KR20080020103A - A variable stage system - Google Patents

Abstract

A variable stage system is provided to perform both a large deflection attitude control and a small deflection precision attitude control, thereby rapidly determining a rapid and accurate position. A variable stage system includes a main stage(10) and a sub stage(50). The main stage is varied through a second plate(11) and a first plate(13). The first plate is equipped with a first feeding block having a screw groove formed in a center of a first concave portion(13-5) longitudinally formed on an upper surface. First guides(13-7) are provided at both sides of the first concave portion. The second plate is also equipped with a second feeding block having a screw groove formed in a center of a second concave portion(11-5) longitudinally formed on a lower surface. Second guides(11-7) are provided at both sides of the second concave portion. Third and fourth guides(15-7) respectively corresponding to the first and second guides are provided on upper and lower surfaces of an actuator(15) so that the first and second plates move by crossing each other.

Description

Variable Stage System

1 is an exploded view showing a conventional horizontal table.

Figure 2 is a perspective view of a stage according to the present invention.

3 is a sectional view showing a stage according to the present invention.

4 is a perspective view showing a stage according to another embodiment of the present invention.

5 is a sectional view showing a stage according to another embodiment of the present invention.

* Description of the symbols for the main parts of the drawings

10 ... Main stage 15,55 ... Actuator

11,13, 51,53 ... plate

40 ... rotation table 45 ... rotation sensor

61 ... gear combination

The present invention relates to a variable stage system.

In more detail, the position of the X and Y axes in the first region, which is a predetermined variable region, is changed through the first plate and the second plate that cross-move, and the third plate and the upper portion of the first plate. By stacking and installing the fourth plate in order to change the cross-movement in the first plate in order to change the attitude of large displacement on a certain plane as well as precise control of the small displacement is implemented at the same time to ensure accurate positioning quickly A variable stage system.

Generally, the X and Y axis stages are used to transport small chips or to move in the X axis Y axis direction such as precision devices, test objects and inspected objects for the operation or inspection of precision devices. The error range is in microns. Ultra-precision (within 3 micrometers) is required.

In connection with this technology, the applicant of the present invention proposed a horizontal table 100 in Utility Model Registration No. 368454, and its configuration is shown in Fig. 1, where the stages 130 and 140 are X and Y axis driving means. It is conveyed through each of the horizontal driving means 150 consisting of (160) 180.

In addition, the transfer unit of the X-axis, the guide rails 181 are respectively installed on the drive base 112 installed on the table base 110 so that the guide blocks 120 can be transferred, and the guide blocks 120 are transferred. One end of the motor 183 is provided with a ball screw 187 fixed as a coupling 189, a screw nut 191, and a support 118, and a stopper to adjust the stroke of the ball screw 187. 122) is installed.

In addition, the Y-axis transfer unit, a plurality of guide rails 161 are intersected with the guide block 120 is connected to the guide block is moved through the ball screw 167 is driven as a motor 163 thereon The ball screw 167 is fixed as a coupling 165 and a screw nut 171 and a support connected to the motor.

In addition, the motors 163 and 183 are supported by the motor brackets 169 and 189, and the stages 130 and 140 are connected to the upper portion of the guide block, and the sensor bracket 116 protects the sensor. And a sensor guide 114 is further provided.

However, the stage as described above cannot be installed on the same axis of the motors 163 and 183 for transporting the stage in the X-axis and Y-axis directions due to structural limitations. It is necessary to precisely couple, such as a screw nut for preventing the eccentric rotation of the ball screw 167 has a disadvantage in that workability is reduced.

In addition, the displacement can be adjusted only in the X and Y axis directions, so if the raw material requiring inspection is inclined as much as the first θ axis, posture control becomes difficult, and it is inconvenient for the worker to work again by hand. The disadvantage is that the decision is difficult.

In addition, large-capacity movement and precise movement are impossible, which makes it difficult to quickly position.

An object of the present invention for improving the conventional problems as described above, to minimize the constraints of the installation by installing a plurality of drive motors in the same direction, and the attitude control on the plane to always enable accurate process work In addition, the present invention provides a variable stage system in which the angle of the stage is easily adjusted so that the inspection object is always inspected in the correct direction to improve reliability.

In addition, the present invention provides a variable stage system that allows precise positioning of rapid displacement and accurate movement of a large displacement as well as a small displacement on a constant plane. To provide.

The present invention, in order to achieve the above object, by varying the position of the X, Y axis in the first region, which is a predetermined variable region through the first plate and the second plate moving cross,

A third stage and a fourth plate are sequentially stacked on top of the first plate to provide a variable stage system that is variable while crossing and moving in the first plate.

In addition, the present invention is characterized in that the angular displacement of the θ axis is provided by providing a rotary table capable of angular displacement on the fourth plate.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 2 is a perspective view showing a stage according to the present invention, Figure 3 is a sectional view showing a stage according to the present invention, Figure 4 is a perspective view showing a stage according to another embodiment of the present invention, Figure 5 is a present As a cross-sectional view showing a stage according to another embodiment of the present invention, the present invention consists of a main stage 10 and a substage 50 installed to have different moving distances with respect to the same rotational speed.

The main stage 10 is installed so as to be variable through the second plate 11 and the first plate 13 stacked on the upper and lower sides thereof so as to cross-move each other through the first actuator 15.

At this time, the first plate 13 is provided with a first transfer block 13-3 having a screw groove 13-1 at the center of the first recess 13-5 formed in the longitudinal direction of the upper surface. First guides 13-7 are provided at both sides of the first recess 13-5.

In addition, the second plate 11 also includes a second transfer block 11-3 having a screw groove 11-1 at the center of the second recess 11-5 formed in the longitudinal direction of the lower surface. The second guides 11-7 are provided at both sides of the first recessed part 11-5.

In addition, the first and second guides 13-7 and 11-7 correspond to the upper and lower surfaces of the actuator 15 to move in a state where the first and second plates 13 and 11 cross each other. The third and fourth guides 15-7 are provided respectively.

Subsequently, the first actuator 15 has an operation hole in a direction in which the first and second transfer blocks 13-3 and 11-3 are inserted into the upper and lower surfaces thereof so as to cross each other. 15-3) are respectively provided so that the transfer screw 15-1 is rotatably mounted therein, and the driving motor 15-6 is connected to one side of the transfer screw 15-1.

On the other hand, the drive motor for operating the first plate 13 around the first actuator 15 is mounted in the same direction as the drive motor for operating the second plate 11, the drive motor is the first plate When mounted to the (13), one end thereof is installed to be exposed to the mounting hole (13-2) formed in the upper portion of the first plate, the drive motor is a guide block 15 protruding on the bottom surface of the first actuator (15) -2) and through the gear combination 61 of the rack / pinion.

The sub-stage 50 connected to the upper part of the main stage 10 has a fourth plate 53 and a third plate 51 stacked on the upper and lower sides thereof so as to cross-move each other through the second actuator 55. It is installed to be variable through).

At this time, the third plate 51, the feed screw 52-3 is connected to the drive motor 51-1 is installed in the center of the third recessed part (51-5) formed in the longitudinal direction of the upper surface Third guides 51-7 are provided on both sides of the third recessed part 51-5.

In addition, the fourth plate 53 is also provided with a gear combination 61 in which a drive motor 53-1 is connected to the center of the fourth recessed part 53-5 formed in the longitudinal direction of the lower surface. Fourth guides 53-7 are provided on both sides of the fourth recessed part 53-5.

In addition, the third and fourth guides 51-7 and 53-7 are provided on upper and lower surfaces of the second actuator 55 so that the third and fourth plates 51 and 54 cross each other. And fifth guides 55-7 corresponding to the respective ones are provided.

Subsequently, the second actuator 55 has a third transfer block 55-2 and a fourth corresponding to the rack gear and the transfer screw 51-3 forming the gear combination 61 on the upper and lower surfaces thereof. Each of the transfer blocks 55-4 protrudes and the fourth transfer block 55-4 is provided with a screw groove into which the transfer screw 53-3 is engaged.

At this time, the drive motor (53-1) (51-1) is further provided with a rotation sensor 60 to detect the number of revolutions.

On the other hand, the rotary table 40 is integrally connected through the driving motor 41 mounted on the third recess 51-5, and the transfer recess 43 is provided at the bottom edge of the rotary table 40. One side of the rotation monitoring sensor 60 is thereby built.

Referring to the operation of the present invention made of the above configuration as follows.

As shown in Figs. 2 to 5, the variable stage of the present invention is controlled in the X and Y directions on the same plane by the control of the power supplied to the driving motors 15-6, 51-1, 51-3, 41. Movement and angle adjustment in the θ axis direction are possible.

At this time, the first plate 13 and the second plate 11 forming the main stage 10 are moved in the X and Y directions about the first actuator 15 by the operation of the driving motor 15-6. The first and second plates are capable of fast and precise movement by increasing the size of the driving motor.

Subsequently, the third plate 51 and the fourth plate 53 forming the substage 50 by the operation of the driving motors 51-1 and 51-3 are centered on the second actuator 55. The third and fourth plates are precisely moved relatively slower than the first and second plates in the small drive motor.

In addition, by the operation of the drive motor 41, the rotary table 40 is rotated precisely by the θ angle with respect to the substage 50 where the precise positioning is performed.

At this time, the main stage, the sub-stage and the rotary table are each provided with a rotation sensing sensor in the drive motor for driving it so that accurate movement is possible.

According to the present invention, when a posture of a component to be inserted into the upper side of the rotary table is detected by the reference sensor through the above configuration, the movement in the X and Y directions and the? It is possible to adjust the angle so that the inspection work is always performed in the correct position to prevent inspection defects.

At this time, not only the error generated when the positioning of the part is performed by hand but also the irrationality such as having to stop the process for positioning is prevented.

On the other hand, in the present invention, the main stage 10, the drive motor 15-6 for varying the first and second plates 13 and 11 in the X, Y direction around the first actuator 15 is the same direction It is mounted on the first and second plates to be changed in the minimum working area during the movement.

At this time, the first actuator 15 is engaged with the drive motor 15-6 through the gear combination 61, and the center of the first plate 13 is fixed to the base surface through the gear combination when the drive motor rotates. The first actuator 15 is moved in a direction orthogonal to the axis of rotation of the drive motor.

In addition, the operation sequence of the main stage 10, the sub-stage 50 and the rotary table 40 may perform coarse movement, precise movement and rotation movement according to the precision, but precise movement and rotation by the signal of the controller It is more preferable that the movement is made at the same time.

Then, the variable stage having the operation as described above, when the measurement of the deviation of the parts placed for inspection by the reference sensor (not shown) is completed, the distance is input to the control unit (not shown) of the variable stage to move by the deviation. Power is supplied to the drive motor for a predetermined time.

At this time, the motor is a geared motor to be able to control the exact number of revolutions, as well as a speed reducer is installed inside the position is possible to quickly stop the precise control is possible.

By controlling the power supplied to the motor through the configuration as described above will be able to install the parts that require inspection at the correct position at all times.

According to the present invention as described above, by installing a plurality of drive motors in the same direction to minimize the constraints of the installation, the attitude control on the plane is always possible to precise process work, the angle of the stage is made easy By inspecting the inspected product in the correct direction at all times, it improves the reliability and enables the accurate movement of the product.

In addition, the present invention, the attitude control of large displacement in a certain plane as well as the precise control of the small displacement is implemented at the same time, the accurate positioning is quick, accurate movement is possible to improve the accuracy of the product.

While illustrated and described in connection with the embodiments of the present invention, it is common in the art that the present invention may be variously modified and changed without departing from the spirit or the scope of the invention provided by the following claims. I would like to clarify that those who have knowledge of this can easily know.

Claims (6)

Combination of the second plate and the first plate mounted on the upper and lower portions of the first actuator, respectively, the main stage to move the second plate in the X, Y direction with respect to the reference point when the drive motor rotates; A third actuator connected to an upper portion of the second plate and a second actuator connected to a driving motor to move the fourth plate in the X and Y directions about the third plate, wherein the fourth plate is X, The sub-stage to move in the Y direction Variable stage system, which is configured as a rotary table to enable precise movement in the θ direction connected as a drive motor embedded in the fourth plate, so that movement and rotation at a certain displacement are simultaneously performed. According to claim 1, The main stage, The first plate is provided with a first transfer block having a screw groove in the center of the first recess formed in the longitudinal direction of the upper surface, A second plate provided with a second transfer block having a screw groove in the center of the second recess formed in the longitudinal direction of the lower surface; As the first actuator to which the first and second transfer blocks are inserted into the upper and lower surfaces, respectively, operating holes are provided in the direction crossing each other so that the transfer screw to which the driving motor is connected is rotatably mounted. Variable stage system characterized by varying position The driving motor of claim 2, wherein the driving motor for operating the first actuator connected to the upper portion of the first plate is mounted in the same direction as the driving motor for operating the second plate, and the driving motor is inserted into the mounting hole. Variable stage system, characterized in that the first actuator is engaged with the guide block and the gear combination of the actuator to move the first actuator in a direction orthogonal to the axis of rotation of the drive motor. According to claim 1, wherein the substage, The third plate for installing the transfer screw to which the drive motor is connected to the center of the third recess formed in the longitudinal direction of the upper surface,  A fourth plate provided with a gear combination to which a driving motor is connected at the center of the fourth recess formed in the longitudinal direction of the lower surface; On the upper and lower surfaces, a rack actuator and a second screw actuator projecting in the direction in which the third and fourth transfer blocks intersect, respectively, to correspond to the rack gear and the transfer screw, which form a gear combination, respectively, and the fourth plate is a reference point when the driving motor is driven. Variable stage system, characterized in that for The gear combination according to claim 3 or 4, wherein the gear combination is any one selected from the group of bevel gear combinations, worm gear combinations, helical gear combinations, rack and pinion gear combinations, and enables power transmission in a right angle direction. Variable stage system The variable stage system according to any one of claims 1 to 4, wherein the drive motor further includes a rotation sensor on one side of the rotation shaft to sense the rotation speed.

Images