CN108581843A - Color-buffing finish device and polishing grinding equipment - Google Patents
Color-buffing finish device and polishing grinding equipment Download PDFInfo
- Publication number
- CN108581843A CN108581843A CN201810402089.2A CN201810402089A CN108581843A CN 108581843 A CN108581843 A CN 108581843A CN 201810402089 A CN201810402089 A CN 201810402089A CN 108581843 A CN108581843 A CN 108581843A
- Authority
- CN
- China
- Prior art keywords
- finishing
- color
- pedestal
- driving mechanism
- horizontal displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present embodiments relate to precision instrument production equipment fields, in particular to a kind of color-buffing finish device and polishing grinding equipment.The color-buffing finish device includes pedestal, horizontal displacement structure, first driving mechanism, displacement detecting structure, second driving mechanism, modify detection structure and finishing structure, horizontal displacement structure setting is parallel with pedestal in the side of pedestal and can be axially moved along pedestal, first driving mechanism is arranged in one end of the horizontal displacement structure, displacement detecting mechanism is arranged in horizontal displacement structure, one end far from the first driving mechanism is arranged in horizontal displacement structure in finishing structure vertical, finishing structure need to install dressing tool for modifying, second driving structure is arranged in the one end of finishing structure far from pedestal, detection structure setting is modified in finishing structure.The structure that the color-buffing finish device can modify needs is accurately modified.
Description
Technical field
The present invention relates to precision instrument production equipment fields, are thrown in particular to a kind of color-buffing finish device and grinding
Light device.
Background technology
In modern semiconductors special equipment manufacturing process, realize that the finishing of polissoir polishing disk is a key technology.
Need to realize the grinding-material and lapping liquid residual in removal polishing disk groove in existing polissoir technical process.
Invention content
The purpose of the present invention is to provide a kind of color-buffing finish device and polishing grinding equipments, aim to solve the problem that the prior art
Present in the above problem.
An embodiment of the present invention provides a kind of color-buffing finish device, the color-buffing finish device includes pedestal, horizontal displacement
Structure, the first driving mechanism, displacement detecting structure, the second driving mechanism, finishing detection structure and finishing structure；
The horizontal displacement structure setting is parallel with the pedestal in the side of the pedestal and can be along the pedestal
It is axially moved；
First driving mechanism is arranged in one end of the horizontal displacement structure, and first driving mechanism is for pushing
The horizontal displacement structure motion；
The displacement detecting mechanism is arranged in the horizontal displacement structure, and the displacement detecting mechanism is described for measuring
The water level move distance of horizontal displacement structure；
One end far from first driving mechanism, institute is arranged in the horizontal displacement structure in the finishing structure vertical
Finishing structure is stated for installing dressing tool；
Second driving structure is arranged in the described finishing one end of structure far from the pedestal, second driving structure
For giving the finishing structure to provide finishing power；
The finishing detection structure is arranged in the finishing structure, and the finishing detection is for detecting the finishing structure
Carry out displacement distance when finishing operation.
As further, the horizontal displacement structure includes first moving component, the second moving assembly, connection component and tune
Whole structure；
The first movement component is arranged in parallel with second moving assembly, and the first movement component passes through the company
Connected components are connect with the pedestal, and the adjustment structure is connect with the connection component, and the displacement detecting structure setting is in institute
It states on first movement component；
The adjustment structure is used to adjust the move distance of the first movement component and second moving assembly.
As further, the one of first driving mechanism and second moving assembly and second moving assembly
End connection, the finishing structure setting is in the one end of second moving assembly far from first driving mechanism.
Offered along first movement component direction as further, on the first movement component move it is recessed
Rail is provided with convex block on second moving assembly；
The convex block is sticked into the movement female rail and can be moved along the female rail that moves, to realize that described second moves
Dynamic component is axially moved along the first movement component.
As further, cutter screens is provided in the finishing structure；
The cutter screens is for blocking dressing tool.
As further, the rectangular set square shape of pedestal, one in the pedestal is arranged in the connection component
On right-angle side, another right-angle side of the pedestal is for being fixed on polishing machine.
As further, first driving mechanism is motor or driving cylinder.
As further, second driving mechanism is motor or driving cylinder.
The embodiment of the present invention additionally provides a kind of polishing grinding equipment, and the polishing grinding equipment includes grinding and polishing knot
Structure, conditioner discs and color-buffing finish device described in any one of the above embodiments；
The conditioner discs are arranged in the grinding and polishing structure and can the rotary motions in the grinding and polishing structure；
The color-buffing finish device is arranged in the grinding and polishing structure and opposite with the position that the conditioner discs are arranged
It answers.
As further, the one end of the pedestal far from the horizontal displacement structure, which is fixed at, described to be stated grinding and throws
On the photo structure and position of the finishing structure is corresponding with the position that the conditioner discs are arranged.
A kind of color-buffing finish device and polishing grinding equipment provided in an embodiment of the present invention, the color-buffing finish device include
Pedestal, horizontal displacement structure, the first driving mechanism, displacement detecting structure, the second driving mechanism, finishing detection structure and finishing knot
Structure, horizontal displacement structure setting is parallel with pedestal in the side of pedestal and can be axially moved along pedestal, the first driving mechanism
It is arranged in one end of the horizontal displacement structure, for pushing horizontal displacement structure motion, displacement detecting mechanism to be arranged in level
On displacement structure, the water level move distance for measuring horizontal displacement structure, finishing structure vertical is arranged in horizontal displacement structure
Upper one end far from the first driving mechanism, finishing structure need to install dressing tool for modifying, and the setting of the second driving structure is being repaiied
The one end of whole structure far from pedestal, for giving finishing structure to provide finishing power, finishing detection structure is arranged in finishing structure,
For detecting displacement distance when finishing structure carries out finishing operation.The color-buffing finish device can to the structure modified of needs into
The accurate finishing of row.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 shows a kind of structural schematic diagram of polishing grinding equipment 100 provided in an embodiment of the present invention.
Fig. 2 shows the structural schematic diagrams at a visual angle of color-buffing finish device 200.
Fig. 3 shows the structural schematic diagram at another visual angle of color-buffing finish device 200
Icon：100- polishing grinding equipments；110- grinding and polishing structures；120- conditioner discs；200- color-buffing finish devices；
210- pedestals；220- horizontal displacement structures；221- first moves component；The second moving assemblies of 222-；223- connection components；224- tune
Whole structure；The first driving mechanisms of 230-；240- displacement detecting structures；The second driving mechanisms of 250-；260- modifies detection structure；
270- modifies structure.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, below the detailed description of the embodiment of the present invention to providing in the accompanying drawings be not intended to limit it is claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.Based on the embodiments of the present invention, this field is common
The every other embodiment that technical staff is obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should be noted that：Similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.
In the description of the present invention, it is to be understood that, term "center", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, or be somebody's turn to do
Invention product using when the orientation or positional relationship usually put or those skilled in the art orientation or position that usually understand
Relationship is set, is merely for convenience of description of the present invention and simplification of the description, equipment is not indicated or implied the indicated or element is necessary
With specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, it is not understood to indicate or imply
Relative importance.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection, can also be electrical connection；It can be directly connected, it can also be indirect by intermediary
It is connected, can is the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in the present invention.
Referring to Fig. 1, Fig. 1 shows a kind of structural schematic diagram of polishing grinding equipment 100 provided in an embodiment of the present invention.
In embodiments of the present invention, polishing grinding equipment 100 is repaiied including grinding and polishing structure 110, conditioner discs 120 and polishing
Engagement positions 200.Conditioner discs 120 are arranged in grinding and polishing structure 110 and can the rotary motions in grinding and polishing structure 110.
Color-buffing finish device 200 is arranged in grinding and polishing structure 110 and corresponding with the position that conditioner discs 120 are arranged.
Fig. 2 and Fig. 3 are please referred to, Fig. 2 shows the structural schematic diagrams at a visual angle of color-buffing finish device 2002.Figure
3 show the structural schematic diagram at another visual angle of color-buffing finish device 200
In embodiments of the present invention, the color-buffing finish device 200 includes pedestal 210, horizontal displacement structure 220, first
Driving mechanism 230, displacement detecting structure 240, the second driving mechanism 250, finishing detection structure 260 and finishing structure 270.
Horizontal displacement structure 220 is arranged parallel with pedestal 210 in the side of pedestal 210 and can be axial along pedestal 210
Movement.First driving mechanism 230 is arranged in one end of the horizontal displacement structure 220, and the first driving mechanism 230 is for pushing water
Flat displacement structure 220 moves.Displacement detecting mechanism is arranged in horizontal displacement structure 220, and displacement detecting mechanism is for measuring water
The water level move distance of flat displacement structure 220.Finishing structure 270 is vertically set in horizontal displacement structure 220 drives far from first
One end of motivation structure 230, finishing structure 270 need to install dressing tool for modifying, and the setting of the second driving structure is in finishing structure
270 one end far from pedestal 210, displacement detecting mechanism are used to provide finishing power to finishing structure 270.Modify detection structure
In finishing structure 270, finishing detection structure 260 is used to detect movement when finishing structure 270 carries out finishing operation for 260 settings
Distance.
By using above scheme, is moved by 230 drive displacement detection structure 240 of the first driving mechanism, pass through finishing
Detection structure 260 measures the distance of 240 movement of displacement detecting structure, when displacement detecting structure 240 moves to setting value, first
Driving mechanism 230 stops driving the first driving mechanism 230 movement, and the second driving mechanism 250 driving finishing structure 270 moves, by
The move distance that detection structure 260 measures finishing structure 270 is modified, when finishing structure 270 moves to preset value, and then is realized
The component modified to needs is modified.The structure that the color-buffing finish device 200 can modify needs is accurately modified.
In embodiments of the present invention, the one end of pedestal 210 far from horizontal displacement structure 220, which is fixed at, states grinding and polishing
In the structure 110 and position of finishing structure 270 is corresponding with the position that conditioner discs 120 are arranged.
By using above scheme, the cutter modified in structure 270 is corresponding with the position being arranged with conditioner discs 120, when
When 120 rotary motion of conditioner discs, the cutter modified in structure 270 may be implemented to modify conditioner discs 120.
By using above scheme, the grinding-material and lapping liquid residual on 120 surface of conditioner discs can be effectively removed so that
The product of production, cleaning are high-quality.The product of production such as semi-conducting material, wafer etc..
In embodiments of the present invention, horizontal displacement structure 220 includes the first shifting component 221, the second moving assembly 222, connects
Connected components 223 and adjustment structure 224.First movement component is arranged in parallel with the second moving assembly 222, and first movement component passes through
Connection component 223 is connect with pedestal 210, and adjustment structure 224 is connect with connection component 223, and displacement detecting structure 240 is arranged the
On one moving assembly.Adjustment structure 224 is used to adjust the move distance of first movement component and the second moving assembly 222.
By using above scheme, the move distance of horizontal displacement structure 220 can be accurately controlled, and then can realize essence
True color-buffing finish operation.
In embodiments of the present invention, it is offered along first movement component direction on first movement component and moves female rail, the
It is provided with convex block on two moving assemblies 222.Convex block is sticked into movement female rail and can be moved along female rail is moved, to realize second
Moving assembly 222 is axially moved along first movement component.
By using above scheme, can adjust the second moving assembly 222 along first movement component axial movement away from
From to adjust the length of horizontal displacement structure 220.
As further, one end of the first driving mechanism 230 and the second moving assembly 222 and the second moving assembly 222
Connection, finishing structure 270 are arranged in the one end of the second moving assembly 222 far from the first driving mechanism 230.
By using above scheme, can the movement of controlled level displacement structure 220 and length from many aspects, pass through guarantee
The accuracy of color-buffing finish operation.
In embodiments of the present invention, it modifies and is provided with cutter screens in structure 270, cutter screens is for blocking finishing knife
Tool.In embodiments of the present invention, cutter has the blade that can cut object.
Tool motion is driven by modifying structure 270, and then realizes color-buffing finish operation.
In embodiments of the present invention, one in pedestal 210 is arranged in 210 rectangular set square shape of pedestal, connection component 223
On right-angle side, another right-angle side of pedestal 210 is for being fixed on polishing machine.
By using above scheme, since triangle has stability, to 210 stable structure of pedestal.
In embodiments of the present invention, the first driving mechanism 230 can be motor or driving cylinder, the second driving mechanism
250 can be motor or driving cylinder.Displacement detecting structure 240 can be level sensor or slide calliper rule, or
It is camera or laser ranging system etc..It can be trim locations sensor to modify detection structure 260, or card
Ruler camera or laser ranging system etc..
By using above scheme, when polishing grinding equipment 100 needs to modify conditioner discs 120, finishing structure 270 is wanted
After reaching trim locations so that finishing structure 270 is fixed a cutting tool feeding, in order to ensure accuracy that the product of production is aligned, can be made
With displacement detecting structure 240, such as position sensor is translated, to control the automatic detection of in-position, finishing detection can be used
Structure 260, such as trim locations sensor, to control the automatic detection of supplying position.In embodiments of the present invention, it does not limit
The particular number of trim locations sensor peace pan position sensor.
It is fed down by modifying structure 270, the specific direction as disk of holding power moves feeding, and then starts to repair
It is whole, there are lines setting, the rotation of horizontal displacement structure 220 to be carried out at the same time movement, make conditioner discs 120 according to the surface of conditioner discs 120
The outside spiral thread in center or multi-turn lines can be modified, for determining that horizontal displacement mechanism kinematic is sensed to horizontal position
The position that device can detect, the position of level sensor detectable level displacement mechanism is to ensure horizontal displacement mechanism level
The precision of displacement and the safety of displaced position, feeding finishing detection structure 260 is detectable to determine position to ensure the essence of feeding
Degree and displaced position safety.
In conclusion a kind of color-buffing finish device 200 provided in an embodiment of the present invention and polishing grinding equipment 100, described
Color-buffing finish device 200 includes pedestal 210, horizontal displacement structure 220, the first driving mechanism 230, displacement detecting structure 240, the
Two driving mechanisms 250, finishing detection structure 260 and finishing structure 270, horizontal displacement structure 220 are arranged in the side of pedestal 210
Parallel with pedestal 210 and can be axially moved along pedestal 210, the first driving mechanism 230 is arranged in the horizontal displacement structure
220 one end, for pushing horizontal displacement structure 220 to move, displacement detecting mechanism is arranged in horizontal displacement structure 220, uses
In the water level move distance for measuring horizontal displacement structure 220, finishing structure 270 is vertically set in horizontal displacement structure 220 far
One end from the first driving mechanism 230, finishing structure 270 need to install dressing tool for modifying, and the setting of the second driving structure exists
The one end of structure 270 far from pedestal 210 is modified, for providing finishing power to finishing structure 270, finishing detection structure 260 is set
It sets in finishing structure 270, for detecting displacement distance when finishing structure 270 carries out finishing operation.The color-buffing finish device
200 structures that can be modified to needs are accurately modified.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of color-buffing finish device, which is characterized in that the color-buffing finish device includes pedestal, horizontal displacement structure, first
Driving mechanism, displacement detecting structure, the second driving mechanism, finishing detection structure and finishing structure；
The horizontal displacement structure setting is parallel with the pedestal in the side of the pedestal and can be along pedestal axial direction
Movement；
First driving mechanism is arranged in one end of the horizontal displacement structure, and first driving mechanism is described for pushing
Horizontal displacement structure motion；
The displacement detecting mechanism is arranged in the horizontal displacement structure, and the displacement detecting mechanism is for measuring the level
The water level move distance of displacement structure；
One end far from first driving mechanism is arranged in the horizontal displacement structure in the finishing structure vertical, described to repair
Whole structure is for installing dressing tool；
Second driving structure is arranged in the described finishing one end of structure far from the pedestal, and second driving structure is used for
Finishing power is provided to the finishing structure；
The finishing detection structure is arranged in the finishing structure, and the finishing detection is carried out for detecting the finishing structure
Displacement distance when finishing operation.
2. color-buffing finish device according to claim 1, which is characterized in that the horizontal displacement structure includes the first shifting group
Part, the second moving assembly, connection component and adjustment structure；
The first movement component is arranged in parallel with second moving assembly, and the first movement component passes through the connection group
Part is connect with the pedestal, and the adjustment structure is connect with the connection component, and the displacement detecting structure setting is described
On one moving assembly；
The adjustment structure is used to adjust the move distance of the first movement component and second moving assembly.
3. color-buffing finish device according to claim 2, which is characterized in that first driving mechanism is moved with described second
Dynamic component is connected with one end of second moving assembly, and the finishing structure setting is in second moving assembly far from described
One end of first driving mechanism.
4. color-buffing finish device according to claim 2, which is characterized in that along described on the first movement component
One moving assembly direction offers movement female rail, and convex block is provided on second moving assembly；
The convex block is sticked into the movement female rail and can be moved along the female rail that moves, to realize the second movement group
Part is axially moved along the first movement component.
5. color-buffing finish device according to claim 2, which is characterized in that be provided with cutter card in the finishing structure
Position；
The cutter screens is for blocking dressing tool.
6. color-buffing finish device according to claim 2, which is characterized in that the rectangular set square shape of pedestal, it is described
Connection component is arranged on a right-angle side of the pedestal, another right-angle side of the pedestal is for being fixed on polishing machine
On.
7. color-buffing finish device according to claim 1, which is characterized in that first driving mechanism is motor or drive
It takes offence cylinder.
8. color-buffing finish device according to claim 1, which is characterized in that second driving mechanism is motor or drive
It takes offence cylinder.
9. a kind of polishing grinding equipment, which is characterized in that the polishing grinding equipment includes grinding and polishing structure, conditioner discs and power
Profit requires 1-8 any one of them color-buffing finish devices；
The conditioner discs are arranged in the grinding and polishing structure and can the rotary motions in the grinding and polishing structure；
The color-buffing finish device is arranged in the grinding and polishing structure and corresponding with the position that the conditioner discs are arranged.
10. polishing grinding equipment according to claim 9, which is characterized in that the pedestal is far from the horizontal displacement knot
One end of structure is fixed at described state in grinding and polishing structure and the position of the finishing structure and conditioner discs setting
Position is corresponding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810402089.2A CN108581843A (en) | 2018-04-28 | 2018-04-28 | Color-buffing finish device and polishing grinding equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810402089.2A CN108581843A (en) | 2018-04-28 | 2018-04-28 | Color-buffing finish device and polishing grinding equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108581843A true CN108581843A (en) | 2018-09-28 |
Family
ID=63620046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810402089.2A Pending CN108581843A (en) | 2018-04-28 | 2018-04-28 | Color-buffing finish device and polishing grinding equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108581843A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110076696A (en) * | 2019-04-10 | 2019-08-02 | 中国科学院上海光学精密机械研究所 | A kind of auxiliary device and method for glass polishing machine polishing die face shape leveling reparation |
| CN114074257A (en) * | 2021-11-10 | 2022-02-22 | 刘艳婷 | High-end equipment shell trimming equipment |
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| CN110076696A (en) * | 2019-04-10 | 2019-08-02 | 中国科学院上海光学精密机械研究所 | A kind of auxiliary device and method for glass polishing machine polishing die face shape leveling reparation |
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| CN114074257A (en) * | 2021-11-10 | 2022-02-22 | 刘艳婷 | High-end equipment shell trimming equipment |
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Application publication date: 20180928 |