CN102744663A - Flat-rotating polishing fairing device - Google Patents
Flat-rotating polishing fairing device Download PDFInfo
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- CN102744663A CN102744663A CN2012102660079A CN201210266007A CN102744663A CN 102744663 A CN102744663 A CN 102744663A CN 2012102660079 A CN2012102660079 A CN 2012102660079A CN 201210266007 A CN201210266007 A CN 201210266007A CN 102744663 A CN102744663 A CN 102744663A
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Abstract
The invention discloses a flat-rotating polishing fairing device which comprises an eccentric rotation mechanism, a flat-rotating switching mechanism and a fairing disc. An output shaft of the eccentric rotation mechanism is in rotary motion around a rotation center. The flat-rotating switching mechanism comprises a flat-rotating shaft and a flat-rotating remaining assembly, the flat-rotating shaft can be sleeved on the output shaft in rotating mode, the flat-rotating remaining assembly is connected with the flat-rotating shaft and limits rotation of the flat-rotating shaft, and the fairing disc is connected with the flat-rotating shaft and flat-rotates along with the flat-rotating shaft. The flat-rotating polishing fairing device has the advantages of being simple and compact in structure, reliable to use, capable of achieving even abrasion of the fairing disc, improving matching degree of the fairing disc and a machined workpiece, being capable of effectively removing medium-high frequency errors caused by magnetorheological machining and good in fairing effect of a formed function, and simultaneously having certain shape correcting capacity and the like.
Description
Technical field
The present invention relates to the optical precision optical machinery technical field, be specifically related to a kind of moving polishing fairing device of flatting turn.
Background technology
Present optical system has proposed increasingly high requirement to the precision of optical element; In strictness control low frequency face shape error, also must effectively suppress the medium-high frequency error; To guarantee that the optical element surface smoothing does not have broken band; Low frequency, intermediate frequency and high frequency error all are nanoscale, the basic not damaged in inferior surface etc.For example in the heavy caliber light laser optical element of America NI F development; Wavelength influences focusing performance greater than the low frequency aberration of 33mm; Wavelength is in the hangover and the near field modulation of the intermediate frequency percent ripple error effect focal spot of 0.12-33mm, and wavelength has material impact less than the roughness error of 0.12mm to scattering.
The polishing of tradition small tool, magnetorheological polishing and ion beam polishing are to use several kinds of finishing methods comparatively widely now.Tradition small tool polishing efficiency is lower, and certainty is poor; Though magnetorheological polishing efficient and certainty are all very high and since used than machine component little the removal function of Duoing, tend to bring waviness error---the medium-high frequency error of small scale; The ion beam polishing precision is very high, the last one refine shape technology of Chang Zuowei, but very low of its efficient.
Therefore, single traditional optical processing method has been difficult to realize the high request of present optical element processing, must adopt new optical fabrication process.A kind of efficient ways is, at first utilizes magnetorheological big removal amount machining blanks minute surface, uses the small tool fairing then, re-uses magnetorheological refine, finally reaches required precision.In this technological process, the role that fairing device performer is important, its task is effectively to remove the medium-high frequency composition that magnetorheological processing brings, and can not destroy low frequency face shape.
Application number has been 200710055351.2 the disclosure of the Invention efficient numerically controlled glossing and the equipment of aperture aspherical optical element in a kind of, the rubbing head of wherein mentioning utilize four connecting rod balanced controls obtain to flat turn moving, complex structure; Rigidity is low; In addition, the drive motors axle load of this mechanism is big, and rotary inertia is big; Dynamic balancing is poor, can not high-speed cruising.Application number a kind of planetary wheel numerical control polishing removal function generator that has been 201010152031.0 disclosure of the Invention, this device adopts public rotation form, and the removal approximation to function pulse shape that obtains is difficult to satisfy the fairing requirement.
Summary of the invention
The technical problem that the present invention will solve is the deficiency that overcomes prior art, provide a kind of simple and compact for structure, use reliable, can realize the uniform wear of fairing dish, improve fairing dish and the processing work goodness of fit, can effectively remove medium-high frequency error that magnetorheological processing brings, the function of formation has good fairing effect and has the moving fairing device that polishes of flatting turn of certain modification capability simultaneously concurrently.
For solving the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of moving polishing fairing device of flatting turn; Comprise eccentvic rotation mechanism, flat turn manual converting mechanism and fairing dish; Gyration is done at the output shaft wraparound commentaries on classics center of said eccentvic rotation mechanism, and the said manual converting mechanism of flatting turn comprises that the axle peace rotation of flatting turn keeps assembly, said rotating being socketed on the said output shaft of axle of flatting turn; Said flatting turn moving keep assembly to be connected with the axle of flatting turn and limit a rotation of flatting turn, and said fairing dish is connected in flats turn axle upward and flat turn moving with a work of flatting turn.
As further improvement of the present invention:
The said moving assembly that keeps of flatting turn comprises first guide rail, second guide rail and the limit rotation hornblock that fixedly installs; Said first guide rail is connected on the limit rotation hornblock; Said second guide rail and the first guide rail arranged crosswise and be slidingly connected, the said axle of flatting turn is slidingly connected with second guide rail.
The said axle of flatting turn comprises sleeve and ball head, and said sleeve and said second guide rail are slidingly connected, and sleeve is connected on the said output shaft through bearing holder (housing, cover), and said ball head upper end and sleeve are affixed, and the bulb of said ball head lower end is connected with said fairing dish.
Said fairing dish is provided with a tubular connecting portion, and the sidewall of said tubular connecting portion is provided with vertically the draw-in groove of arranging, the bulb of said ball head lower end stretches in the tubular connecting portion, be connected with on the said bulb one pass draw-in groove spacer pin.
Said eccentvic rotation mechanism comprises rotary drive and offset adjusting part, and said output shaft is connected with rotary drive through the offset adjusting part and does gyration by the rotary drive driving.
Said offset adjusting part comprises dovetail groove slide unit that links to each other with rotary drive and the projection that links to each other with output shaft; Said projection is slidedly arranged in the dovetail groove of dovetail groove slide unit, and said dovetail groove slide unit is provided with the fastener hole that is used for through securing member locking projection.
Be provided with the panel that is used for the adjusting play between said projection and the dovetail groove, said projection is provided with the offset read text scale.
The said moving polishing fairing device of flatting turn also comprises relocation mechanism; Said relocation mechanism comprises substrate and slide plate; Said slide plate vertically is slidedly arranged on the substrate; Said eccentvic rotation mechanism, flat turn manual converting mechanism and fairing dish are installed on the slide plate, are provided with the pressure adjusting part between said substrate and the slide plate.
Said pressure adjusting part is low friction cylinder assembly, and said low friction cylinder assembly comprises the cylinder that is installed on the substrate, and said cylinder is connected with slide plate through floating junction.
Compared with prior art, the invention has the advantages that:
The present invention's moving polishing fairing device of flatting turn drives the moving motion of doing to flat turn of fairing dish and polishes; Make the form of the planetary motion of single rotation or public rotation than having the fairing dish now, can realize the uniform wear of fairing dish, improve the goodness of fit of fairing dish and processing work; And in the glossing chain, can effectively remove the medium-high frequency error that magnetorheological processing brings; Through verification experimental verification, the fairing dish is flatted turn and is formed a kind of approximate flat unimodal shape removal function when moving motion is polished, and this removal function has good fairing effect; Have certain modification capability simultaneously concurrently, can be good at satisfying the requirement of glossing chain.This flat turn moving polishing fairing apparatus structure compact, reliability height, and can adjust the moving offset of flatting turn.
Description of drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is the main TV structure sketch map (part) of the manual converting mechanism of flatting turn among the present invention.
Fig. 3 is A among Fig. 2-A sectional structure sketch map.
Fig. 4 is the moving perspective view that keeps assembly of flatting turn among the present invention.
Fig. 5 is the perspective view of fairing dish among the present invention.
Fig. 6 is the perspective view of floating junction among the present invention.
Fig. 7 is the mounting structure sketch map of low friction cylinder assembly among the present invention.
Fig. 8 is the side-looking structural representation of offset adjusting part among the present invention.
Fig. 9 is the plan structure sketch map of offset adjusting part among the present invention.
Figure 10 removes the X-Y scheme of function for the present invention adopts the actual measurement of Zygo interferometer.
Figure 11 is along the outline line sketch map of diameter B-B among Figure 10.
Each label is represented among the figure:
1, eccentvic rotation mechanism; 11, output shaft; 12, rotary drive; 13, offset adjusting part; 131, dovetail groove slide unit; 132, projection; 133, dovetail groove; 134, fastener hole; 135, offset read text scale; 136, panel; 3, the manual converting mechanism of flatting turn; 31, the axle of flatting turn; 311, sleeve; 312, ball head; 313, spacer pin; 32, the moving assembly that keeps of flatting turn; 321, limit rotation hornblock; 322, first guide rail; 323, second guide rail; 324, slide bar; 325, first slide block; 326, second slide block; 33, angular contact bearing; 34, bearing holder (housing, cover); 35, locking nut; 4, fairing dish; 41, tubular connecting portion; 411, draw-in groove; 412, annular groove; 5, relocation mechanism; 51, substrate; 52, slide plate; 53, cylinder; 54, floating junction; 55, main guide rail; 56, main cushion block; 57, slide block; 58, upper limit position block; 59, lower position block; 510, supporting seat.
The specific embodiment
Below will combine accompanying drawing and specific embodiment that the present invention is done further explain.
Fig. 1 to Figure 11 shows flat turn a kind of embodiment of moving polishing fairing device of the present invention; This fairing device comprises eccentvic rotation mechanism 1, flat turn manual converting mechanism 3 and fairing dish 4; Gyration is done at the output shaft 11 wraparound commentaries on classics centers of eccentvic rotation mechanism 1; The manual converting mechanism 3 of flatting turn comprises that axle 31 peaceful rotations of flatting turn keep assemblies 32, axle 31 rotating being socketed on the output shaft 11 of flatting turn, and the moving maintenance assembly 32 of flatting turn links to each other with the axle 31 of flatting turn and limits axle 31 rotations of flatting turn; It is moving that the output shaft 11 and moving maintenance assembly 32 actings in conjunction of flatting turn are flatted turn axle 31 works, and fairing dish 4 is connected on the axle 31 of flatting turn and flats turn moving with axle 31 works of flatting turn.Fairing dish 4 polishes with the moving motion of flatting turn; Make the form of the planetary motion of single rotation or public rotation than having fairing dish 4 now, can realize the uniform wear of fairing dish 4, improve the goodness of fit of fairing dish 4 and processing work; And in the glossing chain, can effectively remove the medium-high frequency error that magnetorheological processing brings; Through verification experimental verification, fairing dish 4 is flatted turn and is formed a kind of approximate flat unimodal shape removal function when moving motion is polished, and this removal function has good fairing effect; Have certain modification capability simultaneously concurrently; Can be good at satisfying the requirement of glossing chain,, can also reduce the generation of edge effect if when adopting triangle or 4 pairs on tetragonal fairing dish that the mirror finish of straight flange shape is arranged.Moving polishing fairing apparatus structure compact, the reliability height of flatting turn of the present invention, and can adjust the moving offset of flatting turn.
In the present embodiment; The moving assembly 32 that keeps of flatting turn comprises first guide rail 322, second guide rail 323 and the limit rotation hornblock 321 that fixedly installs; First guide rail 322 is fixed on the limit rotation hornblock 321; Second guide rail 323 is fixedly installed on the slide bar 324, and an end of slide bar 324 is slidingly connected through first slide block 325 and first guide rail 322 and makes first guide rail 322 and second guide rail, 323 cross-shaped layouts, and the axle 31 of flatting turn is slidingly connected through second slide block 326 and second guide rail 323.During work, the axle 31 of flatting turn is driven by eccentvic rotation mechanism 1 and does gyration, and simultaneously, the moving maintenance assembly 32 of flatting turn limits axle 31 rotations of flatting turn, moving the moving of flatting turn that flat turn axle 31 final work edge first guide rails 322 and second guide rail, 323 both directions slide and synthesized.
In the present embodiment, the axle 31 of flatting turn comprises sleeve 311 and ball head 312, and the sleeve 311 and second guide rail 323 are slidingly connected; And sleeve 311 is connected on the output shaft 11 through two bearing holder (housing, cover)s; Bearing adopts angular contact bearing 33, and as shown in Figure 3, two angular contact bearings 33 are installed in the sleeve 311 back-to-back; Adopt bearing holder (housing, cover) 34 to separate between the two; The inner ring of the angular contact bearing 33 of bearing holder (housing, cover) 34 1 ends is through the location of the shaft shoulder on the output shaft 11, and the inner ring of other end angular contact bearing 33 is through locking nut 35 location, and this fit can compensate the expanded by heating of output shaft 11.Ball head 312 upper ends and sleeve 311 are affixed; Ball head 312 lower ends are provided with bulb; Fairing dish 4 is provided with a tubular connecting portion 41, and bulb stretches in the endoporus of tubular connecting portion 41 and can in endoporus, rotate, and is provided with the conical surface that is used to adjust ball head 312 slewing areas in the endoporus.Also be provided with vertically the draw-in groove of arranging 411 on the sidewall of tubular connecting portion 41, be connected with on the bulb one pass draw-in groove 411 spacer pin 313, during assembling, on bulb, offer the through hole that is used to pass spacer pin 313, adopt interference fit between through hole and the spacer pin 313.Simultaneously, also be provided with annular groove 412 on the upper end outer wall of tubular connecting portion 41, the snap rings that can pack into and match in the annular groove 412 are used for spacer pin 313 is carried out spacing, prevent that fairing dish 4 from coming off from ball head 312.In actual application, also can spacer pin 313 be removed, to increase the free degree of fairing dish 4, further improve the fairing effect.
In the present embodiment, eccentvic rotation mechanism 1 comprises rotary drive 12 and offset adjusting part 13, and rotary drive 12 adopts the drive motors of adjustable rotating speed; It provides enough big rotating torque, and satisfies actual light along the requirement of needs adjusting rotating speed usually in the processing, and offset adjusting part 13 comprises dovetail groove slide unit 131 and projection 132; Projection 132 is slidedly arranged in the dovetail groove 133 of dovetail groove slide unit 131; Simultaneously, on dovetail groove slide unit 131, be provided with a plurality of fastener holes 134, fastener hole 134 is a screwed hole; The securing member (not shown) that matches of can from fastener hole 134, packing into is locked projection 132, prevents that both from sliding relatively.Dovetail groove slide unit 131 is provided with connecting bushing; The driving shaft of drive motors is inserted in the connecting bushing; And, on connecting bushing, offer the fastening screw pit simultaneously through the flat key transmitting torque, the screw that setting is complementary in the fastening screw pit carries out axial restraint to the driving shaft of drive motors; Prevent that output shaft 11 is connected on the projection 132.When rotary drive 12 drives 131 rotations of dovetail groove slide unit; Dovetail groove slide unit 131 drives projection 132 and rotates; And then make projection 132 be with the output shaft 11 moving motion of doing to flat turn; Regulate projection 132 sliding position of establishing in dovetail groove slide unit 131, can change the radius of gyration of output shaft 11, and then change the radius of gyration of fairing dish 4.
Further, on projection 132, be provided with offset read text scale 135, the convenient cunning of observing and adjust projection 132 is established the position.
Further, also between projection 132 and dovetail groove 133, be provided with panel 136, when assembling, can regulate the gap between projection 132 and the dovetail groove 133, realize the adjusting of degree of tightness between the two through reconditioning panel 136.After panel 136 is set, the destruction that can also protect the surface of dovetail groove slide unit 131 and projection 132 not receive securing member.
In the present embodiment, also comprise relocation mechanism 5, relocation mechanism 5 comprises substrate 51 and slide plate 52; Substrate 51 is provided with two main guide rails of vertically arranging 55, and each main guide rail 55 is installed on the substrate 51, during installation through a main cushion block 56 respectively; Need to beat the depth of parallelism that table is proofreaied and correct two main cushion blocks 56; Be shaped on positioning step on the main cushion block 56, main guide rail 55 is positioned, be used for guaranteeing the depth of parallelism of main guide rail 55; Slide plate 52 is slidedly arranged on two main guide rails 55 through four slide blocks 57, four slide blocks 57 is set makes whole relocation mechanism 5 have higher rigidity.Eccentvic rotation mechanism 1, flat turn manual converting mechanism 3 and fairing dish 4 are installed on the slide plate 52, and slide plate 52 can be with eccentvic rotation mechanism 1, flat turn manual converting mechanism 3 and fairing dish 4 fluctuate along main guide rail 55.
Also be provided with the pressure adjusting part that is used to control fairing dish 4 operating pressures (being applied to the pressure on the workpiece during work) between substrate 51 and the slide plate 52.This pressure adjusting part adopts low friction cylinder assembly; Low friction cylinder assembly comprises cylinder 53; Cylinder 53 is installed on the substrate 51 through supporting seat 510, and its expansion link is connected with slide plate 52 through floating junction 54, can reduce and control the frictional resistance of slide plate 52 when main guide rail 55 fluctuates.Bearing, conical surface equal angles adjusting device are installed in the floating junction 54, can guarantee that relative floating junction 54 internal threads of floating junction 54 external screw threads have certain pendulum angle and offset, thereby adapt to the site error of cylinder 53 in installation.Cylinder 53 can be bestowed pulling force upwards to slide plate 52; This pulling force can balance part floating part (floating part is slide plate 52 and is installed in other accessories such as the eccentvic rotation mechanism 1 on the slide plate 52, the manual converting mechanism 3 of flatting turn, fairing dish 4) gravity, reach and reduce fairing dish 4 and bestow purpose at the processing work upward pressure; Or slide plate 52 bestowed downward pressure; The pressure that fairing this moment dish 4 is applied on the processing work is the gravity of floating part and the pressure sum that 53 pairs of slide plates 52 of cylinder are bestowed; Reach and increase the purpose that fairing dish 4 is bestowed at the processing work upward pressure; Through the push-pull effort of adjustment cylinder 53, the pressure that finally can make fairing dish 4 be applied to processing work keeps constant.In addition, also be provided with upper limit position block 58 and lower position block 59 in a side of main guide rail 55 on the substrate 51, be used for limiting slide plate 52 and on substrate 51, slide up and down stroke, upper limit position block 58 must be less than the flexible stroke of cylinder 53 with the sliding stroke of lower position block 59 restrictions.The present invention adopts whole form pressurization of floating, and makes whole system insensitive to the alignment error on the vertical direction, is easy to assembling.
The present invention accomplishes process through following step:
Step 1: substrate 51 is installed on the Z axle that lathe moves up and down, overall optical can be moved under the drive of lathe along device.The driver that connects drive motors connects the gas circuit of hanging down the friction cylinder assembly simultaneously;
Step 2:, regulate the air pressure size of gas circuit according to processing request.If required tonnage less than the deadweight of floating part, then makes cylinder 53 apply the pulling force of suitable size, otherwise, if required tonnage greater than the deadweight of floating part, then makes cylinder 53 apply the pressure of suitable size;
Step 3: regulate offset adjusting part 13 according to processing request; Loosening fasteners; Move projection 132 and establish the position to regulate its cunning in dovetail groove 133, the amount of movement of projection 132 can read according to the offset read text scale 135 on the projection 132, move accomplish after tightening fastener parts again;
Step 4: the fairing dish of making 4 is installed on the ball head 312;
Step 5: move the machine tool motion axle, make fairing dish 4 drop on specified point, and apply tonnage;
Step 6: set the rotating speed of drive motors, the operation procedure is opened drive motors simultaneously, beginning fairing processing.
Above-mentioned is preferred embodiment of the present invention, is not the present invention is done any pro forma restriction.Though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention.Any those of ordinary skill in the art, under the situation that does not break away from technical scheme scope of the present invention, all the technology contents of above-mentioned announcement capable of using is made many possible changes and modification to technical scheme of the present invention, or is revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical scheme of the present invention, all should drop in the scope of technical scheme protection of the present invention any simple modification, equivalent variations and modification that above embodiment did according to technical spirit of the present invention.
Claims (10)
1. moving polishing fairing device of flatting turn; It is characterized in that: comprise eccentvic rotation mechanism (1), the manual converting mechanism of flatting turn (3) and fairing dish (4); Gyration is done at output shaft (11) the wraparound commentaries on classics center of said eccentvic rotation mechanism (1); The said manual converting mechanism of flatting turn (3) comprises that axle (31) the peace rotation of flatting turn keeps assembly (32); Saidly flat turn that (31) are rotating is socketed on the said output shaft (11) for axle, said flatting turn movingly keeps assembly (32) to be connected with the axle (31) of flatting turn and limit axle (31) rotation of flatting turn, and said fairing dish (4) is connected in flats turn axle (31) upward and flat turn moving with (a 31) work of flatting turn.
2. the moving polishing fairing device of flatting turn according to claim 1; It is characterized in that: the said moving assembly (32) that keeps of flatting turn comprises first guide rail (322), second guide rail (323) and the limit rotation hornblock (321) that fixedly installs; Said first guide rail (322) is connected on the limit rotation hornblock (321); Said second guide rail (323) and first guide rail (322) arranged crosswise and be slidingly connected, the said axle (31) of flatting turn is slidingly connected with second guide rail (323).
3. the moving polishing fairing device of flatting turn according to claim 2; It is characterized in that: the said axle (31) of flatting turn comprises sleeve (311) and ball head (312); Said sleeve (311) is slidingly connected with said second guide rail (323); And sleeve (311) is connected on the said output shaft (11) through bearing holder (housing, cover), and said ball head (312) upper end is affixed with sleeve (311), and the bulb of said ball head (312) lower end is connected with said fairing dish (4).
4. the moving polishing fairing device of flatting turn according to claim 3; It is characterized in that: said fairing dish (4) is provided with a tubular connecting portion (41); The sidewall of said tubular connecting portion (41) is provided with the draw-in groove of arranging vertically (411); The bulb of said ball head (312) lower end stretches in the tubular connecting portion (41), be connected with on the said bulb one pass draw-in groove (411) spacer pin (313).
5. according to claim 1 or 2 or the 3 or 4 described moving polishing fairing devices of flatting turn; It is characterized in that: said eccentvic rotation mechanism (1) comprises rotary drive (12) and offset adjusting part (13), and said output shaft (11) is connected with rotary drive (12) through offset adjusting part (13) and does gyration by rotary drive (12) driving.
6. the moving polishing fairing device of flatting turn according to claim 5; It is characterized in that: said offset adjusting part (13) comprises dovetail groove slide unit (131) that links to each other with rotary drive (12) and the projection (132) that links to each other with output shaft (11); Said projection (132) is slidedly arranged in the dovetail groove (133) of dovetail groove slide unit (131), and said dovetail groove slide unit (131) is provided with the fastener hole (134) that is used for through securing member locking projection (132).
7. the moving polishing fairing device of flatting turn according to claim 6; It is characterized in that: be provided with the panel (136) that is used for the adjusting play between said projection (132) and the dovetail groove (133), said projection (132) is provided with offset read text scale (135).
8. according to claim 1 or 2 or the 3 or 4 described moving polishing fairing devices of flatting turn; It is characterized in that: the said moving polishing fairing device of flatting turn also comprises relocation mechanism (5); Said relocation mechanism (5) comprises substrate (51) and slide plate (52); Said slide plate (52) vertically is slidedly arranged on the substrate (51); Said eccentvic rotation mechanism (1), the manual converting mechanism of flatting turn (3) and fairing dish (4) are installed on the slide plate (52), are provided with the pressure adjusting part between said substrate (51) and the slide plate (52).
9. the moving polishing fairing device of flatting turn according to claim 7; It is characterized in that: the said moving polishing fairing device of flatting turn also comprises relocation mechanism (5); Said relocation mechanism (5) comprises substrate (51) and slide plate (52); Said slide plate (52) vertically is slidedly arranged on the substrate (51); Said eccentvic rotation mechanism (1), the manual converting mechanism of flatting turn (3) and fairing dish (4) are installed on the slide plate (52), are provided with the pressure adjusting part between said substrate (51) and the slide plate (52).
10. the moving polishing fairing device of flatting turn according to claim 9; It is characterized in that: said pressure adjusting part is low friction cylinder assembly; Said low friction cylinder assembly comprises the cylinder (53) that is installed on the substrate (51), and said cylinder (53) is connected with slide plate (52) through floating junction (54).
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| CN201210266007.9A CN102744663B (en) | 2012-07-30 | 2012-07-30 | Flat-rotating polishing fairing device |
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| CN201210266007.9A CN102744663B (en) | 2012-07-30 | 2012-07-30 | Flat-rotating polishing fairing device |
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| CN104290004A (en) * | 2014-10-17 | 2015-01-21 | 天津大学 | Robotic planetary polishing unit for polishing of large-diameter aspheric surfaces |
| CN105182459A (en) * | 2015-07-13 | 2015-12-23 | 中国科学院上海光学精密机械研究所 | Meter-level large diameter polarizer full-band surface shape processing method |
| CN106112743A (en) * | 2016-06-29 | 2016-11-16 | 重庆大学 | A kind of surface polishing device optimized towards cavitation performance |
| CN107186572A (en) * | 2017-06-09 | 2017-09-22 | 中国科学院西安光学精密机械研究所 | A kind of aspherical optical element burnishing device |
| CN108714852A (en) * | 2018-05-31 | 2018-10-30 | 长光卫星技术有限公司 | A kind of combined type executing agency for being used for numerical control, intelligently polishing |
| CN109664178A (en) * | 2018-12-14 | 2019-04-23 | 天津大学 | Change the polishing mechanism of eccentricity value and transmission ratio-variable by eccentric adjusting block |
| CN112677041A (en) * | 2020-12-29 | 2021-04-20 | 中国科学院长春光学精密机械与物理研究所 | Flat rotating mechanism |
| CN113275998A (en) * | 2021-06-17 | 2021-08-20 | 湖南宇环精密制造有限公司 | Rubbing and polishing mechanism |
| CN117260516A (en) * | 2023-11-22 | 2023-12-22 | 北京特思迪半导体设备有限公司 | Eccentric driving mechanism and polishing machine |
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| CN104290004A (en) * | 2014-10-17 | 2015-01-21 | 天津大学 | Robotic planetary polishing unit for polishing of large-diameter aspheric surfaces |
| CN105182459A (en) * | 2015-07-13 | 2015-12-23 | 中国科学院上海光学精密机械研究所 | Meter-level large diameter polarizer full-band surface shape processing method |
| CN106112743A (en) * | 2016-06-29 | 2016-11-16 | 重庆大学 | A kind of surface polishing device optimized towards cavitation performance |
| CN106112743B (en) * | 2016-06-29 | 2018-02-13 | 重庆大学 | A kind of surface polishing device towards cavitation performance optimization |
| CN107186572B (en) * | 2017-06-09 | 2023-04-11 | 中国科学院西安光学精密机械研究所 | Aspheric surface optical element polishing device |
| CN107186572A (en) * | 2017-06-09 | 2017-09-22 | 中国科学院西安光学精密机械研究所 | A kind of aspherical optical element burnishing device |
| CN108714852A (en) * | 2018-05-31 | 2018-10-30 | 长光卫星技术有限公司 | A kind of combined type executing agency for being used for numerical control, intelligently polishing |
| CN109664178A (en) * | 2018-12-14 | 2019-04-23 | 天津大学 | Change the polishing mechanism of eccentricity value and transmission ratio-variable by eccentric adjusting block |
| CN109664178B (en) * | 2018-12-14 | 2020-10-16 | 天津大学 | Polishing mechanism with variable transmission ratio and eccentric value changed through eccentric adjusting block |
| CN112677041A (en) * | 2020-12-29 | 2021-04-20 | 中国科学院长春光学精密机械与物理研究所 | Flat rotating mechanism |
| CN113275998A (en) * | 2021-06-17 | 2021-08-20 | 湖南宇环精密制造有限公司 | Rubbing and polishing mechanism |
| CN117260516A (en) * | 2023-11-22 | 2023-12-22 | 北京特思迪半导体设备有限公司 | Eccentric driving mechanism and polishing machine |
| CN117260516B (en) * | 2023-11-22 | 2024-03-08 | 北京特思迪半导体设备有限公司 | Eccentric driving mechanism and polishing machine |
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| CN102744663B (en) | 2014-09-17 |
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