Y (en) * | 2005-12-30 | 2007-02-14 | 广东工业大学 | Polishing cushion dressing device |
Non-Patent Citations (4)
| Title |
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| CN1792553A (en) | 2006-06-28 |
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