CN117260516A

CN117260516A - Eccentric driving mechanism and polishing machine

Info

Publication number: CN117260516A
Application number: CN202311561513.5A
Authority: CN
Inventors: 陈艳东; 周惠言; 寇明虎; 蒋继乐
Original assignee: Beijing Tesidi Semiconductor Equipment Co ltd
Current assignee: Beijing Tesidi Semiconductor Equipment Co ltd
Priority date: 2023-11-22
Filing date: 2023-11-22
Publication date: 2023-12-22
Anticipated expiration: 2043-11-22
Also published as: CN117260516B

Abstract

The invention provides an eccentric driving mechanism and a polishing machine, which belong to the technical field of semiconductor equipment, wherein the eccentric driving mechanism comprises: the device comprises a fixed shaft, a sliding sleeve, a rotating sleeve, an adjusting seat and a connecting rod. The center of the fixed shaft is penetrated with a driving piece, and the sliding sleeve is sleeved outside the fixed shaft and is connected with the driving piece through a slot; the rotating sleeve is rotatably arranged on the sliding sleeve; the adjusting seat is arranged on the fixed shaft, the adjusting seat is provided with a guide structure, the guide direction of the guide structure is not parallel to the axis of the fixed shaft, and the guide structure is provided with an output shaft eccentrically arranged with the fixed shaft; one end of the connecting rod is rotationally connected to the rotating sleeve, and the other end of the connecting rod is rotationally connected to the output shaft; according to the eccentric driving mechanism, the output shaft can be driven to eccentrically rotate relative to the fixed shaft through rotation of the rotating sleeve, and the eccentricity of the output shaft relative to the fixed shaft can be adjusted through up-and-down sliding of the rotating sleeve, so that the eccentric driving mechanism is suitable for processing a plurality of wafers with different sizes.

Description

Eccentric driving mechanism and polishing machine

Technical Field

The invention relates to the technical field of semiconductor equipment, in particular to an eccentric driving mechanism and a polishing machine.

Background

Since the advent of Chemical Vapor Deposition (CVD) diamond production technology in the fifth sixty of the 20 th century and the rapid development in the 80 th century, it has become possible to explore and apply the excellent properties of diamond materials. First, diamond, as a wide band gap semiconductor material, can be used to fabricate power devices, photovoltaic devices, diamond-based detectors and sensors, microelectromechanical and nanoelectromechanical devices, semiconductor diamond heterojunction, and the like. And secondly, the heat transfer mechanism of the diamond is that the heat transfer is carried out through lattice vibration, and the quantum energy of the vibration generated by carbon atoms is large, so that the diamond is the substance with the highest thermal conductivity in the nature, and has great application potential in the field of heat dissipation.

When diamond is used as a wafer substrate, it is required that the surface roughness Ra is less than 3nm while having a surface type accuracy of submicron order, that is, the diamond surface is required to reach an ultra-smooth, ultra-flat and defect-free level, and for this reason, it is required to polish the diamond surface using a diamond polisher. In the related art, the diamond polishing machine comprises a plurality of pressure heads, polishing discs and an eccentric driving mechanism, wherein the pressure heads press the diamond on the polishing discs, and the eccentric driving mechanism drives the polishing discs to eccentrically rotate so as to polish the diamond.

In the related art, the eccentric distance of the eccentric driving mechanism is fixed, so that the eccentric rotation form of the polishing disc is single, the diamond polishing disc does not have the functions of process replacement adjustment or process debugging, and diamond wafers with different sizes cannot be processed.

Disclosure of Invention

Therefore, the technical problem to be solved by the invention is to overcome the defect that the eccentricity of the eccentric driving mechanism in the prior art cannot be adjusted, so as to provide the eccentric driving mechanism.

In order to solve the above technical problems, the present invention provides an eccentric driving mechanism, comprising:

the fixed shaft is provided with a driving piece in a penetrating way at the center, and a slot extending along the axial direction is formed in the side wall;

the sliding sleeve is sleeved outside the fixed shaft and is connected with the driving piece through the slot;

the rotating sleeve is rotatably arranged on the sliding sleeve;

the adjusting seat is arranged on the fixed shaft, the adjusting seat is provided with a guide structure, the guide direction of the guide structure is not parallel to the axis of the fixed shaft, and the guide structure is provided with an output shaft eccentrically arranged with the fixed shaft;

one end of the connecting rod is rotationally connected to the rotating sleeve, the other end of the connecting rod is rotationally connected to the output shaft, and the output shaft is driven to eccentrically rotate when the rotating sleeve rotates; when the driving piece drives the rotating sleeve to slide along the groove, the connecting rod drives the output shaft to slide on the guide structure, so that the eccentricity between the fixed shaft and the output shaft is adjusted.

Optionally, the rotating sleeve comprises two parts which are slidably arranged along the axis direction of the fixed shaft, wherein a first rotating part is installed on the fixed shaft through a bearing, a second rotating part is in limiting connection with the first rotating part in the circumferential direction, so that the second rotating part can slide along the axis direction of the fixed shaft relative to the first rotating part, and the first rotating part is used for being connected with a rotary driving piece, so that the second rotating part is driven to rotate through the first rotating part.

Optionally, the first rotating part is sleeved outside the second rotating part, a first limiting groove extending along the axis direction of the fixed shaft is arranged on the inner side wall of the first rotating part, a second limiting groove corresponding to the first limiting groove is arranged on the outer side wall of the second rotating part, and a guide key is arranged between the first limiting groove and the second limiting groove.

Optionally, a first driving wheel for connecting with the rotation driving piece is arranged on the first rotation part.

Optionally, the driving member includes: the screw rod and the screw nut are rotatably arranged in the fixed shaft, the bottom end of the screw rod extends out of the fixed shaft and then is connected with the adjusting driving piece, and the screw nut is in threaded connection with the screw rod and is connected with the sliding sleeve.

Optionally, a second driving wheel used for being connected with the adjusting driving piece is connected to the bottom end of the screw rod.

Optionally, the guiding structure comprises: the guide rod extends towards the direction perpendicular to the axis of the fixed shaft, the sliding block is arranged on the guide rod in a sliding mode, and the output shaft is mounted on the sliding block.

Optionally, the guide rod is sleeved with a first elastic member, and the first elastic member has an elastic force for driving the sliding block to deflect towards one end, so that the connecting rod is kept inclined.

Optionally, the guide rod has at least two guide rods arranged in parallel.

Optionally, the connecting rod is provided with two symmetrically arranged at two sides of the adjusting seat.

Optionally, a compressing mechanism is connected to the upper end of the output shaft, and the output shaft is fixed on the shaking plate through the compressing mechanism.

Optionally, the hold-down mechanism is including sliding sleeve joint in last fixing base and the lower fixing base on the output shaft, go up the fixing base with the butt has the second elastic component down between the fixing base, the below of fixing base is connected down rock the board, the upper end of output shaft is connected with first thrust bearing, first thrust bearing with go up the fixing base and be connected, the upper end of output shaft still has the pressfitting portion that is used for the butt first thrust bearing.

Optionally, a needle bearing is arranged between the output shaft and the shaking plate.

The invention also provides a polishing machine, comprising: the eccentric driving mechanism comprises a frame, a driving shaft and any one of the above schemes, wherein the fixing shaft of the eccentric driving mechanism is connected to the frame, the driving shaft is arranged on a shaking plate and drives the shaking plate to shake through an output shaft of the eccentric driving mechanism, and a polishing disc is connected to the driving shaft and used for polishing products through the polishing disc.

The technical scheme of the invention has the following advantages:

1. according to the eccentric driving mechanism provided by the invention, the output shaft can be driven to eccentrically rotate relative to the fixed shaft through the rotation of the rotating sleeve, and the eccentricity of the output shaft relative to the fixed shaft can be adjusted through the up-and-down sliding of the rotating sleeve, so that the eccentric driving mechanism is suitable for processing a plurality of wafers with different sizes.

2. According to the eccentric driving mechanism provided by the invention, the first rotating part of the rotating sleeve is arranged on the fixed shaft through the bearing, so that the rotating sleeve and the fixed shaft keep concentric rotation, and when the rotating sleeve drives the adjusting seat to rotate, the eccentric distance of the output shaft on the adjusting seat relative to the fixed shaft can be more accurate.

3. According to the eccentric driving mechanism provided by the invention, the first rotating part and the second rotating part of the rotating sleeve are limited in the circumferential direction through the matching of the limiting groove and the guide key and can slide relatively in the axial direction, so that the first rotating part and the second rotating part of the rotating sleeve are more convenient to process.

4. According to the eccentric driving mechanism provided by the invention, the driving piece axially drives the sliding sleeve through the cooperation of the screw rod and the screw nut, specifically, the screw nut is enabled to move in the axis direction in the fixed shaft through rotating the screw rod, so that the sliding sleeve connected with the screw nut is driven to slide along the axis of the fixed shaft, and the axial sliding distance of the sliding sleeve can be adjusted more finely, and the accuracy of eccentric distance adjustment of the output shaft is improved.

5. The polishing machine provided by the invention has all the advantages due to the adoption of the eccentric driving mechanism.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a perspective view of one embodiment of a polisher provided in an example of the present invention;

FIG. 2 is a front cross-sectional view of FIG. 1;

FIG. 3 is a perspective view of one embodiment of an eccentric drive mechanism provided in an embodiment of the present invention;

FIG. 4 is a front view of FIG. 3;

FIG. 5 is a cross-sectional view of FIG. 4;

FIG. 6 is a left side view of FIG. 3;

FIG. 7 is a cross-sectional view of FIG. 6;

FIG. 8 is an amplitude curve data of a polisher in one state according to an embodiment of the present invention;

FIG. 9 is an illustration of amplitude profile data for a polisher in another state according to an embodiment of the present invention.

Reference numerals illustrate:

1. a frame; 2. a drive shaft; 3. shaking the plate; 4. polishing disk; 5. a rotary driving member; 6. adjusting the driving member; 7. a fixed shaft; 9. a screw rod; 10. a nut; 11. a sliding sleeve; 12. a rotating sleeve; 13. a first rotating part; 14. a second rotating part; 15. an adjusting seat; 16. a slide block; 17. a guide rod; 18. a first elastic member; 19. an output shaft; 20. a connecting rod; 21. a guide key; 22. a first driving wheel; 23. a second driving wheel; 24. an upper fixing seat; 25. a lower fixing seat; 26. a second elastic member; 27. a first thrust bearing; 28. a pressing part; 29. needle roller bearings; 30. and a second thrust bearing.

Detailed Description

The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.

Example 1

The eccentric driving mechanism is used for polishing the diamond wafer. Specifically, the eccentric rotation driving device is used for eccentrically and rotationally driving the polishing disk 4 of the polishing machine.

As shown in fig. 1 and 2, a specific implementation of the eccentric driving mechanism provided in this embodiment applied to the polishing machine is provided. The polishing machine includes: the polishing device comprises a frame 1, wherein a driving shaft 2 is arranged on the frame 1 in a penetrating manner, the driving shaft 2 is connected to an output shaft 19 of an eccentric driving mechanism through a shaking plate 3, the output shaft 19 of the eccentric driving mechanism drives the shaking plate 3 to shake, and a polishing disc 4 is connected to the driving shaft 2 and used for polishing a wafer through the polishing disc 4.

As shown in fig. 1 and 2, in this embodiment, two symmetrical eccentric driving mechanisms are installed on the frame 1, a rotary driving member 5 and an adjusting driving member 6 are installed on the frame 1, the rotary driving member 5 is connected with a rotating sleeve 12 of the two eccentric driving mechanisms through a transmission belt, and the adjusting driving member 6 is connected with driving members of the two eccentric driving mechanisms through a transmission belt. That is, the rotary driving member 5 is used to drive the rotation sleeves 12 of the two eccentric driving mechanisms to perform synchronous rotation through the transmission belt, so that the two eccentric driving mechanisms simultaneously perform eccentric driving on the wobble plate 3; the adjusting driving piece 6 is used for driving pieces of the two eccentric driving mechanisms to synchronously move through a transmission belt, so that the two eccentric driving mechanisms synchronously adjust the eccentricity.

Of course, this is not limiting, and the above is set based on the drive of the eccentric drive mechanism by adjusting the eccentricity in a rotational manner. In some embodiments, the driving member of the eccentric driving mechanism adjusts the eccentricity in a telescopic manner, and in this case, the adjusting driving member 6 may be an electric push rod, a telescopic cylinder, or the like.

As shown in fig. 3 to 7, a specific implementation manner of the eccentric driving mechanism provided in this embodiment includes: the fixed shaft 7, the sliding sleeve 11, the rotating sleeve 12, the adjusting seat 15 and the connecting rod 20. A driving piece is arranged in the center of the fixed shaft 7 in a penetrating way, and a slot extending along the axial direction is formed in the side wall of the fixed shaft 7; the sliding sleeve 11 is sleeved outside the fixed shaft 7 and is connected with the driving piece through the slot; the rotating sleeve 12 is rotatably mounted on the sliding sleeve 11; the adjusting seat 15 is arranged on the fixed shaft 7, the adjusting seat 15 is provided with a guide structure, the guide direction of the guide structure is not parallel to the axis of the fixed shaft 7, and the guide structure is provided with an output shaft 19 eccentrically arranged with the fixed shaft 7; one end of the connecting rod 20 is rotatably connected to the rotating sleeve 12, the other end of the connecting rod 20 is rotatably connected to the output shaft 19, and the output shaft 19 is driven to eccentrically rotate when the rotating sleeve 12 rotates; when the driving piece drives the rotating sleeve 12 to slide along the slot, the connecting rod 20 drives the output shaft 19 to slide on the guiding structure, so that the eccentricity between the fixed shaft 7 and the output shaft 19 is adjusted.

The driving member is disposed in the fixed shaft 7 and is configured to drive the sliding sleeve 11 along the axial direction of the fixed shaft 7, and specifically, the driving member may be directly driven by a linear movement manner or may be indirectly driven by a rotation manner. For example, the driving member may be a linear driving member such as an electric push rod, an oil cylinder or an air cylinder, and the driving end of the driving member is directly connected to the sliding sleeve 11, so as to drive the sliding sleeve 11 to move along the axial direction of the fixed shaft 7; or, the driving member may be a screw rod 9, a nut 10 is screwed on the screw rod 9, the nut 10 is connected with the sliding sleeve 11, and the screw rod 9 of the driving member drives the nut 10 to move along the axis of the fixed shaft 7 through rotation, so as to drive the sliding sleeve 11 to move along the axis direction of the fixed shaft 7.

In the present embodiment, the side wall of the fixed shaft 7 is provided with a groove extending in the axial direction for preventing the sliding of the connection point between the sliding sleeve 11 and the driving member, and for preventing the sliding sleeve 11 from rotating relative to the fixed shaft 7. That is, by the arrangement of the grooves, the sliding sleeve 11 is formed to slide along the axis of the fixed shaft 7 to the guide groove. In addition, as an alternative embodiment, the inside of the sliding sleeve 11 may be provided with an inner polygon, the outer wall of the fixed shaft 7 may be provided with an outer polygon matched with the sliding sleeve 11, and the sliding sleeve 11 may be provided on the fixed shaft 7 and then may be prevented from rotating naturally, so that the sliding sleeve may only slide along the axial direction of the fixed shaft 7.

In the present embodiment, the guide direction of the guide structure is perpendicular to the axis of the fixed shaft 7, so that the eccentricity of the output shaft 19 on the guide structure can be adjusted more quickly. Of course, this is not limited thereto, and the guiding direction of the guiding structure may be other directions not parallel to the axis of the fixed shaft 7, for example, may be inclined upward or downward with respect to the axis of the fixed shaft 7, and the distance for adjusting the eccentricity of the output shaft 19 on the guiding structure may be extended, thereby improving the accuracy of the eccentricity adjustment of the output shaft 19.

According to the eccentric driving mechanism provided by the embodiment, the output shaft 19 can be driven to eccentrically rotate relative to the fixed shaft 7 through the rotation of the rotating sleeve 12, and the eccentricity of the output shaft 19 relative to the fixed shaft 7 can be adjusted through the up-and-down sliding of the rotating sleeve 12, so that the eccentric driving mechanism is suitable for processing a plurality of wafers with different sizes.

As shown in fig. 3 to 7, in the eccentric driving mechanism provided in this embodiment, the rotating sleeve 12 includes two parts slidably disposed along the axial direction of the fixed shaft 7, wherein the first rotating part 13 is mounted on the fixed shaft 7 through a bearing, and the second rotating part 14 is in limiting connection with the first rotating part 13 in the circumferential direction, so that the second rotating part 14 can slide along the axial direction of the fixed shaft 7 relative to the first rotating part 13, and the first rotating part 13 is used for being connected with the rotary driving member 5, so that the first rotating part 13 drives the second rotating part 14 to rotate. Specifically, the first rotating portion 13 is sleeved outside the second rotating portion 14, a first limiting groove extending along the axial direction of the fixed shaft 7 is formed in the inner side wall of the first rotating portion 13, a second limiting groove corresponding to the first limiting groove is formed in the outer side wall of the second rotating portion 14, and a guide key 21 is arranged between the first limiting groove and the second limiting groove. During assembly, the guide key 21 is embedded into the second limit groove of the second rotating part 14 of the rotating sleeve 12, then the first rotating part 13 of the rotating sleeve 12 is sleeved on the second rotating part 14, and the first limit groove of the first rotating part 13 is matched with the exposed part of the guide key 21, so that circumferential limit matching of the first rotating part 13 and the second rotating part 14 of the rotating sleeve 12 is realized. Of course, this is not limitative, and other structures may be adopted for the circumferential limitation between the first rotating portion 13 and the second rotating portion 14, for example, the first rotating portion 13 may have an inner polygonal structure, the second rotating portion 14 may have an outer polygonal structure, and the circumferential limitation between the first rotating portion 13 and the second rotating portion 14 may be achieved by sleeving the inner polygonal structure of the first rotating portion 13 on the outer polygonal structure of the second rotating portion 14.

As shown in fig. 3 and 5, the first rotating portion 13 of the rotating sleeve 12 is provided with a first driving wheel 22 for connecting with the rotary driving member 5, and the first driving wheel 22 is provided with external teeth adapted to cooperate with a driving belt, and through the external teeth and the driving belt synchronous cooperation, the first driving wheel 22 can be driven to rotate synchronously through the driving belt. In addition, as an alternative embodiment, the first driving wheel 22 may also be a light wheel structure, and by means of the light wheel structure cooperating with the driving belt, the rotation driving of the first driving wheel 22 may also be achieved.

As shown in fig. 5 and 7, in the eccentric driving mechanism provided in this embodiment, the driving member includes: the screw rod 9 and the screw 10, the screw rod 9 is rotatably arranged in the fixed shaft 7, the bottom end of the screw rod 9 extends out of the fixed shaft 7 and is connected with the adjusting driving piece 6, and the screw 10 is in threaded connection with the screw rod 9 and is connected with the sliding sleeve 11. Specifically, the two ends of the screw rod 9 are respectively installed in the fixed shaft 7 through bearings, so that the screw rod 9 can stably rotate in the fixed shaft 7. The nut 10 is circumferentially limited in the fixed shaft 7, and when the screw rod 9 is rotated, the nut 10 can be driven to move along the axial direction of the fixed shaft 7, so as to drive the sliding sleeve 11 connected with the axial line to move. Specifically, the side wall of the fixed shaft 7 is provided with a slot extending along the axial direction, the sliding sleeve passes through the slot when connected with the screw 10, and the slot is used for limiting the rotation of the sliding sleeve and the screw 10, so that the screw 10 can only move along the axial direction of the fixed shaft 7 under the rotation of the screw rod 9. Further, the slots have two symmetrical slots, which can stably and symmetrically limit the circumference of the nut 10.

As shown in fig. 7, the sliding sleeve 11 and the nut 10 may be connected by a clamping connection, a locking connection by a fastener, or a connection by a screw structure.

As shown in fig. 3 and 5, the bottom end of the screw rod 9 is connected with a second driving wheel 23 connected with the adjusting driving member 6, the second driving wheel 23 is provided with external teeth suitable for synchronous transmission with a driving belt, and the external teeth are matched with the driving belt, so that the second driving wheel 23 can be synchronously transmitted through the driving belt.

As shown in fig. 3 and 4, in the eccentric driving mechanism provided in this embodiment, the guiding structure includes: the guide rod 17 and the slider 16, the slider 16 is slidably arranged on the guide rod 17, and the output shaft 19 is mounted on the slider 16. In particular, the guide bar 17 is arranged perpendicular to the axis of the fixed shaft 7, and the slider 16 slides on the guide bar 17 to adjust the eccentricity with the axis of the fixed shaft 7. Further, the guide rod 17 is sleeved with a first elastic member 18, and the first elastic member 18 has an elastic force for driving the slider 16 to deflect towards one end, so that the connecting rod 20 is kept inclined. By providing the first elastic member 18, the slide 16 is prevented from sliding to a dead point position concentric with the axis of the fixed shaft 7, and the slide 16 can slide only on one side of the axis of the fixed shaft 7. Of course, other ways of blocking the slider 16 are possible, for example, by blocking the slider 16 by a stopper against sliding or the like toward the other side of the axis of the fixed shaft 7. In the present embodiment, the guide rods 17 are provided in two parallel, and the stability of guiding the slider 16 can be improved by the plurality of guide rods 17. The two connecting rods 20 are symmetrically arranged at two sides of the adjusting seat 15, the sliding block 16 is driven to move along the guide rod 17 through the two connecting rods 20 at the same time, the stability of driving the sliding block 16 can be improved, and the adjusting seat 15 is driven to rotate through the combined action of the two connecting rods 20, so that the stability of rotating the adjusting seat 15 can be improved. In this embodiment, the output shaft 19 and the slider 16 are integrally formed, which is not limited, and in some embodiments, the output shaft 19 and the slider 16 may be formed separately and then connected, and the specific connection may be a welded connection or a threaded connection.

As shown in fig. 3 and 5, in the eccentric driving mechanism provided in this embodiment, a pressing mechanism is connected to the upper end of the output shaft 19, and the output shaft 19 is fixed on the wobble plate 3 by the pressing mechanism. That is, after the wobble plate 3 is mounted on the output shaft 19, the wobble plate 3 on the output shaft 19 is axially limited by the pressing mechanism, so that the wobble plate 3 is prevented from falling out from the upper end of the output shaft 19. Specifically, the compressing mechanism includes an upper fixing seat 24 and a lower fixing seat 25, where the sliding sleeve 11 is connected to the output shaft 19, a second elastic element 26 is abutted between the upper fixing seat 24 and the lower fixing seat 25, the lower part of the lower fixing seat 25 is connected to the shaking plate 3, the upper end of the output shaft 19 is connected to a first thrust bearing 27, the first thrust bearing 27 is connected to the upper fixing seat 24, and the upper end of the output shaft 19 further has a compressing portion 28 that is abutted to the first thrust bearing 27. That is, after the wobble plate 3 is sleeved on the output shaft 19, the combination of the upper fixing seat 24, the lower fixing seat 25 and the second elastic member 26 is sleeved on the output shaft 19 and is abutted on the wobble plate 3, then the first thrust bearing 27 is abutted on the uppermost upper fixing seat 24, and then the upper end of the output shaft 19 is connected with the pressing part 28, and the upper end of the output shaft 19 is blocked by the pressing part 28; during use, the output shaft 19 rotates eccentrically, the shaking plate 3 rotates relative to the output shaft 19, above the shaking plate 3, the combination of the upper fixing seat 24, the lower fixing seat 25 and the second elastic member 26 forms downward elastic pressing on the shaking plate 3, and the upper parts of the upper fixing seat 24, the lower fixing seat 25 and the second elastic member 26 are abutted on the first thrust bearing 27, so that the combination of the upper fixing seat 24, the lower fixing seat 25 and the second elastic member 26 can synchronously rotate along with the shaking plate 3, and the upper parts of the first thrust bearing 27 are axially limited through the pressing part 28 to block the first thrust bearing 27 from falling out of the output shaft 19. Specifically, the press-fit portion 28 may be locked to the top end of the output shaft 19 by a fastener.

A needle bearing 29 is provided between the output shaft 19 and the wobble plate 3, and the needle bearing 29 improves stability when the wobble plate 3 rotates relative to the output shaft 19. The bottom of the needle bearing 29 is provided with a supporting plate, the supporting plate is used for supporting the shaking plate 3 sleeved on the needle bearing 29, and the supporting plate is installed on the output shaft 19 through a second thrust bearing 30, so that the supporting plate can also rotate relative to the output shaft 19 when supporting the shaking plate 3.

Example 2

The embodiment of the invention provides a dynamic linkage control method of a polishing machine, which aims to verify whether the eccentricity deviation generated by the polishing machine under a given parameter meets the requirements of related specifications, namely, calculate the eccentricity deviation under the given parameter and judge whether the eccentricity deviation is smaller than a deviation threshold value.

Corresponding to the polishing machine shown in fig. 1 and 2, the method provided by the embodiment relates to a transmission belt, a shaking plate and a driving piece. The method of the present embodiment may be performed by an electronic device such as a computer or a server, and includes the following steps:

s1, acquiring amplitude deviation components of two eccentric driving mechanismsAngular velocity deviation component- >Primary phase deviation component->。

With respect to amplitude deviation componentThe amplitude (or called amplitude) of the eccentricity driving mechanism is the maximum range of the eccentricity, the nominal values (or called theoretical values) of the two eccentricity driving mechanisms in the polishing machine are the same, but the actual maximum range may not be identical with the nominal values, and the two actual maximum ranges are also not equal.

In one embodiment, the difference between the nominal and actual values of the maximum range can be calculatedValues of (2), e.gA is the nominal range (maximum distance that the eccentric mechanism can reach) and +.>For the actual maximum range of one of the eccentricity drives, +.>Is the actual maximum range of the other eccentricity drive mechanism.

In another embodiment, the calculation、/>Mean>The deviation can be expressed as:。

with respect to angular velocity deviation componentWhen the rotational speeds of the driving members of the two eccentric drive mechanisms (mainly involving the screw rod 9) are not synchronous, synchronous rotational deviation is generated, the deviation mainly results from different rotational speeds of the driving members due to pitch error and other factors in the transmission process, and further, angular speed difference occurs, and the angular speed difference finally causes deviation between the actual eccentricity (namely the synthetic eccentricity of the two eccentric drive mechanisms) and the theoretical eccentricity of the polishing machine, and the deviation can be taken as an angular speed deviation component- >Or calculating the angular velocity deviation component +.>。

Primary phase deviation componentWhen the driving members of the two eccentric drive mechanisms, e.g. the screw 9, are actuated at different times, or the initial position is not synchronizedAt the same time, a synchronous rotational deviation is generated, which ultimately leads to a deviation between the eccentricity of the polishing machine (i.e. the combined eccentricity of the two eccentricity drives) and the theoretical eccentricity, which deviation can be used as an initial phase deviation component->Or calculate the initial phase deviation component +.>。

S2, according to the amplitude deviation componentAngular velocity deviation component->Primary phase deviation component->Calculating deviation caused by asynchronous rotation of the transmission belt>. Specifically, the three deviation components obtained in step S1 are all related to the synchronous driving mode of the driving belt, and by combining the three deviation components, a total deviation +.>The calculation can be performed by way of example as follows:

。

it should be noted that this calculation method is not the only available method, and may be performed, for example, as follows:

。

s3, calculating according to stress and size information of the shaking plateDeflection caused by deformation of wobble plate . According to the polishing machine structure in the above embodiment, one end of the wobble plate 3 is connected to the driving shaft 2, and the other end is connected to the output shaft 19. In the rotation process of the driving piece, the screw rod 9 drives the output shaft 19 to translate, the output shaft 19 drives the shaking plate 3 to translate left and right, and the shaking plate 3 further drives the driving shaft 2 to translate. In an ideal situation, when the screw rods 9 of the two eccentric distance driving mechanisms rotate synchronously, the distance between the output shafts 19 on the two sides of the driving shaft 2 is kept unchanged, and the translation of the shaking plate 3 is synchronous.

However, when the rotation of the two screw rods 9 is not synchronized, the change of the wobble plate 3 at both sides is not synchronized any more, and the interval between the two output shafts 19 is changed. The wobble plate 3 is fixedly connected with the driving shaft 2, so that the wobble plate 3 is further caused to axially stretch and compress.

Specifically, in the synchronous rotation process, when the displacement deviation caused by the angular velocity deviation reaches a certain threshold value, the stress between the two driving shafts 2 and the wobble plate 3 is the largest, and the conveyor belt stress is the same the largest. At this time, the maximum deformation of the wobble plate 3 due to axial stretching or compression can be calculated.

The deformation can also be calculated through simulation. When the force between the wobble plate 3 and the two drive shafts 2 is 1000N during rotation, the maximum deformation is 0.03mm as can be seen through simulation.

The stretching and compression deformation cause deviation, the value of the deviation is related to the force applied by stretching and compression and the length and the area of the deviation, and the deviation can be calculated based on the related factors。

S4, calculating deviation caused by Hertz contact according to deformation amount of contact surface of the shaking plate and the driving shaft. Hertz contactWhen two rigid bodies are in contact (namely, between the shaking plate 3 and the driving shaft 2), compression deformation is generated near the contact point, so that a contact surface is formed, a certain deformation amount is generated by the rigid bodies, and during the motion process under the influence, the actual displacement change is slightly lower than a theoretical value, namely, the actual eccentricity is deviated from the theoretical eccentricity, and the numerical value of the deviation is mainly related to the deformation amount of the contact surface. There are various methods for calculating this deformation amount, and the deviation is calculated based on this deformation amount>There are various methods of (a) and (b).

S5, according to deviation caused by asynchronous rotation of the transmission beltDeviation caused by deformation of wobble plate>Deviation from Hertz contact->Calculating eccentricity deviation of polisher>。

By way of example, the following calculation may be employed:

，

this calculation formula is not the only possibility, and can be at least based on the formula 、/>And->Giving different weights, or using a mean-calculated, weighted-average, squareCalculation->。

S6, judging the deviation of the eccentric distanceWhether the deviation threshold is exceeded. If deviation->And if the deviation threshold is exceeded, executing the step S7, otherwise, indicating that the polishing machine meets the related specification requirements, and the processing precision can meet the use requirements.

S7, if the eccentricity is deviatedAnd if the deviation threshold value is exceeded, adjusting any one or more of the transmission belt, the shaking plate and the driving piece to reduce the eccentricity deviation. Specifically, if the calculated deviation +.>Exceeding the deviation threshold indicates that the deviation of the polishing machine is too large, and the machining precision cannot meet the use requirement, so that improvement on related factors is required. The relevant factors include multiple kinds, any one or more of which can be adjusted in specific implementation, and an optimization algorithm is adopted to deviate +.>Searching an optimization scheme for the target with the threshold value smaller than the threshold value; or according to the improvement cost and difficulty in actual conditions, selecting proper factors for improvement.

Deviation caused by asynchronous rotation of the drive beltDeviation caused by deformation of wobble plate>Deviation from Hertz contact->Is calculated according to one or more influencing factors, and the sizes of the three influence the final deviation Size of->、/>And->The greater the value of ∈>The larger the positive correlation is. When->When the deviation threshold is exceeded, the deviation threshold can be selected from +.>、/>And->Determining a deviation with larger value, further determining a corresponding influencing factor (namely a variable used in calculating the deviation), and adjusting the influencing factor with the aim of reducing the deviation value according to the relation between the influencing factor and the deviation value, so that the maximum deviation component is reduced, thereby reducing->。

Such influencing factors include, but are not limited to, the size (e.g., length, area) of the associated components and the consistency of the initial state.

The control method provided by the embodiment of the invention can be applied to the design stage of the polishing machine, calculates the deviation of a given design scheme and adjusts related influence factors, so that the design scheme is optimized; meanwhile, the method can also calculate aiming at the existing product and verify whether the deviation meets the production related requirements, thereby assisting in optimizing the existing product.

The angular velocity deviation components obtained in the above step S1 are provided belowPrimary phase deviation component->Is described.

In one embodiment, the angular velocity deviation component is obtained in step S1Further comprising the following operations:

S11A, generating time-synthesized amplitude curve data of the two eccentric driving mechanisms based on the rotation speed deviation of the driving pieces of the two eccentric driving mechanisms. Specifically, when the rotational speed deviation of the two screw rods 9 is At this time, the deviation of the angular velocity can be expressed by the following formula:

，

wherein,is the radius of the screw rod>The time required for one rotation of the screw is required.

The resultant eccentricity (i.e., the eccentricity of the driving shaft 2) may be the maximum absolute value of the positive and negative directions of the y-axis of the coordinate axis (i.e., the maximum distance between the two eccentric mechanisms during driving, where one eccentric driving mechanism is set to be y1 from the center position and the other eccentric driving mechanism is set to be y2 from the center position, the resultant eccentricity is y1+y2), and the resultant period is the least common multiple of the eccentric rotation periods of the two eccentric driving mechanisms. The resultant amplitude (resultant eccentricity/eccentricity of the drive shaft 2) of the two drive mechanisms in this state is shown in fig. 8, in which the vertical axis represents amplitude and the horizontal axis represents time. The eccentricity deviation of the two mechanisms increases gradually with time.

S12A, calculating root mean square error by using N data points in the time-synthesized amplitude curve data. In practical engineering applications, since the two screw rods 9 are rotated by the transmission belt, when the angular velocity deviation is accumulated to a certain extent, the deviation can be adjusted by the elastic slip generated in the transmission of the belt. In a specific rotation period, fourier fitting is performed on N points in the time-synthesized amplitude curve data shown in FIG. 8, and the root mean square error obtained by fitting is +. >。

S13A, using root mean square errorAnd N calculates the angular velocity deviation component +.>. By way of example, the following way of calculating +.>：

，

In one embodiment, the initial phase deviation component is obtained in step S1Further comprising the following operations:

S11B, generating time-composite amplitude curve data based on initial phase deviation or starting time deviation of driving parts of the two eccentric driving mechanisms. When the initial times of rotation of the two screw rods 9 are not synchronized, or when a deviation occurs in the initial position, a synchronous rotation deviation is generated, which is reflected in the initial phase. The resultant eccentricity (eccentricity of the drive shaft 2) may be the maximum absolute value of positive and negative y-axis, and the resultant amplitude of the two drive mechanisms in this state is shown in fig. 9, where the vertical axis is amplitude and the horizontal axis is time.

S12B, calculating root mean square error by using N data points in the time-synthesized amplitude curve data. Fourier fitting is performed on N points in the time-synthesized amplitude curve data shown in fig. 9, whereby the root mean square error obtained by the fitting is +.>。

S13B, using root mean square errorAnd N calculates the initial phase deviation component +.>. By way of example, the following way of calculating +.>：

。

In one embodiment, the deformation-induced bias is calculated in step S3 Further comprising the following operations:

s31, obtaining the distance between output shafts of two eccentric driving mechanismsContact area between wobble plate and output shaft ∈ ->And the average force it receives->. In the embodiment shown in fig. 3, the distance +.>Means the distance between the central axes of the needle bearings 29 of the two eccentric drives, the contact area +.>Is the contact area between the wobble plate and the needle bearing 29, and the force receiving position is the contact position.

S32, utilizing the distanceArea of contact->Average force->Calculate->. By way of example, the following calculation may be used：

，

Wherein the method comprises the steps ofThe Young's modulus of the wobble plate.

The hertz contact is in various forms, and in one embodiment, the hertz contact of the wobble plate and the drive shaft is regarded as a contact state between the spherical surface and the plane, so that deviation caused by the hertz contact is calculated in step S4Further comprising the following operations:

s41, young' S modulus by using wobble plateAnd Young's modulus of the drive shaft>Poisson's ratio of shaking plate +.>And poisson's ratio of drive shaft->Calculate equivalent Young's modulus +.>. The equivalent Young's modulus can be calculated specifically as follows>：

。

S42, utilizing equivalent Young' S modulusAxial radius of wobble plate in contact state +. >Force when the wobble plate is in contact with the drive shaft +.>Calculate the deformation +.>. Specifically, the deformation amount can be calculated as follows>：

，

S43, utilizing deformation amountCalculate deviation->Specifically, it may be->。

Calculated according to the above embodimentsAbove the deviation threshold, it is possible to select from +.>~Determining an adjustable influence factor from the corresponding influence factors, and according to the adjustable influence factor and +.>~/>For the purpose of reducing the value of the deviation, correcting the adjustable influencing factor, and finally reducing +.>。/>

Example 3

The embodiment of the invention provides an accurate control method for the eccentric driving mechanism of the embodiment, and the method relates to key components for adjusting the eccentricity of the fixed shaft 7 and the output shaft 19, in particular to the rotating sleeve 12, the guide rod 17 and the connecting rod 20.

As shown in FIG. 8, the projection of the line connecting the rotating sleeve 12 and the guide rod 17, the straight line of the connecting rod 20 and the straight line of the eccentric distance on the same projection plane forms an approximate right triangle, one right angle sideCorresponding eccentricity ofThe other right-angle side corresponds to the distance between the rotating sleeve 12 and the connecting rod 20>Hypotenuse corresponds to the length of the connecting rod 20>. According to Pythagorean theorem, we know +.>The three satisfy this relationship when the deviation is ignored. In practice, the three components are offset, so the shape of the projection composition is called an approximate right triangle.

The purpose of the method is to verify whether the eccentricity deviation generated by the eccentric driving mechanism under the given parameters meets the requirements of the related specifications, namely, calculate the eccentricity deviation under the given parametersAnd determines whether it is less than a deviation threshold.

The method of the present embodiment may be performed by an electronic device such as a computer or a server, and includes the following steps:

s1, obtaining the theoretical size of the connecting rod 20Deviation of the actual length of the connecting rod 20 +.>Theoretical distance of the rotating sleeve 12 from the guiding rod 17 +.>Deviation of the actual distance of the rotating sleeve 12 from the guide rod 17 +.>. Wherein the theoretical size->Is a nominal value or a given value, the actual length deviation +.>Is a value that needs to be calculated based on a number of relevant factors, such as dimensional deviations of the workpiece itself, expansion at a given operating temperature, etc., and the method may employ several or all of these factors to calculate the deviation。

According to the above embodiment, the distance between the rotating sleeve 12 and the guide rod 17 is an adjustable amount, and the theoretical distance obtained in the methodIs the expected value at a certain static state, and the actual distance deviation +.>Refers to the deviation of the actual distance from the theoretical distance due to related factors, which also need to be calculated according to the related factors, such as the dimensional deviation of the related workpiece itself, the expansion at a given working temperature, etc., and the method can adopt a method that a plurality of or all of the factors are calculated >。

S2, at least utilizing theoretical dimensionsActual size deviation->Theoretical distance->Actual distance deviation->Calculate the deviation of the eccentricity +.>. The deviation +.can be calculated in particular based on a mathematical model approximating a triangle>This step includes at least two alternative embodiments.

In the first embodiment, the expression is expressed in terms of an approximate right triangleObtaining a mathematical model of eccentricity +.>. Differentiation is performed on the mathematical model to determine the deviation of the eccentricity +.>Is calculated by the following steps:

，

in the second embodiment, more relevant factors are introduced, so that inMore deviations are introduced into the calculation formula of (c). In particular, the guide rod 17 and the output shaft 19 should ideally be in a vertical state, but may not be completely vertical due to actual installation deviations or workpiece deviations, i.e. there is an angular deviation +.>This angular deviation will have an effect on the eccentricity b, denoted as perpendicularity error +.>. Error about perpendicularity->The following relationship can be determined from the perpendicular relationship between the guide bar 17 and the output shaft 19The system is as follows:

，

in the above formula, the angle between a (the line connecting the rotating sleeve 12 and the guide rod 17) and b (the line where the eccentricity is located) is positive less than 90 ° and negative greater than 90 °. In general, the angular deviation of the guide post and the output shaft Not higher than 2 DEG, thereby->Can be approximated as

，

Thus in the calculationMay also introduce +.>。

Due to the influence of the ambient temperature, the connecting rod 20 and the screw rod 9 are subjected to temperature deformation, the adjustment of the eccentricity is finally influenced, and the dimensional deviation caused by the temperature deformation is recorded as. As an example, the deviation component caused by temperature deformation can be calculated as follows>：

，

For the linear expansion coefficients of the connecting rod 20 and the screw 9, < >>To measure temperature deviations during the process. In calculating->May also introduce +.>。

According to expressions approximating right trianglesObtaining a mathematical model of eccentricity +.>Then consider introducing the above +.>And/or +.>Deviation of the eccentricity +.>Is calculated by the following steps:

，

in the above formula, n is 1 or 2, namelyAny or all of which are employed.

S3, judging deviationWhether the deviation threshold is exceeded. If deviation->And if the deviation threshold value is exceeded, executing the step S4, otherwise, indicating that the eccentric driving mechanism meets the related specification requirement, and the machining precision can meet the use requirement.

S4, adjusting the theoretical sizeActual size deviation->Related factors, theoretical distance->Related factors of (1) actual distance deviation->Any one or more of the relevant factors of (2) to reduce the deviation +. >. Specifically, if the calculated deviation +.>Exceeding the deviation threshold value indicates that the deviation of the eccentric driving mechanism is too large, and the machining precision thereof cannot meet the use requirement, so that improvement of the related factors is required. The relevant factors include multiple kinds, any one or more of which can be adjusted in specific implementation, and an optimization algorithm is adopted to deviate +.>Searching an optimization scheme for the target with the threshold value smaller than the threshold value; or according to the improvement cost and difficulty in actual conditions, selecting proper factors for improvement.

By way of example, the actual dimensional deviationAnd actual distance deviation>In particular values calculated on the basis of one or more influencing factors, the magnitude of which influences the final deviation +.>Size of->And->The greater the value of ∈>The larger the positive correlation is. When->When the deviation threshold is exceeded, the deviation threshold can be selected from +.>And->Determining a deviation with larger value, further determining corresponding influencing factors, and adjusting the influencing factors with the deviation value as a target according to the relation between the influencing factors and the deviation value, so that +_>Or->Is reduced, thereby reducing +.>。

Such influencing factors include, but are not limited to, the positional relationship of the associated components (e.g., perpendicularity, distance of the two components) and the dimensions (e.g., length, height).

More specifically, in introducing perpendicularity errorsIn the examples of (1), assume->Greater than the deviation threshold and whereinIs the largest component of the total number of components,according to the above embodiment, the +.>The corresponding influencing factor is the perpendicularity of the guide bar 17 and the output shaft 19, in order to reduce +.>The perpendicularity can be adjusted. />

The accurate control method provided by the embodiment of the invention can be applied to the design stage of the eccentric driving mechanism, and calculates the deviation of the eccentric driving mechanism and adjusts the related influence factors aiming at the given design scheme, so as to optimize the design scheme; meanwhile, the method can also calculate aiming at the existing product and verify whether the deviation meets the production related requirements, thereby assisting in optimizing the existing product.

The actual length deviation in the above step S1 is provided belowActual distance deviation->Is described.

In one embodiment, the actual dimensional deviation of the connecting rod 20 is obtainedComprising:

acquisition of the deviation component caused by the size of the connecting rodAnd a deviation component caused by the temperature deformation of the connecting rod +.>. According to the deviation component->And deviation component->Determining the actual dimensional deviation->. By way of example, the following calculation may be employed:

，

this calculation formula is not the only possibility, and can be at least based on the formula And->Giving different weights or calculating +.>。

Further, the deviation componentIs a constant based on dimensional measurements of the connecting rod. In a specific embodiment, the theoretical length of the connecting rod 20 +.>130mm, theoretical distance of the rotary sleeve 12 from the guide rod 17 +.>Is adjusted in the range of 120-130mm. The dimension error of the adjusting rod is +.>Obeying a uniform distribution, the error can be obtained by repeated measurement or a measurement standard of higher accuracy (e.g. gauge block), the deviation component due to the size of the connecting rod +.>Can be expressed as

，

Further, the method comprises the steps of,based on the temperature deviation in the measuring environment>Theoretical size->And expansion coefficient->The calculated amount.

During the measurement, the link 20 is subjected to temperature deformation due to the influence of the ambient temperature, thereby affecting the adjustment of the eccentricity. As an example, the deviation component due to temperature deformation can be calculated as follows：

，

Wherein,for the linear expansion coefficient of the connecting rod 20, < >>To measure temperature deviations during the process.

With respect to actual distance deviationAccording to the structural embodiment of the eccentric driving mechanism, the screw rod 9 is used for gradually transmitting and adjusting the theoretical distance +. >The screw 9 is ideally coaxial with the fixed shaft 7. Thus calculateAt least the deviation component caused by the screw 9 needs to be taken into account.

In one embodiment, the actual distance deviation is obtainedComprising the following steps: obtaining deviation component caused by lead error of screw rodDeviation component caused by return error of screw rod>Deviation component caused by angle error of screw rod and fixed shaft>Deviation component caused by dimension chain transmission error ∈>The method comprises the steps of carrying out a first treatment on the surface of the According to the deviation component->Deviation component->Deviation component->And deviation component->Calculate distance deviation +.>. By way of example, the following calculation may be employed:

，

this calculation formula is not the only possibility, and can be at least based on the formula~/>Giving different weights or calculating +.>。/>

Further, regarding the deviation component. In the specific example, the screw 9 has a grade P5, a stroke of 300mm and a precision of 0.023mm, and it is known that the deviation component +.>Is constant:

，

deviation componentThe actual distance value obtained by clockwise rotation of the screw rod at the same position is +.>Distance actual value obtained by counter-clockwise rotation +. >The amount obtained. In the process of adjusting the eccentricity, the position of a certain eccentricity can be obtained by respectively rotating the screw rod 9 clockwise and anticlockwise. If the eccentricity is required to be adjusted to be 20mm, the eccentricity is adjustable from 0 to 20mm, and the eccentricity is also adjustable from 50 to 20mm. However, the eccentricity adjusted during clockwise and counterclockwise rotation of the screw 9 is not necessarily identical, thereby generating a return error.

The distance between the rotating sleeve and the guide post, which is obtained by clockwise rotation of the screw rod, is set to be at the same positionThe distance between the rotating sleeve and the guide post is +.>The +.>：

，

Deviation componentBased on angle error->And theoretical distance->The calculated amount. The screw 9 and the fixed shaft 7 are not always in an absolute coaxial state due to the influence of the installation deviation. When the screw rod 9 generates an error in the perpendicularity of installation, there is a deviation between the actual lead of the screw rod 9 and the distance at which the rotating sleeve 12 and the guide rod 17 are actually moved. The deviation is an abbe error. According to the definition of Abbe error, the deviation component +.>：

，

Wherein the method comprises the steps ofIs the perpendicularity error of the screw rod 9.

Deviation componentIs constant in valueThe displacement generated by the screw rod 9 is transmitted through a plurality of dimension chains of a screw nut, a guide piece and a sliding sleeve, and in the transmission process of the dimension chain, the displacement is influenced by factors such as assembly deviation of each component, rigidity of the component and the like, and a certain deviation exists between the actual moving distance of each dimension chain and the ideal moving distance. The deviation of the dimension chains is conservatively estimated to be 0.01mm, and the distance deviation between the rotating sleeve and the guide post caused by the dimension chain transmission error is +.>。

When (when)Greater than the deviation threshold, can be taken from +.>~/>Determining an adjustable influence factor from the corresponding influence factors, and according to the adjustable influence factor and +.>~/>For the purpose of reducing the value of the deviation component, correcting the adjustable influencing factor, and finally reducing +.>。

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.

Claims

1. An eccentric drive mechanism, comprising:

a fixed shaft (7) with a driving piece penetrating through the center and a slot extending along the axial direction on the side wall;

the sliding sleeve (11) is sleeved outside the fixed shaft (7) and is connected with the driving piece through the slot;

a rotating sleeve (12) rotatably mounted on the sliding sleeve (11);

the adjusting seat (15) is arranged on the fixed shaft (7), the adjusting seat (15) is provided with a guide structure, the guide direction of the guide structure is not parallel to the axis of the fixed shaft (7), and the guide structure is provided with an output shaft (19) eccentrically arranged with the fixed shaft (7);

one end of a connecting rod (20) is rotationally connected to the rotating sleeve (12), the other end of the connecting rod is rotationally connected to the output shaft (19), and the output shaft (19) is driven to eccentrically rotate when the rotating sleeve (12) rotates; when the driving piece drives the rotating sleeve (12) to slide along the groove, the connecting rod (20) drives the output shaft (19) to slide on the guide structure, so that the eccentricity between the fixed shaft (7) and the output shaft (19) is adjusted.

2. The eccentric driving mechanism according to claim 1, wherein the rotating sleeve (12) comprises a first rotating part and a second rotating part, wherein the first rotating part (13) is mounted on the fixed shaft (7) through a bearing, the second rotating part (14) is in limit connection with the first rotating part (13) in the circumferential direction, so that the second rotating part (14) can slide along the axial direction of the fixed shaft (7) relative to the first rotating part (13), and the first rotating part (13) is used for being connected with a rotary driving piece (5), so that the second rotating part (14) is driven to rotate through the first rotating part (13).

3. The eccentric driving mechanism according to claim 2, wherein the first rotating portion (13) is sleeved outside the second rotating portion (14), a first limit groove extending along the axial direction of the fixed shaft (7) is provided on the inner side wall of the first rotating portion (13), a second limit groove corresponding to the first limit groove is provided on the outer side wall of the second rotating portion (14), and a guide key (21) is provided between the first limit groove and the second limit groove.

4. Eccentric drive mechanism according to claim 2, characterized in that the first rotation part (13) is provided with a first transmission wheel (22) for connection with the rotary drive (5).

5. The eccentric drive mechanism of claim 1, wherein the drive member comprises: the screw rod (9) and screw (10), screw (9) rotate and set up in fixed axle (7), the bottom of screw (9) stretches out behind fixed axle (7) be used for being connected with adjusting drive piece (6), screw (10) threaded connection be in on screw (9) and with slip cap (11) are connected.

6. Eccentric drive mechanism according to claim 5, characterized in that the bottom end of the screw (9) is connected with a second transmission wheel (23) for connection with the adjustment drive (6).

7. The eccentric drive mechanism of claim 1, wherein the guide structure comprises: the guide rod (17) and the slider (16), the guide rod (17) extends towards the direction perpendicular to the axis of the fixed shaft (7), the slider (16) is arranged on the guide rod (17) in a sliding mode, and the output shaft (19) is mounted on the slider (16).

8. Eccentric driving mechanism according to claim 7, characterized in that the guide bar (17) is sleeved with a first elastic member (18), and the first elastic member (18) has an elastic force for driving the slider (16) to deflect towards one end, so that the connecting rod (20) is kept inclined.

9. Eccentric drive mechanism according to claim 7, characterized in that the guide rod (17) has at least two arranged side by side.

10. Eccentric drive mechanism according to claim 1, characterized in that the connecting rod (20) has two symmetrically arranged on both sides of the adjustment seat (15).

11. Eccentric drive mechanism according to any of claims 1-10, characterized in that the upper end of the output shaft (19) is connected with a hold-down mechanism by means of which the output shaft (19) is fixed on the wobble plate (3).

12. The eccentric driving mechanism according to claim 11, wherein the pressing mechanism comprises an upper fixing seat (24) and a lower fixing seat (25) which are connected to the output shaft (19) through a sliding sleeve (11), a second elastic piece (26) is abutted between the upper fixing seat (24) and the lower fixing seat (25), the shaking plate (3) is connected to the lower portion of the lower fixing seat (25), a first thrust bearing (27) is connected to the upper end of the output shaft (19), the first thrust bearing (27) is connected to the upper fixing seat (24), and a pressing portion (28) for abutting against the first thrust bearing (27) is further arranged at the upper end of the output shaft (19).

13. Eccentric drive mechanism according to claim 12, characterized in that a needle bearing (29) is provided between the output shaft (19) and the wobble plate (3).

14. A polisher, comprising: the eccentric driving mechanism of any one of the claims 1-13, a frame (1), a driving shaft (2) and the fixing shaft (7) of the eccentric driving mechanism is connected to the frame (1), the driving shaft (2) is mounted on the shaking plate (3), the shaking plate (3) is driven to shake by an output shaft (19) of the eccentric driving mechanism, and a polishing disc (4) is connected to the driving shaft (2) and used for polishing products by the polishing disc (4).